Ozone generator
By designing an ozone generator that includes a discharge generation chamber, an input pipeline, and a bypass channel, the problems of low production efficiency, high energy consumption, and high leakage risk caused by equipment shutdown for zeroing in existing technologies have been solved. This achieves zeroing without shutdown, improves production efficiency, and extends equipment life.
Patent Information
- Application Number
- CN202423200903.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-24
- Publication Date
- 2026-02-27
- Estimated Expiration
- 2034-12-24
AI Technical Summary
Existing ozone generators require multiple switching on and off of the equipment when zeroing the concentration meter, which leads to reduced production efficiency, increased energy consumption, increased risk of ozone leakage, and accelerated equipment aging.
An ozone generator was designed, comprising a discharge generation chamber, an input pipeline, a three-way valve, an ozone concentration detector, and a bypass channel. The ozone concentration analyzer can be zeroed without shutting down the system by using different valve control modes. The bypass channel is used to switch between the ozone and oxygen pathways, bypassing the ozone concentration detector.
This technology enables zeroing of the ozone concentration analyzer without equipment downtime, improving production efficiency, reducing energy consumption and the risk of ozone leakage, and extending equipment lifespan.
Smart Images
Figure CN223950738U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor manufacturing, especially relates to an ozone generator. BACKGROUND
[0002] The ozone generator is one of key parts of equipment of integrated circuit sub-atmospheric pressure chemical vapor deposition, and a certain concentration of ozone is decomposed into oxygen atoms and a specific gaseous source to generate a required film through chemical reaction, so the accuracy of ozone concentration is crucial. However, the instrument for measuring the ozone concentration will be affected by zero drift caused by pollution and other reasons, which will result in that the actual ozone concentration is lower than the set value, thereby causing the deposited film to deviate, so the concentration instrument needs to be zeroed at irregular time.
[0003] The existing equipment needs to close the ozone generation first, let the oxygen directly into the equipment to flush the pipeline and the concentration instrument, and when it is ensured that the oxygen passes through the concentration instrument without ozone residue, the concentration instrument is zeroed, and the ozone generator is restarted to generate ozone after the operation is completed. However, the operation needs to turn on and off the equipment many times, which not only reduces the production efficiency, but also increases the risk of ozone leakage and the aging of the equipment.
[0004] In order to overcome the above-mentioned defects existing in the prior art, the technical field urgently needs an ozone generator for zeroing the ozone concentration analyzer without stopping the equipment, thereby improving the production efficiency, reducing the risk of ozone leakage and the aging of the equipment. SUMMARY
[0005] The following gives a brief summary of one or more aspects to provide a basic understanding of these aspects. This summary is not an exhaustive overview of all contemplated aspects, and neither is it intended to identify key or critical elements of all aspects nor to delineate the scope of any or all aspects. Its only purpose is to give some concepts of one or more aspects in a simplified form before the later given more detailed description.
[0006] In order to overcome the above-mentioned defects existing in the prior art, the utility model provides an ozone generator for zeroing the ozone concentration analyzer without stopping the equipment, thereby improving the production efficiency, reducing the risk of ozone leakage and the aging of the equipment.
[0007] Specifically, the ozone generator according to the first aspect of the utility model comprises: a discharge generation chamber; a first input pipeline, the first end of which is connected to an oxygen source via a first valve, and the second end of which is connected to the air inlet end of the discharge generation chamber; a three-way valve, the first end of which is connected to the air outlet end of the discharge generation chamber, the second end of which is connected to the air inlet end of an ozone concentration detector, and the third end of which is connected to the first end of a first bypass channel; the ozone concentration detector, the air outlet end of which is connected to the output pipeline of the ozone generator; the first bypass channel, which is used to provide an ozone path bypassing the ozone concentration detector; and a second bypass channel, the first end of which is connected to the oxygen source via a second valve, and the second end of which is connected to the ozone concentration detector, so as to provide an oxygen path bypassing the discharge generation chamber.
