Visual inspection assembly, hole shielding assembly and semiconductor device processing equipment

Abstract

The utility model discloses a visual inspection assembly, hole shielding assembly and semiconductor device processing equipment, the visual inspection assembly comprises an outer cover and an image acquisition assembly arranged in the outer cover, an end plate of the outer cover opposite to a lens of the image acquisition assembly is provided with an inspection hole, the outer cover is internally provided with the hole shielding assembly, and the hole shielding assembly is provided with a hole. The hole shielding assembly comprises a bendable baffle plate and a driver for driving the baffle plate to move along a bending guide groove of the guide plate, a telescopic shaft of the driver is parallel to a lens optical axis of the image acquisition assembly, and the telescopic shaft drives the baffle plate to shield the detection hole when extending out; and when the telescopic shaft retracts, the baffle plate is driven to move to the outer side of the detection hole. According to the utility model, the detection hole can be completely shielded by the baffle plate, so that the driver can be arranged along the vertical space of the outer cover, the required horizontal space can be effectively reduced, the horizontal space required by the visual detection assembly is greatly reduced, and the visual detection assembly is greatly convenient to use in equipment with limited horizontal space; and the application range is expanded.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device processing, and in particular to visual inspection components, hole masking components, and semiconductor device processing equipment. Background Technology

[0002] In semiconductor product processing, such as wafer dicing, various inspections and adjustments are performed using vision inspection devices. Because visual inspection of semiconductor products requires micron-level precision, the stability of these devices is critical. However, the working environment in processing plants is often harsh, and impurities such as moisture and silicon powder can easily splash onto the lens, affecting recognition accuracy. Therefore, the lens needs to be covered when not in use.

[0003] Patent document CN220689696U discloses a commonly used visual inspection mechanism. In this structure, a baffle is driven by a power device to move horizontally, thereby blocking the inspection port.

[0004] The problem with this structure is that the power unit and baffle require a large amount of horizontal space, which greatly increases the difficulty of using this structure for processing equipment with limited horizontal space. Utility Model Content

[0005] The purpose of this invention is to solve the above-mentioned problems in the prior art and to provide a visual inspection component, a hole masking component, and a semiconductor device processing equipment.

[0006] The objective of this utility model is achieved through the following technical solution:

[0007] A visual inspection component includes an outer casing and an image acquisition component disposed within the outer casing. A detection hole is provided on an end plate of the outer casing opposite the lens of the image acquisition component. A hole-blocking component is disposed within the outer casing. The hole-blocking component includes a flexible baffle and a driver that drives the baffle to move along a curved guide groove of a guide plate. The telescopic shaft of the driver is parallel to the optical axis of the lens of the image acquisition component. When the telescopic shaft extends, it drives the baffle to block the detection hole; when the telescopic shaft retracts, it drives the baffle to move to the outside of the detection hole.

[0008] Preferably, the driver is an electric cylinder, a pneumatic cylinder, a hydraulic cylinder, or a linear motor.

[0009] Preferably, the telescopic shaft is connected to the upper end of the baffle via a plate clamp, and the plate clamp is provided with a slot for inserting the baffle and a connecting hole for fixing the baffle at the slot.

[0010] Preferably, the connecting hole includes screw holes and through holes located on both sides of the slot, wherein the diameter of the screw holes is smaller than the diameter of the through holes.

[0011] Preferably, the guide plate includes a first part, a turning part, and a second part. The first part is fixed on a bracket extending into the outer casing. The second part is perpendicular to the first part and located between the end plate where the lens and the detection hole are located. The second part is provided with a clearance notch corresponding to the lens. The first part forms a first straight groove, the turning part is provided with an arc-shaped groove, and the second part is provided with a second straight groove perpendicular to the first straight groove. The first straight groove, the arc-shaped groove, and the second straight groove are sequentially connected to form the curved guide groove.

[0012] Preferably, the first part is provided with a clearance for the reciprocating movement of the plate clamp, and the guide groove extends to both sides of the guide plate.

[0013] Preferably, the second part and the end plate where the detection hole is located are sealed by a sealing ring.

[0014] Preferably, the outer cover is mounted on the bracket, and the portion of the bracket extending outside the outer cover is provided with an external connecting plate.

