Jig capable of easily inspecting contact pin of probe card

Abstract

The utility model discloses a jig easy to inspect a pin of a probe card, and relates to the technical field of semiconductors, the jig comprises a bearing module, a probe head detachably provided with a pin to be inserted, and a reflector module arranged at the bottom of the bearing module, the reflector module comprises a reflector, the reflector is arranged in an inclined manner, and the reflector is arranged on the bearing module. The reflective mirror module is located on the side portion of the probe head, the reflective mirror can display a probe head pin inserting image, the adjusting module is located on the side portion of the reflective mirror module and rotationally connected with the reflective mirror module, and the adjusting module is used for adjusting the reflective mirror module to a preset position, so that a user can know the probe head pin inserting state from the reflective mirror. According to the design, a user does not need to directly contact with the probe head, so that the accident that the probe head falls off or mistakenly touches the probe to cause the bending of the probe point is avoided, the risk cost is greatly reduced, and the production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a fixture for easy inspection of probe card pins. Background Technology

[0002] As a key component in the semiconductor testing field, the pin alignment accuracy and contact performance of probe cards directly affect the accuracy and reliability of chip testing. During pin assembly or maintenance, operators need to frequently inspect the pin condition of the probe head (such as pin tip alignment, spacing consistency, and damage) to ensure it meets testing requirements. However, traditional inspection methods have significant limitations:

[0003] Firstly, operators usually rely on direct visual observation or magnification tools to inspect the probes. However, due to the compact structure of the probe head and the dense distribution of the probes at the bottom, it is difficult to fully observe the actual state of the probes at the bottom from a conventional perspective. Especially for multi-layer or miniaturized probe heads, repeated disassembly and angle adjustment are required, resulting in low detection efficiency. Furthermore, frequent disassembly and assembly may cause probe head wear or positioning deviation.

[0004] Secondly, manually picking up the probe tip and turning it over for observation not only carries the risk of dislodging the inserted needle, but also the risk of the probe tip falling or the probe tip bending during the process of handling it.

[0005] Therefore, there is an urgent need for a simple inspection fixture that reduces risk and cost, in order to improve the visualization efficiency and ease of operation of the probe tip insertion status, while avoiding potential risks caused by frequent disassembly and assembly. Utility Model Content

[0006] The main purpose of this invention is to provide a fixture for easy inspection of probe card pins, aiming to solve the problem that pins are easily damaged when flipped to observe their state.

[0007] To achieve the above objectives, this utility model proposes a fixture for easy inspection of probe card pins, the fixture comprising:

[0008] The carrier module has a probe head with pins to be inserted that can be detachably mounted.

[0009] A reflector module is disposed at the bottom of the support module. The reflector module includes a reflector, which is tilted and can display the image of the probe head pin.

[0010] An adjustment module is located on the side of the reflector module and is rotatably connected to the reflector module. The adjustment module is used to adjust the reflector module to a preset position so that the user can know the status of the probe head pins from the reflector.

[0011] Preferably, the carrier module includes a fixing component and a mounting plate. The mounting plate is provided with a mounting port and is disposed on the reflector module. The fixing component is disposed on the mounting plate, and the mounting plate is used to fix the probe head to be inserted on the mounting port.

[0012] Preferably, there are several fixing components, and the several fixing components are evenly distributed around the probe head to be inserted.

[0013] The fixing assembly includes a pressure plate and an elastic element. The pressure plate, under the elastic action of the elastic element, places the probe head to be inserted onto the mounting port.

[0014] Preferably, the reflector module further includes a carrier plate and a bracket;

[0015] The mounting plate is disposed on the carrier plate;

[0016] One side of the bracket is connected to the bottom of the carrier plate, wherein the reflector is mounted below the carrier plate via the bracket.

[0017] Preferably, the adjustment module includes a side plate and an adjustment component. The adjustment component passes through the side plate and is connected to the reflector module. By rotating the adjustment component, the reflector module rotates accordingly.

[0018] Preferably, the adjustment module further includes a base, which is disposed at the bottom of the side plate to support the side plate, and a positioning component is disposed at the top of the base to stabilize the mirror module in a predetermined position.

[0019] Preferably, the positioning component includes a plurality of positioning posts, which are erected on the top of the base and located on the side of the reflector away from the carrier plate, wherein the top of the positioning post abuts against the bottom of the carrier plate.

[0020] Preferably, the rotation angle range of the reflector module is 0 to 270 degrees.

[0021] Preferably, the side plate is provided with a locking component for fixing the position of the reflector module;

[0022] The locking assembly includes a locking shaft that passes through the side plate. Under rotational engagement, the end of the locking shaft abuts against or disengages from the side of the carrier plate.

