High-temperature coating workpiece table

Abstract

The utility model discloses a high-temperature coating workpiece table which comprises a mounting flange, a driving mechanism, a gear transmission mechanism, a water-cooling slewing mechanism and a substrate frame, and the gear transmission mechanism comprises a driving gear and a driven gear which are meshed with each other; a cooling runner is arranged in the mounting flange, the mounting flange is hermetically connected with the coating cavity, the driving mechanism is arranged on the mounting flange, the output end of the driving mechanism hermetically extends into the coating cavity and is connected with the driving gear, the driven gear is nested on the outer side of the water-cooling slewing mechanism, one end of the water-cooling slewing mechanism is connected with the inner side of the mounting flange, and the other end of the water-cooling slewing mechanism is connected with the inner side of the mounting flange. The other end is connected with a substrate frame for bearing a substrate; and when the driving mechanism drives the driving gear to rotate, the driven gear drives the water-cooling slewing mechanism and the substrate frame to rotate, so that the substrate rotates in the coating cavity. The utility model has the characteristics of compact structure, convenience in disassembly and assembly, high reliability and the like, can be suitable for the temperature environment of more than 350 DEG C, and well meets the requirements of the lift-off process.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor preparation, specifically relates to a high temperature coating workpiece table. BACKGROUND

[0002] The principle of the lift-off process is to form a photoresist layer after photoetching on a substrate, then deposit metal on the pattern layer using evaporation or sputtering process, and then remove the photoresist while stripping the metal on the film clean, so as to only keep the metal of the original image on the substrate. This process is particularly useful for some materials that are difficult to etch.

[0003] In the existing lift-off process, the coating generally adopts evaporation. The evaporation coating workpiece table of the existing lift-off process is generally driven by a motor, and the substrate holder is driven to rotate by a belt or gear transmission. For a substrate holder that needs to clamp more than 25 substrates, the substrate needs to be clamped multiple times to manually control the motor to drive the substrate holder to rotate to the appropriate position for loading. This substrate clamping method is low in efficiency, and the existing evaporation workpiece table does not involve application in a temperature environment above 350℃. SUMMARY

[0004] The utility model solves the technical problem that the existing evaporation coating workpiece table is low in substrate clamping efficiency and does not involve application in a temperature environment above 350℃, and provides a high-temperature coating workpiece table which is compact in structure, convenient to operate and high in stability.

[0005] In order to solve the above technical problems, the utility model adopts the technical scheme that:

[0006] A high-temperature coating workpiece table, comprising: a mounting flange, a driving mechanism, a gear transmission mechanism, a water-cooled rotary mechanism and a substrate holder, the gear transmission mechanism comprising a driving gear and a driven gear meshing with each other; the mounting flange is internally provided with a cooling flow channel, and the mounting flange is sealingly connected with a coating cavity, the driving mechanism is arranged on the mounting flange, and the output end of the driving mechanism sealingly extends into the coating cavity and is connected with the driving gear, the driven gear is nested on the outside of the water-cooled rotary mechanism, one end of the water-cooled rotary mechanism is connected with the inside of the mounting flange, and the other end of the water-cooled rotary mechanism is connected with the substrate holder, and the substrate holder is used for carrying the substrate; when the driving mechanism drives the driving gear to rotate, the driven gear drives the water-cooled rotary mechanism and the substrate holder to rotate, so as to realize the rotation of the substrate in the coating cavity.

[0007] As a further improvement of the utility model, a film thickness detector is further included, the film thickness detector is mounted on the mounting flange, and the probe of the film thickness detector extends into the coating cavity, so as to monitor the film thickness of the substrate in real time.

[0008] As a further improvement of the utility model, the water-cooled rotary mechanism comprises a rotary magnetic fluid and a cooling water assembly; the rotary magnetic fluid is nested in the inner side of the driven gear, and the rotary magnetic fluid is connected with the mounting flange and the substrate holder at both ends respectively; the cooling water assembly is arranged in the inner side of the rotary magnetic fluid.

