Bearing mechanism
By designing a carrier mechanism with gas flow channels and regulating holes, and using sealing components to separate the gas flow channels to form branch channels, the problem of insufficient compatibility of the wafer stage was solved, achieving compatibility with multi-size wafers and cost reduction.
Patent Information
- Application Number
- CN202520355878.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-03
- Publication Date
- 2026-02-24
- Estimated Expiration
- 2035-03-03
AI Technical Summary
Existing wafer carrier stages can only accommodate a limited number of wafers of fixed sizes, which means that the wafer carrier stage needs to be replaced when the wafer model changes, increasing costs.
Design a support mechanism including a support member, a first sealing member and a second sealing member. The support member has a gas flow channel and an adjustment hole inside. By combining the sealing members in different positions and in different ways, the gas flow channel is separated to form multiple flow channels to accommodate wafers of different sizes.
This allows the same carrier to be adapted to wafers of various sizes, avoiding the need to replace the carrier and reducing replacement costs.
Smart Images
Figure CN223943137U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wafer inspection technology, and in particular to a support mechanism. Background Technology
[0002] In the wafer inspection industry, automated optical inspection methods are commonly used. These methods employ optical algorithms to measure critical dimensions of wafers, such as linewidth, lineheight, film thickness, and surface roughness. Before inspection, wafers need to be held in place by a wafer carrier stage. As the variety of wafer types increases, it is desirable for a single wafer carrier stage to be able to inspect wafers of multiple sizes or types. Therefore, the wafer carrier stage, as a functional module that carries wafers, needs to be compatible with various wafer sizes and types. However, conventional wafer carrier stage structures have limited wafer size compatibility, and the compatible wafer sizes are fixed. When the wafer model changes, the wafer carrier stage needs to be replaced, increasing costs.
[0003] Therefore, it is urgent to study a support mechanism to solve the above problems. Utility Model Content
[0004] The purpose of this invention is to provide a carrier mechanism to solve the problems of limited wafer sizes that can be accommodated by the existing wafer stage and the fixed size of the wafers that can be accommodated.
[0005] To achieve the above objectives, the present invention adopts the following technical solution:
[0006] The supporting mechanism includes:
[0007] A carrier component has several annular grooves with progressively increasing diameters arranged on its first end face from the inside out. The carrier component has a gas flow channel inside, and each of the annular grooves extends concavely into the gas flow channel and communicates with it. The gas flow channel has an extraction hole communicating with a gas source. The carrier component also has several adjustment holes communicating with the gas flow channel. These adjustment holes are spaced apart along the extension direction of the gas flow channel and dispersed between adjacent annular grooves. Each adjustment hole can be selectively connected to a first sealing component or a second sealing component.
[0008] The first plugging member is used to block the regulating hole, and the second plugging member is used to block the regulating hole and separate the gas flow channel.
[0009] As an optional technical solution for the support mechanism, the second sealing element is elongated and partially fixed to the adjusting hole, and partially located within the gas flow channel to separate the gas flow channel; and / or,
[0010] The gas flow channel extends radially along the annular groove.
[0011] As an optional technical solution for the bearing mechanism, the bearing member has a receiving groove communicating with the gas flow channel. The receiving groove is concentrically arranged with the adjustment hole. When the second sealing member separates the gas flow channel, one end is located in the adjustment hole, the other end is located in the receiving groove, and the middle part is sealed in the gas flow channel.
[0012] As an optional technical solution for the support mechanism, the diameter of the adjustment hole is larger than the diameter of the gas flow channel, and the center line of the adjustment hole intersects the center line of the gas flow channel, and the second sealing member is fixed inside the adjustment hole.
[0013] As an optional technical solution for the support mechanism, the second sealing member has a through-hole, and the extension direction of the through-hole is perpendicular to the extension direction of the gas flow channel.
[0014] As an optional technical solution for the bearing mechanism, the bearing member has a vent hole, one end of which is connected to the annular groove and the other end is connected to the gas flow channel.
