Emergency stop device and emergency stop system

Abstract

The utility model discloses an emergency stop device and an emergency stop system, and relates to the technical field of semiconductors. The emergency stop device comprises a plurality of output ends, wherein at least one output end is used for being electrically connected with external plugs of at least one external emergency stop button in a one-to-one correspondence manner; the first input end is configured to be electrically connected with an alternating current power distribution cabinet; the control nodes in the output ends are sequentially connected in series to form a conduction branch, and the conduction branch is electrically connected with the first input end to control the power supply state of the alternating current power distribution cabinet; and when any emergency stop button is pressed down, the control node in the corresponding output end is disconnected, and the conduction branch is disconnected, so that the AC power distribution cabinet stops supplying power. According to the embodiment of the invention, equipment safety protection can be reliably realized.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductors, and particularly relates to an emergency stop device and an emergency stop system. BACKGROUND

[0002] At present, in the semiconductor chip industry, an electron beam wafer detection device is a key link for ensuring product yield. With the continuous development of semiconductor technology, the complexity and precision of the electron beam wafer detection device are also continuously improved. However, during the operation of the device, various unexpected situations may occur, such as device failure, human operation error, etc., which may cause serious damage to the device, personnel and products. Therefore, when the above unexpected situations occur, it is crucial to accurately and reliably achieve the emergency stop of the electrical equipment to protect the safety of the device, personnel and products.

[0003] However, the current emergency stop scheme for the electrical equipment such as the electron beam wafer detection device still has many defects such as instability and insecurity, and the industry still urgently needs a new type of emergency stop scheme to achieve the purpose of reliably protecting the safety of the device, personnel and products. CONTENT OF THE INVENTION

[0004] The application embodiment provides an emergency stop device and an emergency stop system, which can fully and reliably achieve multi-directional safety protection.

[0005] In a first aspect, the application embodiment provides an emergency stop device, which comprises:

[0006] a plurality of output terminals, at least one output terminal being electrically connected one-to-one with an external plug of at least one emergency stop button;

[0007] a first input terminal configured to be electrically connected with an alternating current power distribution cabinet; control nodes in each output terminal are connected in series to form a conduction branch, and the conduction branch is electrically connected with the first input terminal to control the power supply state of the alternating current power distribution cabinet;

[0008] In the case that any emergency stop button is pressed, the control node in the corresponding output terminal is disconnected, and the conduction branch is disconnected, so that the alternating current power distribution cabinet stops power supply.

[0009] Based on the same inventive concept, in a second aspect, the application embodiment provides an emergency stop system, which comprises at least one emergency stop button, at least one external plug corresponding to the at least one emergency stop button, and an emergency stop device according to any one of the preceding first aspect embodiments of the application; the emergency stop device comprises:

[0010] a plurality of output terminals, at least one output terminal being electrically connected one-to-one with an external plug of at least one emergency stop button;

[0011] The first input end is configured to be electrically connected with the AC power distribution cabinet; the control nodes in each output end are connected in series to form a conduction branch, and the conduction branch is electrically connected with the first input end to control the power supply state of the AC power distribution cabinet.

[0012] In the case where any emergency stop button is pressed, the control node in the corresponding output end is disconnected, and the conduction branch is disconnected, so that the AC power distribution cabinet stops power supply.

[0013] The emergency stop device and the emergency stop system provided by the embodiment of the present application can flexibly connect at least one external emergency stop button to the output end of the module through the corresponding external plug. The first input end can serve as a relay between the output end and the AC power distribution cabinet, and can meet the requirement of electrically connecting the multiple output ends with the AC power distribution cabinet. The control nodes in the multiple output ends are connected in series to form a conduction branch, and the conduction branch is electrically connected with the first input end to control the power supply state of the AC power distribution cabinet. In this way, when the emergency stop button is pressed, the control node in the corresponding output end can be quickly disconnected, the conduction branch is cut off, and the AC power distribution cabinet is stopped from power supply through the first input end.

[0014] The emergency stop device and the emergency stop system provided by the embodiment of the present application can realize the centralized setting of multiple emergency stop buttons in a modular manner, and can fully and reliably realize multidirectional safety protection. When the corresponding physical module of the emergency stop device is faulty, the module can be directly replaced to efficiently reduce the maintenance time cost. The first input end can fully reduce the number of wirings on the AC power distribution cabinet, avoid the wiring complexity caused by the need of wiring each emergency stop button in the AC power distribution cabinet, effectively reduce the wiring difficulty and space occupation in the AC power distribution cabinet, and is convenient to maintain. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiments of the present application will be briefly introduced. Those skilled in the art can obtain other drawings according to these drawings without creating any creative labor.

[0016] Figure 1 is a structural schematic diagram of an emergency stop device provided by an embodiment of the present application;

[0017] Figure 2 is a structural schematic diagram of an emergency stop device provided by another embodiment of the present application;

[0018] Figure 3 is a structural schematic diagram of an emergency stop device provided by another embodiment of the present application;

[0019] Figure 4 is a structural schematic diagram of an emergency stop device provided by another embodiment of the present application;

[0020] Figure 5 is a structural schematic diagram of an emergency stop device provided by another embodiment of the present application;

[0021] Figure 6 is a structural schematic diagram of an emergency stop system provided by an embodiment of the present application;

[0022] Figure 7 is a structural schematic diagram of an external plug provided by an embodiment of the present application;

[0023] Figure 8 is a structural schematic diagram of an external plug provided by another embodiment of the present application;

[0024] Figure 9 is a structural schematic diagram of a short plug provided by an embodiment of the present application. DETAILED DESCRIPTION

[0025] The features and exemplary embodiments of the various aspects of the present application will be described in detail below with reference to the drawings. To make the purpose, technical solutions and advantages of the present application more clear, the present application will be further described in detail below with reference to the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, but not to limit the present application. The present application can be implemented without some of the specific details by those skilled in the art. The following description of the embodiments is only to provide a better understanding of the present application by showing examples of the present application.

[0026] It should be noted that, in this document, relational terms such as first and second, and the like, are used solely to distinguish one entity or action from another entity or action, without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without more limitations, an element preceded by "comprises... a" does not, without more constraints, foreclose the existence of additional identical elements in the process, method, article, or apparatus that comprises the stated elements.

[0027] It should be understood that the term "and / or" used herein is only to describe an association relationship of associated objects, which means that there can be three relationships, for example, A and / or B can represent three cases of A existing alone, A and B existing simultaneously, and B existing alone. In addition, the character " / " herein generally represents an "or" relationship between the front and rear associated objects.

[0028] It should be noted that the transistor in the embodiments of the present application can be an N-type transistor or a P-type transistor. For the N-type transistor, the on level is high and the off level is low. That is, when the gate of the N-type transistor is high, the first pole and the second pole are turned on, and when the gate of the N-type transistor is low, the first pole and the second pole are turned off. For the P-type transistor, the on level is low and the off level is high. That is, when the control pole of the P-type transistor is low, the first pole and the second pole are turned on, and when the control end of the P-type transistor is high, the first pole and the second pole are turned off. In the specific implementation, the gate of each transistor is used as the control pole, and according to the signal of the gate of each transistor and its type, the first pole can be used as the source pole and the second pole as the drain pole, or the first pole can be used as the drain pole and the second pole as the source pole, which is not distinguished here. In addition, the on level and the off level in the embodiments of the present application are generic, the on level refers to any level that can turn on the transistor, and the off level refers to any level that can turn off / turn off the transistor.

[0029] In the embodiments of the present application, the term "electrically connected" can mean that two components are directly electrically connected, or that two components are electrically connected via one or more other components.

[0030] In the embodiments of the present application, the first node, the second node and the third node are only defined for the convenience of describing the circuit structure, and the first node, the second node and the third node are not an actual circuit unit.

