Portable wafer storage box

Abstract

The utility model discloses a portable wafer storage box, which comprises a box body and a wafer storage mechanism, and is characterized in that the box body comprises an outer box cover and a base; a plurality of groups of wafer storage mechanisms are arranged on the base; the wafer storage mechanism comprises a wafer slot, a limiting rod and a slot handle; the limiting rods are arranged on the two sides of the wafer slot, the bottoms of the limiting rods are slidably connected with the base through a sliding rail mechanism, and the upper ends of the limiting rods are connected with the slot handle. When in use, the limiting rods on the two sides of the wafer slot are pushed to move along the sliding rail mechanism, and the distance between the two limiting rods is changed to be matched with the size of a wafer, so that wafers of different sizes can be compatible, the compatibility is higher, and the use is more flexible.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer storage device especially portable wafer storage box. BACKGROUND

[0002] The wafer for manufacturing integrated circuit is extremely strict in storage condition, and the requirement to environmental conditions such as temperature, humidity, air pressure is very high, and usually needs to prevent static electricity, ensure very high cleanliness, avoid physical impact, carry out nitrogen protection, and needs to extract vacuum or fill nitrogen seal for long-term storage.

[0003] Special storage box is needed to store wafer, and currently there are two types, one is automatic with functions such as nitrogen filling, temperature and humidity control box number display, can store wafer alone, but the cost is high, and the other is portable storage box, wafer storage box made of PVC plastic as main material, the cost is low, but long-term storage uses the external environment of nitrogen tank, the existing portable storage box can only be used for one kind of wafer, and is not flexible to use. UTILITY MODEL CONTENTS

[0004] In view of the above-mentioned defects of the existing portable wafer storage box, the utility model provides a portable wafer storage box, which can achieve the effect of compatible with different sizes of wafer.

[0005] To achieve the above-mentioned purpose, the embodiment of the utility model adopts the following technical scheme:

[0006] A portable wafer storage box, comprising a box body and a wafer storage mechanism, the box body comprises an outer box cover and a base; a plurality of groups of wafer storage mechanisms are arranged on the base; the wafer storage mechanism comprises a wafer slot, a limiting rod and a slot handle; the limiting rod is arranged on both sides of the wafer slot, and the bottom thereof is slidably connected with the base through a sliding rail mechanism, and the upper end thereof is connected with the slot handle; when in use, the limiting rods on both sides of the wafer slot are pushed to move along the sliding rail mechanism, and the spacing of the two limiting rods is changed to match the size of the wafer.

[0007] According to one aspect of the utility model, the wafer slot is a circular arc groove.

[0008] According to one aspect of the utility model, the wafer slot is a circular arc groove.

[0009] According to one aspect of the utility model, the sliding rail mechanism comprises a plurality of positioning columns.

[0010] According to one aspect of the utility model, the bottom of the base is provided with supporting legs at four corners.

[0011] According to one aspect of the utility model, the outer box cover top four corners are provided with anti -skid baffle, anti -skid baffle with support foot one to one correspondence.

[0012] According to one aspect of the utility model, the outer box cover and base buckle place are provided with lock catch.

[0013] According to one aspect of the utility model, the base and outer box cover are provided with a plurality of vent holes.

[0014] According to one aspect of the utility model, the outer box cover top is provided with outer box handle, and the side is provided with side handle.

[0015] The utility model implementation's advantage:

[0016] The limiting rod bottom end is connected with the base through the slide rail mechanism, the spacing of the limiting rod can be adjusted, the compatibility of different size wafer pieces is realized by cooperating with the wafer slot, and use is more flexible, the structure is simple, and production and manufacture are facilitated, the four corners of the base bottom are provided with support feet, the outer box cover top four corners are provided with anti -skid baffle, the outer box cover is also provided with outer box handle and side handle, convenient to carry and stack and place, the box body is provided with vent hole, cooperates the external environment of nitrogen gas cabinet or nitrogen gas warehouse, maintains air circulation, avoids the corrosion and electrostatic hidden danger of wafer due to excessive humidity or dry. ACCURACY

[0017] In order to more clearly illustrate the technical scheme in the embodiment of the utility model, the following will briefly introduce the drawing needed to be used in the embodiment, and obviously, the drawing in the following description is only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creating creative labor.

[0018] Figure 1 It is a kind of portable wafer storage box structure schematic view described in the utility model;

[0019] Figure 2 It is the structure schematic view of wafer storage mechanism described in the utility model;

[0020] Figure 3 It is the schematic diagram that wafer storage mechanism described in the utility model adapts different size wafer;

[0021] Figure 4 It is the structure schematic view of slide rail mechanism described in the utility model.

[0022] Legend: 1, outer box cover;11, anti -skid baffle;12, outer box handle;13, side handle;2, base;21, support foot;3, lock catch;4, wafer slot;5, limiting rod;51, slide rail mechanism;6, slot handle. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the utility model will be apparently and completely described in connection with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0024] As shown in Figure 1 , Figure 2 , Figure 3 and Figure 4 , a portable wafer storage box comprises a box body and a wafer storage mechanism, the box body comprises an outer box cover 1 and a base 2; the base 2 is provided with a plurality of groups of wafer storage mechanisms; the wafer storage mechanism comprises a wafer slot 4, a limiting rod 5 and a slot handle 6; the limiting rod 5 is arranged on both sides of the wafer slot 4, the bottom thereof is slidably connected with the base 2 through a sliding rail mechanism 51, and the upper end thereof is connected with the slot handle 6; in use, the limiting rods 5 on both sides of the wafer slot 4 are pushed to move along the sliding rail mechanism 51, the distance between the two limiting rods 5 is changed to match the size of the wafer, so that wafers of different sizes can be compatible, the compatibility is stronger, and the use is more flexible.