[0023] Preferably, the adjustment assembly includes a rotating shaft and a first rotating handle, wherein the first rotating handle is disposed at the end of the rotating shaft away from the reflector module;

[0024] A second rotating handle is provided at the end of the locking shaft away from the reflector module.

[0025] The beneficial effects of this utility model are as follows: The probe head to be inserted is detachably installed in the support module. The reflector module is set at the bottom of the support module and includes a reflector. The reflector is tilted, so the reflector and the probe head to be inserted are positioned opposite each other. That is, the reflector can display the probe head insertion image. Since the adjustment module is located on the side of the reflector module and is rotatably connected to the reflector module, the adjustment module can adjust the reflector module to a preset position, so that the user can intuitively know the probe head insertion status from the reflector. Secondly, the above design does not require the user to directly contact the probe head, so there will be no accidental probe head falling or accidentally touching the probe, which could cause the needle tip to bend. This greatly reduces the risk cost and improves production efficiency. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0027] Figure 1 This is a three-dimensional structural diagram of the fixture in this utility model;

[0028] Figure 2 This is a schematic diagram of the fixture for rotating the load-bearing module in this utility model;

[0029] Figure 3 This is a schematic diagram of the fixture when the load-bearing module rotates at another angle in this utility model;

[0030] Figure 4 This is a cross-sectional view of the load-bearing module in this utility model;

[0031] Figure 5 This is a front view of the load-bearing module in this utility model.

[0032] Label Explanation:

[0033] 1. Load-bearing module; 11. Fixing component; 111. Pressure plate; 1111. Connecting shaft; 11111. Limiting block; 112. Elastic element; 1121. Compression spring; 12. Mounting plate; 121. Mounting port;

[0034] 2. Reflector module; 21. Reflector; 22. Bracket; 23. Carrier plate;

[0035] 3. Adjustment module; 31. Side plate; 311. Blocking block; 32. Adjustment component; 321. First rotating handle; 322. Rotating shaft; 33. Base; 331. Positioning component; 3311. Positioning post; 34. Locking component; 341. Second rotating handle; 342. Locking shaft.

[0036] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0037] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0038] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0039] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, if the word "and / or" appears throughout the text, it means including three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution that simultaneously satisfies A and B. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0040] This utility model provides a fixture for easy inspection of probe card pins. Please refer to [reference needed]. Figures 1-5The fixture includes a support module 1, a reflector module 2, and an adjustment module 3. The support module 1 has a probe head (not shown) to be inserted detachably mounted on it. The reflector module 2 is located at the bottom of the support module 1 and includes a reflector 21, which is tilted and can display the probe head insertion image. The adjustment module 3 is located on the side of the reflector module 2 and is rotatably connected to it. The adjustment module 3 is used to adjust the reflector module 2 to a preset position so that the user can see the probe head insertion status from the reflector 21. The above design eliminates the need for the user to directly contact the probe head, thus preventing the probe head from falling or accidentally touching the probe, which could cause the needle tip to bend. This greatly reduces risk and costs, thereby improving production efficiency.

[0041] Furthermore, the carrier module 1 includes a fixing component 11 and a mounting plate 12. The mounting plate 12 is provided with a mounting port 121. The mounting plate 12 is disposed on the reflector module 2. The fixing component 11 is disposed on the mounting plate 12. The mounting plate 12 is used to fix the probe head to be inserted on the mounting port 121. The above arrangement is mainly to stabilize the probe head on the mounting plate 12, so as to facilitate the user to insert the pin, and at the same time, to facilitate the subsequent structure to display the pin insertion status of the probe head.

[0042] In this embodiment, there are several fixing components 11, which are evenly distributed around the probe head to be inserted.

[0043] Specifically, following the above, there are four fixing components 11, which surround the mounting opening 121 to fix the probe head to be inserted. In other embodiments, there are five, six, etc., and the specific number depends on the size of the item to be fixed.

[0044] In this embodiment, the fixing component 11 includes a pressure plate 111 and an elastic element 112. The pressure plate 111, under the elastic action of the elastic element 112, places the probe head to be inserted onto the mounting port 121.

[0045] Specifically, in this embodiment, please refer to Figure 4 and Figure 5The pressure plate 111 has a connecting shaft 1111 at one end of its bottom. The connecting shaft 1111 passes through the mounting plate 12 and is slidably connected to the mounting plate 12. The end of the connecting shaft 1111 located below the mounting plate 12 is provided with a limiting block 11111 to restrict the connecting shaft 1111 from sliding out of the mounting plate 12. The elastic element 112 includes a compression spring 1121, which is sleeved on the outside of the connecting shaft 1111 located below the mounting plate 12. When the pressure plate 111 is pulled upward away from the mounting plate 12, the compression spring 1121 is compressed under the pressure of the mounting plate 12 and the limiting block 11111. At this time, the probe head to be inserted is placed on the mounting opening 121. Then the pressure plate 111 is released, and the pressure plate 111 will press the top of the probe head to be inserted under the restoring force of the compression spring 1121, thereby fixing the position of the probe head to be inserted.

