Multi-station plasma treatment equipment

Abstract

The utility model discloses multi-station plasma processing equipment, which comprises a processing equipment main body, a console is arranged on one side of the processing equipment main body, a plurality of processing stations are arranged in the processing equipment main body, and each processing station comprises a clamping mechanism and a plasma processing mechanism. A plurality of machining stations are arranged, so that a plurality of parts can be machined at a time, the machining efficiency is improved, a first servo motor is used for driving a rotating rod to rotate, a driving gear drives a driven gear to rotate, and a first translation sliding seat drives a fixing seat to slide to clamp the parts; the first servo motor is used for driving the multiple driving gears to rotate so that the multiple parts can be clamped at a time, and therefore the control difficulty is lowered.

Description

Technical Field

[0001] This utility model relates to the field of plasma processing equipment technology, and in particular to a multi-station plasma processing equipment. Background Technology

[0002] Plasma is a state of matter composed of ions, electrons, and neutral particles, exhibiting electrical neutrality on a macroscopic scale. During plasma surface treatment, the interaction between high-energy plasma and the material surface transfers kinetic and chemical energy to surface molecules and atoms, triggering physicochemical changes including dissociation, ionization, and combination. Simultaneously, active particles or reactive gases in the plasma, through collisions, scattering, and excitation, can induce a series of effects on the material surface microstructure, such as rearrangement, isomerization, defect formation, and crystal transformation.

[0003] A search revealed Chinese patent application number 202420952416.2, which discloses a multi-station plasma spraying fixture for medical bone grafts, relating to the field of plasma spraying technology. This utility model includes a fixing mechanism and a main body. A spraying mechanism is located on the back of the fixing mechanism, and a mounting base is rotatably connected inside the main body. An electric telescopic rod is connected to the inner wall of the mounting base. The spraying fixture in the aforementioned patent has the following shortcomings: it can only adjust the height of the plasma generator, resulting in a limited spraying range and making it impossible to perform plasma spraying on parts of different sizes. Utility Model Content

[0004] The purpose of this invention is to further address the shortcomings of existing technologies by proposing a multi-station plasma processing device.

[0005] This device is further configured to achieve the above objectives, and the present invention adopts the following technical solution:

[0006] A multi-station plasma treatment device includes a main body of the device. A control console is provided on one side of the main body. Multiple processing stations are provided inside the main body. Each processing station includes a clamping mechanism and a plasma treatment mechanism. The clamping mechanism includes a mounting frame. The mounting frame is arranged and installed on the main body of the device. A processing table is provided in the middle of the mounting frame. Mounting plates are provided at both ends of the bottom of the mounting frame. Bearing seat 1 and bearing seat 2 are provided on the upper and lower sides of the mounting plate. A screw 1 is rotatably installed between the bearing seats 2. The screw 1 has two threads with opposite directions. A driven gear is fixedly installed in the middle position of the screw 1.

[0007] As a further embodiment of this utility model: the processing device further includes a servo motor, which is detachably installed on one side of the main body of the processing device. A rotating rod is rotatably installed inside the main body of the processing device. The rotating rod is rotatably installed in the bearing seat. A plurality of driving gears are arranged and fixedly installed on the rotating rod. The driving gears mesh with the driven gears. The output end of the servo motor passes through the main body of the processing device and is connected to the rotating rod.

[0008] As a further embodiment of this utility model: the clamping mechanism further includes a translation slide and a fixed seat. The translation slide is slidably mounted on two threads with opposite directions of rotation of the screw. The fixed seat is detachably mounted on the translation slide.

[0009] As a further embodiment of this utility model: the plasma treatment mechanism includes a slide rail one, which is fixedly installed on the top of the rear end of the mounting frame. A screw two is rotatably installed inside the slide rail one. A stepper motor one is detachably installed on the top of the slide rail one, and the output end of the stepper motor one is connected to the screw two.

[0010] As a further embodiment of this utility model: the plasma processing mechanism further includes a lifting slide, which is slidably mounted on the screw two, and a servo motor two is detachably mounted on the bottom of the end of the lifting slide away from the screw two.

[0011] As a further embodiment of this utility model: the plasma processing mechanism further includes a slide rail two, which is installed at the output end of the servo motor two. A screw three is rotatably installed inside the slide rail two. The screw three is provided with two sections of threads with opposite directions of rotation. A stepper motor two is installed on one side of the slide rail two, and the output end of the stepper motor two is connected to the screw three.

[0012] As a further embodiment of this utility model: the plasma processing mechanism further includes a translation slide two and a plasma generator body. The translation slide two is slidably mounted on two oppositely helical threads of the screw three, and the plasma generator body is mounted on the bottom of the translation slide two.

[0013] The beneficial effects of this utility model are as follows:

[0014] 1. By setting up several processing stations, multiple parts can be processed at once, thereby improving processing efficiency. By using a servo motor to drive the rotating rod to rotate, the driving gear drives the driven gear to rotate, which in turn drives the translation slide to slide the fixed seat to clamp the parts. By using a servo motor to drive multiple driving gears to rotate, multiple parts can be clamped at once, thereby reducing the difficulty of control.

