Wafer box storage and wafer inserting and taking positioning device

Abstract

The utility model discloses a wafer box storage and wafer inserting and positioning device, and aims to provide the wafer box storage and wafer inserting and positioning device capable of improving the wafer feeding speed and precision, and the technical scheme is characterized in that the wafer box storage and wafer inserting and positioning device comprises a lower warehouse frame, and the lower warehouse frame is also provided with an inserting and positioning device; the inserting and taking device comprises lower warehouse layer plates located between the lower warehouse frames, a plurality of installation bases are further arranged on the lower warehouse layer plates, positioning plates are arranged between the installation bases in the middles of the lower warehouse layer plates, piece boxes are further arranged between the installation bases, and fastening devices are further arranged in the middles of the lower warehouse frames. A mounting plate is further arranged in the middle of the lower warehouse layer plate, and a lower positioner is further arranged on the mounting plate.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, specifically to a wafer cassette storage and wafer insertion and positioning device. Background Technology

[0002] Silicon wafers are the basic material for manufacturing semiconductor chips. Silicon is the primary raw material for semiconductor integrated circuits, hence the term silicon wafers. Silicon exists widely in nature as silicates or silicon dioxide in rocks and gravel. The manufacturing of silicon wafers can be summarized into three basic steps: silicon refining and purification, single-crystal silicon growth, and wafer forming. The first step is silicon purification. Sand and gravel raw materials are placed in an electric arc furnace at approximately 2000°C with a carbon source. At this high temperature, carbon and silicon dioxide in the sand and gravel undergo a chemical reaction (carbon combines with oxygen, leaving silicon), yielding pure silicon with a purity of approximately 98%, also known as metallurgical-grade silicon. This is not pure enough for microelectronic devices because the electrical properties of semiconductor materials are highly sensitive to impurity concentrations. Therefore, metallurgical-grade silicon undergoes further purification: pulverized metallurgical-grade silicon is chlorinated with gaseous hydrogen chloride to produce liquid silane. Then, through distillation and chemical reduction processes, high-purity polycrystalline silicon is obtained, with a purity as high as 99.999999999%, becoming electronic-grade silicon. Next is the growth of single-crystal silicon, the most commonly used method is called the Czochralski (CZ) method.

[0003] Currently, Chinese patent CN216547951U discloses a wafer storage compartment, including: a storage rack, which has multiple storage compartments for inserting or removing wafers horizontally from the rear side of the storage rack, and channels arranged in the front-back direction for the transfer box and the wafer fork to enter and exit. The channels are provided with a fixed platform for horizontally placing the transfer box; a wafer pick-and-place device that can move horizontally left and right and rise and fall on the rear side of the storage rack, the wafer pick-and-place device including a first arm that can swing horizontally along a rotation center located at the rear end, a second arm that can swing horizontally synchronously at the front end of the first arm, a fixed base that can swing horizontally synchronously at the front end of the second arm, and a wafer fork. The wafer fork is arranged horizontally forward, and its rear end is fixed to the fixed base.

[0004] Although this type of wafer storage bin stores and removes wafers on a per-wafer basis, allowing specific wafers to be taken out and placed into a transfer box to meet the needs of subsequent processes and improve production efficiency, its efficiency is often low when used on vertical furnaces. Summary of the Invention

[0005] The purpose of this invention is to provide a wafer cassette storage and wafer insertion positioning device, which has the advantages of being able to be quickly applied to vertical furnaces, improving wafer extraction efficiency, improving positioning accuracy, and reducing the risk of wafer cassette displacement.

[0006] The above-mentioned technical objective of this utility model is achieved through the following technical solution:

[0007] A wafer cassette storage and wafer insertion positioning device includes a lower cassette frame, and an insertion device is provided on the lower cassette frame. The insertion device includes a lower cassette layer plate located between the lower cassette frames. The lower cassette layer plate is also provided with a plurality of mounting seats. A positioning plate is provided between the mounting seats in the middle of the lower cassette layer plate. A wafer cassette is also provided between the mounting seats. A fastening device is also provided at the middle position of the lower cassette frame. A mounting plate is also provided at the middle position of the lower cassette layer plate. A lower locator is also provided on the mounting plate.

[0008] By adopting the above technical solution, the entire lower frame can hold multiple film boxes, and the two film boxes in the middle position can be loaded by a robotic arm, which improves the overall work efficiency compared to the previous single film box.

[0009] Further features: The mounting base is also equipped with a basket sensor, which extends through the mounting base to the top of the mounting base, and the basket sensor is also equipped with a basket sensor contact for engaging the film box.

[0010] By adopting the above technical solution, the installed flower basket sensor can effectively wait for the flower box to enter, thereby determining whether the placement position is accurate.