[0031] Various modifications and changes can be made to the present application without departing from the spirit or scope of the present application, which will be apparent to those skilled in the art. Therefore, the present application intends to cover the modifications and changes of the present application falling within the scope of the corresponding claims (claimed technical solutions) and their equivalents. It should be noted that the embodiments provided by the embodiments of the present application can be combined with each other without contradiction.

[0032] Before describing the technical solutions provided by the embodiments of the present application, in order to facilitate the understanding of the embodiments of the present application, the present application first specifically describes the problems existing in the related art:

[0033] As mentioned above, during the operation of the device, the emergency stop of the electrical equipment can be accurately and reliably realized when encountering an emergency situation, which is crucial for ensuring the safety of the device, personnel and products. For example, the production environment of semiconductor chips usually involves dangerous factors such as high voltage, high temperature and high radiation. If the electron beam wafer detection device encounters an abnormal situation during operation, it may cause harm to the operator, and a reliable emergency stop scheme can stop the device from running at the first time to avoid injury to the personnel, thereby ensuring the safety of the personnel.

[0034] For another example, the electron beam wafer detection device is usually expensive and has very high requirements for precision and stability. If the device malfunctions during operation, continued operation may cause further damage to the device, and a reliable emergency stop scheme can stop the device in time to reduce the extent of damage to the device and reduce maintenance costs.

[0035] For another example, the wafer is a core component of semiconductor products, and its quality directly affects the performance of the final product. If the electron beam wafer detection device encounters a problem during detection, it may result in incorrect detection results, thereby affecting product quality, and a reliable emergency stop scheme can avoid such situations and fully ensure product quality.

[0036] However, the inventors of the present application have found that when performing emergency stop protection, specifically, the emergency stop button directly controls the main circuit breaker of the device. If the main circuit breaker uses an AC coil, the system protection circuit and the Emergency Machine Off (EMO) circuit controlled by the emergency stop button are controlled by an AC 220V voltage. This scheme has many defects, as follows:

[0037] (1) The main circuit breaker uses a 220V voltage coil, and the high voltage is prone to electric shock risk;

[0038] (2) The circuit breaker and the relay are ordinary relays, and the long electric shock time is prone to sticking or misoperation;

[0039] (3) The control circuit is entirely connected in series, which is not convenient when adding or removing emergency stop buttons, is not conducive to maintenance, and is not easy to reserve. For example, if the client needs to add several additional emergency stop buttons (EMO), the entire machine needs to be powered off to connect the control circuit in series;

[0040] (4) The control circuit and the main circuit use a cabinet design, and once a fault occurs, it can only be solved on site, and if the fault point cannot be found, the machine cannot be replaced and restored for operation in time.

[0041] Therefore, the above emergency stop scheme still has many deficiencies in guaranteeing the safety of equipment, personnel and products, and is not conducive to reliably achieving emergency stop of the equipment. In view of the above, how to more reliably achieve emergency stop of the equipment to fully guarantee the safety of equipment, personnel and products is a problem to be solved in the industry at present.

[0042] To solve the above technical problems, the embodiments of the present application provide an emergency stop device and an emergency stop system. First, an emergency stop device provided by the embodiments of the present application is introduced.

[0043] Figure 1 is a structural schematic diagram of an emergency stop device 100 provided by an embodiment of the present application.

[0044] As shown in Figure 1 , the embodiments of the present application provide an emergency stop device 100, as shown in Figure 1 , the emergency stop device 100 provided by the embodiments of the present application comprises:

[0045] a plurality of output terminals, at least one output terminal being electrically connected one-to-one with an external plug of at least one emergency stop button. Taking the number of output terminals as 8 and the number of emergency stop buttons as 5 as an example, Figure 1 the plurality of output terminals shown in the figure are J1-J8, and the at least one emergency stop button is SW1-SW5. Among them, the at least one emergency stop button can be respectively led out through a wire harness to correspond to the external plug.

[0046] a first input terminal P1, the first input terminal P1 being configured to be electrically connected with an alternating current distribution cabinet 200; control nodes in each output terminal are connected in series to form a conduction branch, and the conduction branch is electrically connected with the first input terminal P1 to control the power supply state of the alternating current distribution cabinet 200.

[0047] In the case that any emergency stop button is pressed, the control node in the corresponding output terminal is disconnected, and the conduction branch is disconnected, so that the alternating current distribution cabinet 200 stops power supply.

[0048] In one example, as shown in Figure 1 , the alternating current distribution cabinet 200 can be specifically used to supply power to a power consumption device 300. The power consumption device 300 is, for example, an electron beam defect detection device, etc., which is not strictly limited here.

[0049] The alternating current distribution cabinet 200 can receive high-voltage power supply from a transformer or a line side, and reasonably distribute the electric energy to the power consumption device 300 through internal switches, circuit breakers and protection devices, so as to realize power supply to the power consumption device 300. The alternating current distribution cabinet 200 outputs 220V alternating current or 380V alternating current, which can be specifically determined according to application scenarios and equipment requirements.

[0050] In this embodiment, by integrating multiple output terminals and the first input terminal P1 into the emergency stop device 100, at least one external emergency stop button can be flexibly connected to the output terminal of the module via a wire harness leading out a corresponding external plug. Figure 1 In this device, the external plug is inserted into the corresponding output terminal of the emergency stop device 100 via a plug-in method. The output terminal can be implemented in the form of a socket.

[0051] The emergency stop button and the external plug can be connected by a prefabricated cable bundle, which can effectively reduce the difficulty and time of wiring, reduce the actual product size of the emergency stop device 100, and has a lower cost and simpler wiring operation.

[0052] The aforementioned first input terminal P1 can serve as a transfer function between the output terminal and the AC distribution cabinet 200, meeting the electrical connection requirements of multiple output terminals and the AC distribution cabinet 200. The control nodes in each of the multiple output terminals are connected in series to form a conductive branch. Figure 1 (Not shown in the diagram), this conducting branch is connected to both ends of the first input terminal P1. It should be noted that the control node in the output terminal can be understood as a physical connection point (such as a switch or relay). When the control node is disconnected, it will cut off the normal transmission of electrical signals in the conducting circuit, causing the relevant circuits or equipment to stop working.

[0053] In this way, when the emergency stop button is pressed, the control node in the corresponding output terminal can quickly respond and disconnect, thereby breaking the original conductive branch and feeding back to the AC distribution cabinet 200 through the first input terminal P1, so that the AC distribution cabinet 200 stops supplying power to the electrical equipment 300.

[0054] For example, combined Figure 1 As shown, if the emergency stop button SW3 is pressed, the control node in the output terminal J3 corresponding to the emergency stop button SW3 is disconnected, thereby disconnecting the conduction branch formed by the series connection of control nodes in multiple output terminals J1 to J8. This disconnection causes a change in the electrical signal transmitted to the AC distribution cabinet 200 via the first input terminal P1, and under these circumstances, the AC distribution cabinet 200 cuts off the power supply to the electrical equipment 300.

[0055] When connecting the first input terminal P1 to the AC distribution cabinet 200, prefabricated cable bundles can also be used to facilitate a quick and easy electrical connection between the two. It should be understood that the specifications, dimensions, and models of the cables between the emergency stop button and the external plug, as well as the cables between the first input terminal P1 and the AC distribution cabinet 200, can be determined according to different cabling requirements and are not strictly limited here.

[0056] It should be noted that in a specific application, the emergency stop device 100 is installed in the power distribution cabinet in the form of a module for the convenience of installation and maintenance. The emergency stop device 100 is small in size and easy to install. When the emergency stop device 100 fails, the module can be replaced to efficiently reduce the maintenance time cost.

[0057] The shell of the emergency stop device 100 described above can adopt an aluminum alloy shell to facilitate the timely transmission of internal heat to the shell surface. The internal injection molding process is used to achieve IP68 dustproof and waterproof, and at the same time, shockproof and drop-proof, prevent internal circuit looseness and pollution, thereby improving the service life of the device.