[0008] Further, in some embodiments of the utility model, the ozone generator comprises multiple working modes, wherein, in a preset first mode, the first valve is turned on, the second valve is turned off, the air outlet end of the discharge generation chamber is communicated with the ozone concentration detector via the first end and the second end of the three-way valve, so as to output the generated ozone via the air outlet end of the ozone concentration detector, and in a preset second mode, the first valve and the second valve are both turned on, the oxygen source is communicated with the air inlet end of the ozone concentration detector via the second valve, so as to provide part of the output oxygen of the oxygen source to the air inlet end of the ozone concentration detector via the second bypass channel, and the air outlet end of the discharge generation chamber is communicated with the first bypass channel via the first end and the third end of the three-way valve, so as to output the generated ozone via the second end of the first bypass channel.
[0009] Further, in some embodiments of the utility model, the ozone generator further comprises an ozone decomposer, wherein the ozone decomposer is connected to the second end of the first bypass channel, so as to decompose the ozone generated in the second mode.
[0010] Further, in some embodiments of the utility model, the ozone generator further comprises a first filter, which is arranged between the air outlet end of the discharge generation chamber and the first end of the three-way valve, so as to purify the ozone leading to the ozone concentration detector.
[0011] Further, in some embodiments of the utility model, the ozone generator further comprises a back pressure valve arranged at the air outlet end of the ozone concentration detector, which is used to stabilize the ozone output pressure of the output pipeline of the ozone generator; and / or a first check valve arranged at the air outlet end of the ozone concentration detector, which is used to prevent the backflow of external gas via the output pipeline of the ozone generator.
[0012] Further, in some embodiments of the utility model, the ozone generator further includes: a first mass flow meter arranged in the second bypass channel and used for measuring the oxygen flow provided by the oxygen source to the ozone concentration detector; and / or a second check valve arranged in the second bypass channel and used for preventing the backflow of external gas to the oxygen source.
[0013] Further, in some embodiments of the utility model, the ozone generator further includes: a second filter arranged at the output end of the oxygen source and used for purifying the oxygen output by the oxygen source; and / or a second mass flow meter arranged in the first input pipeline and used for measuring the oxygen flow provided by the oxygen source to the discharge generation chamber; and / or a third check valve arranged at the air inlet end of the discharge generation chamber and used for preventing the backflow of gas in the discharge generation chamber through the first input pipeline.
[0014] Further, in some embodiments of the utility model, the ozone generator further includes: a second input pipeline, a first end of which is connected to a nitrogen source via a third valve, and a second end of which is connected to the air inlet end of the discharge generation chamber.
[0015] Further, in some embodiments of the utility model, the ozone generator further includes: a third filter arranged at the output end of the nitrogen source and used for purifying the nitrogen output by the nitrogen source; and / or a third mass flow meter arranged in the second input pipeline and used for measuring the nitrogen flow provided by the nitrogen source to the discharge generation chamber; and / or a fourth check valve arranged at the air inlet end of the discharge generation chamber and used for preventing the backflow of gas in the discharge generation chamber through the second input pipeline.
[0016] Further, in some embodiments of the utility model, the ozone generator further includes: a cooling water system used for cooling the discharge generation chamber. BRIEF DESCRIPTION OF DRAWINGS
[0017] The above features and advantages of the utility model will be better understood after reading the detailed description of embodiments of the present disclosure in conjunction with the following drawings. In the drawings, various components are not necessarily drawn to scale and components having similar related properties or features can have the same or similar reference numerals.
[0018] Figure 1 A connection structure schematic diagram of the ozone generator provided according to some embodiments of the utility model is shown.
[0019] Figure 2 A working flow schematic diagram of the ozone generator provided according to some embodiments of the utility model is shown. DETAILED DESCRIPTION
[0020] The following describes the embodiments of the present application by specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the disclosure. Although the description of the present application will be introduced in combination with the preferred embodiments, it does not mean that the features of the present application are limited to the embodiments. On the contrary, the purpose of introducing the present application in combination with the embodiments is to cover other options or modifications that can be extended based on the claims of the present application. In order to provide a deep understanding of the present application, many specific details will be included in the following description. The present application can also be implemented without using these details. In addition, in order to avoid confusion or obscure the focus of the present application, some specific details will be omitted in the description.
