Sheet taking and placing device and solar cell production line

Abstract

The utility model relates to the technical field of energy storage batteries, in particular to a sheet taking and placing device and a solar battery production line, and aims to solve the problem that silicon wafers are damaged when sucked by an existing suction nozzle. In order to achieve the purpose, the material taking and placing device comprises a carrier plate provided with air holes; the supporting assembly comprises a base and a supporting rod arranged on the base, and the supporting rod is movably arranged in the air hole in a penetrating mode and used for supporting the sheet; and the grabbing device is arranged above the carrying plate and used for grabbing the sheets and placing the sheets on the supporting rods arranged in the air holes in a penetrating mode. According to the sheet taking and placing device, through the taking and placing mode that the grabbing device grabs the side edges of the sheets, the situation that the surfaces of the sheets are damaged by suction nozzle marks generated in a suction nozzle taking and placing mode is avoided. In addition, the air holes in the carrier plate are matched with the supporting assembly arranged below the carrier plate to support the sheets. The carrier plate of the solid structure avoids the winding plating condition, and the yield of sheet coating is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of energy storage battery, and specifically provides a sheet taking and placing device and solar cell production line. BACKGROUND

[0002] The silicon-based heterojunction cell technology develops rapidly, and the highest efficiency in the laboratory has reached 26.81%, and mass production has initially taken shape, and the mass production efficiency is greater than or equal to 25.5%. The core of the silicon-based heterojunction cell technology lies in intrinsic amorphous silicon passivation and preparation of microcrystalline / wide-bandgap doped microcrystalline silicon film. In the traditional HJT CVD process, the cell wafer is grabbed by a mechanical suction nozzle, and a common phenomenon occurs when the cell wafer is grabbed by the mechanical suction nozzle, that is, suction nozzle printing.

[0003] At present, a manufacturer in this field designs a carrier plate to be hollowed out, and then grabs the silicon wafers around the carrier plate and places them above the carrier plate, but this method has the disadvantage that the silicon wafers placed on the carrier plate are easy to leak light and wrap, affecting the film quality and process efficiency. Other manufacturers improve the material of the suction nozzle to reduce and lower the suction nozzle printing. However, as long as the suction method is adopted, the suction nozzle printing is easy to occur, and the existing technology cannot fundamentally solve the problem of suction nozzle printing, but only can reduce or decrease the generation of suction nozzle printing. In addition, the suction of the suction nozzle to the silicon wafer inevitably produces negative pressure, which will damage the film layer on the surface of the silicon wafer and the surface texture of the silicon wafer after texturing, causing an impact, thereby affecting the efficiency and yield. SUMMARY

[0004] The utility model aims at solving the above technical problem, that is, solving the problem that the existing suction nozzle suction of the silicon wafer causes damage to the silicon wafer.

[0005] In a first aspect, the utility model provides a sheet taking and placing device, comprising: a carrier plate, a plurality of air holes are arranged on the carrier plate; a support assembly, comprising a base and a support rod arranged on the base, the support rod is movably arranged in the air hole, and is used for supporting the sheet; a grabbing device arranged above the carrier plate is used for grabbing the sheet and placing it on the support rod arranged in the air hole.

[0006] Further, the support rod is provided with a fixed block on the end arranged in the base.

[0007] Further, the material of the fixed block is aluminum alloy, and the materials of the base and the support rod are ceramic.

[0008] Further, the sheet taking and placing device further comprises a moving device arranged at the bottom of the base of the support assembly, which is used for controlling the movement of the support assembly in the direction parallel and perpendicular to the carrier plate.

[0009] Further, the sheet taking and placing device further comprises a carrier plate support for placing a plurality of carrier plates.

[0010] Further, the carrier plate support is provided with a carrier plate positioning structure.

[0011] Further, the sheet taking and placing device further comprises a positioning device for determining the positions of the sheet, the carrier plate and the support assembly.

[0012] Further, the positioning device comprises a mechanical positioning device and a visual positioning device.

[0013] Further, the sheet taking and placing device further comprises a control module connected with the grabbing device, the moving device, the mechanical positioning device and the visual positioning device.