[0058] The emergency stop device 100 of the embodiment of the present application integrates multiple output terminals and a first input terminal P1 in the emergency stop device 100. At least one external emergency stop button can be flexibly connected to the output terminals of the module through the corresponding external plug. The first input terminal P1 can serve as a switching function between the output terminals and the AC power distribution cabinet 200, and can meet the demand of electrical connection between multiple output terminals and the AC power distribution cabinet 200. The control nodes in the multiple output terminals are connected in series to form a conduction branch connected to both ends of the first input terminal P1. In this way, when the emergency stop button is pressed, the control node in the corresponding output terminal can quickly respond to disconnection, the conduction branch is cut off, and feedback is provided to the AC power distribution cabinet 200 through the first input terminal P1, so that the AC power distribution cabinet 200 stops power supply.

[0059] The emergency stop device 100 described above provided by the embodiment of the present application realizes the centralized setting of multiple emergency stop buttons in a modular manner, which can effectively cut off the power supply of the entire device in time, and can stop the loss in time when the device is about to suffer greater loss, so that the safety protection in multiple directions can be fully and reliably realized. When the corresponding physical module of the emergency stop device 100 fails, it can be directly replaced in the form of a module to efficiently reduce the maintenance time cost. At the same time, the setting of the first input terminal P1 can sufficiently reduce the number of wirings on the AC power distribution cabinet 200, avoid the wiring complexity caused by the need for each emergency stop button to be wired respectively in the AC power distribution cabinet 200, effectively reduce the wiring difficulty and space occupation in the AC power distribution cabinet 200, and be more convenient to maintain.

[0060] Therefore, the emergency stop device 100 provided by the embodiment of the present application is simple and convenient to operate, can ensure the safety and stability of the electrical equipment 300 such as electron beam defect detection equipment during use, can disconnect the power supply to the equipment in time when the equipment fails, thereby reducing personnel casualties and property losses, and finally fully safeguards the safety of the equipment, personnel and products in multiple directions.

[0061] As an optional embodiment, the control node at the output end includes a first normally closed contact and a second normally closed contact; the first input end P1 includes a first adapter pin, a second adapter pin, a third adapter pin, and a fourth adapter pin; a safety relay SR is installed in the AC distribution cabinet 200;

[0062] The first and second adapter pins are configured to electrically connect to the first input contact K1 of the safety relay SR, and the third and fourth adapter pins are configured to electrically connect to the second input contact K2 of the safety relay SR.

[0063] The first normally closed contact of each output terminal is connected in series between the first adapter pin and the second adapter pin;

[0064] The second normally closed contact of each output terminal is connected in series between the third and fourth adapter pins;

[0065] When any emergency stop button is pressed, the first normally closed contact and the second normally closed contact of the corresponding output terminal switch from the normally closed state to the open state, the first input contact K1 and the second input contact K2 open, causing the output contact of the safety relay SR to open, and the AC distribution cabinet 200 to stop supplying power.

[0066] like Figure 2 As shown, a safety relay SR is installed in the AC distribution cabinet 200. The safety relay SR includes two input contacts: a first input contact K1 and a second input contact K2. The first input contact K1 of the safety relay SR is electrically connected to the first and second transition pins of the first input terminal P1, and the second input contact K2 of the safety relay SR is electrically connected to the third and fourth transition pins of the first input terminal P1. The output contact of the safety relay SR is set in the control circuit. When the control circuit is cut off, the AC distribution cabinet 200 stops supplying power to the electrical equipment 300.

[0067] In this embodiment, the first normally closed contacts of each output terminal are connected in series between the first transfer pin and the second transfer pin of the first input terminal P1, and the first transfer pin and the second transfer pin are connected to the first input contact K1 of the safety relay SR.

[0068] Under normal power supply conditions, the first normally closed contacts of each output terminal are connected in series to form a conducting branch, thus keeping the first input contact K1 of the safety relay SR closed. When the emergency stop button is pressed, the corresponding first normally closed contact of the output terminal opens, thereby cutting off the conducting branch formed by multiple closed first normally closed contacts connected in series. This is equivalent to breaking the series branch between the first input contacts K1. The first input contact K1 opens, causing the output contact of the safety relay SR to also open.

[0069] And, by connecting the second normally closed contact of each output in series between the third adapter pin and the fourth adapter pin of the first input P1, the third adapter pin and the fourth adapter pin adapt the second input contact K2 of the safety relay SR.

[0070] In the case of normal power supply operation, the second normally closed contact of each output is connected in series to form a conduction branch, so that the second input contact K2 of the safety relay SR remains closed. When the emergency stop button is pressed, the second normally closed contact of the corresponding output is opened, thereby cutting off the conduction branch formed by the series connection of the plurality of closed first normally closed contacts, which is equivalent to opening the series branch between the second input contacts K2. The opening of the second input contact K2 causes the output contact of the safety relay SR to open.

[0071] In this embodiment, a double-circuit design is adopted when the emergency stop control is set, and the safety relay SR in the AC power distribution cabinet 200 is used as the actuator. Since the safety relay SR has the characteristic of double signal channel detection, the output contact of the safety relay SR will remain normally closed only when the first input contact K1 and the second input contact K2 are both closed, so that the AC power distribution cabinet 200 normally supplies power to the electrical equipment 300.

[0072] When the emergency stop button is pressed, in the case where either or both of the first input contact K1 and the second input contact K2 are opened, the output contact of the safety relay SR is quickly opened, thereby effectively cutting off the power supply of the AC power distribution cabinet 200 to the device, and achieving timely loss prevention when the device is about to suffer greater losses.

[0073] Compared with the current emergency stop scheme mainly using the main circuit breaker, the safety relay SR is used to implement the emergency stop action in this embodiment, which can further reduce the misoperation and electric shock sticking, make the execution more accurate, and avoid frequent shutdown of the device caused by misoperation.

[0074] In addition, in the case of poor contact or other faults in either circuit of the double circuit, such as contact welding, short circuit or short circuit, the other circuit of the double circuit can also work normally to cut off the power supply, thereby avoiding safety accidents caused by single point faults, and fully improving the reliability and safety of the emergency stop action of the device.

[0075] In addition, it should be noted that the safety relay SR is usually powered by a small voltage DC power supply, such as a 24V DC power supply. Therefore, compared with the current 220V voltage power supply main circuit breaker, the emergency stop device 100 effectively avoids personal injury and damage to the device caused by equipment failure or improper operation.

[0076] As an optional embodiment, the number of output terminals is M, and the number of emergency stop buttons is N, where M and N are positive integers, M > 1 and M ≥ N. Please continue to refer to Figure 3 , Figure 3 which specifically shows the pin series connection mode between each output terminal. In combination with Figure 3 as shown, the first normally-closed contact of the output terminal includes a first pin and a second pin, and the second normally-closed contact includes a third pin and a fourth pin.

[0077] In this embodiment, when specifically connecting the internal wires of the socket, the first pin of the i-th output terminal is electrically connected to the second pin of the (i + 1)-th output terminal, and the second pin of the i-th output terminal is electrically connected to the first pin of the (i - 1)-th output terminal, where 1 < i < N and i is a positive integer;

[0078] the second pin of the 1st output terminal is electrically connected to the second transfer pin of the first input terminal P1;

[0079] the first pin of the M-th output terminal is electrically connected to the first transfer pin of the first input terminal P1;

[0080] the third pin of the i-th output terminal is electrically connected to the fourth pin of the (i + 1)-th output terminal, and the fourth pin of the i-th output terminal is electrically connected to the third pin of the (i - 1)-th output terminal;

[0081] the fourth pin of the 1st output terminal is electrically connected to the fourth transfer pin of the first input terminal P1;

[0082] the third pin of the M-th output terminal is electrically connected to the third transfer pin of the first input terminal P1.

