Vacuum angle valve and wafer coating equipment

Abstract

The embodiment of the utility model provides a vacuum angle valve and wafer coating equipment. The vacuum angle valve comprises a valve body, a first pressure relief unit and a second pressure relief unit, a first channel and a second channel which communicate with each other are formed in the valve body. The first channel is provided with an inlet-outlet close to the second channel; the first pressure relief unit is arranged at the inlet-outlet; the first pressure relief unit is configured to open the inlet / outlet or close the inlet / outlet; the first pressure relief unit is provided with a pressure relief channel, and the first channel, the pressure relief channel and the second channel can communicate in sequence; the inner diameter of the pressure relief channel is smaller than that of the inlet / outlet; the second pressure relief unit is embedded in the first pressure relief unit, and the second pressure relief unit is configured to open or close the pressure relief channel; when the first pressure relief unit closes the inlet and outlet, the second pressure relief unit is configured to open the pressure relief channel so as to sequentially communicate the first channel, the pressure relief channel and the second channel; or the pressure relief channel is closed to be matched with the first pressure relief unit to close the inlet and outlet.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum valves, and in particular to a vacuum angle valve and a wafer coating equipment. BACKGROUND

[0002] The vacuum angle valve is a control valve in a pipeline fluid conveying system. The main functions of the vacuum angle valve include controlling the on-off of the airflow of the vacuum system, maintaining the sealing of the vacuum system, and adjusting the vacuum degree.

[0003] In the related art, a corresponding coating equipment is used in the thin film deposition process of a wafer. The vacuum angle valve is used to connect the vacuum pump and the coating equipment to control the on-off and flow of the gas entering the coating equipment.

[0004] However, when the vacuum angle valve is used in a condition of large flow or large pressure difference, the rapid change of the pressure at the moment when the valve of the vacuum angle valve is opened will generate turbulence and may cause sudden condensation effect, affecting the wafer coating quality. CONTENT OF THE INVENTION

[0005] Embodiments of the present application provide a vacuum angle valve and a wafer coating equipment to solve the technical problem that, in the related art, when the vacuum angle valve is used in a condition of large flow or large pressure difference, the rapid change of the pressure at the moment when the valve of the vacuum angle valve is opened will generate turbulence and may cause sudden condensation effect, affecting the wafer coating quality.

[0006] In a first aspect, embodiments of the present application provide a vacuum angle valve, comprising a valve body, a first pressure relief unit and a second pressure relief unit;

[0007] The valve body forms a first channel and a second channel that are in communication with each other; the first channel has an inlet and an outlet close to the second channel;

[0008] The first pressure relief unit is arranged at the inlet and outlet; the first pressure relief unit is configured to open the inlet and outlet, or close the inlet and outlet; the first pressure relief unit is provided with a pressure relief channel, and the first channel, the pressure relief channel and the second channel can be sequentially communicated; the inner diameter of the pressure relief channel is smaller than the inner diameter of the inlet and outlet, and the second pressure relief unit is arranged in the pressure relief channel;

[0009] The second pressure relief unit is embedded in the first pressure relief unit, and the second pressure relief unit is configured to open or close the pressure relief channel;

[0010] When the first pressure relief unit closes the inlet and outlet, the second pressure relief unit is configured to open the pressure relief channel to sequentially communicate the first channel, the pressure relief channel and the second channel; or, the second pressure relief unit is configured to close the pressure relief channel to cooperate with the first pressure relief unit to close the inlet and outlet.

[0011] In a feasible implementation manner, the first pressure relief unit comprises a first valve plate and a first movable assembly arranged integrally.

[0012] One side of the first valve plate is arranged at the inlet and outlet, the other side of the first valve plate is connected with one end of the first movable assembly, the other end of the first movable assembly extends away from the direction of the inlet and outlet, and the first movable assembly is configured to drive the first valve plate to move towards or away from the direction of the inlet and outlet; the first movable assembly is provided with a movable cavity, and the movable cavity extends away from the direction of the inlet and outlet through the pressure relief channel;

[0013] The second pressure relief unit comprises a second valve plate and a second movable assembly, one side of the second valve plate is arranged at the pressure relief channel, the other side of the second valve plate is arranged at one end of the second movable assembly, the other end of the second movable assembly extends along the movable cavity, and the second movable assembly is configured to drive the second valve plate to move towards or away from the direction of the pressure relief channel.

[0014] In a feasible implementation, the vacuum angle valve further comprises a valve seat, and the valve seat is formed with a first guide channel;

[0015] The first movable assembly comprises a first valve rod and a first elastic component; one end of the first valve rod is connected with the first valve plate, and the other end of the first valve rod extends towards the first guide channel;

[0016] One end of the first elastic component is arranged at the valve seat, and the other end of the first elastic component is arranged at the first valve plate.

[0017] In a feasible implementation, the first movable assembly further comprises a first spring, and the first elastic component is a flexible bellows;

[0018] The first spring is arranged around the outer sidewall of the first valve rod, the flexible bellows is arranged outside the first spring to seal the first valve rod, one end of the flexible bellows is fixed to the valve seat through a flange, and the other end of the flexible bellows is arranged at the first valve plate; wherein the flexible bellows, the flange, the first valve plate and the first valve rod are integrally arranged.

[0019] In a feasible implementation, the second movable assembly comprises a second valve rod and a second elastic component;

[0020] The movable cavity comprises a telescopic cavity and a second guide channel which are sequentially communicated, one end of the second valve rod is connected with the second valve plate, and the other end of the second valve rod extends towards the second guide channel through the telescopic cavity;

[0021] The inner diameter of the telescopic cavity is greater than the inner diameter of the second guide channel, the second elastic component is arranged in the telescopic cavity, one end of the second elastic component is arranged at the end wall of the telescopic cavity close to the second guide channel, the other end of the second elastic component is arranged at the second valve plate, and the second elastic component is arranged around the outer sidewall of the second valve rod.

[0022] In a feasible implementation, the valve seat is further formed with a first piston cavity which is in communication with the first guide channel;

[0023] The first pressure relief unit further comprises a first piston which is adapted to the first piston cavity, the first piston is arranged in the first piston cavity, and the other end of the first valve rod is connected to the first piston through the first guide channel; and the first piston and the first piston cavity form a first inflation space which is communicated with the first inflation channel;

[0024] The valve seat is further provided with a first inflation port and a first inflation channel, and the first inflation port is communicated through the first guide channel and the first inflation space.

