Wafer box automatic switch assembly and wafer loading system

Abstract

The utility model discloses a wafer box automatic opening and closing assembly and a wafer loading system, and the wafer box automatic opening and closing assembly comprises a base body which is provided with an unlocking member used for separating a box body and a box door of a wafer transmission box, the box door is provided with a lock hole, and the unlocking member is provided with an unlocking end used for stretching into the lock hole for unlocking; the driving piece is arranged on the base body, the number of the unlocking ends and the number of the lock holes are both two, and the driving piece is used for driving the two unlocking ends to synchronously rotate relative to the lock holes respectively; and the translation piece is connected with the base body, and the translation piece is used for driving the base body to horizontally move in the extending direction of the lock hole. The phenomenon that the unlocking mechanism interferes with the box door of the wafer box during unlocking is reduced, meanwhile, unlocking noise is reduced, rigid collision is avoided, and unlocking efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor equipment technical field especially relates to a wafer box automatic switch subassembly and wafer loading system. BACKGROUND

[0002] In the semiconductor production process, the wafer needs to be frequently converted between clean and super-clean environment, and the wafer loading device is used as the input and output of the environment conversion to ensure that the wafer is not attached to the particle during the conversion process. It can be said that the wafer loading device is the external equipment of the wafer, which is installed in front of the front-end module and used as a window for the wafer to enter and exit the wafer transmission equipment, realizing the wafer transfer between the track of the production workshop and the processing equipment. The loading port is the medium between the front-end module and the internal wharf, and the operation of the automatic material handling system in the semiconductor factory is to assist the wafer to shuttle between different work areas according to its processing path. After the wafer operation is completed in a certain work area, it is transmitted to the internal wharf handling system through the loading port in front of the front-end module, and then the transmission destination is determined according to the next work area. If the destination is in a different work area, the wafer box is first stored in the storage, then transmitted to the storage of the destination through the intermediate wharf system, and finally the internal wharf system of the destination transmits the wafer box to the loading port of the front-end module of the semiconductor equipment, so that the wafer can smoothly enter the process cavity for processing.

[0003] The wafer loading port is used for loading, and the front opening wafer transfer box is a front opening wafer transfer box. The specific working steps of the wafer box loading and unloading of the loading port are as follows: the automatic handling system or manual handling wafer box to the loading platform, the clamping mechanism on the loading platform locks the wafer box, the box opening device adsorbs or clamps the wafer box door, the wafer box door and the wafer box are separated, the detection mechanism moves along the vertical direction and scans and detects the wafer in the box, the wafer is handled by the transport manipulator, the wafer in the box is handled, the box opening device merges the wafer box door and the wafer box, the clamping mechanism unlocks the wafer box, and the automatic handling system or manual handling wafer box.

[0004] However, in the prior art, referring to Figure 1 , the movable door used for separating the wafer box door and the wafer box is usually made to fit with the frame by means of cylinder driving swing. However, this operation method has two hidden dangers. On the one hand, the use of the swing method of the unlocking structure makes the unlocking structure easy to interfere with the unlocking position of the wafer box; on the other hand, since the cylinder cannot control the linear output, the movable door is easy to make rapid contact with the frame, which not only emits noise, but also easily causes rigid collision, causing damage to the parts.

[0005] Therefore, it is necessary to provide a wafer box automatic switch subassembly and wafer loading system to solve the above problems existing in the prior art. UTILITY MODEL CONTENTS

[0006] The utility model discloses a wafer box automatic opening and closing assembly and wafer loading system, reduce the interference phenomenon that appears when unlocking the unlocking mechanism and wafer box door, reduce the unlocking noise simultaneously, and avoid causing rigid collision, improve the unlocking efficiency.

[0007] To realize above-mentioned purpose, the technical scheme of the utility model is as follows:

[0008] A wafer box automatic opening and closing assembly is used for unlocking a wafer conveying box, comprising a box body and a box door, and a lock hole is arranged on the box door, and the wafer box automatic opening and closing assembly comprises:

[0009] A mounting hole is arranged at a corresponding position of the lock hole along an extension direction of the base body;

[0010] An unlocking part is arranged in the mounting hole, and the unlocking part has an unlocking end for extending into the lock hole;

[0011] A driving part is arranged on the back surface of the base body, and the driving part is used for driving the unlocking end to rotate and unlocking between the box body and the box door;

[0012] A translation part is connected with the base body, and the translation part comprises a translation seat horizontally moving along the front-back direction and is used for driving the unlocking end to be inserted into the lock hole in translation.

