Tray mounting platform, wafer fixing assembly and light microscope system

Abstract

The utility model discloses a tray mounting platform, a wafer fixing assembly and a light microscope system. The tray mounting platform comprises a platform main body, a driving piece, a first pressing piece, a second pressing piece and an orthogonal conversion piece, a placing station is arranged on the platform main body; the placing station is used for placing a tray; the first pressing piece is arranged on the platform body in a sliding mode in the first direction. The second pressing piece is slidably arranged on the platform main body in the second direction; the output end of the driving piece is connected with the first pressing piece and connected with the second pressing piece through the orthogonal conversion piece. The driving piece is arranged on the platform body and used for driving the first pressing piece and the second pressing piece to press the side portions of the tray correspondingly. In the scheme, through the cooperation of the driving piece and the orthogonal conversion piece, the first pressing piece and the second pressing piece can be driven to move at the same time to press the tray, so that the light microscope system does not need to be provided with a plurality of driving pieces, the structure cost of the system can be reduced, and the control and management cost of the system can be simplified at the same time.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a tray mounting platform, a wafer fixing assembly, and an optical mirror system. Background Technology

[0002] In high-precision semiconductor manufacturing scenarios, such as EBL electron beam exposure and micro-nano processing, optical microscope systems are used to perform microscopic observation and attitude calibration of wafers. They can provide sample state information with nanometer-level precision for subsequent processes. Their core components usually include high-resolution optical microscopes, laser interferometers, electron beam positioning and calibration modules, and some devices are also equipped with visual recognition cameras and Faraday cups.

[0003] Taking EBL electron beam lithography as an example, because EBL processing requires high stability of the wafer, the wafer needs to be mounted on a dedicated tray for transport and inspection. Correspondingly, the tray needs to be fixed in place when the optical microscope system inspects the wafer.

[0004] Existing optical microscope systems require multiple driving components to press the tray from multiple directions to ensure its stability; for example, the inspection station of an optical microscope system may have multiple telescopic columns driven by cylinders. After the tray is placed at the inspection station, multiple cylinders are activated to drive the telescopic columns to press the tray from multiple directions. This method results in high structural and control costs for the system. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a tray mounting platform, a wafer fixing component, and an optical mirror system to solve the problems of complex structure, high structural cost, and high control cost of existing tray fixing methods for optical mirror equipment.

[0006] To achieve the above-mentioned technical objectives, the first aspect of this application provides a pallet mounting platform, comprising: a platform body, a drive component, a first clamping component, a second clamping component, and an orthogonal conversion component;

[0007] The platform body is equipped with workstations;

[0008] The placement station is used for pallet placement;

[0009] The first clamping member is slidably disposed on the platform body along a first direction;

[0010] The second clamping member is slidably disposed on the platform body along the second direction;

[0011] The output end of the drive unit is connected to the first clamping member, and is connected to the second clamping member through the orthogonal conversion member;

[0012] The driving component is disposed on the platform body and is used to drive the first pressing component to move along the first direction, and at the same time drive the second pressing component to move along the second direction through the orthogonal conversion component, so that the first pressing component and the second pressing component respectively press the side of the tray along the first direction and the side of the tray along the second direction.

[0013] Furthermore, the orthogonal transformation element is a connecting rod;

[0014] One end of the orthogonal converter is rotatably connected to the output end of the drive unit, and the other end is rotatably connected to the second clamping unit.

[0015] Furthermore, a stop is provided on one side of the platform body along the first direction;

[0016] The first clamping member is located on the other side of the platform body.

[0017] Furthermore, the second clamping element comprises two;

[0018] Two second clamping members are symmetrically arranged on both sides of the driving member.

[0019] Furthermore, a buffer is provided on the stop block.

[0020] Furthermore, the first clamping element includes: a T-block and a plurality of pushing elements;

[0021] The T-block is connected to the output end of the drive component;

[0022] Multiple pushing elements are disposed on the T-shaped block for pushing the tray.

[0023] Furthermore, a buffer is provided on the second clamping member and / or the first clamping member.

[0024] Furthermore, the platform body is equipped with a support platform and fine-tuning bolts;

[0025] The placement station is set on the support platform;

[0026] The support platform can rotate in the horizontal direction;

[0027] The fine-tuning bolts are located on both sides of the support platform;

[0028] The fine-tuning bolt can drive the support platform to rotate when it rotates.