[0014] In the second aspect, the utility model also provides a solar cell production line, including the sheet taking and placing device as described above.

[0015] In the case of adopting the above technical scheme, the sheet taking and placing device of the utility model discloses a kind of sheet taking and placing devices, it is discarded by the way of existing suction nozzle adsorption to take and place sheet, and the side of sheet is avoided by grabbing device grabbing sheet Suction nozzle printing damages the surface of sheet.In addition, the support of sheet is realized by the cooperation of the air hole on the carrier plate and the support assembly arranged below the carrier plate.The carrier plate of solid structure avoids the occurrence of around plating, increases the yield of sheet plating, improves plating efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiment or prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creating any creative labor.

[0017] In the drawings:

[0018] Figure 1 It is a structure schematic view of the sheet taking and placing device in the embodiments of the present application.

[0019] Figure 2 It is a schematic view of the grabbing device of the sheet taking and placing device in the embodiments of the present application grabbing sheet.

[0020] Figure 3 It is a structure schematic view of the carrier plate of the sheet taking and placing device in the embodiments of the present application.

[0021] Figure 4 It is a schematic view of the carrier plate support and carrier plate cooperation of the sheet taking and placing device in the embodiments of the present application.

[0022] Reference signs:

[0023] 1, carrier plate; 11, air hole; 2, support assembly; 21, base; 22, support rod; 23, fixing block; 3, sheet; 4, grabbing device; 41, grab hand; 5, carrier plate support; 51, carrier plate positioning structure; 6, moving device. DETAILED DESCRIPTION

[0024] The preferred embodiments of the present application will be described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present application, and are not intended to limit the protection scope of the present application. Those skilled in the art can make adjustments as needed in order to adapt to specific application occasions.

[0025] First of all, it should be pointed out that in the description of the present application, the terms "upper", "lower", "left", "right", "vertical", "horizontal", "vertical", "inner", "outer" and other terms indicating the direction or positional relationship are based on the direction or positional relationship shown in the drawings, which is only for the convenience of description, and is not intended to indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0026] In addition, it should also be pointed out that in the description of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements inside. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0027] As shown in Figure 1 and Figure 2 The sheet taking and placing device provided by the embodiments of the present application is mainly used for taking and placing and moving the sheet of silicon wafer in the chemical vapor deposition (CVD, Chemical Vapor Deposition) film plating process of the silicon wafer. The sheet taking and placing device comprises a carrier plate 1, a support assembly 2, a grabbing device 4 and a moving device 6. Among them, the carrier plate 1 is used to place the sheet 3 of the silicon wafer; the support assembly 2 plays a supporting role on the sheet 3; the grabbing device 4 plays a moving role on the sheet 3; and the moving device 6 is used to control the movement of the support assembly 2.

[0028] Specifically, as shown in Figure 3As shown, the carrier plate 1 has ventilation holes 11, and the carrier plate 1 is typically made of graphite. The support assembly 2 includes a base 21 and support rods 22 mounted on the base 21. The support rods 22 can pass through the ventilation holes 11 of the carrier plate 1 to support the sheet 3. The diameter, number, and arrangement of the ventilation holes 11 on the carrier plate 1 can be determined according to the size and shape of the sheet 3. In addition, the diameter, number, and arrangement of the support rods 22 mounted on the base 21 must correspond to the ventilation holes 11 on the carrier plate 1. The diameter of the support rods 22 is smaller than the diameter of the ventilation holes 11, allowing the support rods 22 to pass through the ventilation holes 11 and move freely up and down within them. The carrier plate 1 is a solid structure with a non-perforated back, which also avoids the occurrence of plating around the surface.

[0029] In one specific embodiment, the diameter of the vent hole 11 is 3 mm, and the diameter of the support rod 22 is 0.5 mm. The number and arrangement of the support rods 22 are the same as those of the vent holes 11 on the carrier plate 1, so that all the support rods 22 can pass through the corresponding vent holes 11 to support the sheet 3. In the embodiment of this application, four vent holes 11 arranged in a diamond shape are provided on the carrier plate 1. Correspondingly, four support rods 22 of the same shape and size arranged in a diamond shape are also provided on the base 21.