[0013] The wafer box automatic opening and closing assembly has the following beneficial effects: the base body is driven to move horizontally along the extension direction close to or away from the lock hole by the translation part, so that the risk of interference between the unlocking part on the base body and the lock hole when unlocking by swinging in the traditional technology is avoided. Through accurate translation control, the impact caused by rigid collision in the unlocking process is avoided.

[0014] Further, the driving part comprises:

[0015] A driving source is arranged on the base body, and the driving source has a driving end capable of moving along a straight line;

[0016] A connecting block is fixedly connected with the driving end of the driving source;

[0017] A first sliding rail is arranged on the base body, and the connecting block is slidingly connected with the first sliding rail along the length direction of the first sliding rail;

[0018] A linkage plate is fixedly connected with the connecting block, and strip-shaped grooves are arranged at both ends of the linkage plate;

[0019] A cam follower is rollingly connected in the strip-shaped grooves, and the cam follower can roll along the length direction of the strip-shaped grooves;

[0020] The swing rod is rotatably connected with the cam follower at one end and fixedly connected with a rotating rod at the other end, and the rotating rod is coaxially arranged with the unlocking end.

[0021] Further, a buffer is arranged on the base body, and the buffer is used for buffering the movement of the connecting block.

[0022] Further, the buffer comprises two oppositely arranged buffers, and the buffers have telescopic ends which are directed towards the connecting block.

[0023] Further, a limiting piece is arranged, and the limiting piece is used for limiting the rotation angle of the unlocking end.

[0024] Further, the limiting piece comprises two oppositely arranged limiting blocks, and the limiting blocks are arranged close to the swing rod and have spherical portions at one end directed towards the swing rod.

[0025] Further, the translation piece comprises:

[0026] a support column connected with one side of the base body;

[0027] a translation seat connected with one end of the support column away from the base body,

[0028] a first electric cylinder having a telescopic end fixedly connected with the translation seat, and the movement direction of the telescopic end is perpendicular to the cross section of the base body;

[0029] a support plate, and a second slide rail is arranged in the support plate, a sliding block is arranged on the second slide rail, the sliding block is connected with the first electric cylinder, and the first electric cylinder can drive the sliding block to move along the length direction of the second slide rail.

[0030] A wafer loading system comprises an automatic opening and closing assembly of a wafer box as described above, a frame having a transmission port for the wafer in a wafer transmission box to pass through is arranged on a main body, a baffle is arranged on the base body, and a buffer pad is arranged on the baffle.

[0031] Further, the detection assembly is used for detecting the placement of the wafer in the wafer transmission box, a second electric cylinder is connected with the detection assembly, and the second electric cylinder is used for driving the detection assembly to move towards or away from the wafer transmission box.

[0032] Further, a transition plate is further arranged, and the first electric cylinder and the second electric cylinder are arranged on the transition plate. BRIEF DESCRIPTION OF DRAWINGS

[0033] Figure 1 A schematic diagram of the prior art unlocking;

[0034] Figure 2 A schematic view of a wafer box automatic opening and closing assembly according to an embodiment of the present application

[0035] Figure 3 A schematic view of a movable door and a lock opening member according to an embodiment of the present application

[0036] Figure 4 A schematic view of a driving member in a lock closing state according to an embodiment of the present application

[0037] Figure 5 A schematic view of a driving member in a lock closing state according to an embodiment of the present application

[0038] Figure 6 A schematic view of a detection assembly structure according to an embodiment of the present application

[0039] Figure 7 A schematic view of a wafer loading system overall structure according to an embodiment of the present application

[0040] Figure 8 A schematic view of a detection assembly back structure according to an embodiment of the present application

[0041] The drawings show: 1, base body; 11, movable door; 111, suction cup; 12, mounting shell; 13, baffle; 131, buffer pad; 2, lock opening member; 3, driving member; 31, driving source; 32, connecting block; 33, first sliding rail; 34, linkage plate; 341, strip-shaped groove; 35, cam follower; 36, swing lever; 37, rotating lever; 4, translation member; 41, support column; 42, translation seat; 43, first electric cylinder; 5, buffer; 6, limiting block; 61, spherical part; 7, main body; 71, frame; 72, detection assembly; 73, support plate; 74, second sliding rail; 75, second electric cylinder; 76, operation table; 77, sliding block; 8, transition plate; 9, wafer transfer box. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme of the embodiments of the present application will be described clearly and completely below. Obviously, the described embodiments are some embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meanings understood by those skilled in the art to which the present application belongs. The similar words such as "comprise" used herein mean that the elements or objects before the words cover the elements or objects listed after the words and their equivalents, and other elements or objects are not excluded.

