Diamond substrate grinding equipment

Abstract

Diamond substrate grinding equipment comprises a base, a placing plate is fixedly connected to the rear side wall of the base, a first soft clamp is fixedly connected to the upper portion of the front side wall of the placing plate, a grinding pen is hung in the first soft clamp, a placing base is fixedly connected to the upper side wall of the base, and the outer side of the placing base is sleeved with an air pipe; a second soft clamp is fixedly connected to one side wall of the base, an inflatable air bag is hung on the second soft clamp, and the inflatable air bag is communicated with one end of the air pipe through an air inlet pipe. Compared with the prior art, the diamond substrate clamping device has the advantages that the diamond substrate clamping device can adapt to diamond substrates with various side wall shapes through cooperation of the inflatable air bag, the air inlet pipe, the air pipe, the communicating pipe and the positioning mechanism, and the stable and reliable clamping effect can be achieved no matter the diamond substrates are flat, uneven or in other complex shapes. By means of the improvement, the applicability of the device is remarkably improved, and the clamping problem caused by limitation of the shape of the side wall in the prior art is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to diamond processing technical field, especially a kind of diamond substrate grinding equipment. BACKGROUND

[0002] Diamond substrate is a kind of radiator using diamond material, with extremely high thermal conductivity and excellent heat conduction performance, widely used in electronic, photoelectric, semiconductor and other fields. At the same time, diamond also has excellent electrical performance, optical performance and chemical stability, which can greatly improve the performance and reliability of chip. When diamond substrate is processed, grinding equipment is needed to polish it to remove burrs, sharp corners and uneven parts on the surface generated during cutting.

[0003] In the existing diamond substrate grinding technology, the clamping effect of diamond substrate mainly depends on the flatness of side wall. The traditional clamp is only suitable for diamond substrate with flat side wall. When the side wall of diamond substrate is uneven, the traditional clamp can not realize uniform and stable fixing effect. This leads to displacement or shaking of diamond substrate during grinding, which affects the grinding precision and surface quality. SUMMARY

[0004] The main purpose of the utility model is to provide a kind of diamond substrate grinding equipment, which can effectively solve the problems in the background art.

[0005] To achieve the above purpose, the technical scheme adopted by the utility model is as follows: a kind of diamond substrate grinding equipment, including base, the rear side wall of the base is fixedly connected with placing plate, the front side wall of the placing plate is fixedly connected with first soft clamp above, the first soft clamp is hung with polishing pen inside, the upper side wall of the base is fixedly connected with placing seat, the outside of the placing seat is sleeved with air pipe, one side wall of the base is fixedly connected with second soft clamp, the second soft clamp is hung with inflatable air bag, the inflatable air bag and one end of air pipe are communicated through the air inlet pipe, the placing seat is equipped with positioning mechanism.

[0006] As a further description of the above technical scheme, the positioning mechanism includes placing groove, cavity, piston, push rod and positioning head, the upper side wall of the placing seat is provided with placing groove, a plurality of cavities are formed in the wall around the placing groove, the cavities are provided with pistons, the push rod is fixedly connected to the side wall close to the placing groove of the piston, the other end of the push rod extends into the placing groove and is fixedly connected with the positioning head.

[0007] As a further description of the above technical scheme, the air pipe is communicated with the cavities through a plurality of communication pipes.

[0008] As a further description of the above technical solutions, the other end of the air pipe is threadedly connected with a pressure relief cap.

[0009] As a further description of the above technical solutions, the piston is provided with a return spring between the inner wall of the cavity close to the one side of the placement slot.

[0010] As a further description of the above technical solutions, the positioning head is covered with a rubber pad.

