Semiconductor equipment and guide structure of maintenance tool thereof

Abstract

The utility model provides a semiconductor device and a guide structure of a maintenance tool thereof. An ejector pin and a lead screw are arranged at the front end of the maintenance tool, and the guide structure comprises an installation base used for being fixedly connected with main equipment of the semiconductor equipment; the positioning block is fixed on the mounting base, and a positioning hole matched with the ejector pin is formed in the positioning block; the limiting block is fixed on the mounting base, and a limiting hole matched with the screw rod is formed in the limiting block; the installation base is installed on the main equipment, the ejector pin of the maintenance tool is inserted into the positioning hole of the positioning block, and after the ejector pin reaches the limiting position, the lead screw penetrates through the limiting hole of the limiting block and is locked through the nut. The guide device is used for guiding the maintenance tool so as to improve the installation precision of the maintenance tool.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor equipment technical field, especially a kind of semiconductor equipment and the guiding structure of its maintenance tool. BACKGROUND

[0002] The maintenance tool of semiconductor equipment refers to a series of tools and devices used to ensure that semiconductor manufacturing equipment can operate normally, maintain performance and troubleshoot and repair, which is crucial to ensure production efficiency, product quality and safety. For example, the maintenance tool can be a calibration device. To ensure the accuracy of measurement results, maintenance personnel need to regularly use standard calibration equipment to calibrate sensors and other measuring instruments.

[0003] When the semiconductor equipment needs to be maintained, the maintenance tool needs to be installed on the semiconductor equipment first, and then the maintenance is carried out. However, directly installing the maintenance tool on the semiconductor equipment will have the problem of low installation precision. SUMMARY

[0004] The purpose of the utility model is to provide a guiding structure of semiconductor equipment and its maintenance tool, which guides the maintenance tool to improve the installation precision of the maintenance tool.

[0005] To achieve the above purpose, the utility model realizes the following technical solutions:

[0006] A guiding structure of a maintenance tool is used to install the maintenance tool on a main device of a semiconductor equipment. The front end of the maintenance tool is provided with a thimble and a lead screw. The guiding structure comprises:

[0007] A mounting base is used to fixedly connect with the main device;

[0008] A positioning block is fixed on the mounting base and is provided with a positioning hole adapted to the thimble;

[0009] A limiting block is fixed on the mounting base and is provided with a limiting hole adapted to the lead screw;

[0010] The mounting base is installed on the main device, the thimble of the maintenance tool is inserted into the positioning hole of the positioning block, and after reaching the limited position, the lead screw passes through the limiting hole of the limiting block, and a nut is used for locking.

[0011] Optionally, the thimble is made of stainless steel.

[0012] Optionally, the material of the positioning block is polyurethane.

[0013] Optionally, the thimble is conical, and the positioning hole is a conical hole.

[0014] Optionally, the positioning blocks are the same in number as the number of the top pins, and are at least two.

[0015] Optionally, the positioning blocks are two and are located on two sides of the limiting blocks.

[0016] Optionally, the limiting holes are long oval holes.

[0017] Optionally, the relative position relationship between the positioning blocks and the limiting blocks is the same as the relative position relationship between the top pins and the lead screws.

[0018] A semiconductor device comprises a main device and a maintenance tool, and the maintenance tool is mounted on the main device by using the guide structure of the maintenance tool according to any one of the preceding embodiments.

[0019] Compared with the prior art, the guide structure has the following advantages:

[0020] The guide structure provided by the utility model realizes the guiding of the maintenance tool through the cooperation of the top pin and the positioning hole on the positioning block and the cooperation of the lead screw and the limiting hole of the limiting block, and the installation precision of the maintenance tool is improved. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical scheme of the utility model, the following will briefly introduce the drawings needed to be used in the description, and obviously, the drawings in the following description are one embodiment of the utility model, and for the ordinary skilled in the art, other drawings can also be obtained according to these drawings without creative labor:

[0022] Fig. 1 The use state diagram of the guide structure provided by one embodiment of the utility model is shown in the drawing;

[0023] Fig. 2 The front view of the guide structure provided by one embodiment of the utility model is shown in the drawing;

[0024] Fig. 3 The top view of the guide structure provided by one embodiment of the utility model is shown in the drawing. DETAILED DESCRIPTION

[0025] The utility model discloses a scheme makes further detailed explanation in combination with the drawings and specific embodiment. According to the following description, the advantages and characteristics of the utility model will be more clear. It should be noted that the drawings are very simplified and all use non-precise scale, only to facilitate, clear, and assist the purpose of explaining the embodiment of the utility model. In order to make the purpose, features and advantages of the utility model more obvious and easy to understand, please refer to the drawings. It is known that the structure, proportion, size etc. shown in the drawings of the present specification are only used to cooperate with the content disclosed in the specification, for understanding and reading by those skilled in the art, and are not used to limit the limiting conditions of the implementation of the utility model, so they do not have the substantial meaning of technology, any modification of structure, change of proportion relationship or adjustment of size, as long as it does not affect the effect and purpose that can be achieved by the utility model, should still fall within the scope covered by the technical content disclosed by the utility model.