[0043] The utility model discloses a kind of wafer box automatic opening and closing components, as shown in Figure 3, comprising base body 1, driving part 3 and translation part 4. Figure 1 -attached Figure 8 Further detailed description is made to the specific embodiment of the utility model.

[0044] In the first aspect, referring to Figure 2 -fig, 3, the utility model provides a kind of wafer box automatic opening and closing components, comprising base body 1, driving part 3 and translation part 4.Wafer transfer box 9 (combine Figure 7 ) is front opening wafer transfer box, and the outside of wafer transfer box 9 is provided with the box door of detachably connected wafer box.Locking element 2 for separating the box body of wafer transfer box 9 and box door is provided on base body 1.Box door is provided with lock hole, and locking element 2 has the unlocking end for inserting lock hole and unlocking.

[0045] Referring to Figures 4-6 , base body 1 is further provided with suction cup 111, and suction cup 111 is used to suction and fix the box door after separating the box body and box door, and then by moving base body 1 downwards, box door is driven away from the box body of wafer transfer box 9, to facilitate the detection of wafer sheet placed inside wafer transfer box 9.Base body 1 includes movable door 11 on the left side close to the box door of wafer transfer box 9 and mounting shell, and movable door 11 and mounting shell are fixed by screw installation, and installation space is formed between movable door 11 and mounting shell.

[0046] In some embodiments of the utility model, driving part 3 is provided on base body 1, and driving part 3 is provided in the installation space between mounting shell and movable door 11.Both unlocking end and lock hole are two, and unlocking end penetrates and extends transmission door, to facilitate subsequent unlocking.Driving part 3 is used to drive two unlocking ends to rotate synchronously relative to lock hole.By one driving part 3 synchronously driving two unlocking ends to rotate synchronously and with same frequency, it can more quickly and accurately complete unlocking action, compared with the design of traditional single end or non-synchronous rotation, can significantly improve unlocking efficiency, reduce unlocking time, and then improve the working efficiency of overall wafer loading system.

[0047] Referring to Figure 4 And Figure 5In some embodiments of the utility model, drive piece 3 includes drive source 31, connecting block 32, first slide rail 33, linkage plate 34, cam follower 35 and swing lever 36. Drive source 31 is arranged on base body 1, specifically on swing door 11, and drive source 31 has a drive end capable of linear motion. In the utility model, drive source 31 adopts a pneumatic cylinder or other driving element capable of driving the linear motion of the drive end. Connecting block 32 is fixedly connected with the drive end of drive source 31, and first slide rail 33 is arranged on swing door 11 of base body 1, and connecting block 32 is slidably connected with first slide rail 33 along the length direction of first slide rail 33. Linkage plate 34 is fixedly connected with connecting block 32, and both ends of linkage plate 34 are provided with strip-shaped grooves 341, and the rotor end of cam follower 35 is rollingly connected in the strip-shaped grooves 341, and cam follower 35 can roll along the length direction of strip-shaped groove 341; one end of swing lever 36 is rotatably connected with cam follower 35, and the other end is fixedly connected with rotating rod 37, and rotating rod 37 is coaxially arranged with the unlocking end.

[0048] Specifically, the drive end of the pneumatic cylinder moves rightwards by driving connecting block 32, connecting block 32 drives sliding block 77 (not shown in the figure, located between connecting block 32 and slide rail) to slide along the length direction of the slide rail, at the same time, connecting block 32 drives linkage plate 34 to move rightwards, linkage plate 34 drives cam follower 35 to perform circular motion with rotating rod 37 as the center through the slot of strip-shaped groove 341, cam follower 35 drives rotating rod 37 to rotate through swing lever 36, and rotating rod 37 drives unlocking piece 2 to rotate to unlock the box door of wafer transfer box 9.

[0049] Translation piece 4 is connected with base body 1, and translation piece 4 is used for driving base body 1 to move horizontally along the extension direction of the lock hole. In some embodiments of the utility model, translation piece 4 includes support column 41, translation seat 42, first electric cylinder 43 and support plate 73. Support column 41 is connected with the bottom of mounting shell 12, and translation seat 42 is connected with one end of support column 41 away from base body 1. First electric cylinder 43 has a telescopic end, the telescopic end is fixedly connected with translation seat 42, and the moving direction of the telescopic end is perpendicular to the cross section of base body 1, that is, the moving direction of the telescopic end is the front-back direction. Support plate 73 is provided with second slide rail 74, and sliding block 77 is arranged on second slide rail 74, and sliding block 77 is connected with first electric cylinder 43.

