Chip fixer
By designing a chip holder that uses quartz material and rubber anti-slip components to fix the chip under test, the problem of test position offset caused by operational errors and different chip sizes is solved, and the consistency and stability of test data are achieved.
Patent Information
- Application Number
- CN202520426927.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-12
- Publication Date
- 2026-02-24
- Estimated Expiration
- 2035-03-12
AI Technical Summary
In the semiconductor chip manufacturing process, the test position may shift due to differences in operators and chip size, affecting test reliability and data consistency.
A chip holder is designed, including a test stage, a first fixing component, a second fixing component, and a connecting component. The chip to be tested is fixed to the first fixing component through the second fixing component and the connecting component to ensure its stability on the test stage. Quartz material and rubber anti-slip parts are used to improve connection stability and prevent wear.
It effectively avoids test position shifts caused by operational errors or different chip sizes, improves the consistency and stability of test data, and reduces the risk of chip damage.
Smart Images
Figure CN223940992U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing technology, and more specifically, to a chip holder. Background Technology
[0002] In the semiconductor chip manufacturing process, sheet resistance (RS) testing is a crucial step in monitoring chip quality. Sheet resistance, also known as film resistance, refers to the resistance of a square thin film along its opposite sides. When an irregularly shaped thin film is formed on a single-crystal substrate through diffusion doping (such as polycrystalline deposition) / ion implantation, and impurities are activated or lattice defects are repaired through thermal treatment, the resistance value of these thin films is a critical process parameter that requires precise control in semiconductor device and integrated circuit manufacturing. In manufacturing, the chip to be tested is typically placed on a test bench and then tested using an RS55 four-probe tester. However, reliability issues can arise during testing due to differences in operator skills and chip size. Utility Model Content
[0003] In order to at least overcome the above-mentioned shortcomings in the prior art, the purpose of this application is to provide a chip holder.
[0004] In a first aspect, embodiments of this application provide a chip holder, the chip holder comprising a test stage, a first fixing component, a second fixing component, and a connecting component;
[0005] The test bench includes a test slot;
[0006] The first fixing component is placed against the inner wall of the test groove;
[0007] The second fixing component is used to position and fix the chip to be tested, and the second fixing component is fixed to the inner wall of the first fixing component through the connecting component.
[0008] In one possible implementation, the second fixing component includes an annulus with a notch, the radius of which is the same as the radius of the chip under test.
[0009] In one possible implementation, the second fixing component further includes a locking groove disposed on the inner wall of the ring, and the fixing component fixes the chip to be tested through the locking groove.
[0010] In one possible implementation, the connection assembly includes a plurality of detachable connectors, each connector having a first end and a second end opposite to each other, the first end being connected to the first fixing component and the second end being connected to the second fixing component.
[0011] In one possible implementation, the inner side of the first fixing component is provided with a first fixing groove, and the outer side of the second fixing component is provided with a second fixing groove corresponding to the first fixing groove.
[0012] The first end is fixed in the first fixing groove, and the second end is fixed in the second fixing groove.
[0013] In one possible implementation, the connecting component further includes a first anti-slip portion and a second anti-slip portion;
[0014] The first anti-slip part is disposed at the first end, and the size of the first anti-slip part matches the size of the first fixing groove;
[0015] The second anti-slip part is disposed at the second end, and the size of the second anti-slip part matches the size of the second fixing groove.
[0016] In one possible implementation, the materials of the first anti-slip part and the second anti-slip part include rubber.
[0017] In one possible implementation, the length of the connector is 50mm to 100mm, and the material of the connector includes quartz.
[0018] In one possible implementation, the shape of the first fixing component includes a circle or a square, the size of the first fixing component is 180mm to 220mm, and the diameter of the ring is 120mm to 160mm.
[0019] In one possible implementation, the first fixing component and the second fixing component are made of quartz.
[0020] Based on any of the above aspects, the chip holder provided in this application includes a test stage, a first fixing component, a second fixing component, and a connecting component. The test stage includes a test slot. The first fixing component is placed against the inner wall of the test slot. The second fixing component is used to position and fix the chip to be tested. The second fixing component is fixed to the inner wall of the first fixing component through the connecting component. In the above structure, the first fixing component can be fixed against the test slot. The second fixing component, after fixing the chip to be tested, can be fixed to the inner wall of the first fixing component through the connecting component, thereby achieving the purpose of fixing the chip to be tested on the test stage, avoiding test position displacement caused by operational errors or different chip sizes, and thus improving the consistency and stability of test data. Attached Figure Description
[0021] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings required in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0022] Figure 1 A schematic diagram of a possible structure of the chip holder provided in this application;
[0023] Figure 2 A schematic diagram of a possible partial structure of the chip holder provided in this application;
[0024] Figure 3 A schematic diagram of another possible partial structure of the chip holder provided in this application;
[0025] Figure 4 This is a schematic diagram of another possible partial structure of the chip holder provided in this application. Detailed Implementation
[0026] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0027] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0028] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0029] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0030] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "connected," "linked," and "connected" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0031] It should be noted that, where there is no conflict, different features in the embodiments of this application can be combined with each other.
