Lens assembly and exposure device
By using threaded connections and sealing designs for the fixing ring and pressure ring, the problem of colloid evaporation and sedimentation in the lens box is solved, ensuring the light transmittance and exposure accuracy of the lens and improving the stability of the exposure device.
Patent Information
- Application Number
- CN202520624429.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-03
- Publication Date
- 2026-02-27
- Estimated Expiration
- 2035-04-03
AI Technical Summary
In existing exposure devices, lenses are fixed in the lens box by adhesive bonding. When the temperature rises, the adhesive evaporates and settles on the lens surface, resulting in reduced light transmittance and increased stray light, which affects the clarity and accuracy of the exposure.
The lens is fixed by a retaining ring, a first pressure ring, and a second pressure ring, avoiding glue fixation. Threaded connections and sealing rings are used to prevent the volatile adhesive from settling and to ensure the lens's light transmittance and clarity.
The design of the fixing ring and the pressure ring avoids the evaporation and sedimentation of the colloid, maintains the light transmittance and exposure accuracy of the lens, and improves the stability and effect of the exposure device.
Smart Images
Figure CN223955955U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of exposure device, concretely relates to a lens assembly and exposure device. BACKGROUND
[0002] In the related industry such as silk screen printing and semiconductor, exposure is a very important link, and the stability of exposure device has important influence on exposure effect. The existing exposure device generally fixes the lens in the lens box through the mode of colloid bonding, but when laser passes through the lens box, the temperature in the lens box will be increased, causing the colloid to volatilize, and after the volatilized colloid is deposited on the lens surface, the transmittance of the lens is reduced, the stray light is increased, and the clarity and precision of exposure are reduced.
[0003] The information disclosed in this Background section is only for the purpose of increasing the understanding of the background of the present utility model and should not be taken as an acknowledgement or any form of suggestion that this information forms prior art with respect to the present utility model. SUMMARY
[0004] The utility model aims at providing a lens assembly, which is used to solve the problem that the colloid in the lens box is easy to volatilize and deposit on the lens surface.
[0005] In order to achieve the above-mentioned purpose, one embodiment of the utility model provides a lens assembly, which comprises a lens box, a fixing ring, a lens, a first compression ring and a second compression ring. The fixing ring is arranged in the lens box, the lens is arranged on the fixing ring, the first compression ring and the second compression ring are detachably connected in the lens box, and are arranged on the two sides of the fixing ring along the axial direction of the fixing ring, so as to limit the movement of the fixing ring and the lens along the axial direction of the lens box.
[0006] In one or more embodiments of the utility model, the lens is screw-connected to the inner ring of the fixing ring.
[0007] In one or more embodiments of the utility model, the fixing ring comprises a ring part and a plurality of boss parts protruding axially from the end face of the ring part, and the lens is limited between the plurality of boss parts and the first compression ring or the second compression ring.
[0008] In one or more embodiments of the utility model, the boss part is provided with an arc surface for contacting the lens.
[0009] In one or more embodiments of the utility model, the first compression ring is screw-connected to the inner wall of the lens box.
[0010] In one or more embodiments of the utility model, the second compression ring is screw-connected to the inner wall of the lens box.
[0011] In one or more embodiments of the present application, the fixed ring is fixedly connected with the inner wall of the lens box.
[0012] In one or more embodiments of the present application, the lens assembly further comprises a first sealing ring arranged between the first compression ring and the fixed ring.
[0013] In one or more embodiments of the present application, the lens assembly further comprises a second sealing ring arranged between the second compression ring and the fixed ring.
[0014] In one or more embodiments of the present application, the inner diameter of the fixed ring is greater than the inner diameter of the first compression ring.
[0015] In one or more embodiments of the present application, the inner diameter of the fixed ring is greater than the inner diameter of the second compression ring.
[0016] In one or more embodiments of the present application, the inner diameter of the first compression ring is equal to the inner diameter of the second compression ring.
[0017] In one or more embodiments of the present application, the first compression ring abuts against the fixed ring along the axial direction thereof.
[0018] In one or more embodiments of the present application, the second compression ring abuts against the fixed ring along the axial direction thereof.
