Magnet layout structure in stainless steel target core
By arranging N-pole and S-pole magnetic strips in the stainless steel target core, the problem of uneven etching rate of the target material was solved, achieving uniform etching of the target surface and improving the utilization rate of the target material.
Patent Information
- Application Number
- CN202520486310.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-19
- Publication Date
- 2026-02-27
- Estimated Expiration
- 2035-03-19
AI Technical Summary
In existing stainless steel target cores, the magnetic field strength ratio between the two ends and the middle of the target material is improper, resulting in uneven etching speed and uneven overall etching profile on the target surface.
Magnetic boots are horizontally arranged inside the stainless steel target core, and N-pole and S-pole magnetic strips are set on them. The N-pole magnetic strips are located in the middle and extend along the length direction. The S-pole magnetic strips are evenly distributed on both sides and gradually approach the N-pole magnetic strips at both ends. The size and number of S-pole magnetic blocks can be arranged symmetrically or asymmetrically.
The magnetic field distribution at the target tip was improved, the over-etching phenomenon was reduced, and the utilization rate of the target material was increased.
Smart Images
Figure CN223951158U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to magnetron sputtering target core structure technical field especially relates to a magnet layout structure in stainless steel target core. BACKGROUND
[0002] The magnetron sputtering coating is the current widely coating deposition process. The principle of sputtering coating is that inert gas is bombarded to the target material surface under the action of electric field, and the molecules, atoms, ions and electrons of the target material surface are sputtered, and fly to the substrate to deposit into a film.
[0003] In the coating process, the quality requirement of the magnetron sputtering coating equipment is very high, and the magnetic field intensity distribution of the magnetron sputtering cathode is particularly important. In the coating process, the magnetic field intensity of the target core (also called magnetic rod) at both ends of the target material is not proportional to the magnetic field intensity of the middle part, which causes the etching speed of the end area of the target material to be faster than that of the middle area of the target material, so that the overall etching profile of the target material surface is uneven. SUMMARY
[0004] The utility model discloses a magnet layout structure in stainless steel target core to solve the problem that the magnets of the existing target core are uniformly distributed at both ends and the middle, causing the etching speed of the end area of the target material to be faster than that of the middle area of the target material, and making the overall etching profile of the target material surface uneven.
[0005] To solve the above technical problems, the utility model provides a magnet layout structure in stainless steel target core, including the magnetic shoe that is horizontally arranged in the target core, is arranged with N pole magnetic strip and S pole magnetic strip on the magnetic shoe;
[0006] The N pole magnetic strip is located in the middle of the magnetic shoe and extends along the length direction thereof;
[0007] The S pole magnetic strip is provided with two, and is distributed on both sides of the magnetic shoe, the middle part of the two S pole magnetic strips is distributed in parallel with the N pole magnetic strip at equal intervals, and the two ends gradually approach the N pole magnetic strip.
[0008] Preferably, the N pole magnetic strip is sequentially connected and arranged by a plurality of N pole magnetic blocks along the center line of the magnetic shoe.
[0009] Preferably, the S pole magnetic strip is sequentially connected and arranged by a plurality of S pole magnetic blocks, and the S pole magnetic block in the middle part is distributed in parallel with the N pole magnetic block at equal intervals, and the S pole magnetic block at the two ends gradually approaches the N pole magnetic block towards the center line.
[0010] Preferably, the S pole magnetic blocks at the same end of the two S pole magnetic strips are of the same size and number and are symmetrically arranged.
[0011] Preferably, the S pole magnetic blocks at the same end of the two S pole magnetic strips are of different size and number and are asymmetrically arranged.
[0012] Compared with the prior art, the utility model discloses the beneficial effects are:
[0013] The utility model discloses the magnetic field distribution of the end position of the target core is improved by using different sizes and quantities of S pole magnetic blocks in the stainless steel target core, the horizontal magnetic field intensity in the etching area caused by the traditional target core structure is weakened, the excessive etching phenomenon of the target material end position is greatly weakened, and the target material utilization is improved. BRIEF DESCRIPTION OF DRAWINGS
[0014] Figure 1 It is the structure schematic diagram of the stainless steel target core using the magnet layout structure provided by the utility model;
[0015] Figure 2 It is the schematic diagram of the magnet layout structure provided by the utility model;
[0016] Figure 3 It is the enlarged schematic diagram of the end of the magnet layout structure provided by the utility model.