[0083] When any emergency stop button is pressed, the first pin and the second pin of the corresponding output terminal switch from the normally-closed state to the open state, and the third pin and the fourth pin switch from the normally-closed state to the open state, and the first input contact K1 and the second input contact K2 are disconnected, causing the output contact of the safety relay SR to be disconnected, and the AC power distribution cabinet 200 stops power supply.

[0084] It should be noted that taking M = 8 and N = 5 as an example, Figure 3 the clockwise direction from J1 to J8 can be understood as the sequential direction of the output terminals from the 1st to the M-th in this application. The (i - 1)-th output terminal is adjacent to the i-th output terminal, and the i-th output terminal and the (i + 1)-th output terminal are adjacent output terminals. For example, if the (i - 1)-th output terminal is Figure 3 J1 in Figure 3 as shown, the i-th output terminal is Figure 3 J2 in Figure 3 as shown, and the (i + 1)-th output terminal is J3. Another example is that if the (i - 1)-th output terminal is Figure 3 J2 in Figure 3 as shown, the i-th output terminal is Figure 3 J3 in

[0085] In this embodiment, the first pin and the second pin of the output end are connected in series between the first adapter pin and the second adapter pin of the first input end P1 in the actual application example.

[0086] In addition, the third pin and the fourth pin of the output end are connected in series between the third adapter pin and the fourth adapter pin of the first input end P1 in the actual application example.

[0087] The pins are connected in series as shown in Figure 3 , thereby connecting multiple output ends in series and connecting through the first input end P1, and finally forming a double-circuit channel corresponding to the first input contact K1 and the second input contact K2 of the safety relay SR in the above-mentioned alternating current power distribution cabinet 200.

[0088] As an optional embodiment, please continue to refer to Figure 3 , the emergency stop device 100 further comprises a plurality of indicator lights, and the plurality of indicator lights are one-to-one associated with the plurality of output ends;

[0089] The output end comprises a fifth pin and a sixth pin, and the fifth pin and the sixth pin constitute a normally closed contact. The first input end P1 comprises a fifth adapter pin and a sixth adapter pin, and the fifth adapter pin and the sixth adapter pin are electrically connected to the positive and negative poles of the direct current power supply, respectively.

[0090] The fifth pin of the output end is electrically connected to one end of the associated indicator light, and the other end of the associated indicator light is electrically connected to the fifth adapter pin. The sixth pin of the output end is electrically connected to the sixth adapter pin.

[0091] Alternatively, the fifth pin of the output end is electrically connected to the fifth adapter pin, the sixth pin of the output end is electrically connected to one end of the associated indicator light, and the other end of the associated indicator light is electrically connected to the sixth adapter pin.

[0092] In the case where any emergency stop button is pressed, the fifth pin and the sixth pin of the corresponding output end are switched from a normally closed state to an open state, so that the indicator light associated with the corresponding output end is extinguished.

[0093] As shown in Figure 3 , taking the number of output ends as 8 for example, the emergency stop device 100 further comprises 8 indicator lights: H1-H8, and the 8 indicator lights are one-to-one associated with the 8 output ends. Specifically, the fifth adapter pin of the first input end P1 is electrically connected to the positive pole of the direct current power supply, the sixth adapter pin is electrically connected to the negative pole of the direct current power supply, and the direct current power supply is connected to the normally closed contact of the output end in Figure 3The direct current power supply is for example a 24V rectifier power supply, and the direct current can be provided by the AC power distribution cabinet 200 after rectification and voltage regulation.

[0094] The fifth pin of the output end is electrically connected with the fifth adapter pin of the first input end P1, and the sixth pin of the output end is electrically connected with the sixth adapter pin of the first input end P1. The associated indicator lamp can be arranged between the fifth pin and the fifth adapter pin according to the positive and negative polarity, or the associated indicator lamp can be arranged between the sixth pin and the sixth adapter pin according to the positive and negative polarity. In this application Figure 3 The fifth pin of the output end is electrically connected with the fifth adapter pin of the first input end P1, and the sixth pin of the output end is electrically connected with the sixth adapter pin of the first input end P1. The associated indicator lamp can be arranged between the fifth pin and the fifth adapter pin according to the positive and negative polarity, or the associated indicator lamp can be arranged between the sixth pin and the sixth adapter pin according to the positive and negative polarity. In this application

[0095] Through the above connection mode, the multiple indicator lamps are connected in parallel between the corresponding fifth adapter pin and sixth adapter pin, which is equivalent to connecting each indicator lamp in the multiple indicator lamps in parallel between the positive and negative poles of the direct current power supply. Whether the different indicator lamps are powered on or not is independent of each other, and is determined only by the switch state between the fifth pin and the sixth pin of the corresponding output end.

[0096] In actual application examples, different emergency stop buttons are arranged at different positions of the machine, such as the front of the equipment (MCfront), the back of the equipment (MC behind), the power equipment rack (Power Rack) or the user operation console (User Console) at the side of the equipment. When the equipment is working normally, the fifth pin and the sixth pin in each output end remain in a normally closed state, and the indicator lamps corresponding to each emergency stop button are lit respectively. In the case of abnormal conditions of the whole machine or electric shock of personnel, the emergency stop button at the nearest position of the personnel will be pressed to cut off the power supply of the whole machine. In this case, the fifth pin and the sixth pin in the corresponding output end are disconnected, which is equivalent to cutting off the parallel circuit of the indicator lamp, so that the corresponding indicator lamp in the emergency stop device 100 is extinguished.

[0097] In this way, the action indication when the emergency stop action is performed is realized by the bright and dark of the indicator lamp, and the on-site personnel can accurately lock the position of the corresponding emergency stop button according to the extinguished indicator lamp, so as to facilitate the on-site personnel to maintain and troubleshoot in time.

[0098] As an optional embodiment, more specifically, the indicator lamp is a light-emitting diode;

[0099] The fifth pin of the output end is electrically connected with the cathode of the light-emitting diode, and the anode of the associated light-emitting diode is electrically connected with the fifth adapter pin;

[0100] Alternatively, the sixth pin of the output end is electrically connected with the anode of the light-emitting diode, and the cathode of the associated light-emitting diode is electrically connected with the sixth adapter pin.

[0101] In a specific application example, a light emitting diode (LED) is used as the indicator light. The light emitting diode generally has high energy conversion efficiency and low cost, thereby reducing the long-term operation power consumption of the device and the replacement cost of the module, and has a long service life, thereby effectively reducing the replacement frequency and maintenance cost of the indicator light in the emergency stop device 100. In addition, the light emitting diode has a compact structure, thereby having strong impact resistance and shock resistance, which is beneficial to fully guarantee the stability of the physical module of the emergency stop device 100.

[0102] In actual connection, the fifth adapter pin of the first input end P1 is electrically connected to the positive pole of the direct current power supply, and the sixth adapter pin is electrically connected to the negative pole of the direct current power supply. Continuing to refer to Figure 4 As shown, by connecting the cathode of the light emitting diode to the fifth pin of the corresponding output end, connecting the anode of the light emitting diode to the fifth adapter pin of the first input end P1, and directly connecting the sixth pin of the corresponding output end to the sixth adapter pin of the first input end P1.

[0103] Alternatively, in other embodiments, the anode of the light emitting diode is electrically connected to the sixth pin of the corresponding output end, the cathode of the light emitting diode is electrically connected to the sixth adapter pin of the first input end P1, and the fifth pin of the corresponding output end is directly electrically connected to the fifth adapter pin of the first input end P1. The two light emitting diode connection modes provided above can effectively guarantee the normal work of the indicator light.