[0025] The wafer slot 4 is a circular arc groove, the radius thereof should match the largest size wafer that the wafer storage box is adapted to; when the limiting rod 5 is located at the outermost side (as shown in the case of reference sign a in Figure 3 , the wafer slot 4 can completely adapt to the corresponding wafer; when the two limiting rods 5 move inward and the distance between them is narrowed (as shown in the case of reference sign b in Figure 3 , the wafer slot 4 clamped between the two limiting rods 5 can adapt to a wafer of a smaller size; since the size specifications of wafers are limited, in actual use, the size of the wafer slot 4 and the movement stroke of the limiting rod 5 can be designed according to actual needs under the condition of ensuring the compatibility effect and the operation convenience.

[0026] In actual application, a buffer rubber strip is arranged inside the wafer slot 4 and inward of the limiting rod 5, and the soft material can try to avoid damaging the wafer.

[0027] Further, a plurality of positioning columns (as shown in Figure 4 ) can be arranged on the sliding rail mechanism 51, which can quickly move the limiting rod 5 to a suitable position in cooperation with the slot handle 6; correspondingly, the storage box can quickly switch between different adapted sizes.

[0028] In order to prevent moisture and air circulation, the support legs 21 can be arranged at the four corners of the bottom of the base 2, and the anti-skid lines can be arranged on the surface of the support legs 21 to increase the anti-skid ability; similarly, the anti-skid flaps 11 are arranged at the four corners of the top of the outer box cover 1; the anti-skid flaps 11 correspond to the support legs 21 one by one, and when the storage boxes are vertically stacked, the anti-skid flaps 11 are just located outside the support legs 21, preventing the storage boxes from moving; correspondingly, the base 2 and the outer box cover 1 are provided with a plurality of air holes, which cooperate with the external environment of the nitrogen cabinet or the nitrogen warehouse to maintain air circulation and avoid corrosion and static electricity of the wafer due to excessive moisture or dryness.

[0029] In actual application, the locking buckle 3 is arranged at the buckling position of the outer box cover 1 and the base 2, which can be fixed by magnetic attraction, and is convenient and fast.

[0030] In order to facilitate transportation, the outer box handle 12 is arranged at the top of the outer box cover 1, which is convenient for one hand or rope to hold; the pair of side handles 13 are arranged on the side of the outer box cover 1, which is convenient for two hands to carry.

[0031] The advantages of the embodiment of the utility model are as follows:

[0032] The limiting rods are arranged at both ends of the wafer slot, the bottom ends of the limiting rods are connected with the base through the slide rail mechanism, the spacing of the limiting rods can be adjusted, the wafer slot is matched to realize the compatibility of different sizes of wafer pieces, and use is more flexible; the structure is simple and convenient for production and manufacturing; the support legs are arranged at the four corners of the bottom of the base, the anti-skid flaps are arranged at the four corners of the top of the outer box cover, the outer box cover is further provided with the outer box handle and the side handle, and the storage box is convenient for carrying and stacking.

[0033] The above is only a specific embodiment of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art can easily think of changes or replacements within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model. Therefore, the protection scope of the utility model should be subject to the protection scope of the claims.

Claims

1. A portable wafer storage case comprising a case body and a wafer storage mechanism, characterized by, The box body comprises an outer box cover (1) and a base (2); the base (2) is provided with a plurality of groups of wafer storage mechanisms; the wafer storage mechanism comprises a wafer slot (4), a limiting rod (5) and a slot handle (6); the limiting rod (5) is arranged on both sides of the wafer slot (4), the bottom of the limiting rod (5) is slidably connected with the base (2) through a slide rail mechanism (51), and the upper end of the limiting rod (5) is connected with the slot handle (6); during use, the limiting rods (5) on both sides of the wafer slot (4) are pushed to move along the slide rail mechanism (51), and the spacing of the two limiting rods (5) is changed to match the size of the wafer.

2. The portable wafer storage box of claim 1, wherein, The wafer slot (4) is a circular arc groove.

3. The portable wafer storage box of claim 2, wherein, A buffer rubber strip is arranged on the inward side of the limiting rod (5) inside the wafer slot (4).

4. The portable wafer storage box of claim 1, wherein, The slide rail mechanism (51) comprises a plurality of positioning columns.

5. The portable wafer storage case of claim 1, wherein, The bottom of the base (2) is provided with a supporting leg (21) at four corners.

6. The portable wafer storage box of claim 5, wherein, The outer box cover (1) is provided with an anti-skid baffle (11) at four corners of the top; the anti-skid baffle (11) corresponds to the supporting leg (21) one by one.

7. The portable wafer storage case of claim 1, wherein, The outer box cover (1) and the base (2) are provided with a lock buckle (3) at the buckling position.

8. The portable wafer storage case of claim 1, wherein, The base (2) and the outer box cover (1) are provided with a plurality of air holes.

9. The portable wafer storage case of claim 1, wherein, The outer box cover (1) is provided with an outer box handle (12) at the top, and is provided with a side handle (13) on the side.

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