Movable clean microenvironment equipment

Abstract

The utility model relates to the technical field of microenvironment equipment, in particular to movable clean microenvironment equipment which comprises a movable box body, a filtering area, a clean working area, a working table and an ash area, the filtering area, the clean working area, the working table and the ash area are arranged in the movable box body, the filtering area is communicated with the clean working area, and the clean working area is isolated from the ash area through the working table; the workbench comprises an operation table, a containing groove located in one side of the operation table and an air return opening exposed out of the containing groove. The ash area is provided with a temperature control area and an air return pipeline, an inlet of the air return pipeline is communicated with the air return port, an outlet of the air return pipeline is communicated with an inlet of the temperature control area, and an outlet of the temperature control area is communicated with a filter area pipeline; the filtering area, the clean working area, the air return opening, the air return pipeline and the temperature control area form an inner circulation air channel in the movable box body. The floor area, the environment space and the construction cost of the equipment can be reduced, and the controllability and stability of the environment humidity, temperature and cleanliness in the clean working area are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to microenvironment equipment technical field, especially in a movable clean microenvironment equipment. BACKGROUND

[0002] The existing semiconductor, optics and other precision machining and manufacturing need to meet the operation space of clean grade demand, usually in the fixed dust-free room, and the construction cost and maintenance cost are very high. In order to solve the above problems, the related technology adopts the fixed external circulation microenvironment equipment to reduce the clean work area area needing maintenance, but the land occupation, environmental space and construction cost still exceed the cost control demand, and the fixed design cannot be applied to the laboratory that has completed the infrastructure, and the control difficulty of the environmental temperature, humidity and cleanliness of the functional area is high, and the maintenance cost is huge. SUMMARY

[0003] In order to solve the above technical problems, the utility model provides a movable clean microenvironment equipment, including movable box body, and the filter area, clean work area, workstation and ash area arranged in the movable box body, the filter area is communicated with the clean work area, and the clean work area is isolated with the ash area through the workstation;

[0004] The workstation includes an operation table, a storage groove located on one side of the operation table and an air return opening exposed to the storage groove.

[0005] The ash area is provided with a temperature control area and a return air pipeline, the inlet of the return air pipeline is communicated with the air return opening, the outlet of the return air pipeline is communicated with the inlet of the temperature control area, and the outlet of the temperature control area is communicated with the filter area pipeline.

[0006] Specifically, the workstation further includes a sealing curtain, a gap between the operation table and the ash area, and a gap between the storage groove and the ash area, and the clean work area and the ash area are sealed and isolated through the operation table, the storage groove and the sealing curtain.

[0007] Specifically, the outlet of the temperature control area is communicated with the filter area through a supply air pipeline, the supply air pipeline includes at least one supply air branch, the filter area is provided with at least one air inlet, and the at least one supply air branch is respectively communicated with the filter area through the at least one air inlet.

[0008] Specifically, the outlet of the temperature control area is communicated with the filter area through a supply air pipeline,

[0009] The air supply pipeline comprises at least two air supply branches, and the filtering area is provided with at least two spaced air inlets, and the at least two air supply branches are communicated with the filtering area through the at least two spaced air inlets.

[0010] Specifically, the filtering area is provided with a filter and a uniform air supply outlet.

[0011] The air flow entering from the air inlets can enter the clean work area through the filter and the uniform air supply outlet.

[0012] Specifically, the filtering area is provided with at least two filters, each of which is communicated with at least one air inlet and provided with at least one uniform air supply outlet.

[0013] Specifically, the movable box body is further provided with an air supply area above the filtering area, and the air supply pipeline extends into the air supply area and is communicated with the filtering area.

[0014] Specifically, the air return pipeline comprises at least two air return branches, and the workbench is provided with at least two spaced air return outlets, and the at least two air return branches are respectively communicated with the clean work area through the at least two spaced air return outlets.

[0015] Specifically, the temperature control area is provided with a temperature control device,

[0016] The temperature control device comprises an air cavity, the air cavity is respectively communicated with the outlet of the air return pipeline and the pipeline of the filtering area, and the air cavity is provided with a refrigeration device and a heating device, and the effective refrigeration area of the refrigeration device and the effective heating area of the heating device at least partially cover the air cavity.