[0104] In one example, when the device is working normally, the indicator lights corresponding to the respective output ends are lit respectively. When the emergency stop button is pressed, the fifth pin and the sixth pin in the corresponding output end are disconnected, which is equivalent to cutting off the parallel circuit in which the indicator light is located, thereby making the corresponding indicator light in the emergency stop device 100 extinguished, which is convenient for on-site personnel to maintain and troubleshoot in time.

[0105] It should be noted that in other embodiments, an organic light emitting diode (OLED) can also be used to realize the above-mentioned indicator light work, which is not strictly limited in the present application.

[0106] As an optional embodiment, continuing to refer to Figure 4 The emergency stop device 100 further includes a second input end P2, the second input end P2 including a first extension pin and a second extension pin; the output end further includes a seventh pin and an eighth pin, the seventh pin and the eighth pin constituting a normally open contact;

[0107] The seventh pin of the output end is electrically connected with the first extension pin, and the eighth pin of the output end is electrically connected with the second extension pin.

[0108] As shown in FIG. 1, the first extension pin and the second extension pin of the second input end P2 are configured to be electrically connected with the power supply device 400, and the power supply device 400 is arranged between the AC power distribution cabinet 200 and the electrical equipment 300, and is used to continue to supply power to the electrical equipment 300 in the case that the AC power distribution cabinet 200 interrupts the power supply to the electrical equipment 300. Figure 5

[0109] In the case that any emergency stop button is pressed, the seventh pin and the eighth pin of the corresponding output end are switched from the normally open state to the closed state, and the power supply device 400 is controlled to stop supplying power to the electrical equipment 300.

[0110] The embodiment will be specifically described below. In the embodiment, in actual production, considering that some electrical equipment 300 is usually also configured with an uninterruptible power supply (UPS) device, the UPS is a power supply system containing an energy storage device, and is mainly composed of an inverter, which can provide constant voltage and constant frequency power supply when the mains power is interrupted, and ensure the normal operation of the equipment. Therefore, the power supply device 400 in the embodiment can be, for example, the above-mentioned UPS device.

[0111] Specifically, the power supply device 400 in the embodiment is arranged between the AC power distribution cabinet 200 and the electrical equipment 300, and can provide AC power to the electrical equipment 300 after rectification and inversion of the AC power output by the AC power distribution cabinet 200. The power supply device 400 is configured with a storage battery, which is pre-charged by AC-DC conversion of the AC power output by the AC power distribution cabinet 200, so that in the case that the AC power distribution cabinet 200 stops outputting AC power, the DC power can be inverted to AC power to continue to supply power to the electrical equipment 300, so as to ensure the normal operation of the electrical equipment 300.

[0112] However, in the case of sudden conditions such as electric shock of personnel, if the power supply device 400 continues to supply power to the electrical equipment 300 in the case that the AC power distribution cabinet 200 is powered off, the personal safety may not be fully guaranteed. Therefore, in order to improve the personal operation safety level, the application also extends to set an emergency stop function for the power supply device 400.

[0113] Specifically, in order to facilitate the extension control of the power supply device 400, the emergency stop device 100 further comprises a second input end P2, and the second input end P2 comprises a first extension pin and a second extension pin, and the first extension pin and the second extension pin are configured to be electrically connected with the power supply device 400. As shown in FIG. 1, the first extension pin and the second extension pin of the second input end P2 are configured to be electrically connected with the power supply device 400, and the power supply device 400 is arranged between the AC power distribution cabinet 200 and the electrical equipment 300, and is used to continue to supply power to the electrical equipment 300 in the case that the AC power distribution cabinet 200 interrupts the power supply to the electrical equipment 300. Figure 5 ​As shown, the first extension pin and the second extension pin can realize quick electrical connection with the power supply device 400 through a pre-prepared cable, so as to effectively simplify the connection operation between the second input end P2 and the power supply device 400. In order to facilitate effective emergency stop control of the power supply device 400, the first extension pin and the second extension pin can be electrically connected with a relay, a contactor or a circuit breaker of a power supply control loop in the power supply device 400.

[0114] The output end is also provided with a seventh pin and an eighth pin for extension control, which are kept open. The seventh pin of each output end is electrically connected with the first extension pin, and the eighth pin of each output end is electrically connected with the second extension pin. The seventh pin and the eighth pin can be used for synchronous control of the emergency power-off operation of the uninterruptible power supply device.

[0115] In this way, in actual application examples, when the equipment is working normally, the seventh pin and the eighth pin in each output end are kept open. In the case of abnormal situation of the whole machine or electric shock of personnel, the emergency stop button at the nearest position will be pressed. In this case, the seventh pin and the eighth pin in the corresponding output end are closed, which can simultaneously cut off the power supply from the power supply device 400 to the electrical equipment 300, thereby fully improving the personal operation safety level.

[0116] It should be understood that, considering that different semiconductor manufacturers have different requirements for uninterrupted power supply, in some other embodiments, if uninterrupted power supply is required to avoid economic losses caused by equipment downtime, the first extension pin and the second extension pin can also be kept open and not electrically connected with the power supply device 400, which is not strictly limited here.

[0117] As an optional embodiment, in the case that the number of emergency stop buttons is less than the number of output ends, at least one reserved output end can be included in the plurality of output ends.

[0118] Any reserved output end of the at least one reserved output end is configured to be electrically connected with a smoke temperature protection system, an equipment front end module (EFEM), a newly added emergency stop button or a pre-set short plug provided in the electrical equipment 300.

[0119] In the embodiment, several reserved output terminals are reserved in the emergency stop device 100. In combination with the emergency stop mechanism of the actual equipment, when the temperature and environmental smoke value of the field equipment are abnormal, or the equipment front end module (EFEM) fails, the power supply of the electrical equipment 300 needs to be cut off in time. Therefore, any one of the remaining reserved output terminals in the emergency stop device 100 can be connected with the smoke temperature protection system and the emergency stop switch built in the equipment front end module EFEM, so as to cut off the power supply through a mode other than pressing the external emergency stop button, thereby reducing the loss of personnel and property. Please refer to Figure 6 , Figure 6 In the embodiment, several reserved output terminals are reserved in the emergency stop device 100. In combination with the emergency stop mechanism of the actual equipment, when the temperature and environmental smoke value of the field equipment are abnormal, or the equipment front end module (EFEM) fails, the power supply of the electrical equipment 300 needs to be cut off in time. Therefore, any one of the remaining reserved output terminals in the emergency stop device 100 can be connected with the smoke temperature protection system and the emergency stop switch built in the equipment front end module EFEM, so as to cut off the power supply through a mode other than pressing the external emergency stop button, thereby reducing the loss of personnel and property. Please refer to

[0120] In some scenarios, if the electrical equipment 300 is reconfigured with a newly added emergency stop button, the emergency stop button can also be directly connected with an external plug through a wiring harness, and the external plug is directly inserted into the reserved output terminal in the emergency stop device 100.

[0121] As for the vacant reserved output terminal in the emergency stop device 100, it is electrically connected with a preset short plug, so as to ensure that the vacancy of the reserved output terminal does not affect the normal work of other output terminals. For example, in the foregoing embodiment, the output terminal includes a first pin, a second pin, a third pin and a fourth pin. After the reserved output terminal is connected with the short plug, the first pin and the second pin are short-circuited and always maintain a normally closed state; the third pin and the fourth pin are short-circuited and always maintain a normally closed state.

[0122] Based on the emergency stop device 100 provided in the foregoing embodiment, as an optional embodiment, in order to ensure that the power supply in the normal scenario is restored in time, when the system protection such as the smoke temperature protection system and the equipment front end module EFEM is reset and the emergency stop button is reset, the switch state between the output terminal pins is restored, so that the normal power supply of the electrical equipment 300 by the alternating current power distribution cabinet 200 can be controlled again.