[0015] 2. The height of the plasma generator body can be adjusted by using stepper motor one to drive screw two to rotate, so as to perform surface treatment on parts of different heights. The position of the plasma generator body can be adjusted by using servo motor two to drive slide rail two to rotate, and stepper motor two to drive screw three to rotate, so as to perform surface plasma treatment on parts of different sizes. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a multi-station plasma treatment device proposed in this utility model;

[0017] Figure 2 This is a schematic diagram of the internal structure of a multi-station plasma treatment device proposed in this utility model;

[0018] Figure 3 This is a schematic diagram of the plasma processing mechanism proposed in this utility model;

[0019] Figure 4 This is a schematic diagram of the structure for mounting the main body of the plasma generator proposed in this utility model.

[0020] In the diagram: 1-Main body of the processing equipment, 2-Control console, 3-Clamping mechanism, 4-Plasma processing mechanism, 5-Servo motor one, 6-Rotating rod, 7-Driving gear, 8-Mounting bracket, 9-Bearing seat one, 10-Bearing seat two, 11-Screw one, 12-Driven gear, 13-Transfer slide one, 14-Fixed seat, 15-Slide rail one, 16-Stepper motor one, 17-Screw two, 18-Lifting slide, 19-Servo motor two, 20-Slide rail two, 21-Stepper motor two, 22-Screw three, 23-Transfer slide two, 24-Main body of the plasma generator. Detailed Implementation

[0021] The technical solution of this utility model will be further described in detail below with reference to specific embodiments.

[0022] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0023] Example

[0024] A multi-station plasma treatment device, such as Figures 1-4As shown, the device includes a processing equipment body 1, a control console 2 on one side of the processing equipment body 1, and multiple processing stations inside the processing equipment body 1. Each processing station includes a clamping mechanism 3 and a plasma processing mechanism 4. The clamping mechanism 3 includes a mounting frame 8, which is arranged and installed on the processing equipment body 1. A processing table is located in the middle of the mounting frame 8, and mounting plates are located at both ends of the bottom of the mounting frame 8. Bearing seats 9 and 10 are located on the upper and lower sides of the mounting plates. A screw 11 is rotatably mounted between the bearing seats 10. The screw 11 has two threads with opposite directions. A driven gear 12 is fixedly installed in the middle of the screw 11. The processing equipment also includes a servo motor 5. The clamping mechanism 3 is detachably installed on one side of the main body 1 of the processing equipment. A rotating rod 6 is rotatably installed inside the main body 1 of the processing equipment. The rotating rod 6 is rotatably installed in the bearing seat 9. Several driving gears 7 are arranged and fixedly installed on the rotating rod 6. The driving gears 7 mesh with the driven gears 12. The output end of the servo motor 5 passes through the main body 1 of the processing equipment and is connected to the rotating rod 6. The clamping mechanism 3 also includes a translation slide 13 and a fixed seat 14. The translation slide 13 is slidably installed on the two threads with opposite directions of the screw 11. The fixed seat 14 is detachably installed on the translation slide 13. The fixed seat 14 can be adjusted in shape according to the actual processing needs and matches the shape of the part to be processed. By setting up several processing stations, multiple parts can be processed at once, thereby improving processing efficiency. By using servo motor 5 to drive rotating rod 6 to rotate, driving gear 7 to drive driven gear 12 to rotate, thereby causing translation slide 13 to drive fixed seat 14 to slide and clamp the parts. By using servo motor 5 to drive multiple driving gears 7 to rotate, multiple parts can be clamped at once, thereby reducing the difficulty of control.

[0025] This device is further configured such as Figure 1 , Figure 3 , Figure 4As shown, the plasma processing mechanism 4 includes a slide rail 15, which is fixedly installed on the top of the rear end of the mounting bracket 8. A screw 17 is rotatably installed inside the slide rail 15. A stepper motor 16 is detachably installed on the top of the slide rail 15, and the output end of the stepper motor 16 is connected to the screw 17. The plasma processing mechanism 4 also includes a lifting slide 18, which is slidably installed on the screw 17. A servo motor 19 is detachably installed at the bottom of the end of the lifting slide 18 away from the screw 17. The plasma processing mechanism 4 also includes a slide rail 20, which is mounted on the servo motor. The output end of slide rail 20 is rotatably mounted with screw 22. Screw 22 has two oppositely oriented threads. Stepper motor 21 is mounted on one side of slide rail 20, and the output end of stepper motor 21 is connected to screw 22. The plasma treatment mechanism 4 also includes a translation slide 23 and a plasma generator body 24. The translation slide 23 is slidably mounted on the two oppositely oriented threads of screw 22. The plasma generator body 24 is mounted at the bottom of the translation slide 23. The structure and working principle of the plasma generator body 24 are existing technologies and will not be described in detail here. The height of the plasma generator body 24 can be adjusted by using stepper motor 16 to drive screw 217 to rotate, so as to perform surface treatment on parts of different heights. By using servo motor 219 to drive slide rail 20 to rotate, and stepper motor 21 to drive screw 32 to rotate, the position of plasma generator body 24 can be adjusted, so as to perform surface plasma treatment on parts of different sizes.