[0025] In a feasible implementation, the first piston is formed with a second piston cavity;

[0026] The second pressure relief unit comprises a second piston which is adapted to the second piston cavity, the second piston is arranged in the second piston cavity, and the other end of the second valve rod is connected to the second piston through the second guide channel; and the second piston and the second piston cavity form a second inflation space which is communicated with the second guide channel;

[0027] The valve seat is further provided with a second inflation port and a second inflation channel, and the second inflation port is communicated through the second inflation channel and the second inflation space.

[0028] In a feasible implementation, the second inflation channel comprises a channel one, a through groove, a channel two and a channel three; the valve seat is provided with the channel one, and the valve seat is further provided with the through groove which is communicated with the first guide channel;

[0029] One end of the channel one is communicated with the first inflation port, and the other end of the channel one is communicated with the through groove;

[0030] The first valve rod is provided with the channel two which is communicated with the through groove;

[0031] The first valve rod is provided with the channel three which is communicated with the through groove, and the channel three is communicated with the channel two and the second piston cavity.

[0032] In a feasible implementation, the through groove is provided with a first sealing ring and a second sealing ring at two ends respectively, the first sealing ring and the second sealing ring are abutted with the first valve rod, and the first sealing ring is located between the through groove and the first piston cavity;

[0033] The channel three is provided with a third sealing ring, and the channel two is located between the third sealing ring and the second piston cavity.

[0034] In a feasible implementation, the vacuum angle valve further comprises a top cover, and the valve body, the valve seat and the top cover are sequentially fixedly connected;

[0035] The vacuum angle valve comprises an adjusting knob, one end of the adjusting knob is sequentially penetrated through the top cover and the first piston and extended into the second piston cavity, and the adjusting knob can be extended and retracted along the extension direction of the first valve rod by rotating the adjusting knob, so as to adjust the opening degree of the pressure relief channel.

[0036] In an implementation, the first pressure relief unit further comprises a third valve stem;

[0037] The first valve plate is formed with a mounting hole which is adapted to the third valve plate and has a diameter greater than or equal to the third valve plate;

[0038] The pressure relief passage comprises a first pressure relief passage and a second pressure relief passage, the first pressure relief passage is arranged in the third valve plate, the second pressure relief passage is arranged in the first valve plate, the first pressure relief passage is connected with the first passage and the second pressure relief passage, and the second pressure relief passage is connected with the first pressure relief passage and the second passage;

[0039] The second valve plate is arranged at the connection port of the first pressure relief passage and the second pressure relief passage.

[0040] In an implementation, the valve body is provided with a purge passage, and the gas outlet of the purge passage is arranged towards the first valve plate.

[0041] In a second aspect, the embodiments of the present application further provide a wafer coating device, the wafer coating device comprising the vacuum angle valve according to any one of the technical solutions in the first aspect, and the wafer coating device further comprising a coating device and a vacuum pump;

[0042] When the first passage is for gas inlet and the second passage is for gas outlet, the first passage is connected with the coating device, and the second passage is connected with the vacuum pump;

[0043] When the second passage is for gas inlet and the first passage is for gas outlet, the first passage is connected with the vacuum pump, and the second passage is connected with the coating device.

[0044] In a first aspect, the embodiments of the present application provide a vacuum angle valve. The embodiments of the present application set the pressure relief passage in the first pressure relief unit, and set the second pressure relief unit in the pressure relief passage. When the pressure difference between the vacuum pump and the coating device is large, the second pressure relief unit opens the pressure relief passage, and the gas flows out through the first passage, the pressure relief passage and the second passage in sequence (or the gas flows out through the second passage, the pressure relief passage and the first passage in sequence). Since the inner diameter of the pressure relief passage is smaller than the inner diameter of the inlet and outlet, the pressure between the first passage and the second passage can be slowly relieved through the pressure relief passage, so as to avoid the turbulence or condensation effect caused by the rapid change of the pressure in the vacuum angle valve. When the pressure difference between the vacuum pump and the coating device is reduced to a suitable value (i.e. the pressure difference between the first passage and the second passage is reduced to a suitable value), the first pressure relief unit is opened to relieve the pressure, so as to effectively avoid the rapid change of the pressure. Furthermore, the second pressure relief unit is embedded in the first pressure relief unit, so as to make full use of the limited space of the vacuum angle valve, reduce the occupied space of the vacuum angle valve, improve the versatility of the vacuum angle valve, further improve the product performance of the vacuum angle valve, reduce the use of materials and processes, and reduce the production cost. Through the arrangement of the present application, the rapid change of the pressure at both ends (i.e. the first passage and the second passage) of the vacuum angle valve can be effectively avoided, the gas flow at both ends (i.e. the first passage and the second passage) of the vacuum angle valve is relatively stable, the wafer coating quality is ensured, and a vacuum angle valve with high integration is provided.

[0045] In a second aspect, the embodiments of the present application also provide a wafer coating device, which adopts the vacuum angle valve in any of the above technical solutions, and has all the beneficial effects of the vacuum angle valve in any of the above technical solutions, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0046] The drawings described herein are used to provide further understanding of the present application, and form a part of the present application. The schematic embodiments of the present application and the descriptions thereof are used to explain the present application, and do not constitute an improper limitation on the present application. In the drawings:

[0047] Figure 1 FIG. 1 is a structural schematic diagram of a vacuum angle valve according to an embodiment of the present application;

[0048] Figure 2 FIG. 2 is a sectional view of FIG. 1, which shows that the first pressure relief unit and the second pressure relief unit cooperate to close the first passage; Figure 1

[0049] Figure 3 FIG. 4 is a sectional view of FIG. 3, which shows the process state of the opening of the pressure relief passage by the second valve plate; Figure 1

[0050] Figure 4 FIG. 5 is a sectional view of FIG. 4, which shows the process state of the opening of the pressure relief passage by the first pressure relief unit; and​​Figure 1 is a sectional view of the first valve plate opening the inlet and outlet of the first channel;

[0051] Figure 5 is Figure 2 is a structural schematic view of the first valve plate, the first valve rod and the elastic bellow being integrally arranged in the first valve plate;

[0052] Figure 6 is a structural sectional view of a vacuum angle valve provided by another embodiment of the present application.