[0017] Specifically, the temperature control device further comprises a booster fan, which can provide the circulating power of the air in the internal circulation air duct.

[0018] Specifically, the temperature control device further comprises a condensate water drainage device.

[0019] Specifically, the clean work area and / or the air cavity are provided with a temperature detection device.

[0020] Specifically, the clean work area and / or the air cavity are provided with a humidity control device, and the air in the air cavity at least partially flows through the humidity control device before being discharged from the outlet of the temperature control area.

[0021] Specifically, the air cavity is provided with a purification device, and the air in the air cavity at least partially flows through the purification device before being discharged from the outlet of the temperature control area.

[0022] Specifically, the movable box body comprises a shell, a support, and a moving device, the shell is arranged on the support, and the moving device is arranged at the bottom of the shell.

[0023] Specifically, the movable box body further comprises an instrument placing table, which is arranged above the operation table.

[0024] Specifically, the gray area is further provided with a mounting reserved hole.

[0025] The embodiment of the present application has the following beneficial effects:

[0026] The movable clean micro-environment equipment integrates the filtering area, the clean working area, the workbench and the gray area in the movable box body, can realize the mobile setting of the whole micro-environment, decomposes the operation task space of different machines, effectively reduces the floor area, environmental space and construction cost of the equipment, can be adapted to various micro-environment requirements and processing scenes through flexible assembly and micro-environment equipment series connection and the like. Moreover, the filtering area in the movable box body is in communication with the clean working area, the clean working area is isolated from the gray area through the workbench, the gray area is provided with a temperature control area and a return air pipeline, the inlet of the return air pipeline is in communication with the return air port, the outlet of the return air pipeline is in communication with the inlet of the temperature control area, and the outlet of the temperature control area is in communication with the pipeline of the filtering area, so that the filtering area, the clean working area, the return air port, the return air pipeline and the temperature control area form an internal circulation air duct in the movable box body, thereby enabling the temperature control area to realize constant temperature and humidity gas heat exchange through smaller power, reducing the filtering capacity requirement of the filtering area, and improving the controllability and stability of at least one of the environmental humidity, temperature and cleanliness of the clean working area. BRIEF DESCRIPTION OF DRAWINGS

[0027] In order to more clearly illustrate the technical scheme of the present application, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creating any creative labor.

[0028] Figure 1 A structure schematic view of a movable clean micro-environment equipment according to an embodiment of the present application is shown in the figure;

[0029] Figure 2 Another structure schematic view of a movable clean micro-environment equipment according to an embodiment of the present application is shown in the figure;

[0030] Figure 3 A partial structure schematic view of a movable clean micro-environment equipment according to an embodiment of the present application is shown in the figure;

[0031] Figure 4 Another partial structure schematic view of the mobile clean micro-environment device according to an embodiment of the present application is shown in Fig. 6.

[0032] Figure 5 Another partial structure schematic view of the mobile clean micro-environment device according to an embodiment of the present application is shown in Fig. 6.

[0033] Figure 6 Another partial structure schematic view of the mobile clean micro-environment device according to an embodiment of the present application is shown in Fig. 6.

[0034] In the figure, the reference signs correspond to:

[0035] 1 - mobile box, 2 - filtration area, 3 - clean work area, 4 - workbench, 5 - ash area, 6 - air supply area, 7 - air supply pipeline, 8 - instrument placement table, 11 - shell, 12 - support, 13 - moving device, 21 - filter, 41 - operation table, 42 - storage groove, 43 - return air inlet, 44 - sealing curtain, 51 - temperature control area, 52 - return air pipeline, 71 - air supply branch, 511 - temperature control equipment, 521 - return air branch. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0037] It should be noted that the terms "first", "second", and the like in the description and claims of the present application and the above drawings are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device that includes a series of steps or units does not have to be limited to those steps or units clearly listed, but can include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0038] In the description of the utility model, it is necessary to explain, unless another explicit provision and limitation, the term "installation", "arrangement", "connection" should be broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be two elements inside the communication.For the ordinary skilled in the art, the above-mentioned terms can be understood in the specific meaning of the utility model according to the specific circumstances.