[0046] In another embodiment, the mounting plate 12 is provided with a mounting shaft (not shown) at the bottom. A telescopic spring (not shown) is elastically connected inside the mounting shaft. The end of the telescopic spring away from the mounting shaft passes through the mounting plate 12 and is elastically connected to the bottom of one end of the pressure plate 111. Similarly, when the pressure plate 111 is lifted, the probe head to be inserted is placed on the mounting opening 121. Then, through the restoring force of the telescopic spring, the pressure plate 111 will press the top of the probe head to be inserted, thereby fixing the position of the probe head to be inserted.

[0047] In other embodiments, the pressure plate 111 can also cooperate with the elastic element 112 in other ways, as long as it can stably fix the probe head to be tested in the corresponding position and make it easy to disassemble the probe head.

[0048] In this embodiment, please refer to Figure 1 and Figure 2 The reflector module 2 also includes a carrier plate 23 and a bracket 22. The mounting plate 12 is disposed on the carrier plate 23, and one side of the bracket 22 is connected to the bottom of the carrier plate 23. The reflector 21 is mounted under the carrier plate 23 through the bracket 22. The above arrangement is mainly to stabilize the position of the reflector 21.

[0049] In this embodiment, the adjustment module 3 includes a side plate 31 and an adjustment component 32. The adjustment component 32 passes through the side plate 31 and is connected to the reflector module 2. By rotating the adjustment component 32, the reflector module 2 rotates accordingly. Since the mounting plate 12 is set on the carrier plate 23, the mounting plate 12 and the structure on the mounting plate 12 rotate with the reflector module 2. The above setting is mainly to adjust the angle of the reflector module 2, so that the user can observe the bottom state of the probe head from the reflector 21 according to their own habitual viewing angle, determine whether the probe pin is misaligned, and then determine whether interference adjustment is required.

[0050] Secondly, the above setup eliminates the need for users to directly touch the probe head, flip it, and observe the pin's state. By simply adjusting the adjustment module 3, the pin's state can be directly observed through the reflector 21, reducing the risk of touching the probe and bending the pin tip, thereby improving production efficiency.

[0051] Furthermore, the adjustment module 3 also includes a base 33, which is located at the bottom of the side plate 31 to support the side plate 31. The top of the base 33 is provided with a positioning component 331 to stabilize the mirror module 2 at a predetermined position.

[0052] In this embodiment, please refer to Figure 1 and Figure 2 The positioning component 331 includes several positioning posts 3311, which are erected on the top of the base 33 and located on the side of the reflector 21 away from the carrier plate 23. The top of the positioning post 3311 abuts against the bottom of the carrier plate 23. This arrangement ensures that when the mounting plate 12 is parallel to the base 33, it can be stably positioned in a predetermined position under the action of the positioning post 3311, and is less prone to imbalance, thus facilitating the user to insert the probe head. On the other hand, the positioning post 3311 is located here to prevent the reflector module 2 from flipping inward, thus preventing the user from not being able to see the image presented by the reflector 21. In other words, this design restricts the rotation direction of the reflector module 2 to a certain extent.

[0053] In other embodiments, the positioning component 331 can be other structures, such as a support frame, positioning block, etc. In essence, as long as it can restrict the inward flip of the reflector module 2 without affecting the normal rotation of the reflector module 2, it is acceptable.

[0054] To further facilitate pin insertion on the probe tip, please refer to... Figure 2 The side plate 31 is provided with a locking component 34 for fixing the position of the reflector module 2. The locking component 34 is used to secondary stabilize the mounting plate 12 in a predetermined position. In this embodiment, the locking component 34 includes a locking shaft 342, which passes through the side plate 31. Under rotational engagement, the end of the locking shaft 342 abuts against or disengages from the side of the carrier plate 23. In other words, when the user needs to insert the probe head, the locking shaft 342 is rotated, causing the locking shaft 342 to rotate and move towards the side of the carrier plate 23, so that the locking shaft 342 abuts against the side of the carrier plate 23, which is parallel to the base 33, thereby indirectly stabilizing the position of the mounting plate 12 again and preventing the mounting plate 12 from rotating with the carrier plate 23, thus preventing the user from making mistakes such as unstable insertion of the probe head.

[0055] Of course, in other embodiments, the locking component 34 can be other designs, such as a telescopic snap-fit ​​shaft provided on the side plate 31, which snaps into or disengages from the carrier plate 23 by telescopic movement, thereby restricting the carrier plate 23 from continuing to rotate. Obviously, as long as the structure of the locking component 34 can restrict the rotation state of the carrier plate 23, it is acceptable.