[0123] In an example, in order to facilitate understanding of the emergency stop device 100 provided in the embodiments of the present application, an actual application of the emergency stop device 100 is also provided. In a specific application example, the emergency stop device 100 can specifically include eight output terminals with a diameter of 12 mm, and a first input terminal P1 and a second input terminal P2 near the output terminals.

[0124] In this example, the output terminal uses an 8-pin female connector, while the first input terminal P1 and the second input terminal P2 use male connectors. This ensures a foolproof design for both input and output, effectively reducing problems caused by operational errors or incorrect connections. Simultaneously, each socket in the emergency stop device 100 also features a foolproof design, preventing pin insertion errors due to angular deviations and ensuring correct wiring.

[0125] The aforementioned multiple output terminals can be connected to the external plug of the emergency stop button, which is led out from the emergency stop button via a wiring harness. Simultaneously, the reserved output terminals can also be electrically connected to the smoke temperature protection system, the equipment front-end module EFEM, an additional emergency stop button, or a pre-set shorting plug. Furthermore, the emergency stop device 100 is equipped with corresponding indicator lights for different output terminals, allowing for indication of emergency stop action by whether the indicator lights are off, facilitating timely maintenance and troubleshooting by on-site personnel.

[0126] In summary, the emergency stop device 100 provided in this application embodiment is simple and convenient to operate, and can ensure the safety and stability of electrical equipment 300 such as electron beam defect detection equipment during use. When equipment malfunctions, it can disconnect the power supply to the equipment in a timely manner, thereby reducing personal injury and property loss, and ultimately fully guaranteeing the multi-faceted safety of equipment, personnel and products.

[0127] It is understood that the above are all examples and do not serve as a substantial limitation on the emergency stop device 100 protected by this application.

[0128] Based on the emergency stop device 100 provided in the above embodiments, correspondingly, this application provides an emergency stop system 1000. Figure 7 This is a schematic diagram of the structure of an emergency stop system 1000 provided in one embodiment of this application. Figure 7 As shown, the emergency stop system 1000 includes at least one emergency stop button, at least one external plug corresponding to each emergency stop button, and an emergency stop device 100 as described in any of the foregoing embodiments of this application. The emergency stop device 100 includes:

[0129] Multiple output terminals, at least one of which is used for one-to-one electrical connection with the external plug of at least one emergency stop button;

[0130] The first input terminal P1 is configured to be electrically connected to the AC distribution cabinet 200; the control nodes in each output terminal are connected in series to form a conducting branch, which is electrically connected to the first input terminal P1 to control the power supply status of the AC distribution cabinet 200.

[0131] In the case that any emergency stop button is pressed, the control node in the corresponding output end is disconnected, and the branch circuit is turned on to stop the power supply of the AC power distribution cabinet 200.

[0132] Specifically, more than one emergency stop device 100 provided in the foregoing embodiments can be arranged in the emergency stop system 1000. The external plug can be designed as a right angle to facilitate installation in limited space. The pin arrangement of each external plug corresponds to the pin arrangement of the output end in the emergency stop device 100. For example, the external plug is designed as an 8-pin, corresponding to the 8-pin output end in the emergency stop device 100.

[0133] It should be understood that the emergency stop system 1000 provided in the embodiments of the present application has the beneficial effects of the emergency stop device 100 provided in the embodiments of the present application. For specific details, please refer to the specific description of the emergency stop device 100 in the above embodiments, which will not be repeated here.

[0134] As an optional embodiment, please refer to the external plug 10 shown in Figure 7 , Figure 7 The external plug 10 can be understood as a type of external plug connected to the emergency stop button. As shown in Figure 7 , the emergency stop button includes a first normally closed switch (1, 2 in EMO) and a second normally closed switch (3, 4 in EMO), and the corresponding external plug 10 includes a first contact (pin1-2) and a second contact (pin3-4);

[0135] The first contact is electrically connected to both ends of the first normally closed switch, and the first contact is electrically connected to the first pin and the second pin of the corresponding output end, so that the first pin and the second pin form a normally closed contact;

[0136] The second contact is electrically connected to both ends of the second normally closed switch, and the second contact is electrically connected to the third pin and the fourth pin of the corresponding output end, so that the third pin and the fourth pin form a normally closed contact;

[0137] In the case that any emergency stop button is pressed, the first normally closed switch and the second normally closed switch are disconnected, the first pin and the second pin of the corresponding output end are switched from the normally closed state to the open state, the third pin and the fourth pin are switched from the normally closed state to the open state, and the AC power distribution cabinet 200 stops power supply.

[0138] In this embodiment, the internal structure of the emergency stop button is expanded, and the internal wiring mode of the external plug 10 connected to the emergency stop button is specifically described. As shown in the figure, the emergency stop button includes a first normally closed switch and a second normally closed switch, and the external plug 10 includes a first contact and a second contact.

[0139] Wherein, the first contact of the external plug 10 can be understood as a pair of pins: pin1-2, and the second contact can be understood as pin3-4. The pin1-2 and pin3-4 in the external plug 10 are connected with the first normally closed switch and the second normally closed switch in the emergency stop button, and can be used to control the double-loop on-off of the safety relay.

[0140] In a specific application example, when the emergency stop button is pressed, the first normally closed switch and the second normally closed switch in the emergency stop button are opened, and the first contact and the second contact in the external plug 10 led out by the emergency stop button are switched from normally closed to open, so that the first pin and the second pin of the corresponding output end in the emergency stop device 100 are switched from normally closed to open state, and the third pin and the fourth pin are switched from normally closed to open state.

[0141] In this way, as shown in the foregoing embodiment of the emergency stop device 100, the first input contact K1 and the second input contact K2 of the safety relay SR are opened, the output contact of the safety relay SR is opened, and finally the alternating current power distribution cabinet 200 stops power supply.

[0142] As an optional embodiment, please continue to refer to Figure 8 , the emergency stop button further comprises a third normally closed switch (5, 6 in EMO), and the external plug 10 comprises a third contact (pin5-6);

[0143] The third contact is electrically connected between the two ends of the third normally closed switch, and the third contact is electrically connected with the fifth pin and the sixth pin of the corresponding output end, so that the fifth pin and the sixth pin constitute a normally closed contact;

[0144] In the case that any emergency stop button is pressed, the third normally closed switch is opened, and the fifth pin and the sixth pin of the corresponding output end are switched from normally closed to open state, so that the indicator lamp associated with the corresponding output end is extinguished.

[0145] Corresponding to the foregoing output end, the emergency stop button further comprises a third normally closed switch, and the external plug 10 comprises a third contact. Wherein, the third contact of the external plug 10 can be understood as a pair of pins: pin5-6, which can be used to control the indicator lamp of the corresponding output end.

[0146] In a specific application example, when the emergency stop button is pressed, the third normally closed switch in the emergency stop button is opened, and the third contact in the external plug 10 led out by the emergency stop button is switched from normally closed to open, so that the fifth pin and the sixth pin of the corresponding output end in the emergency stop device 100 are switched from normally closed to open state.

[0147] Thus, the emergency stop button corresponds to the indicating lamp in the circuit is cut off, the indicating lamp is extinguished, the position of the specific emergency stop button pressed is indicated, thereby facilitating the on-site personnel to timely troubleshoot the fault.

[0148] As an optional embodiment, continue to combine Figure 8 , the emergency stop button further comprises a fourth normally open switch (7, 8 in EMO), and the external plug 10 comprises a fourth contact (pin7-8);

[0149] The fourth contact is electrically connected to both ends of the fourth normally open switch, and the fourth contact is electrically connected to the seventh pin and the eighth pin of the corresponding output end, so that the seventh pin and the eighth pin constitute a normally open contact.

[0150] Corresponding to the aforementioned output end, the emergency stop button further comprises a fourth normally open switch, and the external plug 10 comprises a fourth contact. Among them, the third contact of the external plug 10 can be understood as a pair of pins: pin7-8.