[0053] Explanation of reference signs:

[0054] 100 - valve body; 200 - first pressure relief unit; 300 - second pressure relief unit; 400 - valve seat; 500 - adjusting knob; 600 - purge channel; 700 - top cover;

[0055] 110 - first channel; 120 - second channel;

[0056] 210 - first valve plate; 211 - second pressure relief channel; 212 - third valve plate; 212a - first pressure relief channel; 220 - first movable assembly; 221 - first valve rod; 221a - telescopic cavity; 221b - second guide channel; 222 - first spring; 223 - elastic bellow; 224 - second exhaust channel; 230 - first piston; 231 - second piston cavity; 240 - flange;

[0057] 310 - second valve plate; 320 - second movable assembly; 321 - second valve rod; 322 - second spring; 330 - second piston;

[0058] 410 - first piston cavity; 420 - first inflation port; 430 - first inflation channel; 440 - second inflation port; 451 - channel one; 452 - through groove; 453 - channel two; 454 - channel three; 460 - first exhaust channel;

[0059] 510 - third spring;

[0060] 810 - first sealing ring; 820 - second sealing ring; 830 - third sealing ring. DETAILED DESCRIPTION

[0061] In order to make the person skilled in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by the person skilled in the art without creative labor should belong to the protection scope of the present application.

[0062] It should be noted that in the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced according to other embodiments that do not require some of the specific details described below, and the scope of the present application is not limited to the specific details described below.

[0063] In the description of the present application, it should be understood that the terms "center", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In the present application, unless otherwise specifically defined and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium.

[0064] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be interpreted broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. However, it is noted that direct connection means that the connection between the two main bodies does not form a connection relationship through an excessive structure, but is connected only through the connection structure to form a whole. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0065] In the present application, the description such as "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second" can explicitly or implicitly include at least one of the features.

[0066] The vacuum angle valve is a control valve in a pipeline fluid conveying system. The main functions of the vacuum angle valve include controlling the on-off of the air flow of the vacuum system, maintaining the sealing of the vacuum system, and adjusting the vacuum degree.

[0067] In the related art, a corresponding coating equipment needs to be used in the thin film deposition process of the wafer, and the vacuum angle valve is used to connect the vacuum pump and the coating equipment to control the on-off and flow of the gas entering the coating equipment.

[0068] However, when the vacuum angle valve is in a use condition of large flow or large pressure difference, the rapid change of pressure at the moment of opening of the valve of the vacuum angle valve will produce turbulent flow and may cause sudden condensation effect, affecting the wafer coating quality.

[0069] Therefore, the embodiments of the present application provide a vacuum angle valve and a wafer coating equipment to solve the technical problem in the related art that when the vacuum angle valve is in a use condition of large flow or large pressure difference, the rapid change of pressure at the moment of opening of the valve of the vacuum angle valve will produce turbulent flow and may cause sudden condensation effect, affecting the wafer coating quality.

[0070] Figure 1 is a structural schematic diagram of a vacuum angle valve provided by an embodiment of the present application; Figure 2 is Figure 1 is a sectional view of Figure 3 , in which the first pressure relief unit and the second pressure relief unit cooperate to close the first channel are shown; Figure 1 is a sectional view of Figure 4 , in which the process state of the second valve plate opening the pressure relief channel is shown; Figure 1 is a sectional view of , in which the inlet and outlet of the first channel opened by the first valve plate are shown.

[0071] In a first aspect, the embodiments of the present application provide a vacuum angle valve, referring to Figures 1 to 4 , comprising a valve body 100, a first pressure relief unit 200 and a second pressure relief unit 300;

[0072] The valve body 100 is formed with a first channel 110 and a second channel 120 which are in communication with each other; the first pressure relief unit 200 is arranged at the inlet and outlet of the first channel 110; the first pressure relief unit 200 is configured to open or close the inlet and outlet; the first pressure relief unit 200 is provided with a pressure relief channel, and the first channel 110, the pressure relief channel and the second channel 120 can be sequentially communicated; the inner diameter of the pressure relief channel is smaller than the inner diameter of the inlet and outlet; the second pressure relief unit 300 is embedded in the first pressure relief unit 200, and the second pressure relief unit 300 is configured to open or close the pressure relief channel; when the first pressure relief unit 200 closes the inlet and outlet, the second pressure relief unit 300 is configured to open the pressure relief channel to sequentially communicate the first channel 110, the pressure relief channel and the second channel 120 (refer to Figure 3 ); or, the pressure relief channel is closed to cooperate with the first pressure relief unit 200 to close the inlet and outlet (refer to Figure 2 ).

[0073] For example, the first pressure relief unit 200 can include a first sealing plate and a first rotating member (not shown), the first sealing plate and the inlet and outlet of the first channel 110 are adapted to each other, the first rotating member passes through the first sealing plate from outside the valve body 100 to rotate the first sealing plate to be arranged at the inlet and outlet of the first channel 110, and the first sealing plate can be rotated by the first rotating member. When the first rotating member is in the first position, the first sealing plate can open the inlet and outlet of the first channel 110, and when the first rotating member is in the second position, the first sealing plate can close the inlet and outlet of the first channel 110. The second pressure relief unit 300 can include a second sealing plate and a second rotating member (not shown), the first sealing plate is provided with a pressure relief channel, the second sealing plate and the inlet and outlet of the pressure relief channel are adapted to each other, the second rotating member passes through the first sealing plate and the second sealing plate from outside the valve body 100 to rotate the second sealing plate to be arranged at the inlet and outlet of the pressure relief channel, and when the second rotating member is in the third position, the second sealing plate opens the inlet and outlet of the pressure relief channel, and when the second rotating member is in the fourth position, the second sealing plate closes the inlet and outlet of the pressure relief channel.

[0074] In actual use, the first channel 110 is connected with the coating device, the second channel 120 is connected with the vacuum pump, in the initial state, the first pressure relief unit 200 closes the inlet and outlet of the first channel 110, and the second pressure relief unit 300 closes the pressure relief channel, that is, the vacuum angle valve is in the cut-off state. When the vacuum pump is opened to extract the gas in the second channel 120, the pressure in the second channel 120 rapidly decreases, and then the pressure difference between the second channel 120 and the first channel 110 rapidly increases. At this time, the second pressure relief unit 300 opens the pressure relief channel, and the second channel 120, the pressure relief channel, the first channel 110 and the coating device are sequentially connected to extract the gas in the coating device by the vacuum pump for pressure relief. When the pressure difference between the first channel 110 and the second channel 120 decreases to a suitable difference, the first pressure relief unit 200 opens the inlet and outlet of the first channel 110, so that the vacuum pump extracts the gas in the coating device through the second channel 120 and the inlet and outlet of the first channel 110 with a larger inner diameter. It should be noted that the second channel 120 can be connected with the coating device, and the first channel 110 can be connected with the vacuum pump, and the working process of the vacuum angle valve is consistent with the working process of the first channel 110 and the coating device connected with the second channel 120 and the vacuum pump, which will not be described in detail here.