[0021] In the description of the present application, it should be pointed out that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, or the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0022] In addition, "up", "down", "left", "right", "top", "bottom", "horizontal", "vertical" used in the following description should be understood as the orientation shown in the paragraph and the related drawings. Such relative terms are only for the convenience of description, and they do not mean that the device described should be manufactured or operated in a particular orientation, so they should not be understood as a limitation on the present application.
[0023] It can be understood that although the terms "first", "second", "third" and the like can be used herein to describe various components, regions, layers and / or parts, these components, regions, layers and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers and / or parts. Therefore, the first component, region, layer and / or part discussed below can be called the second component, region, layer and / or part without deviating from some embodiments of the present application.
[0024] As described above, the existing device needs to close the ozone generation first, let the oxygen directly into the device to flush the pipeline and the concentration instrument, and ensure that the oxygen passes through the concentration instrument without ozone residue, and then the concentration instrument is zeroed, and the ozone generator is restarted to generate ozone. However, this operation needs to turn on and off the device many times, which not only reduces the production efficiency, increases the energy consumption, but also increases the risk of ozone leakage and accelerates the aging of the device.
[0025] In order to overcome the above-mentioned defects existing in the prior art, the utility model provides an ozone generator for completing the zero calibration of the ozone concentration analyzer under the condition of avoiding equipment downtime, thereby improving production efficiency, reducing additional energy consumption and the risk of ozone leakage, and slowing down equipment aging.
[0026] Please refer to Figure 1 , Figure 1 The connection structure schematic diagram of the ozone generator provided according to some embodiments of the utility model is shown.
[0027] As Figure 1 shown, the ozone generator comprises a discharge generation chamber C1, a first input pipeline P02, a three-way valve, an ozone concentration detector Q1, a first bypass channel and a second bypass channel.
[0028] Specifically, the first end of the first input pipeline P02 is connected with an oxygen source via a first valve V22, and the second end thereof is connected with the gas inlet end of the discharge generation chamber C1. The first end of the three-way valve is connected with the gas outlet end of the discharge generation chamber C1, the second end thereof is connected with the gas inlet end of the ozone concentration detector Q1, and the third end thereof is connected with the first end of the first bypass channel. The gas outlet end of the ozone concentration detector Q1 is connected with the output pipeline of the ozone generator. The first bypass channel is used for providing an ozone passage bypassing the ozone concentration detector Q1. The first end of the second bypass channel is connected with the oxygen source via a second valve V24, and the second end thereof is connected with the ozone concentration detector Q1, so as to provide an oxygen passage bypassing the discharge generation chamber C1.
[0029] In some embodiments, the ozone generator at least comprises a preset first mode and a second mode, wherein the first mode is an ozone output mode, and the second mode is a detector zero calibration mode.
[0030] Specifically, in the preset first mode (ozone output mode), the first valve V22 is turned on, the second valve V24 is turned off, the gas outlet end of the discharge generation chamber C1 is communicated with the ozone concentration detector Q1 via the first end and the second end of the three-way valve, so as to output the generated ozone of the ozone concentration detector Q1 via the gas outlet end thereof.
[0031] Correspondingly, in the preset second mode (detector zero calibration mode), the first valve V22 and the second valve V24 are both turned on, the oxygen source is communicated with the gas inlet end of the ozone concentration detector Q1 via the second valve V24, so as to provide part of the output oxygen of the oxygen source to the gas inlet end of the ozone concentration detector Q1 via the second bypass channel, and the gas outlet end of the discharge generation chamber C1 is communicated with the first bypass channel via the first end and the third end of the three-way valve, so as to output the generated ozone of the discharge generation chamber C1 via the second end of the first bypass channel.
[0032] In some embodiments, the ozone generator further comprises an ozone decomposer. The ozone decomposer is connected to the second end of the first bypass channel to decompose the ozone generated in the second mode.
[0033] In some embodiments, the ozone generator further comprises a fourth valve V23. The fourth valve V23 is disposed at the gas outlet end of the second end of the first bypass channel to control the on-off of the ozone in the ozone generator.