[0009] As a further improvement of the utility model, the rotary magnetic fluid comprises a rotating body, a non-rotating body and a bearing; the rotating body is nested in the inner side of the driven gear, and the bottom of the rotating body is provided with a connecting rod for connecting the substrate holder; the non-rotating body is nested in the inner side of the rotating body, and the bearing is arranged between the non-rotating body and the rotating body to realize the stable rotation of the rotating body driving the substrate holder; and the top of the non-rotating body is connected and fixed with the inner side of the mounting flange.

[0010] As a further improvement of the utility model, the inner side of the non-rotating body is provided with a cooling flow channel, and the both ends of the cooling flow channel are respectively provided with VCR joints to realize the in-out of the cooling water in the cooling flow channel.

[0011] As a further improvement of the utility model, the mounting flange is provided with a water inlet pipe and a backwater pipe, and the water inlet pipe and the backwater pipe are connected with the VCR joints respectively.

[0012] As a further improvement of the utility model, the substrate holder is in an umbrella-shaped structure, and a plurality of substrate clamps are distributed on the substrate holder.

[0013] As a further improvement of the utility model, the inner side of the substrate clamp is provided with a sunken platform, and the sunken platform is used for assisting the positioning of the substrate.

[0014] As a further improvement of the utility model, the driving mechanism comprises a servo motor, a speed reducer, an adapter and a magnetic fluid connected in sequence, and the output shaft of the magnetic fluid is nested with the driving gear to realize the rotation of the driving gear driven by the servo motor.

[0015] As a further improvement of the utility model, the driving mechanism further comprises a one-way clutch and a hole elastic retainer; the hole elastic retainer is used for mounting and fixing the one-way clutch in the adapter, the hole end of the one-way clutch is connected with the input shaft of the magnetic fluid, and the one-way clutch is used for limiting the one-way rotation of the magnetic fluid.

[0016] Compared with the prior art, the utility model has the advantages of:

[0017] The utility model discloses a high temperature coating workpiece platform, through with the installation flange of internal cooling runner and the sealing connection of coating cavity, and drive mechanism is set up on the installation flange, realized drive device and the drive gear connection in the coating cavity, through from the drive gear nesting in the water -cooling rotary mechanism outside, water -cooling rotary mechanism connects the inside of installation flange and substrate holder respectively, namely constitutes simple structure, convenient installation, high reliability's high temperature coating workpiece platform, and utilize water -cooling rotary body instead of conventional bearing and drive, avoided the risk of bearing failure in high temperature cavity, when drive mechanism drive drive gear rotates, from the drive gear drive water -cooling rotary mechanism and substrate holder rotation, namely realized substrate and rotates in the coating cavity, and through the cooling effect of installation flange and water -cooling rotary body, make coating workpiece platform can be applicable to 350 DEG C above temperature environment, very good satisfied the demand of lift -off technology. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is one of structure principle schematic drawing of high temperature coating workpiece platform in the utility model embodiment;

[0019] Figure 2 It is the structure principle schematic drawing two of high temperature coating workpiece platform in the utility model embodiment;

[0020] Figure 3 It is the structure principle schematic drawing of installation flange in the utility model embodiment;

[0021] Figure 4 It is the structure principle schematic drawing of drive mechanism in the utility model embodiment;

[0022] Figure 5 It is the structure principle schematic drawing of water -cooling rotary mechanism in the utility model embodiment;

[0023] Figure 6 It is the sectional view of rotary structure in the utility model embodiment;

[0024] Figure 7 It is the structure principle schematic drawing of substrate holder in the utility model embodiment;

[0025] Figure 8 It is the structure principle schematic drawing of substrate holder in the utility model embodiment;

[0026] Legend: 1, mounting flange; 2, driving mechanism; 3, gear transmission mechanism; 4, water-cooled rotary mechanism; 5, substrate holder; 6, film thickness detector; 7, protective liner; 11, handle; 12, positioning pin; 13, sealing ring; 14, first mounting hole; 15, second mounting hole; 16, water inlet pipe; 17, water return pipe; 21, servo motor; 22, speed reducer; 23, adapter; 24, one-way clutch; 25, magnetic fluid; 26, elastic retainer ring for hole; 31, driving gear; 32, driven gear; 41, rotary magnetic fluid; 42, cooling water assembly; 43, connecting rod; 411, rotating body; 412, non-rotating body; 413, bearing; 414, VCR joint; 51, substrate clamp; 52, sink. DETAILED DESCRIPTION

[0027] The utility model will be further described below in conjunction with the drawings and specific preferred embodiments of the specification, but not therefore limit the protection scope of the utility model.