[0075] From the above description, it can be seen that the present scheme achieves the following technical effects:

[0076] In the first aspect, the embodiments of the present application provide a vacuum angle valve. The embodiments of the present application set the pressure relief passage in the first pressure relief unit 200, and set the second pressure relief unit 300 in the pressure relief passage. When the pressure difference between the vacuum pump and the coating device is large, the second pressure relief unit 300 opens the pressure relief passage, and the gas flows out through the first passage 110, the pressure relief passage and the second passage 120 in turn (or the gas flows out through the second passage 120, the pressure relief passage and the first passage 110 in turn). Since the inner diameter of the pressure relief passage is smaller than the inner diameter of the inlet and outlet, the pressure between the first passage 110 and the second passage 120 can be slowly relieved through the pressure relief passage, so as to avoid the turbulence or condensation effect caused by the rapid change of the pressure in the vacuum angle valve. When the pressure difference between the vacuum pump and the coating device is reduced to a suitable value (i.e. the pressure difference between the first passage 110 and the second passage 120 is reduced to a suitable value), the first pressure relief unit 200 is opened to relieve the pressure, so as to effectively avoid the rapid change of the pressure. Further, the second pressure relief unit 300 is embedded in the first pressure relief unit 200, so as to make full use of the limited space of the vacuum angle valve, reduce the occupied space of the vacuum angle valve as a whole, improve the versatility of the vacuum angle valve, further improve the product performance of the vacuum angle valve, reduce the use of materials, and reduce the production cost. Through the arrangement of the present application, the rapid change of the pressure at both ends of the vacuum angle valve (i.e. the first passage 110 and the second passage 120) can be effectively avoided, the gas flow in the vacuum angle valve (i.e. the first passage 110 and the second passage 120) is relatively stable, the wafer coating quality is ensured, and a vacuum angle valve with high integration is provided.

[0077] In some examples, the first pressure relief unit 200 includes a first valve plate 210 and a first movable assembly 220 arranged integrally.

[0078] One side of the first valve plate 210 is arranged at the inlet and outlet of the first passage 110, the other side of the first valve plate 210 is arranged integrally with the first movable assembly 220, the other end of the first movable assembly 220 extends away from the direction of the inlet and outlet of the first passage 110, and the first movable assembly 220 is configured to drive the first valve plate 210 to move towards or away from the direction of the inlet and outlet of the first passage 110. The first movable assembly 220 is provided with a movable cavity, and the movable cavity extends away from the direction of the inlet and outlet of the first passage 110.

[0079] The second pressure relief unit 300 includes a second valve plate 310 and a second movable assembly 320. One side of the second valve plate 310 is arranged in the pressure relief passage, the other side of the second valve plate 310 is arranged integrally with one end of the second movable assembly 320, the other end of the second movable assembly 320 extends along the movable cavity, and the second movable assembly 320 is configured to drive the second valve plate 310 to move towards or away from the direction of the pressure relief passage.

[0080] Exemplarily, the first valve plate 210 and the first movable assembly 220 can be integrally formed, or can be separately formed, and the first valve plate 210 is fixed to the first movable assembly 220. Of course, the second valve plate 310 and the second movable assembly 320 can be integrally formed, or can be separately formed.

[0081] For example, the extension direction of the movable cavity and at least part of the pressure relief channel are coaxially arranged, so that the second valve plate 310 can open or close the pressure relief channel.

[0082] The embodiments of the present application can drive the first valve plate 210 to move towards the direction close to the inlet and outlet of the first channel 110 by the first movable assembly 220, so as to abut against the inlet and outlet to close the inlet and outlet, or drive the first valve plate 210 to move away from the inlet and outlet of the first channel 110 by the first movable assembly 220, so as to move away from the inlet and outlet to open the inlet and outlet. Further, the embodiments of the present application can integrate the second movable assembly 320 in the movable cavity to move, and then drive the second valve plate 310 to move towards the direction close to the pressure relief channel to close the pressure relief channel, or drive the second valve plate 310 to move away from the direction close to the pressure relief channel to open the pressure relief channel for pressure relief. Further, the embodiments of the present application integrate the first pressure relief unit 200 and the second pressure relief unit 300 by moving the second movable assembly 320 in the movable cavity formed by the first movable assembly 220, so as to fully utilize the limited space of the vacuum angle valve, reduce the occupied space of the vacuum angle valve, improve the versatility of the vacuum angle valve, further improve the product performance of the vacuum angle valve, reduce the use of materials, and reduce the production cost.

[0083] Figure 5 is Figure 2 The structure schematic view of the first valve plate, the first valve rod and the elastic bellows.

[0084] In some other examples, referring to Figure 5 The vacuum angle valve further includes a valve seat 400, and the valve seat 400 is formed with a first guide channel;

[0085] The first movable assembly 220 includes a first valve rod 221 and a first elastic component; one end of the first valve rod 221 is integrally arranged with the first valve plate 210, and the other end of the first valve rod 221 extends towards the first guide channel;

[0086] One end of the first elastic component is fixed to the valve seat 400, and the other end of the first elastic component is arranged on the first valve plate 210.

[0087] It should be noted that the first elastic component can adopt an elastic bellows 223.

[0088] In the embodiment of the present application, the first valve rod 221 and the first valve plate 210 are integrally arranged, and the first elastic component is integrally arranged on the first valve plate 210, so that the first valve rod 221, the first valve plate 210 and the first elastic component can be integrally arranged, which facilitates the assembly of the structure and improves the air tightness of the structure.

[0089] For example, the first movable assembly further comprises a first spring 222, and the first elastic component is an elastic bellows 223.

[0090] The first spring 222 is arranged around the outer side wall of the first valve rod 221, and the elastic bellows 223 is arranged outside the first spring 222 to seal the first valve rod 221, one end of the elastic bellows 223 is fixed to the valve seat 400 through a flange 240, and the other end of the elastic bellows 223 is arranged on the first valve plate 210; wherein the elastic bellows 223, the flange 240, the first valve plate 210 and the first valve rod 221 are integrally arranged.

[0091] For example, one end of the first spring 222 abuts against the first valve plate 210, and the other end of the first spring 222 abuts against the valve seat 400.