[0034] In some embodiments, the ozone generator further comprises a first filter FL13. The first filter FL13 is disposed between the gas outlet end of the discharge generation chamber C1 and the first end of the three-way valve to purify the ozone leading to the ozone concentration detector Q1.
[0035] In some embodiments, the ozone generator further comprises a back pressure valve APC and a first check valve CV23. The back pressure valve APC is disposed at the gas outlet end of the ozone concentration detector Q1 to stabilize the ozone output pressure of the output pipeline of the ozone generator. The first check valve CV23 is disposed at the gas outlet end of the ozone concentration detector Q1 to prevent the backflow of external gas through the output pipeline of the ozone generator.
[0036] In some embodiments, the ozone generator further comprises a first mass flow meter MFC3 disposed in the second bypass channel to measure the oxygen flow rate provided by the oxygen source to the ozone concentration detector Q1; and / or a second check valve CV24 disposed in the second bypass channel to prevent the backflow of external gas to the oxygen source.
[0037] In some embodiments, the ozone generator further comprises a second filter FL11 disposed at the output end of the oxygen source to purify the oxygen output by the oxygen source; and / or a second mass flow meter MFC2 disposed in the first input pipeline P02 to measure the oxygen flow rate provided by the oxygen source to the discharge generation chamber C1; and / or a third check valve CV22 disposed at the gas inlet end of the discharge generation chamber C1 to prevent the backflow of the gas in the discharge generation chamber C1 through the first input pipeline P02.
[0038] In some embodiments, the ozone generator further comprises a second input pipeline PN2 having a first end connected to the nitrogen source via a third valve V21 and a second end connected to the gas inlet end of the discharge generation chamber C1. It can be used to dilute the oxygen to improve the generation efficiency of the ozone.
[0039] In some embodiments, the ozone generator further comprises a third filter FL12, a third mass flow meter MFC1 and a fourth check valve CV21. The third filter FL12 is arranged at the output end of the nitrogen source for purifying the nitrogen output by the nitrogen source. The third mass flow meter MFC1 is arranged at the second input pipeline PN2 for measuring the nitrogen flow provided by the nitrogen source to the discharge generation chamber C1. The fourth check valve CV21 is arranged at the gas inlet end of the discharge generation chamber C1 for preventing the gas in the discharge generation chamber C1 from flowing back through the second input pipeline PN2.
[0040] In some embodiments, the ozone generator further comprises a cooling water system PCW for cooling the discharge generation chamber C1.
[0041] The device structure of the ozone generator will be described below in combination with the zero calibration method of some ozone generators. When the ozone generator is in normal operation, oxygen is introduced into the discharge generation chamber C1 by the first valve V22, the second mass flow meter MFC2 and the third check valve CV22 to be converted into ozone.
[0042] Further, when the ozone generator is in the ozone output mode, the three-way valve V27 is closed and the three-way valve V26 is opened, and the ozone enters the film deposition equipment or the ozone decomposer through the ozone concentration detector Q1.
[0043] Correspondingly, when the ozone generator needs to be calibrated, the second valve V24 is opened, the three-way valve V26 is closed and the three-way valve V27 is opened, at this time, the ozone bypasses the ozone concentration detector Q1 and directly enters the decomposer through the first bypass channel. At this time, oxygen is introduced into the ozone concentration detector Q1 through the second bypass channel to flush the ozone in the ozone concentration detector Q1.
[0044] After the ozone in the ozone concentration detector Q1 is flushed, the ozone generator starts the zero calibration action to calibrate the zero point.
[0045] Finally, after the zero calibration action is completed, the second valve V24 is closed, the three-way valve V26 is opened and the three-way valve V27 is closed to restore the ozone output mode of the machine.
[0046] In addition, please refer to Figure 2 , Figure 2 The ozone generator working process schematic diagram provided by some embodiments of the present application is shown.
[0047] As Figure 2 shown, in the equipment standby state, if the time since the last calibration exceeds 15 days, the system automatically enters the calibration purge mode and performs calibration purge for 15 minutes to record the zero value. Here, if the calibration purge is performed during the standby state of the machine, and the final value exceeds 5g / m3 If so, calibration is automatically performed. Accordingly, if the machine receives a new instruction during the calibration purge, the purge calibration is temporarily suspended to perform the new instruction, and the next cycle trigger condition is awaited.