[0032] The inventors discovered that, in order to test chips of various sizes such as 8-inch, 6-inch, and 5-inch, a test stage with a fixed diameter (200mm) is typically used. However, in practice, due to human error, the placement and orientation of the chip on the test stage cannot be strictly controlled, leading to test position offset. This causes the probes of the RS55 four-probe tester to fail to accurately contact the chip, affecting the normal testing process. Furthermore, test position offset can also affect the consistency of process data, making continuous, point-to-point data monitoring difficult.
[0033] To address the aforementioned technical problems, the inventors have innovatively designed the following technical solutions, which will be described in detail below with reference to the accompanying drawings. It should be noted that the deficiencies in the existing solutions are the result of the inventors' practical experience and careful research. Therefore, the discovery process of the aforementioned technical problems and the solutions proposed in this embodiment below are contributions made by the inventors to this application during the invention process, and should not be construed as technical content known to those skilled in the art.
[0034] To address the problems in the existing technology, please refer to... Figure 1This application provides a chip holder 10, which may include a test stage, a first fixing component 110, a second fixing component 120, and a connecting component 130. The test stage includes a test slot, and the first fixing component 110 is placed against the inner wall of the test slot. In other words, the size and shape of the test slot match the size and shape of the first fixing component 110.
[0035] The second fixing component 120 is used to position and fix the chip under test. The second fixing component 120 is fixed to the inner wall of the first fixing component 110 through the connecting component 130. The size and shape of the second fixing component 120 are matched with the specific size and shape of the chip under test, and a suitable second fixing component 120 can be selected according to the specific situation.
[0036] In the above structure, the first fixing component 110 can be fitted and fixed in the test slot, and the second fixing component 120, which fixes the chip to be tested, can be fixed to the inner wall of the first fixing component 110 through the connecting component 130, thereby achieving the purpose of fixing the chip to be tested on the test stage, avoiding test position shift due to operation error or different chip size, thereby improving the consistency and stability of test data.
[0037] In some possible embodiments, the second fixing component 120 includes a ring 121 with a notch. The radius of the second fixing component 120 is the same as the radius of the chip under test, so as to fix the chip under test by the second fixing component 120. The notch can facilitate the operator to quickly pick up and put down the chip, while avoiding excessive pressure that could damage the chip.
[0038] Further, please refer to Figure 2 and Figure 3 , Figure 2 This is a possible cross-sectional schematic diagram when the second fixing component 120 is not holding the chip. Figure 2 This is a possible cross-sectional schematic diagram of the second fixing component 120 clamping the chip. The second fixing component 120 may further include a locking groove 122, which is disposed on the inner wall of the ring 121. The fixing component fixes the chip under test through the locking groove 122. The locking groove 122 allows the edge of the chip under test to fit tightly against the inner wall of the ring 121, reducing the possibility of chip movement and displacement, and improving the consistency and stability of test data.
[0039] Furthermore, the materials of the first fixing component 110 and the second fixing component 120 may include quartz. Quartz material has the characteristics of high hardness and wear resistance, and is not prone to generating wear particles during use, thus avoiding wear particles from affecting the accuracy of test results. At the same time, it can also reduce the risk of wear particles contaminating the chip surface.
[0040] The shapes of the first fixing component 110 and the test groove may include circles or squares, with dimensions ranging from 180mm to 220mm. Exemplary dimensions include 180mm, 182mm, 185mm, 190mm, 195mm, 200mm, 210mm, 215mm, 218mm, and 220mm. It is easy to understand that these dimensions are related to the shapes of the first fixing component 110 and the test groove. Specifically, when the first fixing component 110 and the test groove are circular, their dimensions refer to the diameter of the circle; while when the first fixing component 110 and the test groove are square, their dimensions can be the side length of the square. Preferably, the first fixing component 110 and the test groove are circular, and their diameter is 200mm.
[0041] The diameter of the second fixing component 120 can be between 120mm and 160mm. For example, the diameter of the second fixing component 120 includes 120mm, 122mm, 125mm, 130mm, 135mm, 140mm, 145mm, 150mm, 155mm, 158mm, and 160mm. The size and shape of the second fixing component 120 match the specific size and shape of the chip under test. A suitable second fixing component 120 can be selected according to specific circumstances. Different sizes and shapes of the second fixing component 120 can be replaced by disassembling the connecting component 130. For example, when the size of the chip under test is 8 inches, the diameter of the second fixing component 120 can be 150mm; when the size of the chip under test is 6 inches, the diameter of the second fixing component 120 can be 125mm.