[0015] As an optional technical solution for the support mechanism, the second sealing element has at least two components to divide the gas flow channel into at least three branch channels, each of which is connected to at least one annular groove.
[0016] As an optional technical solution for the support mechanism, the gas flow channel has two sections, each of which is divided into three sub-channels by two second sealing members; each sub-channel is connected to one of the extraction holes.
[0017] As an optional technical solution for the support mechanism, the two opposite ends of the two gas flow channels penetrate the support member to form two openings. The support mechanism also includes two third sealing members, both of which are disposed on the support member and respectively seal the openings of the two gas flow channels.
[0018] As an optional technical solution for a support mechanism, the gas flow channel includes a flow channel body and a sealing part. The outer diameter of the flow channel body is smaller than that of the sealing part, and the third sealing element is located in the sealing part and has a diameter larger than that of the flow channel body.
[0019] The beneficial effects of this utility model are as follows:
[0020] This utility model provides a carrier mechanism, which includes a carrier component, a first sealing component, and a second sealing component. The carrier component has a plurality of annular grooves arranged from the inside out with progressively increasing diameters. The carrier component has a gas flow channel inside, which connects all the annular grooves. The carrier component also has a plurality of adjusting holes that connect to the gas flow channel and are arranged at intervals. The first sealing component can seal the adjusting holes, and the second sealing component can be arranged in the adjusting holes and the gas flow channel to divide the gas flow channel into several sub-channels. The carrier component also has an exhaust hole to connect to the sub-channels, thereby dividing the plurality of annular grooves into several regions to accommodate wafers of different sizes. In addition, when the second sealing component seals different adjusting holes, the position of the sub-channels changes accordingly, thereby allowing the carrier component to accommodate wafers of more sizes and avoiding the need to replace the carrier component, thus reducing costs. Attached Figure Description
[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.
[0022] Figure 1 This is a schematic diagram of the structure of the bearing mechanism in an embodiment of this utility model;
[0023] Figure 2 This is a cross-sectional view of the bearing mechanism in an embodiment of this utility model;
[0024] Figure 3 for Figure 2 Enlarged view of point A in the middle.
[0025] In the picture:
[0026] 100. Supporting component; 101. Main body of the flow channel; 102. Sealing part;
[0027] 110. First end face; 120. Second end face; 130. Annular groove; 131. Vent hole; 140. Gas flow channel; 141. Adjustment hole; 142. Suction hole; 143. Receiving groove;
[0028] 210. First sealing component;
[0029] 220. Second sealing component; 221. Intermediate passage;
[0030] 230. Third sealing component;
[0031] 300. Connecting part; 310. Connecting pipe; 320. Suction cup. Detailed Implementation
[0032] Before explaining any implementation of this application in detail, it should be understood that this application is not limited to its application to the structural details and component arrangements set forth in the following description or shown in the above drawings.
[0033] In this application, the terms "comprising," "including," "having," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.
[0034] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this application generally indicates that the preceding and following related objects have an "and / or" relationship.
[0035] In this application, the terms "connection," "combination," "coupling," and "installation" can refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, a direct connection refers to two parts or components being connected together without the need for an intermediary, while an indirect connection refers to two parts or components each being connected to at least one intermediary, with the connection achieved through the intermediary. Furthermore, "connection" and "coupling" are not limited to physical or mechanical connections or couplings, but can also include electrical connections or couplings.
[0036] In this application, those skilled in the art will understand that relative terms (e.g., “about,” “approximately,” “basically,” etc.) used in conjunction with quantities or conditions are to include the values and have the meaning indicated by the context. For example, such relative terms include at least the degree of error associated with the measurement of a particular value, tolerances associated with the particular value due to manufacturing, assembly, use, etc. Such terms should also be considered as disclosing a range defined by the absolute values of the two endpoints. Relative terms may refer to a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values not using relative terms should also be disclosed as specific values with tolerances. Furthermore, “basically” when expressing relative angular relationships (e.g., substantially parallel, substantially perpendicular) may refer to a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) added to or subtracted from the indicated angle.