[0048] In summary, the ozone generator provided by the utility model can be used to complete the zero calibration of the ozone concentration analyzer without stopping the equipment, thereby improving the production efficiency, reducing the risk of additional energy consumption and ozone leakage, and slowing down the aging of the equipment.
[0049] Although the above-described methods are illustrated and described as a series of acts for the sake of simplicity, it should be understood and appreciated that the methods are not limited by the order of acts, as some acts may, in accordance with one or more embodiments, occur simultaneously or in different order than shown and described herein or can occur with other acts not presented and described herein in order to convey the substance of the acts to a skilled person in this art.
[0050] The previous description of the disclosure is provided to enable any person skilled in the art to make or use the disclosure. Various modifications to the disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other variations without departing from the spirit or scope of the disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. An ozone generator characterized by, The ozone generator comprises a plurality of working modes, wherein, in a preset first mode, the first valve is turned on, the second valve is turned off, the outlet end of the discharge generation chamber is communicated with the ozone concentration detector via the first end and the second end of the three-way valve, so that the ozone generated by the ozone concentration detector is output via the outlet end of the ozone concentration detector, in a preset second mode, the first valve and the second valve are both turned on, the oxygen source is communicated with the inlet end of the ozone concentration detector via the second valve, so that part of the output oxygen of the oxygen source is provided to the inlet end of the ozone concentration detector via the second bypass channel, and the outlet end of the discharge generation chamber is communicated with the first bypass channel via the first end and the third end of the three-way valve, so that the ozone generated by the discharge generation chamber is output via the second end of the first bypass channel. Further comprising: an ozone decomposer, wherein the ozone decomposer is connected to the second end of the first bypass channel to decompose the ozone generated in the second mode. Further comprising: a first filter arranged between the outlet end of the discharge generation chamber and the first end of the three-way valve to purify the ozone flowing to the ozone concentration detector. Further comprising:
2. The ozone generator of claim 1, wherein, a back pressure valve arranged at the outlet end of the ozone concentration detector to stabilize the ozone output pressure of the output pipeline of the ozone generator; and / or a first check valve arranged at the outlet end of the ozone concentration detector to prevent the backflow of external gas via the output pipeline of the ozone generator.
3. The ozone generator of claim 1, wherein, Further comprising: a first mass flow meter arranged in the second bypass channel to measure the oxygen flow provided by the oxygen source to the ozone concentration detector; 4. The ozone generator of claim 1, wherein, and / or a second check valve arranged in the second bypass channel to prevent the backflow of external gas to the oxygen source.
5. The ozone generator of claim 1, wherein, Further comprising: a second filter arranged at the output end of the oxygen source to purify the oxygen output by the oxygen source; and / or a second mass flow meter arranged in the first input pipeline to measure the oxygen flow provided by the oxygen source to the discharge generation chamber; and / or 6. The ozone generator of claim 1, wherein, a third check valve arranged at the inlet end of the discharge generation chamber to prevent the backflow of gas in the discharge generation chamber via the first input pipeline. Further comprising: a second input pipeline, the first end of which is connected to a nitrogen source via a third valve, and the second end of which is connected to the inlet end of the discharge generation chamber. Further comprising:
7. The ozone generator of claim 1, wherein, 8. The ozone generator of claim 1, wherein, 9. The ozone generator of claim 8, wherein, a third filter arranged at an output end of the nitrogen source and configured to purify nitrogen gas output by the nitrogen source; and / or a third mass flow meter arranged at the second input pipeline and configured to measure a flow rate of the nitrogen gas provided by the nitrogen source to the discharge generation chamber; and / or a fourth one-way valve arranged at an air inlet end of the discharge generation chamber and configured to prevent backflow of gas in the discharge generation chamber through the second input pipeline.
10. The ozone generator of claim 1, wherein, Further comprising: a cooling water system configured to cool the discharge generation chamber.