[0019] In one or more embodiments of the present application, the first compression ring abuts against the lens along the axial direction thereof.
[0020] In one or more embodiments of the present application, the second compression ring abuts against the lens along the axial direction thereof.
[0021] In one or more embodiments of the present application, the lens assembly comprises a plurality of fixed rings, a plurality of lenses, a plurality of first compression rings and a plurality of second compression rings arranged one-to-one.
[0022] The present application also provides an exposure device, which comprises the lens assembly.
[0023] Compared with the prior art, the present application fixes the position of the lens through the fixed ring, the first compression ring and the second compression ring, which can avoid fixing the lens by dispensing glue around the lens, prevent the glue from volatilizing and settling on the surface of the lens, and ensure the transmittance, definition and exposure accuracy of the lens. BRIEF DESCRIPTION OF DRAWINGS
[0024] In order to make the technical personnel in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings accompanying the present application. Obviously, the described embodiments are only some embodiments of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor should belong to the protection scope of the present application.
[0025] Figure 1 A structure diagram of the lens assembly in the first embodiment of the present application is shown in the figure.
[0026] Figure 2 A structure diagram of the lens assembly in the second embodiment of the present application is shown in the figure.
[0027] Figure 3 A structure diagram of the lens assembly in the third embodiment of the present application is shown in the figure.
[0028] Figure 4 A structure diagram of the lens assembly in the third embodiment of the present application is shown in the figure.
[0029] Figure 5 A structure diagram of the lens assembly in the third embodiment of the present application is shown in the figure.
[0030] Main figure mark explanation: 1, lens box, 2, fixing ring, 21, ring part, 22, boss part, 221, arc surface, 3, lens, 4, first compression ring, 5, second compression ring, 6, first sealing ring, 7, second sealing ring, 8, laser, 9, reflecting mirror, 10, DMD. DETAILED DESCRIPTION
[0031] In order to make the technical personnel in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings accompanying the present application. Obviously, the described embodiments are only some embodiments of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor should belong to the protection scope of the present application.
[0032] In the description of the present application, it should be understood that the terms "top", "bottom", "upper", "lower" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.
[0033] The terms "first", "second", "third", etc. are used only for descriptive purposes and should not be construed as implying or suggesting relative importance or an indicated number of the technical features. Thus, the features defined with "first", "second", etc. can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise explicitly specified.
[0034] Embodiment one
[0035] Referring to Figure 1 As shown in the figure, the embodiment provides a lens assembly, which comprises a lens box 1, a fixing ring 2, a lens 3, a first compression ring 4 and a second compression ring 5. The fixing ring 2, the lens 3, the first compression ring 4 and the second compression ring 5 are all arranged in the lens box 1. Among them, the lens 3 is installed on the fixing ring 2, the first compression ring 4 and the second compression ring 5 are detachably connected in the lens box 1, the first compression ring 4, the fixing ring 2 and the second compression ring 5 are arranged in sequence along the axial direction of the lens box 1, that is, the first compression ring 4 and the second compression ring 5 are respectively arranged on both sides of the fixing ring 2 along the axial direction of the fixing ring 2, which is used to limit the movement of the fixing ring 2 and the lens 3 along the axial direction of the lens box 1, fix the position of the fixing ring 2 and the lens 3, and avoid the fixing ring 2 and the lens 3 from moving randomly during work.
[0036] According to the above structure design, after the position of the lens 3 is fixed by the fixing ring 2, the first compression ring 4 and the second compression ring 5, the lens 3 can be fixed by dispensing glue in the circumferential direction of the lens 3, so that when the temperature in the lens box 1 rises due to the light passing through the lens box 1, the glue will not volatilize, thereby avoiding the volatilized glue from settling on the surface of the lens 3, and ensuring the transmittance, clarity and exposure accuracy of the lens 3.
[0037] Referring to Figure 1 As shown in the figure, in the embodiment, the inner ring of the fixing ring 2 is provided with a first internal thread, and the circumferential direction of the lens 3 is provided with a first external thread, and the lens 3 can be threadedly connected to the inner ring of the fixing ring 2 through the cooperation of the first internal thread and the first external thread, so as to facilitate the installation and disassembly of the fixing ring 2 and the lens 3.