[0037] In this application, those skilled in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.
[0038] In this application, the directional terms "upper," "lower," "left," "right," "front," and "rear" are used to describe the orientation and positional relationships shown in the accompanying drawings and should not be construed as limiting the embodiments of this application. Furthermore, in the context, it should be understood that when an element is mentioned as being connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected through an intermediate element. It should also be understood that directional terms such as upper side, lower side, left side, right side, front side, and rear side not only represent positive orientation but can also be understood as lateral orientation. For example, "below" can include directly below, lower left, lower right, lower front, and lower rear.
[0039] like Figures 1 to 3 As shown, this embodiment provides a support mechanism to meet the support requirements of wafers of different sizes. The support mechanism includes a support member 100. The first end face 110 of the support member 100 has a plurality of annular grooves 130 with progressively increasing diameters arranged from the inside out. The support member 100 has a gas flow channel 140 inside. Each annular groove 130 extends recessed into the support member 100 and communicates with the gas flow channel 140. The gas flow channel 140 has an extraction hole 142 communicating with a gas source. The support member 100 also has a plurality of adjustment holes 1 through the gas flow channel 140. 41. A plurality of regulating holes 141 are arranged at intervals along the extension direction of the gas flow channel 140 and are dispersed between adjacent annular grooves 130, that is, at least one regulating hole 141 is provided between every two adjacent annular grooves 130; each regulating hole 141 can be selectively connected with a first sealing member 210 or a second sealing member 220; wherein, the first sealing member 210 is used to block the regulating hole 141, and the second sealing member 220 is used to block the regulating hole 141 and separate the gas flow channel 140.
[0040] The above configuration allows several annular grooves 130 to be divided into different regions by second sealing members 220 at different positions to accommodate wafers of different sizes. In addition, when the second sealing member 220 blocks different adjustment holes 141, the position and / or length of the branch channels separated by the gas flow channel 140 change accordingly, thereby allowing the carrier 100 to accommodate wafers of more sizes and avoiding the need to replace the carrier 100, thus reducing costs.
[0041] In use, simply match the second sealing member 220 with the corresponding adjustment hole 141 according to the requirements and complete the separation of the gas flow channel 140. Then, use the first sealing member 210 to seal the remaining adjustment holes 141.
[0042] In some embodiments, the second sealing member 220 is elongated and partially fixed to the adjusting hole 141, while partially located within the gas flow channel 140 to separate the gas flow channel 140. The second sealing member 220 blocks the adjusting hole 141 while simultaneously cutting off and separating the gas flow channel 140, simplifying the operation. Furthermore, the partial location of the second sealing member 220 within the adjusting hole 141 ensures its fixation, thereby guaranteeing the separation effect of the gas flow channel 140.
[0043] Furthermore, the carrier 100 has a receiving groove 143 communicating with the gas flow channel 140. The receiving groove 143 is concentrically arranged with the regulating hole 141. When the second sealing member 220 separates the gas flow channel 140, one end is located in the regulating hole 141, the other end is located in the receiving groove 143, and the middle part is sealed in the gas flow channel 140. The two ends of the second sealing member 220 are located in the regulating hole 141 and the receiving groove 143, respectively. Under the vacuum environment of the gas flow channel 140, the second sealing member 220 fits against the side wall of the regulating hole 141 and the side wall of the receiving groove 143, thereby achieving effective fixation, further improving its own stability, and ensuring the separation effect of the gas flow channel 140.
[0044] To ensure complete isolation of the gas flow channel 140, the diameter of the adjusting hole 141 is larger than the diameter of the gas flow channel 140, and the centerline of the adjusting hole 141 intersects the centerline of the gas flow channel 140. The second sealing element 220 is interference-fitted into the adjusting hole 141 and can be made of an elastic material such as rubber or silicone. The first sealing element 210 and the second sealing element 220 are made of the same material. This arrangement ensures that the diameter of the second sealing element 220 in the middle is larger than the diameter of the gas flow channel 140, thereby completely blocking the gas flow channel 140 axially and completely isolating it at the second sealing element 220.