[0026] As shown in Figs. 1-3 The utility model provides a guide structure of maintenance tool for installing the maintenance tool 1 on the main equipment 3 of semiconductor equipment, the front end of maintenance tool 1 is equipped with the thimble 2 and the screw rod 7, the guide structure includes: the installation base 4 for fixed connection with the main equipment 3, the positioning block 5 is fixed on the installation base 4, and the positioning hole 51 matched with the thimble 2 is arranged on it, the limiting block 6 is fixed on the installation base 4, and the limiting hole 61 matched with the screw rod 7 is arranged on it.

[0027] In use, first, the installation base 4 is installed on the main equipment 3, then the maintenance tool 1 is pushed forward, the thimble 2 of the maintenance tool 1 is inserted into the positioning hole 51 of the positioning block 5, after reaching the limit position, the screw rod 7 passes through the limiting hole 61 of the limiting block 6, finally the screw rod 7 is locked using the nut 8, to ensure that the maintenance tool 1 is relatively stationary without shaking.

[0028] The guide structure of the embodiment realizes the guidance to the maintenance tool 1 through the cooperation of the thimble 2 and the positioning hole 51 on the positioning block 5, and the cooperation of the screw rod 7 and the limiting hole 61 of the limiting block 6, which improves the installation accuracy of the maintenance tool 1.

[0029] Further, the thimble 2 is conical, and the positioning hole 51 is a conical hole, so that the maintenance tool 1 can not have left-right direction errors during the guidance, and the maintenance tool 1 can be easily pushed into the specified center point position.

[0030] The thimble 2 is made of stainless steel, and the material of the positioning block 5 is polyurethane. Polyurethane has good elasticity and wear resistance. When the maintenance tool 1 is frequently installed, even if the thimble 2 frequently rubs against the positioning block 5, the thimble 2 will not have abnormal phenomena such as wear.

[0031] In order to facilitate installation, the positioning blocks 5 are the same number as the number of the ejector pins 2, and are at least two, and the positional relationship between the at least two positioning blocks 5 is the same as the positional relationship between the at least two ejector pins 2. Fig. 2 As shown, the positioning blocks 5 are two, and are located on both sides of the limiting blocks 6.

[0032] The limiting hole 61 in the limiting block 6 is an oblong hole, which can adapt to the use requirements of different height machines, and can also compensate for the error of the guiding structure in the installation and manufacturing process.

[0033] In addition, the installation base 4 can be designed in different sizes according to different sizes of machine equipment, so as to meet the use requirements of different width occasions.

[0034] Based on the same inventive concept, the utility model also provides a semiconductor equipment, including main equipment and maintenance tool, the main equipment has the installation position of the installation base of the above-mentioned guiding structure, the maintenance tool is installed to the main equipment through the above-mentioned guiding structure. Among them, the main equipment is the reaction chamber of executing semiconductor process, such as etching process, deposition process and the like.

[0035] In summary, the guiding structure provided by the utility model realizes the guiding of the maintenance tool through the cooperation of the positioning hole on the ejector pin and the positioning block, and the cooperation of the limiting hole of the limiting block and the lead screw, improves the installation precision of the maintenance tool. The guiding structure has the advantages of simple overall structure, convenient installation, low price and convenient subsequent maintenance and replacement.

[0036] It should be noted that in this document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without limitation, an element preceded by "comprises... a" does not, without more constraints, foreclose the existence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0037] Although the content of the utility model has been introduced in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached claims.

Claims

1. A guide structure for a maintenance fixture, used to install the maintenance fixture onto the main equipment of a semiconductor device, characterized in that, The front end of the maintenance fixture is provided with a pin and a lead screw, and the guide structure includes: Mounting base, which is used for fixed connection with the main device; A positioning block is fixed on the mounting base and has a positioning hole that matches the ejector pin. A limiting block is fixed on the mounting base and has a limiting hole that matches the lead screw. Install the mounting base on the main equipment, insert the pin of the maintenance tool into the positioning hole of the positioning block, and after reaching the limited position, the lead screw passes through the limiting hole of the limiting block and is locked with a nut.

2. The guide structure of the maintenance tool as described in claim 1, characterized in that, The ejector pin is made of stainless steel.

3. The guide structure of the maintenance tool as described in claim 1, characterized in that, The positioning block is made of polyurethane.

4. The guide structure of the maintenance fixture as described in claim 1, characterized in that, The ejector pin is conical, and the positioning hole is also conical.

5. The guide structure of the maintenance tool as described in claim 1, characterized in that, The number of positioning blocks is the same as the number of ejector pins, and there are at least two of each.

6. The guide structure of the maintenance tool as described in claim 5, characterized in that, There are two positioning blocks, located on both sides of the limiting block.

7. The guide structure of the maintenance tool as described in claim 1, characterized in that, The limiting hole is an elongated elliptical hole.

8. The guide structure of the maintenance tool as described in claim 1, characterized in that, The relative positional relationship between the positioning block and the limiting block is the same as the relative positional relationship between the ejector pin and the lead screw.

9. A semiconductor device, characterized in that, It includes a main device and maintenance fixtures, wherein the maintenance fixtures are installed on the main device using a guide structure as described in any one of claims 1 to 8.

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