[0030] To ensure a more stable connection between the support rod 22 and the base 21, a fixing block 23 is provided on the end of the support rod 22 that is located in the base 21. Both the base 21 and the support rod 22 are made of ceramic, while the fixing block 23 is made of aluminum alloy. The upper part of the entire support assembly 2 is the ceramic support rod 22, and the lower end of the support rod 22 is the aluminum alloy fixing block 23. The aluminum alloy fixing block 23 is fixed to the ceramic base 21, making the entire support rod 22 and base 21 move up and down as a single unit. This ensures that the support rod 22 contacts the sheet 3 synchronously, avoiding excessive contact that could scratch the sheet 3.

[0031] like Figure 1 As shown, a moving device 6 is also provided at the bottom of the base 21 of the support assembly 2, for controlling the movement of the support assembly 2 in directions parallel and perpendicular to the carrier plate 1. The moving device 6 controls the movement of the support assembly 2 in a direction parallel to the carrier plate 1 so that the support rod 22 provided on the base 21 of the support assembly 2 can be aligned with the vent hole 11 provided on the carrier plate 1. Then, the moving device 6 controls the movement of the support assembly 2 in a direction perpendicular to the carrier plate 1 so that the support rod 22 can rise and pass through the vent hole 11 on the carrier plate 1 to provide support for the sheet 3. After the sheet 3 is placed on the support rod 22, the moving device 6 can also control the support rod 22 to descend in a direction perpendicular to the carrier plate 1, placing the sheet 3 on the carrier plate 1.

[0032] The mobile device 6 comprises driving devices, such as servo motors and transmission mechanisms, arranged therein for moving the support assembly 2 in directions parallel and perpendicular to the carrier plate 1. The servo motor drives the support assembly 2 to move, and the position accuracy can be controlled within the range of 0.1 mm.

[0033] As shown in Figure 4 The sheet taking and placing device in the embodiment of the application further comprises a carrier plate support 5 for placing a plurality of carrier plates 1. In order to improve the stability of the carrier plate support 5, a carrier plate positioning structure 51 can be further arranged on the carrier plate support 5.

[0034] As shown in Figure 1 and Figure 2 The grabbing device 4 is arranged above the carrier plate 1 for grabbing the sheet 3 and placing it on the support rod 22 passing through the air hole 11. The grabbing device 4 comprises a gripper 41 for grabbing the sheet 3 by controlling the opening and closing of the gripper 41. When the gripper 41 grabs the sheet 3, the grabbed part is the side edge of the sheet 3. The sheet 3 is taken and placed in the form of grabbing the side edge of the sheet 3, which avoids the suction nozzle mark generated by taking and placing the sheet 3 by the suction nozzle, effectively improves the yield of the sheet 3 coating, and improves the efficiency.

[0035] Further, the gripper 41 is made of PEEK (polyether ether ketone) material. Since the PEEK material has excellent physical and chemical properties, it is resistant to high temperature and chemical corrosion; it also has self-lubricating, wear-resistant, flame-retardant, hydrolysis-resistant, fatigue-resistant and good electrical properties, which will not affect the surface of the sheet 3, thereby further improving the yield.

[0036] Further, the sheet taking and placing device in the embodiment of the application further comprises a positioning device (not shown in the figure) for determining the positions of the sheet 3, the carrier plate 1 and the support assembly 2. The positioning device can further comprise a mechanical positioning device and a visual positioning device for mechanical positioning and visual positioning. The positions of the sheet 3, the carrier plate 1 and the support assembly 2 are determined by the combination of the mechanical positioning device and the visual positioning device.