[0045] To save materials and ensure safety, after the second sealing member 220 is inserted into the adjustment hole 141, the lower end of the second sealing member 220 is flush with the second end face 120 of the carrier member 100, or even the lower end of the second sealing member 220 is located inside the adjustment hole 141.
[0046] In this embodiment, the second sealing element 220 has a through-channel 221, and the extension direction of the through-channel 221 is perpendicular to the extension direction of the gas flow channel 140. The through-channel 221 reduces the material required for the second sealing element 220, saving costs; at the same time, without changing the hardness of the second sealing element 220, it is easy to generate elastic deformation, making it easier to enter or remove from the adjustment hole 141; finally, a tool can be inserted into the through-channel 221 to facilitate the removal of the second sealing element 220 from the adjustment hole 141.
[0047] Furthermore, the intermediate channel 221 includes a first channel, a second channel, and a third channel connected in sequence. The first and third channels have the same diameter, and both are smaller than the diameter of the second channel. This arrangement allows the hook-shaped tool to penetrate the second channel through the first channel and abut against the stepped surface between the first and second channels, thus pulling out the second sealing member 220. The fact that the first and third channels have the same diameter eliminates the need to consider orientation when using the second sealing member 220, increasing its ease of use.
[0048] For ease of design, manufacturing, and use, several annular grooves 130 are arranged concentrically. For ease of manufacturing, the gas flow channel 140 extends radially along the annular grooves 130.
[0049] In some embodiments, the carrier 100 has a vent 131, one end of which communicates with the annular groove 130 and the other end of which communicates with the gas flow channel 140. The vent 131 eliminates the need for the annular groove 130 to be too deep, improving manufacturing convenience and saving vacuuming time.
[0050] To enable adsorption of multiple wafer types, at least two second sealing elements 220 are provided to divide the gas flow channel 140 into at least three sub-channels, each sub-channel corresponding to at least one annular groove 130. Exemplarily, four second sealing elements 220 may be provided to divide the gas flow channel 140 into five sub-channels, thereby accommodating five different wafer types.
[0051] To improve the gas extraction efficiency in the annular groove 130, in some embodiments, there are two gas channels 140, each of which is divided into three sub-channels by two second sealing members 220; each sub-channel is connected to an extraction port 142. The two gas channels 140 are arranged symmetrically about the axis of the support member 100.
[0052] For ease of processing, the two opposite ends of the two gas channels 140 pass through the support member 100 to form two openings. The support mechanism also includes two third sealing members 230, which are both located on the support member 100 and respectively seal the corresponding openings of the two gas channels 140.
[0053] To seal the opening, the gas flow channel 140 includes a flow channel body 101 and a sealing portion 102. The outer diameter of the flow channel body 101 is smaller than that of the sealing portion 102. A third sealing element 230 is located in the sealing portion 102 and has a diameter larger than that of the flow channel body 101. The third sealing element 230 is made of rubber and is interference-fitted into the sealing portion 102. The opening is located at the end of the sealing portion 102 away from the flow channel body 101. With the above configuration, the flow channel body 101 is in a vacuum environment, which will attract and press the third sealing element 230 in the sealing portion 102 against the step between the flow channel body 101 and the sealing portion 102, thereby completing the sealing of the gas flow channel 140.