[0011] Compared with the prior art, the utility model has the beneficial effects that:

[0012] 1. Through the cooperation between the inflatable air bag, the air inlet pipe, the air pipe, the communication pipe and the positioning mechanism, the diamond substrate with various side wall shapes can be clamped stably and reliably, whether it is flat, uneven or other complex shapes. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a whole structure schematic view of the diamond substrate grinding equipment of the utility model;

[0014] Figure 2 It is a placement seat sectional view of the diamond substrate grinding equipment of the utility model;

[0015] Figure 3 It is a push rod structure schematic view of the diamond substrate grinding equipment of the utility model;

[0016] Figure 4 It is a pressure relief cap structure schematic view of the diamond substrate grinding equipment of the utility model;

[0017] In the figure: 1, base; 2, placement plate; 21, first soft clamp; 22, polishing pen; 3, placement seat; 4, air pipe; 11, second soft clamp; 5, inflatable air bag; 51, air inlet pipe; 6, positioning mechanism; 61, placement slot; 62, cavity; 63, piston; 64, push rod; 65, positioning head; 41, communication pipe; 42, pressure relief cap; 621, return spring; 651, rubber pad. DETAILED DESCRIPTION

[0018] In order to make the technical means, creative features and achieved purposes of the utility model easy to understand, the utility model is further described below in combination with specific implementation manners.

[0019] In the description of the utility model, it is necessary to explain that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate the position or location relationship based on the position or location relationship shown in the drawing, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0020] In the description of the utility model, it is necessary to explain that, unless otherwise specified and limited, the terms "installation", "provided with", "connection" and the like should be broadly understood, for example, "connection" can be fixed connection, can also be detachable connection, or integral connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0021] Please refer to Figures 1-4 The utility model provides a kind of diamond substrate grinding equipment, including base 1, the rear side wall of base 1 is fixedly connected with placing plate 2, the front side wall of placing plate 2 is fixedly connected with first soft clamp 21 above, first soft clamp 21 is hung with polishing pen 22, polishing pen 22 is used to grind diamond substrate surface, this is mature and disclosed prior art, no longer repeat here, the upper side wall of base 1 is fixedly connected with placing seat 3, placing seat 3 is equipped with air pipe 4 outside, one side wall of base 1 is fixedly connected with second soft clamp 11, inflatable air bag 5 is hung on second soft clamp 11, inflatable air bag 5 and one end of air pipe 4 are connected by being provided with air inlet pipe 51 and communicate, constantly press inflatable air bag 5, air pipe 4 can be inflated and pressurized by communicating pipe 41, placing seat 3 is equipped with positioning mechanism 6.

[0022] Specifically, as Figure 2As shown in the figure, a diamond substrate grinding device, positioning mechanism 6 includes a placement slot 61, cavity 62, piston 63, push rod 64 and positioning head 65, the upper side wall of the placement seat 3 is provided with a placement slot 61, the four walls of the placement slot 61 are provided with a plurality of cavities 62, the cavities 62 are provided with pistons 63, the pistons 63 are fixedly connected with push rods 64 on the side wall close to the placement slot 61, the other end of the push rod 64 extends into the placement slot 61 and is fixedly connected with the positioning head 65, the air entering the cavity 62 will push the piston 63 to move, so that the push rod 64 pushes the positioning head 65 to approach the diamond substrate, if the side wall of the diamond substrate is not flat, there will be a positioning head 65 that will contact the diamond substrate first, after the positioning head 65 contacts the diamond substrate, the air in the air pipe 4 cannot continue to push the piston 63 in the corresponding cavity 62 to move, the remaining positioning heads 65 continue to approach the diamond substrate, until all the positioning heads 65 clamp the diamond substrate, whether the diamond substrate is flat, uneven or other complex shape, stable and reliable clamping effect can be achieved, greatly improving the applicability.

[0023] Specifically, as shown in the figure, Figure 1 A diamond substrate grinding device, the air pipe 4 is connected with the cavity 62 through the setting of a plurality of communication pipes 41, and the air in the air pipe 4 enters each cavity 62 through the communication pipe 41.

[0024] Specifically, as shown in the figure, Figure 4 A diamond substrate grinding device, the other end of the air pipe 4 is threadedly connected with a pressure relief cap 42, after grinding is completed, the pressure relief cap 42 is unscrewed, and pressure relief can be performed.