[0039] The utility model embodiment provides a movable clean microenvironment equipment, please refer to Figures 1-6 The movable clean microenvironment equipment includes movable box 1 and filter area 2, clean work area 3, workbench 4 and ash area 5 arranged in movable box 1, filter area 2 communicates with clean work area 3, and clean work area 3 is isolated from ash area 5 through workbench 4.

[0040] Specifically, refer to Figures 1-2 Movable box 1 is a closed box body, which is used for integrating clean room equipment and providing a microenvironment inner cavity. Preferably, the filter area 2, the clean work area 3, the workbench 4 and the ash area 5 are sequentially arranged from top to bottom along the movable box 1, the filter area 2 is used for filtering and purifying the gas to be input into the clean work area 3, the clean work area 3 is used for providing a clean constant-temperature gas bath microenvironment, the workbench 4 is used for providing an operation table, and the temperature control area in the ash area 5 is used for temperature control of the gas. The inner cavity of the ash area can be communicated with or not communicated with the external environment, and is used for placing devices such as an electrical control box which do not require a clean constant-temperature environment.

[0041] The workbench 4 includes an operation table 41, a storage groove 42 located at one side of the operation table 41, and an air return port 43 exposed to the storage groove 42.

[0042] Specifically, the operation table 41 has an operation table surface, and the storage groove 42 is adjacent to the operation table surface and recessed in the operation table surface. The air return port 43 is located in the storage groove 42, and a negative pressure is formed in the storage groove 42 to suck in the gas, which is conducive to the suction of dirt, particles and other dirty substances.

[0043] In a possible implementation, the movable box 1 further includes an instrument placement table 8, and the instrument placement table 8 is spaced apart and arranged above the operation table 41.

[0044] The grey area 5 is provided with a temperature control area 51 and a return air pipeline 52. The inlet of the return air pipeline 52 is communicated with the return air outlet 43, the outlet of the return air pipeline 52 is communicated with the inlet of the temperature control area 51, and the outlet of the temperature control area 51 is communicated with the pipeline of the filtering area 2. The filtering area 2, the clean working area 3, the return air outlet 43, the return air pipeline 52 and the temperature control area 51 form an internal circulation air duct in the movable box 1. The air flow is filtered by the filtering area 2, enters the clean working area 3, and then enters the filtering area 2 again through the return air outlet 43, the return air pipeline 52 and the temperature control area 51, so as to realize internal circulation of the air flow.

[0045] In summary, the movable clean micro-environment device integrates the filtering area 2, the clean working area 3, the workbench 4 and the grey area 5 in the movable box 1, can realize the mobile setting of the whole micro-environment, decompose the operation task space of different machines, effectively reduce the floor area, environmental space and construction cost of the device, and can be adapted to various micro-environment requirements and processing scenes through flexible assembly and micro-environment device series connection. In addition, the filtering area 2 in the movable box 1 is communicated with the clean working area 3, the clean working area 3 is isolated from the grey area 5 through the workbench 4, the grey area 5 is provided with a temperature control area 51 and a return air pipeline 52, the inlet of the return air pipeline 52 is communicated with the return air outlet 43, the outlet of the return air pipeline 52 is communicated with the inlet of the temperature control area 51, and the outlet of the temperature control area 51 is communicated with the pipeline of the filtering area 2, so as to form an internal circulation air duct in the movable box 1, so that the temperature control area 51 realizes constant temperature gas heat exchange with smaller power, reduces the filtering capacity requirement of the filtering area 2, and improves the controllability and stability of at least one of the environmental humidity, temperature and cleanliness of the clean working area 3.

[0046] In possible embodiments, referring to Figure 1 The movable box 1 comprises a shell 11, a support 12 and a moving device 13. The shell 11 is arranged on the support 12, and the moving device 13 is located at the bottom of the shell 11. The support 12 and the shell 11 can be moved by the moving device 13.