[0037] The mechanical positioning device can include a position sensor, an actuator and a control system. Common position sensors include photoelectric sensors, contact sensors, laser sensors and the like. These sensors feed back information to the control system by detecting the position of the workpiece or tool, and the control system controls and adjusts the actuator according to the preset position requirements to achieve accurate mechanical positioning. The visual positioning device can include a CCD (Charge-Coupled Device) camera, for example, a position sensor is used to detect the position of the support assembly 2 relative to the carrier plate 1; a CCD camera can also be used to determine the position of the air hole 11 on the carrier plate 1, or the position of the support rod 22 of the support assembly 2 inserted into the air hole 11 on the carrier plate 1. The positioning accuracy of the CCD camera can also be controlled within 0.1 mm.

[0038] Further, the sheet taking and placing device in the embodiment of the application further includes a control module (not shown in the figure) connected with the grabbing device 4, the moving device 6, the mechanical positioning device and the visual positioning device. The control module can obtain the position data of the carrier plate 1, the support assembly 2, the sheet 3 and the moving device 6 collected by the mechanical positioning device and the visual positioning device through the connection with the mechanical positioning device and the visual positioning device, process the obtained position data, and send instructions to the grabbing device 4 and the moving device 6 to control the moving device 6 and the grabbing device 4 to perform corresponding operations, thereby placing the sheet 3 on the support rod 22 inserted into the air hole 11 of the carrier plate 1.

[0039] In the process of coating the silicon wafer, the sheet taking and placing device in the embodiment of the application can be used to perform the feeding and discharging operations of the sheet 3 of the silicon wafer.

[0040] In a specific embodiment, the feeding operation of the sheet 3 is performed first.

[0041] The sheet 3 of the silicon wafer to be coated is placed in a set material container, for example, a material basket. The control module controls the grabbing device 4 to grab a sheet 3 from the material basket. Then, the control module sends instructions to the visual positioning device to perform visual positioning on the sheet 3 grabbed by the grabbing device 4, for example, through a CCD camera to perform visual positioning on the sheet 3 and send information to the control module.

[0042] After the carrier plate 1 is transmitted out of the CVD coating cavity after completing the last silicon wafer coating process, the empty carrier plate 1 is moved to a set position in the feeding area. The positioning accuracy of the carrier plate 1 can be controlled within 0.1 mm through the mechanical positioning and visual positioning modes. The control module controls the grabbing device 4 to move the sheet 3 to a set position above the carrier plate 1 according to the position data of the sheet 3 and the data of the carrier plate 1.

[0043] Simultaneously, based on the position data of the carrier plate 1 and the support component 2, the control module controls the moving device 6 to move the support component 2 horizontally below the carrier plate 1, so that the support rod 22 in the support component 2 is aligned with the vent hole 11 on the carrier plate 1. Then, the moving device 6 is controlled to lift the support component 2, so that the support rod 22 in the support component 2 passes through the vent hole 11 on the carrier plate 1, and stops after rising to a set height.

[0044] The control module controls the gripping device 4 to lower the sheet 3 and place it on the support rod 22, and then releases the gripping device 4 to remove the restriction on the sheet 3. Then, the control module controls the moving device 6 to lower the support rod 22 and place the sheet 3 on the carrier plate 1, completing the loading of the silicon wafer sheet 3.

[0045] Then, the carrier plate 1, carrying the sheet 3, is transferred to the CVD coating chamber of the coating equipment for the coating process. After the coating process is completed, the carrier plate 1 carrying the sheet 3 is transferred out of the CVD coating chamber. Position data is acquired through mechanical positioning and camera positioning of the carrier plate 1 and sent to the control module. Based on the position data of the carrier plate 1, the control module sends a command to the moving device 6 to move the support assembly 2 horizontally below the carrier plate 1 and align the support rod 22 with the vent hole 11 on the carrier plate 1. Then, the moving device 6 is controlled to lift the support assembly 2, so that the support rod 22 in the support assembly 2 passes through the vent hole 11 on the carrier plate 1, lifting the coated sheet 3 placed on the carrier plate 1 to a set height. Then, the control module sends a command to the gripping device 4 to grip the coated sheet 3 and move it onto the conveyor belt, transferring the coated sheet 3 to a designated container.

[0046] Next, the control module sends a command to the moving device 6, causing the support rod 22 in the support assembly 2 to descend, exit from the vent hole 11 on the carrier plate 1, and move the unloaded carrier plate 1 to the set position in the loading area, in preparation for the next loading operation.