[0092] For another example, the inner cavity of the elastic bellows 223 communicates with the first exhaust passage 460, the first exhaust passage 460 communicates with the atmosphere, and when the elastic bellows 223 is compressed, the gas in the elastic bellows 223 is discharged to the atmosphere through the first exhaust passage 460. Wherein the first exhaust passage 460 is arranged on the valve seat 400.

[0093] It should be noted that the first spring 222 is always in a compressed state.

[0094] In the embodiment of the present application, when the first valve rod 221 drives the first valve plate 210 to be away from the inlet and outlet of the first passage 110, the first spring 222 is further compressed, and when the first valve plate 210 needs to be restored to the state of closing the inlet and outlet of the first passage 110, the first valve plate 210 can drive the first valve rod 221 to move towards the first passage 110 under the action of the elasticity of the first spring 222. In the embodiment of the present application, the arrangement of the elastic bellows 223 not only plays a sealing protection role for the first pressure relief unit 200, but also assists the first spring 222 to drive the first movable assembly 220.

[0095] For example, the second movable assembly 320 comprises a second valve rod 321 and a second elastic component.

[0096] The movable cavity comprises a telescopic cavity 221a and a second guide channel 221b connected in sequence, one end of a second valve rod 321 is connected with the second valve plate 310, and the other end of the second valve rod 321 extends to the second guide channel 221b through the telescopic cavity 221a;

[0097] The inner diameter of the telescopic cavity 221a is greater than that of the second guide channel 221b, a second elastic component is arranged in the telescopic cavity 221a, one end of the second elastic component is arranged on the end wall of the telescopic cavity 221a close to the second guide channel 221b, and the other end of the second elastic component is arranged on the second valve plate 310, and the second elastic component surrounds the outer side wall of the second valve rod 321.

[0098] For example, the second elastic component can be a second spring 322. That is, one end of the second spring 322 abuts against the end wall of the telescopic cavity 221a close to the second guide channel 221b, and the other end of the second spring 322 abuts against the second valve plate 310.

[0099] It should be noted that the second spring 322 is always in a compressed state.

[0100] For example, the side wall of the telescopic cavity 221a is provided with a second exhaust channel 224 communicating with the inner cavity of the elastic bellows 223, further, the inner cavity of the elastic bellows 223 also communicates with a first exhaust channel 460, and the first exhaust channel 460 communicates with the atmosphere. The first exhaust channel 460 is arranged on the valve seat 400. When the first valve plate 210 moves away from the first channel 110 and further compresses the elastic bellows 223, the inner cavity of the elastic bellows 223 exhausts to the telescopic cavity 221a through the second exhaust channel 224, and at the same time, the inner cavity of the elastic bellows 223 also exhausts to the external environment through the first exhaust channel 460. When the second valve plate 310 moves away from the pressure relief channel, the gas in the telescopic cavity 221a is discharged into the inner cavity of the elastic bellows 223 through the second exhaust channel 224.

[0101] In specific implementation, when the second valve plate 310 abuts against the pressure relief channel and needs to move away from the pressure relief channel, the second valve rod 321 drives the second valve plate 310 to move away from the first channel 110 to open the pressure relief channel, at this time, the second elastic component is further compressed, and when the second valve plate 310 needs to close the pressure relief channel, the second valve plate 310 drives the second valve rod 321 to move towards the inlet and outlet under the elastic force of the second elastic component, thereby closing the pressure relief channel.

[0102] The second elastic component is arranged, on one hand, when the second valve rod 321 drives the second valve plate 310 to be away from the inlet and outlet of the first channel 110, the second spring 322 is further compressed, when the second valve plate 310 needs to close the pressure relief channel, the second spring 322 can drive the second valve plate 310 to drive the second valve rod 321 to move to the direction close to the first channel 110, so as to close the pressure relief channel.

[0103] For example, the valve seat 400 is formed with a first piston cavity 410 which is communicated with the first guide channel; the first channel 110, the first guide channel, the telescopic cavity 221a, the second guide channel 221b and the first piston cavity 410 are coaxially arranged;

[0104] The first pressure relief unit 200 further comprises a first piston 230 which is mutually adapted with the first piston cavity 410, the first piston 230 is arranged in the first piston cavity 410, the other end of the first valve rod 221 passes through the first guide channel and is connected with the first piston 230; and the first piston 230 and the first piston cavity 410 form a first gas charging space which is communicated with the first guide channel.

[0105] The valve seat 400 is further provided with a first gas charging port 420 and a first gas charging channel 430, the first gas charging port 420 is communicated with the first gas charging space via the first gas charging channel 430.

[0106] It should be noted that the first piston 230 is in sealing sliding connection with the first piston cavity 410. Further, the first guide channel is in sealing sliding connection with the first movable assembly 220, so as to avoid the first gas charging space from leaking, which affects the gas to drive the first piston 230 to move.

[0107] For example, referring to Figure 4 , the first gas charging port 420 can be arranged on the side close to the first channel 110.

[0108] Figure 6 is a structure sectional view of a vacuum angle valve provided by another embodiment of the present application.

[0109] For example, referring to Figure 6 , the first gas charging port 420 can also be arranged on the side away from the first channel 110.

[0110] Further, the first gas charging channel 430 can be arranged as an inclined channel (refer to Figure 4 and Figure 6 ).

[0111] In a specific implementation, when the first valve plate 210 is abutted against the inlet and outlet and needs to be away from the inlet and outlet, the first inflation port 420 can be inflated, and the gas enters the first piston cavity 410 through the first inflation port 420 and the first inflation channel 430 in sequence, so as to push the first piston 230 to move away from the first channel 110, that is, the space of the first inflation space is enlarged, and the first valve rod 221 is driven to move away from the first channel 110 due to the connection between the first piston 230 and the first valve rod 221, thereby driving the first valve plate 210 to open the inlet and outlet. Further, when the first piston 230 is abutted against the top cover 700, the first inflation port 420 is always in an inflated state to maintain the state that the first piston 230 is abutted against the top cover 700.

[0112] Further, when the first valve plate 210 is away from the inlet and outlet and needs to be abutted against the inlet and outlet to close the inlet and outlet, the inflation of the first inflation port 420 is stopped, and the first valve plate 210 is driven to move towards the inlet and outlet of the first channel 110 under the elastic action of the first spring 222 and the elastic bellows 223, and then the first valve rod 221 is driven to move by the first valve plate 210, so that the first piston 230 is driven to move towards the first channel 110, that is, the space in the first inflation space is reduced.