[0056] For further details, please refer to... Figure 2 and Figure 3 To ensure that the probes on the probe head do not fall off when checking whether the probes are properly inserted, the rotation angle range of the reflector module 2 is 0 to 270 degrees. That is, the maximum placement state of the probe head is that the probe head is level with the horizontal plane of the base 33. Specifically, a blocking block 311 is provided on the top of the side plate 31. When the reflector module 2 rotates to 270 degrees, the blocking block 311 will abut against the top surface of the carrier plate 23 to prevent the reflector module 2 from continuing to rotate. The above setting is because if the probe head rotates with the reflector module 2, the pins on the probe head are prone to falling off due to gravity.

[0057] To enhance the user's comfort when manually operating the fixture, in this embodiment, the adjustment component 32 includes a rotating shaft 322 and a first rotating handle 321. The first rotating handle 321 is located at the end of the rotating shaft 322 away from the mirror module 2, and a second rotating handle 341 is located at the end of the locking shaft 342 away from the mirror module 2.

[0058] In other embodiments, the ends of the rotating shaft 322 and the locking shaft 342 away from the reflector module 2 can be connected to a power source, and the rotation of the rotating shaft 322 and the locking shaft 342 can be automatically adjusted by commands to meet the corresponding needs of the user.

[0059] In this embodiment, regarding the operation process of this fixture, please refer to... Figures 1-3 First, the probe head to be inserted is placed on the mounting plate 12 of the mounting port 121, and the probe head is fixed in a predetermined position by several fixing components 11. At this time, the carrier plate 23 is parallel to the base 33, and the locking component 34 abuts against the side of the carrier plate 23. Then the user can perform the probe insertion operation. When the user needs to check the probe head on the other side, the user rotates the first rotating handle 321 so that the locking component 34 does not contact the carrier plate 23. Then the user rotates the first rotating handle 321 to adjust the reflector module 2 to a suitable angle for the user to observe. The user can then observe the other side of the probe head through the reflector 21. After the inspection and adjustment of the other side of the probe head is completed, the user turns back the first rotating handle 321 to return the carrier plate 23 to its initial position. The user resets the second rotating handle 341 and continues to perform the aforementioned probe insertion operation.

[0060] The above description is only an optional embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A fixture for easy inspection of probe card pins, characterized in that, The fixtures include: The carrier module has a probe head with pins to be inserted that can be detachably mounted. A reflector module is disposed at the bottom of the support module. The reflector module includes a reflector, which is tilted and can display the image of the probe head pin. An adjustment module is located on the side of the reflector module and is rotatably connected to the reflector module. The adjustment module is used to adjust the reflector module to a preset position so that the user can know the status of the probe head pins from the reflector.

2. The fixture according to claim 1, characterized in that, The carrier module includes a fixing component and a mounting plate. The mounting plate is provided with a mounting port and is disposed on the reflector module. The fixing component is disposed on the mounting plate and is used to fix the probe head to be inserted into the mounting port.

3. The fixture according to claim 2, characterized in that, There are several fixing components, and the several fixing components are evenly distributed around the probe head to be inserted. The fixing assembly includes a pressure plate and an elastic element. The pressure plate, under the elastic action of the elastic element, places the probe head to be inserted onto the mounting port.

4. The fixture according to claim 3, characterized in that, The reflector module also includes a carrier plate and a bracket; The mounting plate is disposed on the carrier plate; One side of the bracket is connected to the bottom of the carrier plate, wherein the reflector is mounted below the carrier plate via the bracket.

5. The fixture according to claim 4, characterized in that, The adjustment module includes a side plate and an adjustment component. The adjustment component passes through the side plate and is connected to the reflector module. By rotating the adjustment component, the reflector module rotates accordingly.

6. The fixture according to claim 5, characterized in that, The adjustment module also includes a base, which is disposed at the bottom of the side plate to support the side plate, and a positioning component is disposed at the top of the base to stabilize the mirror module in a predetermined position.

7. The fixture according to claim 6, characterized in that, The positioning component includes a plurality of positioning posts, which are erected on the top of the base and located on the side of the reflector away from the carrier plate, wherein the top of the positioning post abuts against the bottom of the carrier plate.

8. The fixture according to claim 7, characterized in that, The rotation angle range of the reflector module is 0 to 270 degrees.

9. The fixture according to claim 5, characterized in that, The side plate is provided with a locking component to fix the position of the reflector module; The locking assembly includes a locking shaft that passes through the side plate. Under rotational engagement, the end of the locking shaft abuts against or disengages from the side of the carrier plate.

10. The fixture according to claim 9, characterized in that, The adjustment assembly includes a rotating shaft and a first rotating handle, wherein the first rotating handle is disposed at the end of the rotating shaft away from the reflector module; A second rotating handle is provided at the end of the locking shaft away from the reflector module.

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