[0042] In some other possible embodiments, please refer to Figure 4The connecting assembly 130 includes a plurality of detachable connectors 131. Each connector 131 has a first end and a second end opposite to each other. The first end is connected to the first fixing assembly 110, and the second end is connected to the second fixing assembly 120. Specifically, the first fixing assembly 110 has a first fixing groove on its inner side, and the second fixing assembly 120 has a second fixing groove corresponding to the first fixing groove on its outer side. The first end is fixed in the first fixing groove, and the second end is fixed in the second fixing groove. To ensure the connection stability between the first fixing assembly 110 and the second fixing assembly 120, the number of connectors 131 is greater than or equal to two. When the number of connectors 131 is two, the included angle of the connectors 131 is 45° to 180°, and the included angle of the connectors 131 faces away from the notch of the ring 121. Preferably, when the number of connectors 131 is two, the included angle of the connectors 131 is 180°. When the number of connectors 131 is greater than 2, the included angles of adjacent connectors 131 are equal, and the included angles of adjacent connectors 131 are greater than the included angles corresponding to the edge of the notch of the ring 121.
[0043] Furthermore, please refer to again Figure 4 The connecting assembly 130 further includes a first anti-slip part 1321 and a second anti-slip part 1322. The first anti-slip part 1321 is disposed at the first end, and its size matches the size of the first fixing groove. The second anti-slip part 1322 is disposed at the second end, and its size matches the size of the second fixing groove. Preferably, the first anti-slip part 1321 and the second anti-slip part 1322 are made of rubber. In the above structure, the rubber-made first anti-slip part 1321 and the second anti-slip part 1322 can completely fill the gap between the first fixing groove and the second fixing groove, preventing the connector 131 from sliding, improving the connection stability of the first fixing assembly 110 and the second fixing assembly 120, and also absorbing vibration interference from the test bench during testing, thus improving the accuracy of the test results.
[0044] Furthermore, the connector 131 is made of quartz, which has high hardness and wear resistance. During use, it is less likely to generate wear particles, thus avoiding the impact of wear particles on the accuracy of test results and reducing the risk of contamination of the chip surface by wear particles. Moreover, the length of the connector 131 can be dynamically adjusted according to the chip size. The length of the connector 131 is 50mm to 100mm, for example, 50mm, 52mm, 55mm, 60mm, 65mm, 70mm, 80mm, 90mm, 95mm, 98mm, and 100mm.
[0045] In summary, this application provides a chip holder that includes a test stage, a first fixing component, a second fixing component, and a connecting component. The test stage includes a test slot. The first fixing component is placed against the inner wall of the test slot, and the second fixing component is used to hold and fix the chip to be tested. The second fixing component is fixed to the inner wall of the first fixing component through the connecting component. In the above structure, the first fixing component can be fixed in the test slot, and the second fixing component, after fixing the chip to be tested, can be fixed to the inner wall of the first fixing component through the connecting component. This achieves the purpose of fixing the chip to be tested on the test stage, avoiding test position displacement caused by operational errors or different chip sizes, thereby improving the consistency and stability of test data.
[0046] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A chip holder, characterized in that, Includes a test stand, a first fixing component, a second fixing component, and a connecting component; The test bench includes a test slot; The first fixing component is placed against the inner wall of the test groove; The second fixing component is used to position and fix the chip to be tested, and the second fixing component is fixed to the inner wall of the first fixing component through the connecting component.
2. The chip holder according to claim 1, characterized in that, The second fixing component includes a ring with a notch, and the radius of the second fixing component is the same as the radius of the chip under test.
3. The chip holder according to claim 2, characterized in that, The second fixing component further includes a locking groove, which is disposed on the inner wall of the ring, and the fixing component fixes the chip to be tested through the locking groove.
4. The chip holder according to claim 3, characterized in that, The connecting assembly includes a plurality of detachable connectors, each connector having a first end and a second end opposite to each other, the first end being connected to the first fixing assembly, and the second end being connected to the second fixing assembly.
5. The chip holder according to claim 4, characterized in that, The first fixing component has a first fixing groove on its inner side, and the second fixing component has a second fixing groove on its outer side that corresponds to the first fixing groove. The first end is fixed in the first fixing groove, and the second end is fixed in the second fixing groove.
6. The chip holder according to claim 5, characterized in that, The connecting assembly further includes a first anti-slip part and a second anti-slip part; The first anti-slip part is disposed at the first end, and the size of the first anti-slip part matches the size of the first fixing groove; The second anti-slip part is disposed at the second end, and the size of the second anti-slip part matches the size of the second fixing groove.
7. The chip holder according to claim 6, characterized in that, The materials of the first anti-slip part and the second anti-slip part include rubber.
8. The chip holder according to claim 4, characterized in that, The length of the connector is 50mm to 100mm, and the material of the connector includes quartz.
9. The chip holder according to claim 2, characterized in that, The first fixing component has a shape including a circle and a square, and the size of the first fixing component is 180mm to 220mm. The diameter of the ring is 120mm to 160mm.
10. The chip holder according to claim 1, characterized in that, The first fixing component and the second fixing component are made of quartz.