[0113] The first piston 230 is formed with the second piston cavity 231, the second piston cavity 231 and the first piston cavity are coaxially arranged, and the first inflation port 420 and the first inflation channel 430 are arranged.

[0114] In some examples, the first piston 230 is formed with a second piston cavity 231, the second piston cavity 231 and the first piston cavity are coaxially arranged;

[0115] The second pressure relief unit 300 includes a second piston 330 matched with the second piston cavity 231, the second piston 330 is arranged in the second piston cavity 231, and the other end of the second valve rod 321 passes through the second guide channel 221b and is connected with the second piston 330; and the second piston 330 and the second piston cavity 231 form a second inflation space communicating with the second guide channel 221b.

[0116] The valve seat 400 is further provided with a second inflation port 440 and a second inflation channel, the second inflation port 440 communicates with the second inflation and the second inflation space.

[0117] For example, with reference to Figure 3 The second inflation port 440 can be arranged on the side away from the first channel 110.

[0118] For another example, referring to Figure 6 , the second air inlet 440 can also be arranged on the side close to the first channel 110.

[0119] For example, the second air passage includes a passage one 451, a through slot 452, a passage two 453 and a passage three 454; the passage one 451 is arranged in the valve seat 400, and the through slot 452 is arranged in the valve seat 400 and communicates with the first guide passage;

[0120] One end of the passage one 451 communicates with the first air inlet 420, and the other end of the passage one 451 communicates with the through slot 452;

[0121] The first valve rod 221 is provided with the passage two 453 which communicates with the through slot 452;

[0122] The passage three 454 is arranged between the first valve rod 221 and the second valve rod 321, and the passage three 454 communicates the passage two 453 and the second piston cavity 231.

[0123] It should be noted that the second piston 330 is in sealing sliding connection with the second piston cavity 231.

[0124] It should be further noted that the shaft sleeve is further arranged between the second valve rod 321 and the second guide passage 221b, and the shaft sleeve can provide support for the second valve rod 321 and effectively reduce the friction when the second valve rod 321 moves.

[0125] In specific implementation, when the second valve plate 310 abuts against the pressure relief passage and needs to move away from the pressure relief passage, the second air inlet 440 can be inflated, and the gas enters the second piston cavity 231 through the second air inlet 440, the passage one 451, the through slot 452, the passage two 453 and the passage three 454 in sequence, so as to push the second piston 330 to move in the direction away from the first channel 110. Since the second piston 330 is connected with the second valve rod 321, the second piston 330 can drive the second valve rod 321 to move in the direction away from the first channel 110, thereby driving the second valve plate 310 to open the pressure relief passage.

[0126] It should be noted that when the first valve plate 210 is in a state of opening the inlet and outlet of the first channel 110, the second valve plate 310 is always in a state of opening the pressure relief passage.

[0127] Further, when the second valve plate 310 needs to abut against the pressure relief passage to close the pressure relief passage, the second valve plate 310 is driven to move towards the first passage 110 by the elastic force of the second spring 322, and then the second valve plate 310 drives the second valve rod 321 to move towards the first passage 110.

[0128] The second piston 330 is driven to move away from the first passage 110 by the second air inlet 440 and the second air passage, and then the second valve plate 310 is driven to move away from the first passage 110 by the second valve rod 321.

[0129] For example, the through groove 452 is provided with a first sealing ring 810 and a second sealing ring 820 at two ends respectively, the first sealing ring 810 and the second sealing ring 820 abut against the first valve rod 221, and the first sealing ring 810 is located between the through groove 452 and the first piston cavity 410.

[0130] The third sealing ring 830 is arranged on the third passage 454, the shaft sleeve is located between the third sealing ring 830 and the second passage 453, and the second passage 453 is located between the shaft sleeve and the second piston cavity 231.

[0131] In another implementation manner, the vacuum angle valve further comprises a top cover 700, and the valve body 100, the valve seat 400 and the top cover 700 are sequentially and fixedly connected.

[0132] The vacuum angle valve comprises an adjusting knob 500, one end of the adjusting knob 500 sequentially penetrates the top cover 700 and the first piston 230 and extends into the second piston cavity 231, the adjusting knob is driven to extend or retract along the extension direction of the second valve rod 321 by rotating the adjusting knob 500, and the adjusting knob is abutted against the second valve rod 321 to adjust the opening degree of the pressure relief passage.

[0133] It should be noted that when the second valve rod 321 abuts against the adjusting knob 500, the second air inlet 440 remains in the inflated state to maintain the state that the second valve rod 321 abuts against the adjusting knob.

[0134] In specific implementation, the top cover 700 and the first passage 110 are oppositely arranged.

[0135] For example, the valve body 100, the valve seat 400 and the top cover 700 are fixedly connected by bolts.

[0136] Exemplarily, a third spring 510 is arranged outside the adjusting knob 500, one end of the third spring 510 abuts against the outer wall of the first piston 230, and the other end of the third spring 510 abuts against the stud of the adjusting knob 500.

[0137] By arranging the adjusting knob 500, the adjusting knob 500 can be extended or retracted along the extension direction of the second valve rod 321 by rotating the adjusting knob 500, so that the second valve rod 321 abuts against the adjusting knob 500, to adjust the distance between the second valve plate 310 and the pressure relief passage, thereby adjusting the opening degree of the pressure relief passage. By arranging the adjusting knob 500 and the adjusting column 520, the opening degree of the pressure relief passage can be adjusted according to the pressure difference between the second passage 120 and the first passage 110.

[0138] In some other examples, the first pressure relief unit 200 further comprises a third valve plate 212;

[0139] The first valve plate 210 is formed with a mounting hole which is adapted to the third valve plate 212, and the diameter of the mounting hole is greater than or equal to the second valve plate 310;

[0140] The pressure relief passage comprises a first pressure relief passage 212a and a second pressure relief passage 211, the first pressure relief passage 212a is arranged on the third valve plate 212 and coaxially arranged with the first passage 110, and the second pressure relief passage 211 is arranged on the first valve plate 210, and the second pressure relief passage 211 and the first pressure relief passage 212a are arranged perpendicularly to each other, wherein the first pressure relief passage 212a communicates the first passage 110 and the second pressure relief passage, and the second pressure relief passage 211 communicates the first pressure relief passage 212a and the second passage 120;

[0141] The second valve plate 310 is arranged at the connecting port of the first pressure relief passage 212a and the second pressure relief passage 211.

[0142] Exemplarily, the third valve plate 212 can be made of rubber, and the first valve plate 210 can be made of cast iron, which is not limited herein.