[0038] Further, referring to Figure 1 As shown in the figure, the fixing ring 2 is fixedly connected with the inner wall of the lens box 1, so as to limit the rotation of the fixing ring 2 when the lens 3 is screwed onto the fixing ring 2. Specifically, the lens box 1 and the fixing ring 2 can be fixed together by an integral molding method.
[0039] In other embodiments, according to the material of the fixing ring 2, it can be fixed in the lens box 1 by using processes such as fusion welding and welding. Alternatively, the fixing ring 2 can also be fixed in the lens box 1 by installing bolts from the outside of the lens box 1 along the radial direction.
[0040] Referring toFigure 1 As shown in the figure, the outer ring of the first compression ring 4 is provided with a second external thread, and the corresponding part of the inner wall of the lens box 1 is provided with a second internal thread. The first compression ring 4 is detachably connected to the inner wall of the lens box 1 through the cooperation of the second external thread and the second internal thread.
[0041] Similarly, the outer ring of the second compression ring 5 is provided with a third external thread, and the corresponding part of the inner wall of the lens box 1 is provided with a third internal thread. The second compression ring 5 is detachably connected to the inner wall of the lens box 1 through the cooperation of the third external thread and the third internal thread.
[0042] Referring to Figure 1 As shown in the figure, the lens 3 in this embodiment is a convex lens 3, the inner diameter of the first compression ring 4 is equal to the inner diameter of the second compression ring 5, and the inner diameter of the fixed ring 2 is greater than the inner diameter of the first compression ring 4 and the second compression ring 5. The first compression ring 4 and the second compression ring 5 are both abutted to the lens 3 along the axial direction thereof.
[0043] Specifically, the edge of the inner ring of the first compression ring 4 is abutted to the lens 3 on the side close to the lens 3. Similarly, the edge of the inner ring of the second compression ring 5 is abutted to the lens 3 on the other side close to the lens 3.
[0044] Further, the first compression ring 4 and the second compression ring 5 are respectively abutted to the fixed ring 2 along the axial direction thereof.
[0045] Referring to Figure 1 As shown in the figure, the lens assembly in this embodiment further includes a first sealing ring 6 and a second sealing ring 7. The first sealing ring 6 is arranged between the first compression ring 4 and the fixed ring 2. The lens assembly further includes a second sealing ring 7 arranged between the second compression ring 5 and the fixed ring 2. The gap between the fixed ring 2 and the first compression ring 4 and the second compression ring 5 can be sealed by the first sealing ring 6 and the second sealing ring 7, so as to avoid the dust and other particulate matters in the lens box 1 from entering the gap between the fixed ring 2 and the first compression ring 4 and the second compression ring 5.
[0046] Embodiment Two
[0047] Referring to Figure 2 As shown in the figure, the lens assembly in this embodiment includes a lens box 1, a plurality of fixed rings 2, a plurality of lenses 3, a plurality of first compression rings 4 and a plurality of second compression rings 5. The plurality of fixed rings 2, the plurality of lenses 3, the plurality of first compression rings 4 and the plurality of second compression rings 5 are correspondingly arranged one by one, that is, they are divided into a plurality of lens groups according to one fixed ring 2, one lens 3, one first compression ring 4 and one second compression ring 5. The plurality of lens groups are distributed in the lens box 1 at intervals.
[0048] Embodiment Three
[0049] Referring to Figure 3As shown, the embodiment provides a lens assembly, which is different from the embodiment one in that the fixing ring 2 in the embodiment comprises a ring part 21 and a plurality of boss parts 22 protruding axially from the end surface of the ring part 21, and the lens 3 is limited between the plurality of boss parts 22 and the first pressing ring 4 or between the plurality of boss parts 22 and the second pressing ring 5.
[0050] Preferably, the fixing ring 2 is provided with three or more boss parts 22.