[0026] Working principle: Based on the dimensions and shape of the parts to be processed in the same batch, a suitable fixed seat 14 is selected and installed on the translation slide 13. Then, the parts to be processed are placed on the fixed seat 14. At the same time, the servo motor 5 drives the rotating rod 6 to rotate. The driving gear 7 on the rotating rod 6 drives the driven gear 12 to rotate. The driven gear 12 drives the screw 11 to rotate, thereby adjusting the position between the fixed seats 14, so that the fixed seats 14 clamp and fix the parts. Then, the stepper motor 16 drives the screw 17 to rotate, adjusting the height position of the plasma generator body 24. Then, the plasma generator body 24 is driven to spray plasma. At the same time, the servo motor 19 drives the slide rail 20 to rotate, and the stepper motor 21 drives the screw 22 to rotate, adjusting the horizontal position of the plasma generator body 24, so that the plasma generator body 24 performs plasma treatment on the surface of the parts.

[0027] The above are merely preferred embodiments of this utility model. For parts that do not require creative effort in circuit control, signal control and transmission, please refer to the prior art. However, the protection scope of this utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in this utility model, based on the technical solution and utility model concept of this utility model, should be included within the protection scope of this utility model.

Claims

1. A multi-station plasma processing apparatus comprising a processing apparatus body (1), characterized in that, The processing equipment body (1) is provided with a console (2) on one side, a plurality of processing stations are arranged in the processing equipment body (1), the processing station comprises a clamping mechanism (3) and a plasma processing mechanism (4), the clamping mechanism (3) comprises a mounting frame (8), the mounting frame (8) is arranged on the processing equipment body (1), a processing table is arranged in the middle of the mounting frame (8), mounting plates are arranged at both ends of the bottom of the mounting frame (8), bearing seats one (9) and bearing seats two (10) are arranged on the upper and lower sides of the mounting plate, a screw rod one (11) is rotatably arranged between the bearing seats two (10), the screw rod one (11) is provided with two threads with opposite rotation directions, and a driven gear (12) is fixedly arranged at the middle position of the screw rod one (11).

2. A multi-station plasma processing apparatus as defined in claim 1, wherein, The processing equipment further comprises a servo motor one (5), the servo motor one (5) is detachably arranged on one side of the processing equipment body (1), a rotating rod (6) is rotatably arranged in the processing equipment body (1), the rotating rod (6) is rotatably arranged in the bearing seat one (9), a plurality of driving gears (7) are fixedly arranged on the rotating rod (6), the driving gears (7) are engaged with the driven gear (12), and the output end of the servo motor one (5) penetrates the processing equipment body (1) and is connected with the rotating rod (6).

3. A multi-station plasma processing apparatus as defined in claim 2, wherein, The clamping mechanism (3) further comprises a translation sliding seat one (13) and a fixed seat (14), the translation sliding seat one (13) is slidingly arranged on the two threads with opposite rotation directions of the screw rod one (11), and the fixed seat (14) is detachably arranged on the translation sliding seat one (13).

4. A multi-station plasma processing apparatus as defined in claim 3, wherein, The plasma processing mechanism (4) comprises a sliding rail one (15), the sliding rail one (15) is fixedly arranged on the top of the rear end of the mounting frame (8), a screw rod two (17) is rotatably arranged in the sliding rail one (15), a stepping motor one (16) is detachably arranged on the top of the sliding rail one (15), and the output end of the stepping motor one (16) is connected with the screw rod two (17).

5. A multi-station plasma processing apparatus as defined in claim 4, wherein, The plasma processing mechanism (4) further comprises a lifting sliding seat (18), the lifting sliding seat (18) is slidingly arranged on the screw rod two (17), and a servo motor two (19) is detachably arranged on the bottom of the end of the lifting sliding seat (18) away from the screw rod two (17).

6. A multi-station plasma processing apparatus as defined in claim 5, wherein, The plasma processing mechanism (4) further comprises a sliding rail two (20), the sliding rail two (20) is arranged on the output end of the servo motor two (19), a screw rod three (22) is rotatably arranged in the sliding rail two (20), the screw rod three (22) is provided with two threads with opposite rotation directions, a stepping motor two (21) is arranged on one side of the sliding rail two (20), and the output end of the stepping motor two (21) is connected with the screw rod three (22).

7. A multi-station plasma processing apparatus as defined in claim 6, wherein, The plasma processing mechanism (4) further comprises a second translation slide (23) and a plasma generator body (24), the second translation slide (23) is slidingly installed on two threads of the screw rod (22) with opposite rotation directions, and the bottom of the second translation slide (23) is provided with the plasma generator body (24).

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