[0029] A second aspect of this application provides a wafer fixing assembly for an optical mirror system, comprising: a tray and a tray mounting platform as described in any one of the above claims;

[0030] The tray is provided with slide rails on both sides;

[0031] The pallet mounting platform is equipped with two second clamping components;

[0032] After the pallet is placed in the placement station of the pallet installation platform, the two second clamping members extend into the two slides of the pallet respectively.

[0033] A third aspect of this application provides a light mirror system, including the tray mounting platform described in any of the preceding claims.

[0034] As can be seen from the above technical solutions, this application provides a tray mounting platform, a wafer fixing assembly, and an optical mirror system; wherein, the tray mounting platform includes: a platform body, a driving component, a first clamping component, a second clamping component, and an orthogonal conversion component; the platform body is provided with a placement station; the placement station is used for placing the tray; the first clamping component is slidably disposed on the platform body along a first direction; the second clamping component is slidably disposed on the platform body along a second direction; the output end of the driving component is connected to the first clamping component, and is connected to the second clamping component through the orthogonal conversion component; the driving component is disposed on the platform body and is used to drive the first clamping component to move along the first direction, and at the same time drive the second clamping component to move along the second direction through the orthogonal conversion component, so that the first clamping component and the second clamping component respectively press the side of the tray along the first direction and the side of the tray along the second direction.

[0035] In this solution, the cooperation between the driving component and the orthogonal conversion component can simultaneously drive the first and second clamping components to move and clamp the tray, so that the optical mirror system does not need to be configured with multiple driving components, thereby reducing the structural cost of the system and simplifying the control and management cost of the system. Attached Figure Description

[0036] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0037] Figure 1 A top perspective view of a pallet mounting platform provided in an embodiment of this application;

[0038] Figure 2 A perspective view of the bottom surface of a pallet mounting platform provided in an embodiment of this application;

[0039] Figure 3 for Figure 1 Enlarged view of part A in the image;

[0040] In the picture:

[0041] 1. Pallet; 2. Slide rail; 10. Platform body; 11. Placement station; 12. Stop block; 13. Buffer; 14. Support platform; 15. Fine-tuning bolt; 20. Drive component; 30. First clamping component; 31. T-block; 32. Pushing component; 40. Second clamping component; 41. Guide rail; 50. Orthogonal conversion component;

[0042] X: First direction; Y: Second direction. Detailed Implementation

[0043] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments in this application specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection claimed in this application.

[0044] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0045] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application according to the specific circumstances.

[0046] Please see Figure 1 and Figure 2 In the first aspect of this application, a pallet mounting platform is provided, including: a platform body 10, a drive component 20, a first clamping component 30, a second clamping component 40, and an orthogonal conversion component 50.

[0047] The platform body 10 is provided with a placement station 11; the placement station 11 is used for placing the pallet 1. In this embodiment, the pallet 1 can be a pallet from the prior art. The placement station 11 on the platform body 10 can stably place the pallet 1.

[0048] The first clamping member 30 is slidably disposed on the platform body 10 along the first direction X; the second clamping member 40 is slidably disposed on the platform body 10 along the second direction Y.

[0049] A drive unit 20 is disposed on the platform body 10. The output end of the drive unit 20 is connected to the first clamping member 30 and to the second clamping member 40 via an orthogonal converter 50. The orthogonal converter 50 can transmit the driving force of the drive unit 20 along the first direction X to the second direction Y. After the drive unit 20 is activated, the output end of the drive unit 20 extends and retracts along the first direction X, thereby driving the first clamping member 30 to move along the first direction X, and simultaneously driving the second clamping member 40 to move along the second direction Y via the orthogonal converter 50, so that the first clamping member 30 and the second clamping member 40 respectively clamp the side of the tray 1 along the first direction X and the side of the tray 1 along the second direction Y.

[0050] Specifically, in this embodiment, the platform body 10 may be provided with a guide rail 41 along the second direction Y. The second clamping member 40 is disposed on the guide rail 41 and is limited by the guide rail 41, so that the second clamping member 40 can slide only along the second direction Y.