[0025] Specifically, as shown in the figure, Figure 2 A diamond substrate grinding device, a reset spring 621 is arranged between the piston 63 and the inner wall of the cavity 62 close to the placement slot 61, after pressure relief, the reset spring 621 can push the piston 63 to reset, so that the positioning head 65 resets.

[0026] Specifically, as shown in the figure, Figure 3 A diamond substrate grinding device, the positioning head 65 is covered with a rubber pad 651, so as to avoid abrasion of the positioning head 65 to the diamond substrate.

[0027] It needs to be explained that the utility model discloses a diamond substrate grinding equipment, when using, the diamond substrate to be ground is placed in the placing groove 61, then the inflatable air bag 5 is taken off from the second soft clamp 11, and the inflatable air bag 5 is pressed constantly, the air pipe 4 is inflated through the communicating pipe 41, the air in the air pipe 4 is pressed into each cavity 62 through the communicating pipe 41, the piston 63 is moved by the air, and the push rod 64 pushes the positioning head 65 to be close to the diamond substrate, if the side wall of the diamond substrate is not flat, then the positioning head 65 that will have the priority to contact the diamond substrate, the positioning head 65 contacts the diamond substrate, and the air in the air pipe 4 cannot continue to push the piston 63 in the corresponding cavity 62 to move, the remaining positioning head 65 continues to be close to the diamond substrate, until all positioning heads 65 clamp the diamond substrate, whether the diamond substrate is flat, uneven or other complex shape, can realize stable and reliable clamping effect, and the applicability is greatly improved.

[0028] The basic principle and main features of the utility model and the advantages of the utility model are shown and described above. The skilled in the art should understand that the utility model is not limited by the above-mentioned embodiments, and the above-mentioned embodiments and the description in the specification only illustrate the principle of the utility model, and various changes and improvements can be made to the utility model without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model claimed. The scope of protection of the utility model is defined by the appended claims and their equivalents.

Claims

1. A diamond substrate grinding device, comprising a base (1), wherein a placement plate (2) is fixedly connected to the rear side wall of the base (1), and a first soft clip (21) is fixedly connected to the upper part of the front side wall of the placement plate (2), wherein a grinding pen (22) is hung inside the first soft clip (21), characterized in that: The upper side wall of the base (1) is fixedly connected with a placing seat (3), the outer side of the placing seat (3) is sleeved with an air pipe (4), one side wall of the base (1) is fixedly connected with a second soft clamp (11), the second soft clamp (11) is hung with an inflatable air bag (5), the inflatable air bag (5) and one end of the air pipe (4) are connected in communication through an air inlet pipe (51), and the placing seat (3) is provided with a positioning mechanism (6).

2. A diamond substrate polishing apparatus according to claim 1, wherein: The positioning mechanism (6) comprises a placing groove (61), cavities (62), a piston (63), a push rod (64) and a positioning head (65), the upper side wall of the placing seat (3) is provided with the placing groove (61), a plurality of cavities (62) are formed in the circumferential wall of the placing groove (61), the piston (63) is arranged in the cavity (62), the push rod (64) is fixedly connected to one side wall of the piston (63) close to the placing groove (61), and the other end of the push rod (64) extends into the placing groove (61) and is fixedly connected with the positioning head (65).

3. A diamond substrate polishing apparatus according to claim 2, wherein: The air pipe (4) is connected in communication with the cavities (62) through a plurality of communication pipes (41).

4. The apparatus of claim 1, wherein: The other end of the air pipe (4) is threadedly connected with a pressure relief cap (42).

5. A diamond substrate polishing apparatus as claimed in claim 2, wherein: A reset spring (621) is arranged between the piston (63) and the inner wall of the cavity (62) close to the placing groove (61).

6. A diamond substrate polishing apparatus as claimed in claim 2, wherein: The positioning head (65) is covered with a rubber pad (651).

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