[0028] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" are based on the orientation or positional relationship shown in the drawings, only for the convenience of describing the utility model and simplifying the description, and not indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the utility model.

[0029] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features, therefore, the features with "first" and "second" can explicitly or implicitly include one or more features, in the description of the utility model, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0030] Embodiment

[0031] As Figure 1 , Figure 2 and Figure 3As shown, the high-temperature coating workpiece table of the utility model, include: mounting flange 1, drive mechanism 2, gear transmission mechanism 3, water-cooling rotary mechanism 4 and substrate holder 5, gear transmission mechanism 3 include each other meshing driving gear 31 and driven gear 32.In this embodiment, driving gear 31 and driven gear 32 are all selected senior nitriding steel material, after processing, after quenching and tempering and nitriding treatment, the gear after treatment can be stably and reliably operated in high-temperature environment.

[0032] Cooling flow channel is arranged in mounting flange 1, and locating pin 12 and sealing ring 13 are arranged on the side of mounting flange 1 to realize the sealing connection between mounting flange 1 and coating cavity; drive mechanism 2 is arranged on mounting flange 1, and the output end of drive mechanism 2 is sealingly extended into the coating cavity and connected with driving gear 31, and driven gear 32 is nested outside water-cooling rotary mechanism 4, one end of water-cooling rotary mechanism 4 is connected with the inside of mounting flange 1, the other end of water-cooling rotary mechanism 4 is connected with substrate holder 5, and substrate holder 5 is used for bearing substrate.In addition, protective lining plate 7 is arranged outside gear transmission mechanism 3 and water-cooling rotary mechanism 4, and protective lining plate 7 is used for protecting gear transmission mechanism 3 and water-cooling rotary mechanism 4.When drive mechanism 2 drives driving gear 31 to rotate, driven gear 32 drives water-cooling rotary mechanism 4 and substrate holder 5 to rotate to realize the rotation of substrate in the coating cavity.

[0033] In this embodiment, mounting flange 1 with cooling flow channel inside is sealingly connected with coating cavity, and drive mechanism 2 is arranged on mounting flange 1, which realizes the connection between driving device and driving gear 31 in the coating cavity, driven gear 32 is nested outside water-cooling rotary mechanism 4, and water-cooling rotary mechanism 4 is connected with the inside of mounting flange 1 and substrate holder 5, that is, a high-temperature coating workpiece table with simple structure, convenient installation and high reliability is formed, and water-cooling rotary body 4 is used to replace the conventional bearing for transmission, which avoids the risk of bearing failure in high-temperature cavity.When drive mechanism 2 drives driving gear 31 to rotate, driven gear 32 drives water-cooling rotary mechanism 4 and substrate holder 5 to rotate, that is, the rotation of substrate in the coating cavity is realized, and through the cooling effect of mounting flange 1 and water-cooling rotary body 4, the coating workpiece table can be applied to a temperature environment above 350 DEG C, which well meets the demand of lift-off process.

[0034] As shown in the figure, Figure 4 Drive mechanism 2 includes servo motor 21, speed reducer 22, adapter 23 and magnetic fluid 25 connected in sequence.Magnetic fluid 25 is nestedly connected with driving gear 31 to realize the rotation of driving gear 31 driven by servo motor 21. Figure 3 And Figure 4As shown, the second mounting hole 15 is arranged on the mounting flange 1, and the magnetic fluid 25 is sealingly connected with the second mounting hole 15, that is, the driving mechanism 2 is mounted and fixed on the mounting flange 1, and the output shaft of the magnetic fluid 25 extends into the coating cavity and is connected with the driving gear 31. In the embodiment, the handle 11 is further arranged on the mounting flange 1, so as to facilitate the overall mounting and dismounting of the workpiece table component.