[0051] In one implementation, the placement station 11 on the platform body 10 can be formed by multiple stops 12, wherein the area enclosed by the multiple stops 12 is larger than the size of the tray 1, so as to facilitate the placement of the tray 1 into the placement station 11. The orthogonal conversion member 50 can be a connecting rod; one end of the orthogonal conversion member 50 is rotatably connected to the output end of the drive member 20, and the other end is rotatably connected to the second clamping member 40. When the output end of the drive member 20 extends or retracts, the connecting rod will move simultaneously along the first direction X and the second direction Y, and the second clamping member 40 will move along the second direction Y due to the limitation of the guide rail 41. Furthermore, when the drive member 20 drives the first clamping member 30 to retract (towards clamping the tray 1), the connecting rod simultaneously drives the second clamping member 40 to retract; when the drive member 20 drives the first clamping member 30 to extend (towards releasing the tray 1), the connecting rod simultaneously drives the second clamping member 40 to extend.

[0052] As described above, this solution, through a single driving component 20 and orthogonal conversion component 50, can achieve the effect of simultaneous multi-directional clamping with a single drive, without the need for multiple additional drive sources. This reduces the number of driving components, lowering the hardware procurement and assembly costs of the equipment. Furthermore, synchronous clamping can be achieved by controlling only a single driving component 20, eliminating the need for complex multi-drive collaborative control logic, simplifying the control program, and reducing the R&D and debugging costs of the control module. Simultaneously, the synchronous drive design ensures the coordination of the clamping actions of the first clamping component 30 and the second clamping component 40, avoiding problems such as uneven force distribution and positioning deviations on the tray 1 caused by asynchronous start-stop of multiple drives. This adapts to the high requirements for tray fixation stability in high-precision semiconductor manufacturing scenarios, providing a reliable fixing foundation for subsequent wafer microscopic observation and attitude calibration.

[0053] In another implementation, the platform body 10 may be provided with only one stop 12. For example, the stop 12 may be provided on one side of the platform body 10, and the first clamping member 30 may be provided on the other side of the platform body 10. During the process of the driving member 20 driving the first clamping member 30 to push the tray 1, the tray 1 may be limited by the first clamping member 30 and the stop 12 on both sides along the first direction X, respectively.

[0054] This solution, by adding a stop 12 and adjusting the position of the stop 12 and the first clamping member 30, can further improve the positioning accuracy and clamping stability of the tray 1 along the first direction X, while simplifying the clamping control logic and reducing the control difficulty.

[0055] In one embodiment, the second clamping member 40 includes two members; the two second clamping members 40 are symmetrically arranged on both sides of the driving member 20.

[0056] In this design, the two second clamping members 40 can simultaneously and evenly clamp the tray on both sides along the second direction Y, improving the stability of the tray 1 along the Y direction. Correspondingly, two orthogonal conversion members 50 are provided, symmetrically arranged on both sides of the driving member 20.

[0057] In one embodiment, a buffer 13 is provided on the stop 12.

[0058] The buffer 13 can buffer the impact force when the tray 1 comes into contact with the stop block 12, thereby improving the stability of the tray 1's positioning.

[0059] Correspondingly, the second clamping member 40 and / or the first clamping member 30 are provided with a buffer to increase the friction on the tray 1 and provide protection when clamping the tray 1.

[0060] In one embodiment, the first pressing member 30 includes a T-block 31 and a plurality of pressing members 32; the T-block 31 is connected to the output end of the driving member 20; the plurality of pressing members 32 are disposed on the T-block 31 for pressing the tray 1.

[0061] Specifically, the T-block 31 and multiple pushing parts 32 can achieve multi-point pressing of the pallet 1 along the X side of the first direction, which improves the pressing stability and the force balance of the pallet, while enhancing the adaptability of the equipment and making it compatible with pallets of different sizes.

[0062] In one embodiment, the platform body 10 is provided with a support platform 14 and a fine-tuning bolt 15; the placement station 11 is provided on the support platform 14; the support platform 14 can rotate in the horizontal direction; the fine-tuning bolt 15 is provided on both sides of the support platform 14; when the fine-tuning bolt 15 rotates, it can push the support platform 14 to rotate.

[0063] The fine-tuning bolt 15 can finely adjust the horizontal angle of the support platform 14 and the tray 1, improving the positioning accuracy of the tray 1 to meet the requirements of nanometer-level precision observation and calibration of the optical mirror system.

[0064] The second aspect of this application provides a wafer fixing assembly for an optical mirror system, including: a tray 1 and a tray mounting platform as described above; slides 2 are provided on both sides of the tray 1; the tray mounting platform is provided with two second clamping members 40; after the tray 1 is placed in the placement station 11 of the tray mounting platform, the two second clamping members 40 respectively extend into the two slides 2 of the tray 1.