[0050] Specifically, the telescopic end is driven to move along the front-back direction by first electric cylinder 43, and then swing door 11 can be moved towards or away from the direction of the box door of wafer transfer box 9. When swing door 11 is attached to the box door of wafer transfer box 9, the unlocking end of unlocking piece 2 is located in the lock hole of wafer transfer box 9 at this time. Then, the unlocking end is driven to rotate relative to the center of the lock hole by drive piece 3, and then the box door of wafer transfer box 9 is unlocked.

[0051] Compared with the prior art using a gas cylinder, the utility model discloses an electric cylinder to move door 11 to the horizontal direction translation. The gas cylinder drive mode has the problem of uncontrollable beat, long force arm and violent end shaking, and is easy to deform. In contrast, the electric cylinder of the embodiment has higher stability, can provide more accurate control, and has higher driving efficiency, and the beat is more controllable, can complete the translation movement of door 11 close to the wafer box door more quickly, and reduces the risk of vibration and deformation.

[0052] In some embodiments of the utility model, it also includes buffer, buffer sets up on base body 1, buffer is used for the movement buffering of connecting block 32. Specifically, the buffer includes two oppositely arranged buffers 5, the buffer 5 has telescopic end, and the telescopic end is towards connecting block 32. Buffer 5 is arranged on buffer 5 support, and buffer 5 support is installed on movable door 11. When connecting block 32 moves violently, buffer 5 can effectively slow down the impact of connecting block 32 through the elastic property of its telescopic end, avoid direct collision and violent vibration. Buffer 5 provides a buffering absorption function, prevents movable door 11 from appearing violent vibration or damage, significantly reduces the damage caused by impact force and vibration, and reduces the wear of each component of the system.

[0053] In some embodiments of the utility model, it also includes limiting piece, and the limiting piece is used for limiting the rotation angle of the unlocking end. The limiting piece includes two oppositely arranged limiting blocks 6, the limiting block 6 is close to the swing lever 36, and the end of the limiting block 6 towards the swing lever 36 is provided with a spherical part 61. Specifically, two limiting blocks 6 are arranged on the two sides of a swing lever 36, and the limiting block 6 is used for mechanically limiting the swing lever 36, so that the rotation angle of the swing lever 36 is between 110 °-130 °, and the specific limiting angle is set according to requirements. By arranging the limiting block 6, the system can accurately limit the rotation angle of the swing lever 36 within the set range, prevent the swing lever 36 from rotating excessively, cause excessive wear or interfere with other components.

[0054] In the second aspect, referring to Figure 7 and Figure 8 The utility model provides a kind of wafer loading system, including the automatic opening and closing subassembly of wafer box as described above, specifically including main body 7 and frame 71, frame 71 has the transmission opening that can be passed by wafer in wafer conveying box 9, and frame 71 is installed on main body 7. Transmission opening can be sealed, when opening, wafer conveying box 9 is passed, and when closing, clean environment is closed. By using operation platform 76 to drive wafer conveying box 9 to move in the direction away from or close to transmission opening, base body 1 is arranged at transmission opening and can move horizontally in front-back direction, and the opening or closing unlocking piece 2 is arranged at the position corresponding to the lock hole of wafer conveying box door.

[0055] Referring to Figure 2 and Figure 7In some embodiments of the utility model, still include operation platform 76 and detection component 72, detection component 72 is used for detecting the placement of wafer in wafer transfer box 9, and detection component 72 is connected with second electric cylinder 75.

[0056] In some embodiments of the utility model, still include transition plate 8, and first electric cylinder 43 and second electric cylinder 75 are arranged on transition plate 8. By integrating first electric cylinder 43 and second electric cylinder 75 on transition plate 8, the space utilization of the equipment is improved.

[0057] In some embodiments of the utility model, still include transition plate 8, and first electric cylinder 43 and second electric cylinder 75 are arranged on transition plate 8. By integrating first electric cylinder 43 and second electric cylinder 75 on transition plate 8, the space utilization of the equipment is improved.