[0017] In the drawing: 100, target core;1, magnetic shoe;2, N pole magnetic strip;3, S pole magnetic strip. DETAILED DESCRIPTION
[0018] The utility model will be further explained in detail below in combination with the drawings and specific embodiments. The advantages and features of the utility model will be more clear according to the following description and claims. It should be noted that the drawings all adopt very simplified form and all use non-precise proportion, only to facilitate, clearly assist the purpose of explaining the embodiment of the utility model.
[0019] In the description of the utility model, it needs to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.
[0020] In the description of the utility model, it needs to be explained that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, can be fixed connection, can also be detachable connection, or integrally connected;Can be mechanical connection, can also be electrical connection;Can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood through specific circumstances. EMBODIMENT
[0021] The utility model provides a magnet layout structure in stainless steel target core, please refer to Figure 1 And Figure 2 , including the horizontal layout in the target core 100 inside magnetic shoe 1, be equipped with N pole magnetic strip 2 and S pole magnetic strip 3 on the magnetic shoe 1, N pole magnetic strip 2 is located in the middle part of the magnetic shoe 1, and extends along its length direction, S pole magnetic strip 3 is equipped with two, distributes in the both sides of the magnetic shoe 1, and the middle part of two S pole magnetic strip 3 is equally spaced parallel distribution with N pole magnetic strip 2, and both ends gradually close to N pole magnetic strip 2.
[0022] Specifically, please refer to Figure 3 , N pole magnetic strip 2 is sequentially connected and is laid out by a plurality of N pole magnetic blocks along the midline of the magnetic shoe 1.
[0023] Further, S pole magnetic strip 3 is sequentially connected and is laid out by a plurality of S pole magnetic blocks, and the S pole magnetic block in the middle part is equally spaced parallel distribution with N pole magnetic block, and the S pole magnetic block at both ends gradually approaches N pole magnetic block towards the midline.
[0024] In an embodiment, the S pole magnetic block of the same end of the two S pole magnetic strips 3 is same in size and number, and is symmetrically laid out.
[0025] In an embodiment, the S pole magnetic block of the same end of the two S pole magnetic strips 3 is different in size and number, and is asymmetrically laid out.
[0026] The utility model uses S pole magnetic block of different size and number in stainless steel target core to improve the magnetic field distribution of target head position, reduces the horizontal magnetic field intensity in etching area caused by traditional target core structure, greatly reduces the excessive etching phenomenon of target head position, and improves target material utilization.
[0027] The above description is only the description of the preferred embodiment of the utility model, and does not limit the scope of the utility model, and any change and modification of the ordinary skill in the art according to the above disclosure are within the protection scope of claims.
Claims
1. A magnet arrangement structure in a stainless steel target core, characterized in that, It includes a magnetic boot (1) horizontally arranged inside the target core (100), and an N-pole magnetic strip (2) and an S-pole magnetic strip (3) are arranged on the magnetic boot (1). The N-pole magnetic strip (2) is located in the middle of the magnetic shoe (1) and extends along its length. The S-pole magnetic strip (3) has two parts, which are distributed on both sides of the magnetic shoe (1). The middle parts of the two S-pole magnetic strips (3) are parallel to the N-pole magnetic strip (2) at equal intervals, while the two ends gradually approach the N-pole magnetic strip (2).
2. The magnet arrangement structure in a stainless steel target core as described in claim 1, characterized in that, The N-pole magnetic strip (2) is composed of several N-pole magnetic blocks connected sequentially along the centerline of the magnetic boot (1).
3. The magnet arrangement structure in a stainless steel target core as described in claim 2, characterized in that, The S-pole magnetic strip (3) is made up of several S-pole magnetic blocks connected in sequence, and the S-pole magnetic blocks in the middle are distributed parallel to the N-pole magnetic blocks at equal intervals, while the S-pole magnetic blocks at both ends gradually move closer to the N-pole magnetic blocks in the middle line.
4. The magnet arrangement structure in a stainless steel target core as described in claim 3, characterized in that, The S-pole magnetic blocks at the same end of the two S-pole magnetic strips (3) are the same in size and number and are arranged symmetrically.
5. The magnet arrangement structure in a stainless steel target core as described in claim 3, characterized in that, The two S-pole magnetic strips (3) have different sizes and numbers of S-pole magnetic blocks at the same end, and are arranged asymmetrically.