[0065] In this embodiment, during the process of pushing the tray 1, the second clamping member 40 can engage with the slide 2. The slide 2 can be a V-shaped slide, and correspondingly, the end of the second clamping member 40 is V-shaped. The slide 2 and the second clamping member 40 provide precise guidance and anti-displacement positioning for the tray 1; specifically, during the process of the first clamping member 30 pushing the tray 1, the second clamping member 40 can slide along the slide 2. Simultaneously, the second clamping member 40 and the slide 2 can limit the vertical movement of the tray 1, preventing it from being pried open.

[0066] A third aspect of this application provides a light mirror system, including the tray mounting platform of any of the above.

[0067] In this embodiment, the optical microscope system can be configured with existing equipment such as optical microscopes, laser interferometers, and electron beam positioning and calibration modules. The tray mounting platform in this solution, through a single drive component 20 combined with an orthogonal conversion component 50, can simultaneously drive the clamping components to clamp from multiple directions, reducing the number of drive components in the optical microscope system, simplifying the overall system structure, and lowering the system's hardware procurement, assembly, and integration costs.

[0068] The above are merely preferred embodiments of this application and are not intended to limit the present invention. Although the present application has been described in detail with reference to examples, those skilled in the art can still modify the technical solutions described in the foregoing examples or make equivalent substitutions for some of the technical features. However, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A pallet mounting platform, characterized in that, include: Platform body (10), drive component (20), first clamping component (30), second clamping component (40) and orthogonal conversion component (50); The platform body (10) is provided with a placement station (11). The placement station (11) is used for placing the pallet (1); The first clamping member (30) is slidably disposed on the platform body (10) along the first direction (X); The second clamping member (40) is slidably disposed on the platform body (10) along the second direction (Y); The output end of the drive member (20) is connected to the first clamping member (30) and is connected to the second clamping member (40) through the orthogonal conversion member (50). The driving component (20) is disposed on the platform body (10) and is used to drive the first pressing component (30) to move along the first direction (X), and at the same time drive the second pressing component (40) to move along the second direction (Y) through the orthogonal conversion component (50), so that the first pressing component (30) and the second pressing component (40) respectively press the side of the tray (1) along the first direction (X) and the side of the tray (1) along the second direction (Y).

2. The pallet mounting platform according to claim 1, characterized in that, The orthogonal conversion component (50) is a connecting rod; One end of the orthogonal converter (50) is rotatably connected to the output end of the drive (20), and the other end is rotatably connected to the second clamping member (40).

3. The pallet mounting platform according to claim 1, characterized in that, A stop (12) is provided on one side of the platform body (10) along the first direction (X). The first clamping member (30) is located on the other side of the platform body (10).

4. The pallet mounting platform according to claim 3, characterized in that, The second clamping element (40) comprises two; Two second clamping members (40) are symmetrically arranged on both sides of the driving member (20).

5. The pallet mounting platform according to claim 3, characterized in that, A buffer (13) is provided on the stop (12).

6. The pallet mounting platform according to claim 1, characterized in that, The first clamping member (30) includes: a T-block (31) and a plurality of pushing members (32); The T-block (31) is connected to the output end of the drive unit (20); Multiple pushers (32) are disposed on the T-block (31) for pushing the tray (1).

7. The pallet mounting platform according to claim 1, characterized in that, The second clamping member (40) and / or the first clamping member (30) are provided with a buffer.

8. The pallet mounting platform according to claim 1, characterized in that, The platform body (10) is provided with a support platform (14) and a fine-tuning bolt (15). The placement station (11) is set on the support platform (14); The support platform (14) can rotate in the horizontal direction; The fine-tuning bolts (15) are located on both sides of the support platform (14); When the fine-tuning bolt (15) rotates, it can push the support platform (14) to rotate.

9. A wafer fixing assembly for an optical mirror system, characterized in that, include: The pallet (1) and the pallet mounting platform as described in any one of claims 1 to 8; The tray (1) is provided with slides (2) on both sides; The pallet mounting platform is provided with two second clamping elements (40); After the pallet (1) is placed in the placement station (11) of the pallet installation platform, the two second clamping members (40) extend into the two slides (2) of the pallet (1).

10. An optical mirror system, characterized in that, Includes the pallet mounting platform as described in any one of claims 1 to 8.

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