[0058] In summary, the utility model discloses a electric cylinder is used to replace the air cylinder and drive movable door 11 horizontal movement. Electric cylinder drive has higher stability and accurate control ability, avoids the beat of the possible appearance in air cylinder drive, terminal swing and deformation etc. Problem, to further improve the efficiency of unlocking. Meanwhile, using a driving piece 3 synchronous drive two unlocking ends carry out synchronous and same frequency rotation, make the unlocking process more quickly and accurately, compared with the traditional single end or non-synchronous rotation design, greatly improve the efficiency of unlocking, reduce the unlocking time. By setting the limiting piece, the rotation angle of swing lever 36 is limited, swing lever 36 is prevented from rotating excessively, and interference or collision with other components in the unlocking process is avoided. Movable door 11 is provided with buffer pad, when movable door 11 is close to wafer transfer box 9 box door, can effectively slow down the impact, reduce the collision sound. Buffer 5 avoids rigid collision of internal parts during the unlocking process, and improves the service life of parts.

[0059] Although the embodiments of the utility model are described in detail in the foregoing, it is obvious for those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes all belong to the scope and spirit of the utility model described in the claims. Moreover, the utility model described herein can have other embodiments, and can be implemented or realized in various ways.

Claims

1. A wafer cassette auto-unlock assembly for unlocking a wafer transfer cassette, comprising a cassette body and a cassette door, wherein a lock hole is provided on the cassette door, characterized in that, The wafer box automatic opening and closing assembly comprises: The base body is provided with a mounting hole at a position corresponding to the lock hole in the extension direction; The unlocking part is arranged in the mounting hole, and the unlocking part has an unlocking end for extending into the lock hole; The driving part is arranged on the back surface of the base body, and the driving part is used to drive the unlocking end to rotate and unlock between the box body and the box door; The translation part is connected with the base body, and the translation part comprises a translation seat horizontally moving in the front-back direction, which is used to drive the unlocking end to translate and insert into the lock hole.

2. The FOUP automatic opening and closing assembly according to claim 1, wherein The driving part comprises: The driving source is arranged on the base body, and the driving source has a driving end capable of linear motion; The connecting block is fixedly connected with the driving end of the driving source; The first sliding rail is arranged on the base body, and the connecting block is slidingly connected with the first sliding rail in the length direction of the first sliding rail; The linkage plate is fixedly connected with the connecting block, and two ends of the linkage plate are provided with strip-shaped grooves; The cam follower is rollingly connected in the strip-shaped groove, and the cam follower can roll in the length direction of the strip-shaped groove; The swing rod is rotationally connected with the cam follower at one end, and the other end is fixedly connected with a rotating rod coaxially arranged with the unlocking end.

3. The FOUP automatic door assembly of claim 2, wherein, Further comprising a buffer part, the buffer part is arranged on the base body, and the buffer part is used to buffer the movement of the connecting block.

4. The FOUP automatic door assembly of claim 3, wherein, The buffer part comprises two oppositely arranged buffers, and the buffers have telescopic ends facing the connecting block.

5. The FOUP automatic door assembly of claim 2, wherein, Further comprising a limiting part, the limiting part is used to limit the rotation angle of the unlocking end.

6. The FOUP automatic door assembly of claim 5, wherein, The limiting part comprises two oppositely arranged limiting blocks, the limiting blocks are close to the swing rod, and one end of the limiting block facing the swing rod is provided with a spherical part.

7. The FOUP automatic door assembly of claim 1, wherein, The translation part comprises: The support is connected with one side of the base body; The translation seat is connected with one end of the support away from the base body, The first electric cylinder has a telescopic end fixedly connected with the translation seat, and the movement direction of the telescopic end is perpendicular to the cross section of the base body; The support plate is provided with a second sliding rail inside, and a sliding block is arranged on the second sliding rail, the sliding block is connected with the first electric cylinder, and the first electric cylinder can drive the sliding block to move in the length direction of the second sliding rail.

8. A wafer loading system comprising a FOUP automatic opening and closing assembly according to any one of claims 1 to 7, characterized in that, The main body and the frame are provided with a transmission port for the wafer to pass through, the frame is mounted on the main body, the main body is provided with a baffle, and the baffle is provided with a buffer pad.

9. The wafer loading system of claim 8, wherein, Further comprising a detection assembly, the detection assembly is used to detect the placement of the wafer in the wafer transfer box, and the detection assembly is connected with a second electric cylinder, and the second electric cylinder is used to drive the detection assembly to move towards or away from the wafer transfer box.

10. The wafer loading system of claim 9, wherein, Further comprising a transition plate, the first electric cylinder of the translation part and the second electric cylinder are arranged on the transition plate.

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