[0151] In a specific application example, under the premise that the seventh pin and the eighth pin of the output end are configured to control the power supply device 400 to be powered off, when the emergency stop button is pressed, the fourth normally open switch is closed, and the seventh pin and the eighth pin are converted from normally open to closed, thereby causing the power supply device 400 to stop supplying power to the electrical equipment 300.

[0152] It needs to be supplemented that, please refer to Figure 8 , Figure 8 The external plug 20 shown in the above can be understood as another type of external plug connected to the emergency stop button. In some embodiments, the output end in the emergency stop device 100 can also be configured to be electrically connected to, for example, the equipment front end module EFEM through the external plug 20, thereby facilitating the timely cut-off of the equipment power supply in the case of emergency stop operation of the equipment front end module EFEM.

[0153] As shown in Figure 9 , in the case that the equipment front end module EFEM has two emergency stop buttons EMO1 and EMO2, the external plug 20 is connected to them in the manner shown in Figure 9 . In subsequent applications, by directly inserting the external plug 20 into the corresponding output end of the emergency stop device 100 through plug-in, the extension control of the equipment front end module EFEM on the equipment power supply is realized.

[0154] As an optional embodiment, as shown in ​ , the short plug 30 shown in ​ can be understood as another type of external plug connected to the emergency stop button. The emergency stop system 1000 further comprises a short plug 30, and the short plug 30 is used to be electrically connected to the vacant reserved output end in the plurality of output ends;

[0155] The first contact of the shorting plug 30 is shorted for electrical connection with the first pin and the second pin in the corresponding reserved output terminal;

[0156] The second contact of the shorting plug 30 is shorted for electrical connection with the third pin and the fourth pin in the corresponding reserved output terminal;

[0157] The third contact of the shorting plug 30 is shorted for electrical connection with the fifth pin and the sixth pin in the corresponding reserved output terminal;

[0158] The fourth contact of the shorting plug 30 is disconnected for electrical connection with the seventh pin and the eighth pin in the corresponding reserved output terminal.

[0159] In this embodiment, the shorting plug 30 is designed for the 8-pin reserved output terminal to configure the shorting plug in the idle state, so as to ensure that the normal work of other output terminals is not affected. In the shorting plug 30, the first contact, the second contact and the third contact are shorted, and the fourth contact is disconnected, which is equivalent to shorting the pin1-2, pin3-4 and pin5-6 of the shorting plug 30, and disconnecting the pin7-8.

[0160] The pin1-2 of the shorting plug 30 is shorted, and the pin1-2 is electrically connected with the first pin and the second pin in the corresponding reserved output terminal, so that the first pin and the second pin in the corresponding reserved output terminal form a shorted state. The pin3-4 of the shorting plug 30 is shorted, and the pin3-4 is electrically connected with the third pin and the fourth pin in the corresponding reserved output terminal, so that the third pin and the fourth pin in the corresponding reserved output terminal form a shorted state.

[0161] The pin5-6 of the shorting plug 30 is shorted, and the pin5-6 is electrically connected with the fifth pin and the sixth pin in the corresponding reserved output terminal, so that the fifth pin and the sixth pin in the corresponding reserved output terminal form a shorted state. The pin7-8 of the shorting plug 30 is disconnected, and the pin7-8 is electrically connected with the seventh pin and the eighth pin in the corresponding reserved output terminal, so that the seventh pin and the eighth pin in the corresponding reserved output terminal form a normally open state.

[0162] It should be noted that the pin1-2 in the embodiment is electrically connected with the first pin and the second pin in the corresponding reserved output terminal, which specifically means that the pin1 of the shorting plug 30 is electrically connected with the first pin in the corresponding reserved output terminal, and the pin2 is electrically connected with the second pin in the corresponding reserved output terminal. The connection relationship between the other pin of the shorting plug 30 and the pin of the reserved output terminal can be inferred in turn, and will not be described here.

[0163] The functions noted in the block diagrams of the above described structures can be implemented as hardware, software, firmware, or a combination thereof. When implemented in hardware, they can be, for example, electronic circuits, application specific integrated circuits (ASICs), appropriate firmware, plug-ins, functional cards, and the like. When implemented in software, the elements of the present application are program or code segments that are used to perform the required tasks. The program or code segments can be stored in a machine-readable medium or transmitted through a data signal carried in a carrier wave over a transmission medium or communication link. A "machine-readable medium" includes any medium that can store or transport information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROM, flash memory, erasable ROM (EROM), floppy disks, CD-ROMs, optical disks, hard disks, fiber optic media, radio frequency (RF) links, and the like. The code segments can be downloaded via computer networks such as the Internet, intranets, and the like.

[0164] It is also important to note that the examples described herein can be implemented in a variety of systems, including and / or incorporating software, firmware, hardware, and / or circuitry. Also, the example need not necessarily be implemented as the steps shown or the order shown. One or more steps can be combined, modified, or deleted where appropriate, or additional steps can be added in accordance with the examples herein. For example, one or more of the described steps can be performed concurrently, in an order different than shown, or not performed at all.

[0165] The aspects of the disclosure described above are described with reference to the flow diagrams and / or block diagrams of apparatus (systems) according to embodiments of the disclosure. It will be understood that each block of the flow diagrams and / or block diagrams, and combinations of blocks in the flow diagrams and / or block diagrams, can be implemented by computer program instructions. Such computer program instructions can be provided to a processor of a general purpose computer, special purpose computer, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, implement the functions / acts specified in the flow diagrams and / or block diagrams. These computer program instructions can also be stored in a computer- readable medium that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable medium produce an article of manufacture including instructions which implement the functions / acts specified in the flow diagrams and / or block diagrams. The computer program instructions can also be loaded onto a computer or other programmable data processing apparatus to cause a series of operations to be performed on the computer or other programmable data processing apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable data processing apparatus implement the functions / acts specified in the flow diagrams and / or block diagrams.

[0166] It should be noted that each of the arrangements described in the specification is described with the progressive development of the application, and the same or similar parts between the various embodiments can be mutually referred to, and each embodiment focuses on the differences from other embodiments. In accordance with the above-described embodiments of the present application, these embodiments do not describe all the details and do not limit the application to the specific embodiments described. Obviously, many modifications and changes can be made according to the above description. The specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the application, so that those skilled in the art can well utilize the application and make modifications and uses based on the application. The application is limited by the claims and their entire scope and equivalents.

[0167] Those skilled in the art will understand that the above embodiments are exemplary and not limiting. Different technical features appearing in different embodiments can be combined to achieve beneficial effects. Those skilled in the art should understand and implement other changed embodiments of the disclosed embodiments based on the drawings, the specification and the claims. In the claims, the term "comprising" does not exclude other structures; the number "one" does not exclude multiple; the terms "first", "second" are used to mark names and not to indicate any specific order. Any reference signs in the claims should not be understood as limiting the scope of protection. The fact that certain technical features appear in different dependent claims does not mean that these technical features cannot be combined to achieve beneficial effects.

[0168] The principles and implementations of the application are described herein using specific examples. The above examples are only used to help understand the application and its core ideas. The above is only a preferred embodiment of the application. It should be noted that due to the limited nature of the language, there are objectively infinite specific structures, and for those skilled in the art, without departing from the principles of the application, a number of improvements, refinements or changes can be made, and the above technical features can be combined in an appropriate manner; these improvements, refinements, changes or combinations, or without improvement, directly apply the concepts and technical solutions of the application to other fields, should be considered within the scope of protection of the application.

Claims

1. An emergency stop device, characterized by The emergency stop device comprises: a plurality of output terminals, at least one of which is electrically connected with an external plug of at least one emergency stop button one by one; a first input terminal configured to be electrically connected with an alternating current power distribution cabinet; control nodes in each of the output terminals are connected in series to form a conduction branch, which is electrically connected with the first input terminal to control the power supply state of the alternating current power distribution cabinet; in the case that any of the emergency stop buttons is pressed, the control nodes in the corresponding output terminals are disconnected, the conduction branch is disconnected, and the alternating current power distribution cabinet stops power supply.