[0047] like Figure 4 As shown, when feeding multiple carrier plates 1 placed on the carrier plate support 5, the position data of the remaining carrier plates 1 can be calculated based on the position data of the first carrier plate 1 according to the size of the carrier plate 1 and the arrangement of the multiple carrier plates 1, and the command to control the movement of the moving device 6 can be set in the control module.

[0048] This application also provides a solar cell production line, which includes the sheet handling device as described in any of the above embodiments.

[0049] The technical scheme of the utility model has been described in combination with the preferred embodiments shown in the drawings, but the person skilled in the art can easily understand that the protection scope of the utility model is obviously not limited to these specific embodiments. The person skilled in the art can make equivalent changes or replacements to the related technical features without deviating from the principles of the utility model, and the technical schemes after the changes or replacements will all fall within the protection scope of the utility model.

Claims

1. A sheet pick-and-place device, characterized by, The sheet taking and placing device comprises: a carrier plate (1) provided with air holes (11); a support assembly (2) comprising a base (21) and a support rod (22) provided on the base (21), the support rod (22) being movably arranged in the air holes (11) for supporting a sheet (3); a grabbing device (4) arranged above the carrier plate (1) for grabbing the sheet (3) and placing it on the support rod (22) arranged in the air holes (11).

2. The sheet pick-and-place apparatus according to claim 1, characterized by, The support rod (22) is provided with a fixing block (23) at the end arranged in the base (21).

3. The sheet pick-and-place apparatus according to claim 2, wherein The fixing block (23) is made of aluminum alloy, and the base (21) and the support rod (22) are made of ceramic.

4. The sheet pick-and-place apparatus according to claim 1, wherein The sheet taking and placing device further comprises a moving device (6) arranged at the bottom of the base (21) for controlling the movement of the support assembly (2) in the directions parallel and perpendicular to the carrier plate (1).

5. The sheet handling apparatus according to claim 4, wherein The sheet taking and placing device further comprises a carrier plate support (5) for placing a plurality of carrier plates (1).

6. The sheet handling apparatus according to claim 5, wherein The carrier plate support (5) is provided with a carrier plate positioning structure (51).

7. The sheet handling apparatus according to claim 6, wherein The sheet taking and placing device further comprises a positioning device for determining the positions of the sheet (3), the carrier plate (1) and the support assembly (2).

8. The sheet handling device according to claim 7, characterized in that The positioning device comprises a mechanical positioning device and a visual positioning device.

9. The sheet handling apparatus according to claim 8, wherein The sheet taking and placing device further comprises a control module connected with the grabbing device (4), the moving device (6), the mechanical positioning device and the visual positioning device.

10. A solar cell production line, characterized by, The sheet taking and placing device comprises: a carrier plate (1) provided with air holes (11); a support assembly (2) comprising a base (21) and a support rod (22) provided on the base (21), the support rod (22) being movably arranged in the air holes (11) for supporting a sheet (3); a grabbing device (4) arranged above the carrier plate (1) for grabbing the sheet (3) and placing it on the support rod (22) arranged in the air holes (11). The support rod (22) is provided with a fixing block (23) at the end arranged in the base (21). The fixing block (23) is made of aluminum alloy, and the base (21) and the support rod (22) are made of ceramic. The sheet taking and placing device further comprises a moving device (6) arranged at the bottom of the base (21) for controlling the movement of the support assembly (2) in the directions parallel and perpendicular to the carrier plate (1). The sheet taking and placing device further comprises a carrier plate support (5) for placing a plurality of carrier plates (1). The carrier plate support (5) is provided with a carrier plate positioning structure (51). The sheet taking and placing device further comprises a positioning device for determining the positions of the sheet (3), the carrier plate (1) and the support assembly (2). The positioning device comprises a mechanical positioning device and a visual positioning device. The sheet taking and placing device further comprises a control module connected with the grabbing device (4), the moving device (6), the mechanical positioning device and the visual positioning device.

Images