[0047] Specifically, referring to Figure 1 The shell 11 is sealingly mounted on the support 12 to form a closed inner cavity. The moving device 13 is fixedly connected to the bottom of the support 12 or directly connected to the shell 11 at the bottom. Under the action of an external force, the moving device 13 can move relative to the placement surface. For example, the moving device 13 can comprise universal wheels and mobile foot cups. By arranging the moving device 13, the mobile assembly of the micro-environment is realized, and the flexible movement of the clean micro-environment and the application requirements of multiple scenes are met.

[0048] In possible embodiments, referring to Figure 1The outlet of the temperature control zone 51 is connected to the filtration zone 2 via an air supply duct 7. The movable housing 1 also includes an air supply zone 6 located above the filtration zone 2, with the air supply duct 7 extending into the air supply zone 6 and connecting to the filtration zone 2. Preferably, the air supply zone 6, filtration zone 2, clean working area 3, workbench 4, and ash zone 5 are arranged sequentially from top to bottom. The filtration zone 2 separates the air supply zone 6 from the clean working area 3. The air supply duct 7 is located within the movable housing 1 and is at least partially contained within the air supply zone 6. The air supply zone 6 further enhances the airtightness of the internal gas circulation and facilitates the provision of a constant temperature environment for the air supply duct 7, thereby improving the environmental temperature stability within the clean working area 3.

[0049] In a possible implementation, the air supply duct 7 includes at least one air supply branch 71, and the filtration zone 2 is provided with at least one air inlet. The at least one air supply branch 71 is connected to the filtration zone 2 through the at least one air inlet. In this way, the air supply branch 71 and the air inlet facilitate the controllability of the internal circulating gas flow and reduce the risk of contamination during the transport of clean gas.

[0050] In possible implementations, refer to Figures 3-5 The air supply duct 7 includes at least two air supply branches 71, and the filtration zone 2 is provided with at least two spaced air inlets. The at least two air supply branches 71 are connected to the filtration zone 2 through the at least two spaced air inlets. In this way, by setting spaced air supply branches 71 and air inlets, the air intake coverage area is expanded, thereby improving the uniformity of gas inflow in the clean working area 3.

[0051] For example, refer to Figures 4-5 The air supply duct is provided with a first air supply branch and a second air supply branch. The filter area 2 is provided with a first air inlet and a second air inlet. The outlet of the first air supply branch is connected to the first air inlet, and the second air supply branch is connected to the second air inlet.

[0052] In a possible implementation, the filtration zone 2 is equipped with a filter 21 and a homogenizing air outlet; the airflow entering from the air inlet passes through the filter 21 and then enters the clean working area 3 through the homogenizing air outlet, which is a surface-shaped air outlet. Thus, the airflow, after passing through the air supply duct, is filtered, purified, and homogenized by the filter 21 before entering the clean working area 3 through the surface-shaped air outlet, improving the uniformity of airflow into the clean working area 3 and reducing airflow disturbance near the workbench 4. Preferably, the surface-shaped air outlet is exposed within the clean working area 3.

[0053] In possible implementations, refer to Figures 4-6, the filtering area 2 is provided with at least two filters 21, each filter 21 is communicated with at least one air inlet and provided with at least one uniform air outlet. Specifically, the air supply branch 71 and the air inlet are arranged in pairs, and each filter 21 is communicated with one or more air inlets and provided with one or more uniform air outlets, so as to improve the gas filtering capacity and air outlet coverage of the filtering area 2, and improve the gas cleanliness and uniformity of the clean work area 3.

[0054] Exemplarily, referring to Figure 4 , the filtering area 2 is provided with a first filter and a second filter, the first filter is provided with a first air inlet and a first uniform air outlet (not shown) at the bottom, the second filter is provided with a second air inlet and a second uniform air outlet (not shown) at the bottom, the airflow of the first air supply branch enters the first filter through the first air inlet and then enters the clean work area 3 through the first uniform air outlet after filtering, and the airflow of the second air supply branch enters the second filter through the second air inlet and then enters the clean work area 3 through the second uniform air outlet after filtering, so as to realize large-area clean gas input.