[0011] Further configuration: An upper positioning device is provided at the middle position of the top of the lower storage frame. The upper positioning device includes an upper positioning support rod located on the lower storage frame. An upper positioning support plate is provided between the upper positioning support rods. An upper positioning device that cooperates with the lower positioning device is also provided on the upper positioning support plate.

[0012] By adopting the above technical solution, the upper positioner can effectively determine whether the disc box has reached the designated position.

[0013] Further configuration: The lower storage frame is provided with rear uprights on both sides at the middle position.

[0014] By adopting the above technical solution, the provided rear upright plate of the lower storage can effectively ensure the position of the film box, reduce the occurrence of falling, and at the same time improve the support strength of the lower storage frame.

[0015] Further configuration: The fastening device includes a push cylinder located on the lower frame and a rocker arm shaft located at the outlet of the push cylinder. The rocker arm shaft is hinged to the outlet of the push cylinder via a U-shaped joint. A rocker arm is also provided on the rocker arm shaft, and a pressure rod seat is provided on the rocker arm. A pressure rod is provided at the top of the pressure rod seat. The two sides of the disc box are also provided with pressure holes that fit into the mounting base and match the pressure rod.

[0016] By adopting the above technical solution, the U-shaped joint can be deflected to a certain extent under the action of the push cylinder, thereby driving the swing arm shaft to deflect and squeezing the pressure rod into the pressure hole, thus ensuring that the entire disc box is firmly on the mounting base.

[0017] Further configuration: A middle positioning plate is provided below the mounting seat in the middle position of the lower frame, which is fixedly connected to the lower frame. The middle positioning plate is provided with a swing arm shaft seat, and the swing arm shaft is rotatably connected to the swing arm shaft seat.

[0018] By adopting the above technical solution, the provided rocker arm axle seat can effectively support the rocker arm axle, thereby ensuring that the same rocker arm axle can simultaneously operate and fix the pressure rods on two mounting seats.

[0019] Further configuration: A swing arm axle seat is provided below the mounting base at the middle position of the lower storage frame, which is fixedly connected to the lower storage frame, and the swing arm axle is rotatably connected to the swing arm axle seat.

[0020] By adopting the above technical solution, the stability of the rocker arm shaft can be effectively guaranteed.

[0021] In summary, this utility model has the following beneficial effects: it solves the problem of clamping and positioning accuracy of the wafer cassette during the wafer insertion process of the wafer insertion robot. By driving the swing arm shafts on both sides through the cylinder, the wafer cassette is subjected to force on both sides simultaneously, ensuring that the wafer cassette is firmly clamped and reliably positioned throughout the entire wafer insertion process, and avoiding wafer or robot damage caused by wafer cassette displacement. Attached Figure Description

[0022] The present invention will be further described below with reference to the accompanying drawings.

[0023] Figure 1 This is a schematic diagram of the overall structure of the wafer cassette storage and wafer insertion and positioning device;

[0024] Figure 2 This is a schematic diagram of the wafer cassette storage and wafer insertion positioning device from another angle;

[0025] Figure 3 It is a wafer cassette storage and wafer insertion and positioning device used to display a schematic diagram of the internal structure.

[0026] In the diagram, 1. Lower storage frame; 2. Insertion device; 21. Lower storage shelf; 22. Mounting base; 23. Positioning plate; 24. Sheet box; 3. Fastening device; 31. Push cylinder; 32. Swing rod shaft; 33. U-shaped joint hinge; 34. Swing rod; 35. Pressure rod seat; 36. Pressure rod; 37. Pressure hole; 4. Mounting plate; 5. Lower positioner; 6. Basket sensor; 7. Basket sensor contact; 8. Upper positioning device; 81. Upper positioning support rod; 82. Upper positioning support plate; 83. Upper positioner; 9. Lower storage rear upright plate; 10. Swing rod shaft seat. Detailed Implementation

[0027] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings.

[0028] The technical solution adopted in this utility model is:

[0029] A wafer cassette storage and wafer interposer positioning device, such as Figure 1 , Figure 2 and Figure 3 As shown, the device includes a lower storage frame 1, on which an insertion device 2 is also provided. The insertion device 2 includes a lower storage shelf 21 located between the lower storage frames 1. The lower storage shelf 21 is also provided with several mounting seats 22. A positioning plate 23 is provided between the mounting seats 22 in the middle position of the lower storage shelf 21. A piece box 24 is also provided between the mounting seats 22. A fastening device 3 is also provided at the middle position on the lower storage frame 1. The fastening device 3 includes a push cylinder 31 located on the lower storage frame 1 and a swing rod shaft 32 located at the outlet of the push cylinder 31. The swing rod shaft 32 and the outlet of the push cylinder 31 are connected by a U-shaped connector. The head hinge 33, the lower storage frame 1 is located in the middle and the two sides are provided with the lower storage rear upright plate 9. The lower storage frame 1 is located in the middle and the mounting base 22 is provided below the lower storage frame 1 and is fixedly connected to the lower storage frame 1. The swing arm shaft 32 is rotatably connected to the swing arm shaft 10. At the same time, the swing arm shaft 32 is also provided with the swing arm 34. The swing arm 34 is provided with the pressure rod seat 35. The top of the pressure rod seat 35 is provided with the pressure rod 36. The two sides of the sheet box 24 are also provided with the pressure hole 37 that fits into the mounting base 22 and matches the pressure rod 36. The lower storage shelf 21 is also provided with the mounting plate 4 in the middle and the lower positioning device 5 is also provided on the mounting plate 4.