[0143] In the assembly process of the vacuum angle valve, the first valve plate 210 and the first valve rod 221 can be assembled first, then the second valve rod 321 is inserted into the movable cavity through the mounting hole, and then the second valve plate 310 is mounted on the second valve rod 321 through the mounting hole, and finally the third valve plate 212 is assembled.

[0144] By arranging the third valve plate 212, the assembly of the second valve rod 321 and the second valve plate 310 is facilitated.

[0145] The valve body 100 further comprises a purge passage 600, and the gas outlet of the purge passage 600 is arranged towards the first valve plate 210.

[0146] It should be noted that, in the process of opening the first valve plate 210 and vacuum pumping by the vacuum pump, the gas inlet of the film deposition device is connected to the gas for wafer film deposition, i.e. the gaseous source, which is pumped out by the vacuum pump during the reaction in the film deposition device, so that the film deposition device is kept in a low vacuum state. During this process, since the first valve plate 210 is in an open state at this time, a large amount of gas flow will cause the temperature to decrease, and some of the gaseous source may solidify on the first valve plate 210 to form adsorbed particles, affecting the sealing of the first valve plate 210.

[0147] It should be further noted that, when the film deposition reaction is completed, the purge gas is introduced into the purge channel 600 to purge the adsorbed particles on the first valve plate 210. After purging is completed, the gas inlet of the second gas inlet 440 is first stopped, and under the elastic action of the second spring 322, the second valve plate 310 moves towards the direction close to the pressure relief channel, and in turn drives the second valve rod 321 and the second piston 330 to move towards the direction close to the pressure relief channel, and finally makes the second valve plate 310 close to the pressure relief channel. Further, the gas inlet of the first gas inlet 420 is stopped, and under the elastic action of the elastic bellows 223 and the first spring 222, the first valve plate 210 moves towards the direction close to the inlet and outlet of the first channel 110, and in turn drives the first valve rod 221 and the first piston 230 to move towards the direction close to the first channel 110, and finally makes the first valve plate 210 close to the inlet and outlet of the first channel 110.

[0148] The present application embodiment provides a purge channel 600, when the first valve plate 210 and the second valve plate 310 have accumulated pollutants, the gas can be introduced into the first valve plate 210 through the purge channel 600 to clean the surface of the first valve plate 210 and the second valve plate 310, so as to improve the sealing performance of the first valve plate 210 to the inlet and outlet.

[0149] In a second aspect, the present application embodiment also provides a wafer film deposition device, which comprises the vacuum angle valve of any one of the first aspect, and further comprises a film deposition device and a vacuum pump.

[0150] When the first channel 110 is gas inlet and the second channel 120 is gas outlet, the first channel 110 is connected to the film deposition device, and the second channel 120 is connected to the vacuum pump.

[0151] When the second channel 120 is gas inlet and the first channel 110 is gas outlet, the first channel 110 is connected to the vacuum pump, and the second channel 120 is connected to the film deposition device.

[0152] In the specific implementation, the first channel 110 is connected with the coating device, the second channel 120 is connected with the vacuum pump, in the initial state, the first valve plate 210 closes the inlet and outlet of the first channel 110, and the second valve plate 310 closes the pressure relief channel, that is, the vacuum angle valve is in the cut-off state. When the vacuum pump is opened to extract the gas in the second channel 120, the pressure in the second channel 120 rapidly decreases, and then the pressure difference between the second channel 120 and the first channel 110 rapidly increases. At this time, the second gas inlet 440 is filled with gas, and the gas enters the second gas space in the second piston cavity 231 through the channel one 451, the through slot 452, the channel two 453 and the channel three 454 in sequence, and pushes the second piston 330 to move towards the adjusting knob 500 to make the second valve rod 321 abut against the adjusting knob 500. The second valve rod 321 drives the second valve plate 310 to open the pressure relief channel (at this time, the second spring 322 in the compressed state is further compressed) through the second piston 330, to sequentially connect the second channel 120, the pressure relief channel, the first channel 110 and the coating device, and the gas in the coating device is extracted by the vacuum pump for pressure relief.

[0153] When the pressure difference between the first channel 110 and the second channel 120 decreases to a suitable difference, the first gas inlet 420 is filled with gas, and the gas enters the first gas space in the first piston cavity 410 through the first gas channel 430, and pushes the first piston 230 to move towards the top cover 700 to make the first piston 230 abut against the top cover 700, and the first valve rod 221 drives the first valve plate 210 to open the inlet and outlet of the first channel 110 through the first piston 230 (at this time, the elastic bellows 223 and the first spring 222 in the compressed state are further compressed), to sequentially connect the second channel 120 and the first channel 110, and the vacuum pump further depressurizes the gas in the coating device.

[0154] When the coating device is pumped to a low vacuum state by the vacuum pump, the gas inlet of the coating device is connected to the gaseous source for wafer coating reaction, after the coating reaction is completed, the purge gas is introduced into the purge channel 600 to purge the adsorbed particles on the first valve plate 210, after the purge is completed, first stop the second gas inlet 440, under the elastic action of the second spring 322, the second valve plate 310 moves to the direction close to the pressure relief channel, and in turn drives the second valve rod 321 and the second piston 330 to move to the direction close to the pressure relief channel, and finally makes the second valve plate 310 close to the pressure relief channel. Further, stop the first gas inlet 420, under the elastic action of the elastic bellows 223 and the first spring 222, the first valve plate 210 moves to the direction close to the inlet and outlet of the first channel 110, and in turn drives the first valve rod 221 and the first piston 230 to move to the direction close to the first channel 110, and finally makes the first valve plate 210 close to the inlet and outlet of the first channel 110. It should be noted that the second channel 120 can also be connected to the coating device, the first channel 110 is connected to the vacuum pump, and the working process of the vacuum angle valve is consistent with the working process of the first channel 110 and the coating device connected to the second channel 120 and the vacuum pump, which will not be described in detail here.

[0155] In the second aspect, the embodiments of the present application also provide a wafer coating device, which adopts the vacuum angle valve in any of the above technical solutions, and thus has all the beneficial effects of the vacuum angle valve in any of the above technical solutions, which will not be described here.

[0156] It is easy to understand that, based on the several embodiments provided by the present application, the skilled in the art can combine, split, recombine, etc. to obtain other embodiments, which do not exceed the protection scope of the present application.