[0055] In a possible implementation, referring to Figures 3-5 , the return air pipeline 52 includes at least two return air branches 521, the workbench 4 is provided with at least two spaced return air inlets 43, and the at least two return air branches 521 are respectively communicated with the clean work area 3 through the at least two spaced return air inlets 43. Optionally, two or more spaced receiving grooves 42 can be arranged, and one or more return air inlets 43 are arranged in the receiving grooves 42. By arranging the spaced return air inlets 43, the uniformity of the return air and the environmental purification rate of the clean work area 3 are improved, so as to improve the micro-environment purification effect.

[0056] In a possible implementation, referring to Figures 4-5 , the temperature control area 51 is provided with a temperature control device 511, and the temperature control device 511 includes an air cavity, which is respectively communicated with the outlet of the return air pipeline 52 and the pipeline of the filtering area 2. Specifically, the return air inlets 43, the return air pipes, the air cavity and the inlet of the air supply pipeline 7 are sequentially communicated to form a return air channel. The air cavity is provided with a refrigeration device and a heating device, and the effective refrigeration area of the refrigeration device and the effective heating area of the heating device at least partially cover the air cavity, so as to heat or cool the internal circulation gas flowing through the air cavity based on the detected gas temperature and the preset temperature required by the micro-environment, so as to maintain a constant temperature environment in the clean work area 3.

[0057] In a possible implementation, the clean work area 3 and / or the air cavity is provided with a temperature detection device, which can detect the gas temperature in the clean work area 3, or detect the gas temperature in the air cavity, or can detect the gas temperature in the clean work area 3 and the air cavity. Preferably, the temperature detection device is arranged in the clean work area 3.

[0058] In some embodiments, the temperature detecting device can include a plurality of temperature sensors, and the control device compares the detected actual temperature in the air cavity with a preset temperature, and starts the refrigeration device to perform refrigeration when the actual temperature is higher than the preset temperature, and starts the heating device to perform heating when the actual temperature is lower than a lowest set value of the preset temperature.

[0059] In possible implementations, the temperature control module also has a gas humidity control function to achieve input of constant-temperature and constant-humidity gas to the air supply pipeline 7.

[0060] In possible implementations, the temperature control device 511 also includes a booster fan, which can provide gas circulation power in the internal circulation air duct to achieve internal circulation of gas in the movable box 1. The booster fan can be arranged in the temperature control device 511, or the booster fan can be connected in series with the air supply pipeline 7 or the return air pipeline 52, or arranged at other positions capable of providing gas circulation power.

[0061] For example, the booster fan can be connected in series with multiple fans at any position in the pipeline to provide sufficient gas circulation power.

[0062] For example, the temperature control device 511 can be, but is not limited to, a gas temperature control air conditioner, a liquid temperature control air conditioner, etc.

[0063] In possible implementations, the temperature control device 511 also includes a condensate water drainage device, which can be, for example, a condensate water pipe, etc., and can be connected to a site drainage pipe or a waste water pool, etc. to facilitate drainage.

[0064] In possible implementations, the gray zone 5 is also provided with a mounting reserved hole, and electrical wiring of electrical equipment, etc. can be sealed by a garden hose to pass from the gray zone 5 into the clean work zone to achieve integration of the whole machine equipment.

[0065] In possible implementations, the clean work zone 3 and / or the air cavity is provided with a humidity control device, which includes a humidity control assembly and a humidity detecting device arranged in the clean work zone 3 and / or the air cavity. The humidity control assembly can receive humidity information of the clean work zone 3 and / or the air cavity fed back by the humidity detecting device, and then adjust the humidity of the micro-environment gas based on the above-mentioned humidity information to achieve the required constant-humidity condition. Preferably, the humidity detecting device is arranged in the clean work zone 3.

[0066] In some embodiments, the gas in the air cavity at least partially flows through the humidity control device before being discharged from the outlet of the temperature control zone 51 to control the humidity of the internal circulation gas and achieve the constant-humidity environment of the clean work zone 3.

[0067] In possible implementations, the air cavity is provided with a purification device, and the gas in the air cavity at least partially flows through the purification device before being discharged from the outlet of the temperature control zone 51 to further purify the internal circulation gas.