[0030] The mounting base 22 is also equipped with a basket sensor 6, which extends through the mounting base 22 to the top of the mounting base 22. The basket sensor 6 is also equipped with a basket sensor contact 7 for inserting into the film box 24. An upper positioning device 8 is also provided at the middle position of the top of the lower frame 1. The upper positioning device 8 includes an upper positioning support rod 81 located on the lower frame 1. An upper positioning support plate 82 is provided between the upper positioning support rods 81. An upper positioning device 83 that cooperates with the lower positioning device 5 is also provided on the upper positioning support plate 82.

[0031] Its main working principle is as follows: During use, the wafer cassette 24 is placed in the lower storage frame 1, with the two middle wafer cassettes 24 positioned in the middle of the lower storage frame 1. The basket sensor 6 is used to position the wafer cassette 24 in the middle. The push cylinder 31 rotates the swing arm 34 shaft 32, thus pressing and fixing the pressure rod 36 into the pressure hole 37. At this time, the wafer cassette 24 is fixed, and the robotic arm can extract the wafers from the wafer cassette 24 through the action of the upper positioner 83 and the lower positioner 5. The action of the upper positioner 83 and the lower positioner 5 is also used to determine whether there are still wafers in the wafer cassette 24. After the wafers are extracted, the push cylinder 31 releases the wafer cassette 24, and the two middle wafer cassettes 24 are removed manually or mechanically. The wafer cassettes 24 on both sides are then placed in the middle position, and the work resumes.

[0032] The above are merely preferred embodiments of this utility model and are not intended to limit the utility model in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this utility model shall fall within the scope of the utility model's technical solution.

Claims

1. A wafer cassette storage and wafer insertion / positioning device, comprising a lower cassette frame (1), characterized in that: The lower storage frame (1) is also provided with an insertion device (2). The insertion device (2) includes a lower storage shelf (21) located between the lower storage frames (1). The lower storage shelf (21) is also provided with a plurality of mounting seats (22). A positioning plate (23) is provided between the mounting seats (22) in the middle position of the lower storage shelf (21). A piece box (24) is also provided between the mounting seats (22). A fastening device (3) is also provided at the middle position of the lower storage frame (1). A mounting plate (4) is also provided at the middle position of the lower storage shelf (21). A lower locator (5) is also provided on the mounting plate (4).

2. The wafer cassette storage and wafer interposer positioning device according to claim 1, characterized in that: The mounting base (22) is also provided with a basket sensor (6), which extends through the mounting base (22) to the top of the mounting base (22). The basket sensor (6) is also provided with a basket sensor contact (7) for inserting into the cassette (24).

3. The wafer cassette storage and wafer interposer positioning device according to claim 2, characterized in that: An upper positioning device (8) is provided at the middle position of the top of the lower storage frame (1). The upper positioning device (8) includes an upper positioning support rod (81) located on the lower storage frame (1). An upper positioning support plate (82) is provided between the upper positioning support rods (81). An upper positioning device (83) that cooperates with the lower positioning device (5) is also provided on the upper positioning support plate (82).

4. The wafer cassette storage and wafer interposer positioning device according to claim 3, characterized in that: The lower storage frame (1) is provided with rear uprights (9) on both sides of the middle position.

5. The wafer cassette storage and wafer interposer positioning device according to claim 4, characterized in that: The fastening device (3) includes a push cylinder (31) located on the lower frame (1) and a rocker arm shaft (32) located at the outlet of the push cylinder (31). The rocker arm shaft (32) is hinged to the outlet of the push cylinder (31) via a U-shaped joint (33). A rocker arm (34) is also provided on the rocker arm shaft (32), and a pressure rod seat (35) is provided on the rocker arm (34). The top of the pressure rod seat (35) is provided with a pressure rod (36), and the two sides of the plate box (24) are also provided with pressure holes (37) that fit into the mounting base (22) and match the pressure rod (36).

6. The wafer cassette storage and wafer interposer positioning device according to claim 5, characterized in that: Below the mounting base (22) in the middle position of the lower frame (1), there is also a swing arm axle seat (10) that is fixedly connected to the lower frame (1), and the swing arm shaft (32) is rotatably connected to the swing arm axle seat (10).

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