[0157] The above specific embodiments have further described the purpose, technical solutions and beneficial effects of the embodiments of the present application, and it should be understood that the above is only the specific implementation of the embodiments of the present application, and is not used to limit the protection scope of the embodiments of the present application, any modification, equivalent replacement, improvement, etc. made on the basis of the technical solutions of the embodiments of the present application shall be included in the protection scope of the embodiments of the present application.

Claims

1. A vacuum angle valve, characterized in that, Includes a valve body, a first pressure relief unit, and a second pressure relief unit; The valve body has a first channel and a second channel that are interconnected; the first channel has an inlet and outlet located near the second channel; The first pressure relief unit is located at the inlet and outlet of the first channel; The first pressure relief unit is configured to open the inlet and outlet, or close the inlet and outlet; the first pressure relief unit is provided with a pressure relief channel, and the first channel, the pressure relief channel and the second channel can be connected in sequence; the inner diameter of the pressure relief channel is smaller than the inner diameter of the inlet and outlet; The second pressure relief unit is embedded in the first pressure relief unit, and the second pressure relief unit is configured to open or close the pressure relief channel; When the first pressure relief unit closes the inlet and outlet, the second pressure relief unit is configured to open the pressure relief channel to sequentially connect the first channel, the pressure relief channel and the second channel; or, to close the pressure relief channel to cooperate with the first pressure relief unit to close the inlet and outlet.

2. A vacuum angle valve according to claim 1, characterized in that, The first pressure relief unit includes an integrally formed first valve plate and a first movable component; One side of the first valve plate is disposed at the inlet and outlet, and the other side of the first valve plate is connected to one end of the first movable component. The other end of the first movable component extends away from the inlet and outlet. The first movable component is configured to drive the first valve plate to move towards or away from the inlet and outlet. The first movable component is provided with a movable cavity, which extends from the pressure relief channel away from the inlet and outlet. The second pressure relief unit includes a second valve plate and a second movable component. One side of the second valve plate is disposed in the pressure relief channel, and the other side of the second valve plate is disposed at one end of the second movable component. The other end of the second movable component extends along the movable cavity. The second movable component is configured to drive the second valve plate to move toward or away from the pressure relief channel.

3. A vacuum angle valve according to claim 2, characterized in that, The vacuum angle valve also includes a valve seat, which forms a first guide channel; The first movable component includes a first valve stem and a first elastic member; one end of the first valve stem is integrally formed with the first valve plate, and the other end of the first valve stem extends toward the first guide channel; One end of the first elastic member is disposed on the valve seat, and the other end of the first elastic member is disposed on the first valve plate.

4. A vacuum angle valve according to claim 3, characterized in that, The first movable component further includes a first spring, and the first elastic component is configured as an elastic bellows; The first spring is arranged around the outer side wall of the first valve stem, and the elastic bellows is arranged outside the first spring to seal the first valve stem. One end of the elastic bellows is fixed to the valve seat by a flange, and the other end of the elastic bellows is arranged on the first valve plate. The elastic bellows, the flange, the first valve plate, and the first valve stem are integrally formed.

5. A vacuum angle valve according to claim 4, characterized in that, The second active component includes a second valve stem and a second resilient component; The movable cavity includes a telescopic cavity and a second guide channel connected in sequence. One end of the second valve stem is connected to the second valve plate, and the other end of the second valve stem extends through the telescopic cavity to the second guide channel. The inner diameter of the telescopic cavity is larger than the inner diameter of the second guide channel. The second elastic component is disposed in the telescopic cavity. One end of the second elastic component is disposed on the end wall of the telescopic cavity near the second guide channel, and the other end of the second elastic component is disposed on the second valve plate. The second elastic component is disposed around the outer wall of the second valve stem.

6. A vacuum angle valve according to claim 5, characterized in that, The valve seat also forms a first piston chamber that communicates with the first guide channel; The first pressure relief unit further includes a first piston that is adapted to the first piston chamber. The first piston is disposed in the first piston chamber, and the other end of the first valve stem passes through the first guide channel and is connected to the first piston. The first piston and the first piston chamber form a first inflation space that communicates with the first guide channel. The valve seat is also provided with a first inflation port and a first inflation channel, wherein the first inflation port is connected to the first inflation space via the first inflation channel.

7. A vacuum angle valve according to claim 6, characterized in that, The first piston has a second piston chamber; The second pressure relief unit includes a second piston that is adapted to the second piston chamber. The second piston is disposed in the second piston chamber. The other end of the second valve stem passes through the second guide channel and is connected to the second piston. The second piston and the second piston chamber form a second inflation space that communicates with the second guide channel. The valve seat is also provided with a second air inlet and a second air inlet channel, the second air inlet being connected to the second air inlet via the second air inlet channel and the second air inlet space.

8. A vacuum angle valve according to claim 7, characterized in that, The second inflation channel includes channel one, through groove, channel two, and channel three; channel one is provided inside the valve seat, and the through groove communicating with the first guide channel is also provided inside the valve seat; One end of the channel is connected to the first air inlet, and the other end of the channel is connected to the through groove; The first valve stem is provided with the second channel, which communicates with the through groove; The third channel is provided between the first valve stem and the second valve stem, and the third channel connects the second channel and the second piston chamber.

9. A vacuum angle valve according to claim 8, characterized in that, A first sealing ring and a second sealing ring are respectively provided at both ends of the through groove. The first sealing ring and the second sealing ring abut against the first valve stem. The first sealing ring is located between the through groove and the first piston chamber. A third sealing ring is provided on the third channel, and the second channel is located between the third sealing ring and the second piston chamber.

10. A vacuum angle valve according to claim 7, characterized in that, The vacuum angle valve also includes a top cover, and the valve body, the valve seat, and the top cover are fixedly connected in sequence; The vacuum angle valve includes an adjustment knob, one end of which passes through the top cover and the first piston and extends into the second piston chamber. By rotating the adjustment knob, the adjustment knob can extend and retract along the extension direction of the first valve stem to adjust the opening of the pressure relief channel.

11. A vacuum angle valve according to any one of claims 2-9, characterized in that, The valve body is provided with a purge channel, and the air outlet of the purge channel is positioned facing the first valve plate.

12. A wafer coating equipment, characterized in that, The wafer coating equipment includes the vacuum angle valve as described in any one of claims 1-11, and the wafer coating equipment further includes a coating device and a vacuum pump; When air enters through the first channel and exits through the second channel, the first channel is connected to the coating device, and the second channel is connected to the vacuum pump. When air enters through the second channel and exits through the first channel, the first channel is connected to the vacuum pump, and the second channel is connected to the coating device.

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