[0068] Exemplarily, referring to Figures 4-6 , the workbench 4 comprises a first receiving groove, a second receiving groove, a first return air outlet located in the first receiving groove, and a second return air outlet located in the second receiving groove, the return air pipeline 52 comprises a first return air branch and a second return air branch, the gas in the clean work area 3 enters the first return air branch and the second return air branch through the first return air outlet and the second return air outlet respectively, so as to enter the heat exchange device 511 of the temperature control equipment for heat exchange, and then enter the inlet of the air supply pipeline 7 through the outlet of the temperature control equipment 511, and then enter the filtering area 2 through the first air supply branch, the first air inlet, and the second air supply branch, the second air inlet. The filtered and purified constant temperature and humidity gas enters the clean work area 3.

[0069] In a possible implementation, the workbench 4 further comprises a sealing curtain 44 located in the gap between the operation table 41 and the ash area 5, and in the gap between the receiving groove 42 and the ash area 5, and the clean work area 3 and the ash area 5 are sealed and isolated by the operation table 41, the receiving groove 42 and the sealing curtain 44. In this way, the gaps around the operation table 41 and the receiving groove 42 are filled by the sealing curtain 44, the ash area 5 is separated by the operation table 41, the receiving groove 42 and the sealing curtain 44, and an independent clean work space is formed, thereby improving the cleanliness and temperature and humidity stability of the micro environment.

[0070] Specifically, the constant temperature gas flow passing through the clean work area 3 is sucked into the return air pipeline 52 by the return air outlet 43 arranged in the side receiving groove 42 due to the pressure near the operation table, and then enters the temperature control device 511 of the temperature control area 51 for heat exchange, becomes the target constant temperature gas, and then enters the air supply pipeline 7, and then enters the filtering area 2 through the air inlet for filtering and homogenization, and then reaches the clean work area 3 again, realizing internal circulation.

[0071] In a possible implementation, the movable box body 1 is further provided with an electrical cabinet interface and a display interface to realize the integration of the whole machine equipment, so that the equipment with constant temperature and humidity and cleanliness requirements can be directly integrated and placed in a working environment that cannot be secondarily constructed and modified, thereby realizing the stable operation of the precision equipment.

[0072] In summary, the movable clean micro environment device of the present application can solve the problems of temperature control difficulty, high cost and manufacturing difficulty caused by the fixed large area space design of the existing micro environment device. Through the internal circulation of the gas in the system, the temperature control device 511 can realize the heat exchange of the constant temperature and humidity gas with smaller power, and continuously provide clean air for the whole system. The filtering area 2 can also continuously increase the filtering times of the gas, thereby improving the cleanliness and environmental stability in the box.

[0073] Although the utility model has been described through preferred embodiments, the utility model is not limited to the embodiments described herein, and various changes and variations made without departing from the scope of the utility model are also included.

[0074] In this article, the front, back, up, down and other orientation words are defined with the parts in the figure and the positions of the parts relative to each other in the figure, just to express the technical scheme clearly and conveniently.

[0075] In the case of no conflict, the features in the above embodiments and the embodiments can be combined with each other.

[0076] The above disclosed is only a preferred embodiment of the utility model, of course, cannot limit the scope of the utility model right with this, therefore, the equivalent changes made according to the utility model claims still belong to the scope covered by the utility model.

Claims

1. A mobile clean micro-environment apparatus, characterized by, The movable box (1) comprises a filtering area (2), a clean work area (3), a workbench (4) and a gray area (5) arranged in the movable box (1), the filtering area (2) is communicated with the clean work area (3), and the clean work area (3) is isolated from the gray area (5) through the workbench (4); The workbench (4) comprises an operation table (41), a receiving groove (42) located on one side of the operation table (41) and an air return port (43) exposed to the receiving groove (42); The gray area (5) is provided with a temperature control area (51) and an air return pipeline (52), the inlet of the air return pipeline (52) is communicated with the air return port (43), the outlet of the air return pipeline (52) is communicated with the inlet of the temperature control area (51), and the outlet of the temperature control area (51) is communicated with the pipeline of the filtering area (2); the filtering area (2), the clean work area (3), the air return port (43), the air return pipeline (52) and the temperature control area (51) form an internal circulating air duct in the movable box (1).