[0035] Further, the driving mechanism 2 further comprises a one-way clutch 24 and an elastic blocking ring 26 for hole. The elastic blocking ring 26 is arranged in the adapter 23 to mount and fix the one-way clutch 24, the hole end of the one-way clutch 24 is connected with the input shaft of the magnetic fluid 25, and the one-way clutch 24 drives the magnetic fluid 25 to rotate in one direction, so as to realize the smooth rotation of the substrate holder 5 in one direction.

[0036] In the embodiment, the magnetic fluid 25 can be a magnetic fluid with a water cooling structure, so as to prevent the heat inside the coating cavity from being transmitted to the servo motor 21, and to ensure the smooth operation of the servo motor 21.

[0037] As shown in Figure 1 and Figure 2 , the film thickness detector 6 is further arranged on the coating workpiece table. As shown in Figure 3 , the first mounting hole 14 is arranged in the middle of the mounting flange 1, the film thickness detector 6 is mounted and fixed on the first mounting hole 14, and the probe of the film thickness detector 6 extends into the coating cavity, so as to accurately measure the actual film thickness of the substrate and will not be affected by the rotating motion of the substrate holder 5. Further, the probe of the film thickness detector 6 has a water cooling structure, so as to ensure that it can be applied in a high temperature cavity environment.

[0038] As shown in Figure 5 , the water-cooled rotary mechanism 4 comprises a rotary magnetic fluid 41 and a cooling water assembly 42. The rotary magnetic fluid 41 is nested in the inside of the driven gear 32, and the two ends of the rotary magnetic fluid 41 are connected with the mounting flange 1 and the substrate holder 5 respectively. The cooling water assembly 42 is arranged in the inside of the rotary magnetic fluid 41, so as to realize the overall cooling of the water-cooled rotary mechanism 4.

[0039] As shown in Figure 6 , the rotary magnetic fluid 41 comprises a rotating body 411, a non-rotating body 412 and a bearing 413. The rotating body 411 is nested in the inside of the driven gear 32, and the bottom of the rotating body 411 is provided with a connecting rod 43 for connecting the substrate holder 5. The non-rotating body 412 is nested in the inside of the rotating body 411, and the bearing 413 is arranged between the non-rotating body 412 and the rotating body 411, so as to realize the smooth rotation of the substrate holder 5 driven by the rotating body 411. The top of the non-rotating body 412 is connected and fixed with the inside of the mounting flange 1, so as to realize the mounting and fixing of the rotary magnetic fluid 41. Further, after the probe of the film thickness detector 6 penetrates through the center through hole of the non-rotating body 412, it extends into the coating cavity, and will not affect the motion of the rotating body 411.

[0040] In the embodiment, the rotating body 411 and the non-rotating body 412 are both made of stainless steel, the rotating magnetic fluid 41 does not involve vacuum sealing, the bearing 413 is directly built-in inside the rotating magnetic fluid 41, the transmission structure is simplified on the basis of realizing the function of transmitting the rotating motion, and the water-cooling rotating mechanism 4 can be integrally manufactured without additional assembly.

[0041] As shown in Figure 6 , the non-rotating body 412 is provided with a cooling flow channel inside, and VCR joints 414 are welded at both ends of the cooling flow channel to realize the inlet and outlet of cooling water in the cooling flow channel. Figure 3 As shown in , the water inlet pipe 16 and the water return pipe 17 are connected with the VCR joints 414, respectively, and the cooling water enters and exits the cooling flow channel of the non-rotating body 412, realizes the cooling and temperature reduction of the non-rotating body 412 and the rotating body 411, and further improves the stability and reliability of the coating workpiece table used in the high-temperature cavity environment, and ensures that the coating workpiece table is applied in a wider environment.

[0042] Figure 7 As shown in , the substrate holder 5 is in an umbrella structure, and a plurality of substrate clamps 51 are distributed on the substrate holder 5.

[0043] Figure 8 As shown in , the substrate clamps 51 are provided with 4-inch or 6-inch sunken platforms 52 inside to assist in positioning the substrate, and the substrate does not need to be pressed and fixed when clamped, and the substrate will not slip when the substrate holder 5 moves, thereby improving the clamping efficiency of the substrate.

[0044] The above is only the preferred embodiment of the present application, and the protection scope of the present application is not limited to the above-mentioned embodiments, and any technical solution falling within the idea of the present application belongs to the protection scope of the present application. It should be noted that for ordinary skilled in the art, some improvements and decorations without departing from the principle of the present application are also considered as the protection scope of the present application.