[0054] In some embodiments, the carrier 100 has a second end face 120 arranged opposite to the first end face 110, and an air extraction hole 142 penetrates the second end face 120. The carrier mechanism also includes a docking member 300, which includes a connecting pipe 310 and a suction cup 320 communicating with one end of the connecting pipe 310. The end of the connecting pipe 310 away from the suction cup 320 is arranged to connect to an external air source. The suction cup 320 is arranged to abut against the second end face 120 and surround the outer periphery of the air extraction hole 142. This arrangement allows the connecting pipe 310 and the carrier 100 to be connected by suction through the suction cup 320. Since there is a flowing airflow inside the suction cup 320, it can ensure that the connecting pipe 310 and the carrier 100 can be separated, thus improving the convenience of connection between the connecting pipe 310 and the carrier 100. It should be noted that the inner diameter of the connector 310 is larger than the diameter of the vent hole 131, so that at the moment the connector 310 is connected, an adsorption force can be generated regardless of whether there is a wafer on the carrier 100, so that the suction cup 320 is adsorbed onto the second end face 120 of the carrier 100.
[0055] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A load-bearing mechanism, characterized in that, include: A support member (100) has a first end face (110) with a plurality of annular grooves (130) of progressively increasing diameter arranged from the inside out. The support member (100) has a gas flow channel (140) inside. Each of the annular grooves (130) extends recessed into the support member (100) into the gas flow channel (140) and communicates with the gas flow channel (140). The gas flow channel (140) has an exhaust hole (142) communicating with a gas source. The support member (100) also has a plurality of adjustment holes (141) communicating with the gas flow channel (140). The plurality of adjustment holes (141) are arranged at intervals along the extension direction of the gas flow channel (140) and are dispersed between adjacent annular grooves (130). Each adjustment hole (141) can be selectively connected to a first sealing member (210) or a second sealing member (220). The first sealing member (210) is used to block the regulating hole (141), and the second sealing member (220) is used to block the regulating hole (141) and separate the gas flow channel (140).
2. The bearing mechanism according to claim 1, characterized in that, The second sealing element (220) is elongated and partially fixed to the adjusting hole (141), and partially located within the gas flow channel (140) to separate the gas flow channel (140); and / or, The gas flow channel (140) extends radially along the annular groove (130).
3. The bearing mechanism according to claim 2, characterized in that, The carrier (100) has a receiving groove (143) communicating with the gas flow channel (140). The receiving groove (143) is concentrically arranged with the regulating hole (141). When the second sealing member (220) separates the gas flow channel (140), one end is located in the regulating hole (141), the other end is located in the receiving groove (143), and the middle part is sealed in the gas flow channel (140).
4. The bearing mechanism according to claim 3, characterized in that, The diameter of the regulating hole (141) is larger than the diameter of the gas flow channel (140), and the center line of the regulating hole (141) intersects the center line of the gas flow channel (140). The second sealing member (220) is fixed inside the regulating hole (141).
5. The bearing mechanism according to claim 2, characterized in that, The second sealing element (220) has a through-hole (221) extending through it, and the extension direction of the through-hole (221) is perpendicular to the extension direction of the gas flow channel (140).
6. The bearing mechanism according to claim 1, characterized in that, The carrier (100) has a vent (131), one end of which is connected to the annular groove (130) and the other end is connected to the gas flow channel (140).
7. The bearing mechanism according to claim 1, characterized in that, The second sealing element (220) has at least two to divide the gas flow channel (140) into at least three branch channels, each of the branch channels corresponding to at least one annular groove (130).
8. The bearing mechanism according to any one of claims 1-7, characterized in that, The gas flow channel (140) has two, and each gas flow channel (140) is divided into three sub-channels by two second sealing members (220); each sub-channel is connected to one of the extraction holes (142).
9. The bearing mechanism according to claim 8, characterized in that, The two opposite ends of the two gas channels (140) pass through the support member (100) to form two openings. The support mechanism also includes two third sealing members (230), both of which are located on the support member (100) and respectively seal the openings of the two gas channels (140).
10. The bearing mechanism according to claim 9, characterized in that, The gas flow channel (140) includes a flow channel body (101) and a plugging part (102). The outer diameter of the flow channel body (101) is smaller than that of the plugging part (102). The third plugging member (230) is located in the plugging part (102) and has a diameter larger than that of the flow channel body (101).