2. The mobile clean micro-environment apparatus of claim 1, wherein, The workbench (4) further comprises a sealing curtain (44), a gap between the operation table (41) and the gray area (5), and a gap between the receiving groove (42) and the gray area (5), and the clean work area (3) and the gray area (5) are sealed and isolated through the operation table (41), the receiving groove (42) and the sealing curtain (44).

3. The mobile clean micro-environment apparatus of claim 1, wherein, The outlet of the temperature control area (51) is communicated with the filtering area (2) through an air supply pipeline (7); The air supply pipeline (7) comprises at least one air supply branch (71), the filtering area (2) is provided with at least one air inlet, and the at least one air supply branch (71) is respectively communicated with the filtering area (2) through the at least one air inlet.

4. The mobile clean micro-environment apparatus of claim 1, wherein, The outlet of the temperature control area (51) is communicated with the filtering area (2) through an air supply pipeline (7); The air supply pipeline (7) comprises at least two air supply branches (71), the filtering area (2) is provided with at least two spaced air inlets, and the at least two air supply branches (71) are respectively communicated with the filtering area (2) through the at least two spaced air inlets.

5. The mobile clean micro-environment apparatus of claim 4, wherein, The filtering area (2) is provided with a filter (21) and a uniform air supply port; The airflow entering from the air inlet can enter the clean work area (3) through the uniform air supply port after passing through the filter (21), and the uniform air supply port is a planar air outlet.

6. The mobile clean micro-environment apparatus of claim 5, wherein, The filtering area (2) is provided with at least two filters (21), each filter (21) is communicated with at least one air inlet and is provided with at least one uniform air supply port.

7. The mobile clean micro-environment apparatus of any one of claims 3-6, wherein, The movable box (1) is further provided with an air supply area (6) located above the filtering area (2), and the air supply pipeline (7) is communicated with the filtering area (2) after extending into the air supply area (6).

8. The mobile clean micro-environment apparatus of any one of claims 1-6, wherein, The return air pipeline (52) comprises at least two return air branches (521), and the workbench (4) is provided with at least two spaced return air outlets (43), and the at least two return air branches (521) are respectively communicated with the clean work area (3) through the at least two spaced return air outlets (43).

9. The mobile clean micro-environment apparatus of any one of claims 1-6, wherein, The temperature control area (51) is provided with a temperature control device (511), The temperature control device (511) comprises an air cavity, the air cavity is respectively communicated with the outlet of the return air pipeline (52) and the pipeline of the filtering area (2), and the air cavity is provided with a refrigeration device and a heating device, and an effective refrigeration area of the refrigeration device and an effective heating area of the heating device at least partially cover the air cavity.

10. The mobile clean micro-environment apparatus of claim 9, wherein, The temperature control device (511) further comprises a booster fan, and the booster fan can provide a gas circulation power in the inner circulation air duct.

11. The mobile clean micro-environment apparatus of claim 9, wherein, The temperature control device (511) further comprises a condensate water drainage device.

12. The mobile clean micro-environment apparatus of claim 9, wherein, The movable clean micro-environment device satisfies at least one of the following characteristics: The clean work area (3) and / or the air cavity is provided with a temperature detection device; The clean work area (3) and / or the air cavity is provided with a humidity control device; The air cavity is provided with a purification device, and at least part of the gas in the air cavity flows through the purification device before being discharged from the outlet of the temperature control area (51).

13. The mobile clean micro-environment apparatus of any one of claims 1-6, wherein, The movable box (1) comprises a shell (11), a support (12) and a moving device (13), the shell (11) is arranged on the support (12), the moving device (13) is located at the bottom of the shell (11), and the support (12) and the shell (11) can be moved through the moving device (13).

14. The mobile clean micro-environment apparatus of any one of claims 1-6, wherein, The movable box (1) further comprises an instrument placing table (8), and the instrument placing table (8) is arranged above the operation table (41) in a spaced manner.

15. The mobile clean micro-environment apparatus of any one of claims 1-6, wherein, The gray area (5) is further provided with a mounting reserved hole.

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