Claims

1. A high-temperature coating workpiece stage, characterized in that, include: The mounting flange (1), drive mechanism (2), gear transmission mechanism (3), water-cooled rotary mechanism (4), and substrate holder (5) are configured. The gear transmission mechanism (3) includes a driving gear (31) and a driven gear (32) that mesh with each other. The mounting flange (1) has a cooling channel inside and is sealed to the coating cavity. The drive mechanism (2) is mounted on the mounting flange (1), and the output end of the drive mechanism (2) extends sealed into the coating cavity and meshes with the driving gear. The driven gear (32) is nested on the outside of the water-cooled rotary mechanism (4). One end of the water-cooled rotary mechanism (4) is connected to the inside of the mounting flange (1), and the other end of the water-cooled rotary mechanism (4) is connected to the substrate holder (5). The substrate holder (5) is used to support the substrate. When the driving mechanism (2) drives the driving gear (31) to rotate, the driven gear (32) drives the water-cooled rotary mechanism (4) and the substrate holder (5) to rotate, so as to realize the rotation of the substrate in the coating cavity.

2. The high-temperature coating workpiece stage according to claim 1, characterized in that, It also includes a film thickness probe (6), which is mounted on the mounting flange (1) and the probe of the film thickness probe (6) extends into the coating cavity for real-time monitoring of the film thickness of the substrate.

3. The high-temperature coating workpiece stage according to claim 2, characterized in that, The water-cooled rotary mechanism (4) includes a rotary magnetic fluid (41) and a cooling water assembly (42); the rotary magnetic fluid (41) is nested inside the driven gear (32), and the two ends of the rotary magnetic fluid (41) are respectively connected to the mounting flange (1) and the substrate frame (5); the cooling water assembly (42) is arranged inside the rotary magnetic fluid (41).

4. The high-temperature coating workpiece stage according to claim 3, characterized in that, The rotating magnetofluid (41) includes a rotating body (411), a non-rotating body (412), and a bearing (413). The rotating body (411) is nested inside the driven gear (32), and the bottom of the rotating body (411) is provided with a connecting rod (43) for connecting the substrate holder (5). The non-rotating body (412) is nested inside the rotating body (411), and a bearing (413) is provided between the non-rotating body (412) and the rotating body (411) to realize that the rotating body (411) drives the substrate holder (5) to rotate smoothly. The top of the non-rotating body (412) is connected and fixed to the inside of the mounting flange (1).

5. The high-temperature coating workpiece stage according to claim 4, characterized in that, The non-rotating body (412) has a cooling channel on its inner side, and VCR connectors (414) are provided at both ends of the cooling channel to allow cooling water to enter and exit the cooling channel.

6. The high-temperature coating workpiece stage according to claim 5, characterized in that, The mounting flange (1) is provided with an inlet pipe (16) and a return pipe (17), which are respectively connected to the VCR connector (414).

7. The high-temperature coating workpiece stage according to any one of claims 1 to 6, characterized in that, The substrate holder (5) has an umbrella-shaped structure, and multiple substrate clamps (51) are distributed on the substrate holder (5).

8. The high-temperature coating workpiece stage according to claim 7, characterized in that, The substrate clamp (51) has a recessed platform (52) on its inner side, which is used to assist in the positioning of the substrate.

9. The high-temperature coating workpiece stage according to any one of claims 1 to 6, characterized in that, The drive mechanism (2) includes a servo motor (21), a reducer (22), an adapter (23) and a magnetorheological fluid (25) connected in sequence. The output shaft of the magnetorheological fluid (25) is nested with the drive gear (31) to enable the servo motor (21) to drive the drive gear (31) to rotate.

10. The high-temperature coating workpiece stage according to claim 9, characterized in that, The drive mechanism (2) further includes a one-way clutch (24) and a retaining ring (26) for the bore; the retaining ring (26) for the bore fixes the one-way clutch (24) in the adapter (23), the bore end of the one-way clutch (24) is connected to the input shaft of the magnetic fluid (25), and the one-way clutch (24) is used to restrict the magnetic fluid (25) to rotate in one direction.

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