2. The apparatus of claim 1, wherein, The control nodes of the output terminals comprise first and second normally closed contacts; the first input terminal comprises first, second, third and fourth adapter pins; A safety relay is installed in the alternating current power distribution cabinet; The first and second adapter pins are configured to electrically connect first input contacts of the safety relay, and the third and fourth adapter pins are configured to electrically connect second input contacts of the safety relay; The first normally closed contacts of each of the output terminals are connected in series between the first and second adapter pins; The second normally closed contacts of each of the output terminals are connected in series between the third and fourth adapter pins; In the case that any of the emergency stop buttons is pressed, the first and second normally closed contacts of the corresponding output terminals are switched from a normally closed state to a disconnected state, the first and second input contacts are disconnected, the output contacts of the safety relay are disconnected, and the alternating current power distribution cabinet stops power supply.

3. The apparatus of claim 2, wherein, The number of the output terminals is M, and the number of the emergency stop buttons is N, M and N are positive integers, M>1 and M≥N; the first normally closed contact comprises a first pin and a second pin, and the second normally closed contact comprises a third pin and a fourth pin; The first pin of the i-th output terminal is electrically connected with the second pin of the i+1-th output terminal, the second pin of the i-th output terminal is electrically connected with the first pin of the i-1-th output terminal, 1 The second pin of the first output terminal is electrically connected with the second adapter pin of the first input terminal; The first pin of the M-th output terminal is electrically connected with the first adapter pin of the first input terminal; The third pin of the i-th output terminal is electrically connected with the fourth pin of the i+1-th output terminal, and the fourth pin of the i-th output terminal is electrically connected with the third pin of the i-1-th output terminal; The fourth pin of the first output terminal is electrically connected with the fourth adapter pin of the first input terminal; The third pin of the M-th output terminal is electrically connected with the third adapter pin of the first input terminal; In the case that any of the emergency stop buttons is pressed, the first pin and the second pin of the corresponding output terminal are switched from the normally closed state to the open state, the third pin and the fourth pin are switched from the normally closed state to the open state, and the first input contact and the second input contact are opened, so that the output contact of the safety relay is opened and the AC power distribution cabinet stops power supply.

4. The apparatus of claim 1, wherein, The device further comprises a plurality of indicator lights, which are in one-to-one correspondence with the plurality of output terminals; The output terminal comprises a fifth pin and a sixth pin, which constitute a normally closed contact, and the first input terminal comprises a fifth adapter pin and a sixth adapter pin, which are respectively electrically connected to the positive and negative poles of a DC power supply; The fifth pin of the output terminal is electrically connected to one end of the associated indicator light, and the other end of the associated indicator light is electrically connected to the fifth adapter pin, and the sixth pin of the output terminal is electrically connected to the sixth adapter pin; Alternatively, the fifth pin of the output terminal is electrically connected to the fifth adapter pin, the sixth pin of the output terminal is electrically connected to one end of the associated indicator light, and the other end of the associated indicator light is electrically connected to the sixth adapter pin; In the case that any of the emergency stop buttons is pressed, the fifth pin and the sixth pin of the corresponding output terminal are switched from the normally closed state to the open state, so that the indicator light associated with the corresponding output terminal is extinguished.

5. The apparatus of claim 4, wherein, The indicator light is a light-emitting diode; The fifth pin of the output terminal is electrically connected to the cathode of the associated light-emitting diode, and the anode of the associated light-emitting diode is electrically connected to the fifth adapter pin; Alternatively, the sixth pin of the output terminal is electrically connected to the anode of the associated light-emitting diode, and the cathode of the associated light-emitting diode is electrically connected to the sixth adapter pin.

6. The apparatus of claim 1, wherein, The device further comprises a second input terminal comprising a first extension pin and a second extension pin, and the output terminal further comprises a seventh pin and an eighth pin, which constitute a normally open contact; The seventh pin of the output terminal is electrically connected to the first extension pin, and the eighth pin of the output terminal is electrically connected to the second extension pin; The first extension pin and the second extension pin are configured to be electrically connected to a power supply device, which is arranged between the AC power distribution cabinet and an electrical equipment, for continuing to supply power to the electrical equipment in the case that the AC power distribution cabinet interrupts power supply to the electrical equipment; In the case that any of the emergency stop buttons is pressed, the seventh pin and the eighth pin of the corresponding output terminal are switched from the normally open state to the closed state, so as to control the power supply device to stop supplying power to the electrical equipment.

7. An emergency stop system characterized by, The emergency stop system comprises at least one emergency stop button, an external plug corresponding to each of the at least one emergency stop button, and an emergency stop device as claimed in any one of claims 1-6; The emergency stop device comprises: A plurality of output terminals, at least one of which is electrically connected with an external plug of at least one emergency stop button one by one; A first input terminal configured to be electrically connected with an alternating current power distribution cabinet; control nodes in each of the output terminals are sequentially connected in series to form a conduction branch, which is electrically connected with the first input terminal to control the power supply state of the alternating current power distribution cabinet; In the case that any of the emergency stop buttons is pressed, the control node in the corresponding output terminal is disconnected, the conduction branch is disconnected, and the alternating current power distribution cabinet stops power supply.

8. The emergency stop system of claim 7, wherein The emergency stop button comprises a first normally closed switch and a second normally closed switch, and the external plug comprises a first contact and a second contact; The first contact is electrically connected to both ends of the first normally closed switch, and the first contact is electrically connected with a first pin and a second pin of the corresponding output terminal, so that the first pin and the second pin form a normally closed contact; The second contact is electrically connected to both ends of the second normally closed switch, and the second contact is electrically connected with a third pin and a fourth pin of the corresponding output terminal, so that the third pin and the fourth pin form a normally closed contact; In the case that any of the emergency stop buttons is pressed, the first normally closed switch and the second normally closed switch are disconnected, the first pin and the second pin of the corresponding output terminal are switched from a normally closed state to a disconnected state, the third pin and the fourth pin are switched from a normally closed state to a disconnected state, and the alternating current power distribution cabinet stops power supply.

9. The emergency stop system of claim 7, wherein, The emergency stop button further comprises a third normally closed switch, and the external plug comprises a third contact; The third contact is electrically connected to both ends of the third normally closed switch, and the third contact is electrically connected with a fifth pin and a sixth pin of the corresponding output terminal, so that the fifth pin and the sixth pin form a normally closed contact; In the case that any of the emergency stop buttons is pressed, the third normally closed switch is disconnected, and the fifth pin and the sixth pin of the corresponding output terminal are switched from a normally closed state to a disconnected state, so that the indicator light associated with the corresponding output terminal is extinguished.

10. The emergency stop system of claim 7, wherein, The emergency stop button further comprises a fourth normally open switch, and the external plug comprises a fourth contact; The fourth contact is electrically connected to both ends of the fourth normally open switch, and the fourth contact is electrically connected with a seventh pin and an eighth pin of the corresponding output terminal, so that the seventh pin and the eighth pin form a normally open contact.

11. The emergency stop system of claim 7, wherein, The system further comprises a short plug, which is electrically connected with a reserved output terminal in the plurality of output terminals; The first contact of the short plug is short-circuited, which is electrically connected with a first pin and a second pin in the corresponding reserved output terminal; The second contact of the short plug is short-circuited, which is electrically connected with a third pin and a fourth pin in the corresponding reserved output terminal; The third contact of the short plug is short-circuited, which is electrically connected with a fifth pin and a sixth pin in the corresponding reserved output terminal; The fourth contact of the short plug is disconnected, which is electrically connected with a seventh pin and an eighth pin in the corresponding reserved output terminal.

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