[0051] Further, referring to Figure 4 As shown, in the embodiment, the boss part 22 is provided with a contact surface at the part in contact with the lens 3, the contact surface is an arc surface 221, the arc surface 221 is matched with the shape of the surface of the lens 3, and further closely adheres to the surface of the lens 3, thereby increasing the contact area of the boss part 22 and the lens 3, and ensuring that the boss part 22 can stably support the lens 3.
[0052] In other embodiments, if the surface of the lens 3 is provided with a protective structure for protecting the lens 3 and for contacting the boss part 22, the shape of the contact surface on the boss part 22 needs to be matched with the surface of the protective structure.
[0053] Embodiment four
[0054] Referring to Figure 5 As shown, the embodiment provides an exposure device, which comprises a laser 8, a mirror 9, a DMD 10 (digital micro mirror) and a lens assembly arranged in sequence along the light path, and the lens assembly is the lens assembly in any one of the embodiments one to three. The mirror 9 reflects the laser emitted by the laser 8 to the DMD 10, and the DMD 10 reflects the laser to the lens 3 of the lens assembly, and the laser is projected onto the corresponding workpiece after passing through the lens 3.
[0055] It is apparent for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, but can be implemented in other concrete forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered in all aspects as exemplary and non-restrictive, and the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and range of equivalent elements of the claims are intended to be embraced in the present application. Any reference signs in the claims should not be considered as limiting the claims involved.
[0056] In addition, it should be understood that, although the present specification is described in terms of embodiments, not every embodiment exhibits only one independent technical solution, and the present specification is described in this manner only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.
Claims
1. A lens assembly, characterized by, The lens assembly comprises: a lens box (1); a fixing ring (2) arranged in the lens box (1); a lens (3) arranged on the fixing ring (2); a first compression ring (4) and a second compression ring (5) detachably connected in the lens box (1) and arranged on both sides of the fixing ring (2) along the axial direction of the fixing ring (2), thereby limiting the axial movement of the fixing ring (2) and the lens (3) along the lens box (1).
2. The lens assembly of claim 1, wherein, The lens (3) is threadedly connected to the inner ring of the fixing ring (2).
3. The lens assembly of claim 1, wherein, The fixing ring (2) comprises a ring portion (21) and a plurality of boss portions (22) protruding axially from the end face of the ring portion (21), and the lens (3) is limited between the plurality of boss portions (22) and the first compression ring (4) or the second compression ring (5).
4. The lens assembly of claim 3, wherein, An arc surface (221) for contacting the lens (3) is arranged on the boss portion (22).
5. The lens assembly of claim 1, wherein, The first compression ring (4) is threadedly connected to the inner wall of the lens box (1); and / or, The second compression ring (5) is threadedly connected to the inner wall of the lens box (1); and / or, The fixing ring (2) is fixedly connected to the inner wall of the lens box (1).
6. The lens assembly of claim 1, wherein, The lens assembly further comprises a first sealing ring (6) arranged between the first compression ring (4) and the fixing ring (2); and / or, The lens assembly further comprises a second sealing ring (7) arranged between the second compression ring (5) and the fixing ring (2).
7. The lens assembly of claim 1, wherein, The inner diameter of the fixing ring (2) is greater than the inner diameter of the first compression ring (4); and / or, The inner diameter of the fixing ring (2) is greater than the inner diameter of the second compression ring (5); and / or, The inner diameter of the first compression ring (4) is equal to the inner diameter of the second compression ring (5).
8. The lens assembly of claim 1, wherein, The first compression ring (4) abuts the fixing ring (2) along the axial direction thereof; and / or, The second compression ring (5) abuts the fixing ring (2) along the axial direction thereof; and / or, The first compression ring (4) abuts the lens (3) along the axial direction thereof; and / or, The second compression ring (5) abuts the lens (3) along the axial direction thereof.
9. The lens assembly of claim 1, wherein, The lens assembly comprises a one-to-one corresponding arrangement of a plurality of fixing rings (2), a plurality of lenses (3), a plurality of first compression rings (4), and a plurality of second compression rings (5).
10. An exposure apparatus characterized by comprising: The exposure device comprises the lens assembly according to any one of claims 1 to 9.