[0015] An aperture blocking assembly includes a flexible baffle and a driver that drives the baffle to move along a curved guide groove of a guide plate. The telescopic axis of the driver is parallel to the optical axis of the lens of the image acquisition assembly. When the telescopic axis extends, it drives the baffle to block the detection aperture. When the telescopic axis retracts, it drives the baffle to move to the outside of the detection aperture.

[0016] Semiconductor device processing equipment, including any of the vision inspection components described above.

[0017] The advantages of this utility model's technical solution are mainly reflected in:

[0018] This invention uses a completely obstructed baffle to cover the detection hole, allowing the driver to be positioned along the vertical space of the outer casing. This effectively reduces the required horizontal space, greatly facilitating the use of the vision inspection component in devices with limited horizontal space and expanding its applicability.

[0019] The structural design of the plate clamp of this utility model helps to ensure the stability and durability of the connection between the baffle and the plate clamp, and helps to ensure the long-term reliable use of the vision inspection component.

[0020] The structural design of the guide plate of this utility model helps to reduce the space required for the plate clamp to move up and down, which can reduce the longitudinal space required for the vision inspection component and facilitate the miniaturization of the vision inspection component. Attached Figure Description

[0021] Figure 1 This is a cross-sectional view of the visual inspection component of this utility model;

[0022] Figure 2 This is a perspective view of the visual inspection component of this utility model without its outer cover.

[0023] Figure 3 This is a partial sectional perspective view of the clamping plate of this utility model. Detailed Implementation

[0024] The purpose, advantages, and features of this utility model will be illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of applying the technical solutions of this utility model, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of protection claimed by this utility model.

[0025] In the description of the solution, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience and simplification of description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] Example 1

[0027] The visual inspection component disclosed in this utility model will now be described in conjunction with the accompanying drawings, as shown below. Figure 1 As shown, it includes an outer cover 100 and an image acquisition component 200 disposed inside the outer cover 100. A detection hole 111 is provided on the end plate 110 of the outer cover 100 opposite to the lens of the image acquisition component 200. A hole shielding component 300 is disposed inside the outer cover 100. The hole shielding component 300 includes a flexible baffle 310 and a driver 330 for driving the baffle 310 to move along the curved guide groove 321 of the guide plate 320. The telescopic shaft 331 of the driver 330 is parallel to the optical axis of the lens of the image acquisition component 200. When the telescopic shaft 331 extends, it drives the baffle 310 to shield the detection hole 111. When the telescopic shaft 331 retracts, it drives the baffle 310 to move to the outside of the detection hole 111.

[0028] Specifically, as shown in the attached document Figure 1As shown, the outer cover 100 can be a cuboid cover, and the outer cover 100 can be mounted on the bracket 400. The portion of the bracket 400 extending outside the outer cover 100 is provided with an external connecting plate 410, and the external connecting plate 410 is provided with a set of through holes or screw holes for connecting with external structures.

[0029] The image acquisition component 200 can be any known device with image acquisition capabilities, and is not limited here. (See attached image) Figure 1 Appendix Figure 2 As shown, the image acquisition component 200 can be connected to the outer cover 100 via the connecting block 500, or more preferably, the image acquisition component 200 can be connected to the bracket 400 via the connecting block 500.

[0030] The specific material of the flexible baffle 310 can be designed as needed, such as a thin sheet of stainless steel, a plastic sheet, etc., and is not limited here.

[0031] As attached Figure 2 Appendix Figure 3 As shown, the actuator 330 is an electric cylinder, pneumatic cylinder, hydraulic cylinder, or linear motor. Taking an electric cylinder as an example, the actuator 330 has its telescopic shaft 331 facing downwards and connected to the upper end of the baffle 310 via a clamp 340. The telescopic shaft 331 is bolted to the middle position of the top of the clamp 340. The clamp 340 is C-shaped, and its horizontal portion has a countersunk hole 341 extending vertically to facilitate bolting the telescopic shaft 331. Simultaneously, the two protrusions 342 of the clamp 340 are respectively provided with slots 343 for inserting the baffle 310 and connecting holes for fixing the baffle 310 to the slots 343. In order to fix the baffle 310 more stably in the slot 343, the connecting hole includes a screw hole 344 and a through hole 345 located on both sides of the slot 343. The diameter of the screw hole 344 is smaller than the diameter of the through hole. Therefore, when a bolt is screwed into the screw hole, the bolt can cause the baffle 310 to be partially deformed and embedded in the through hole, so that the baffle 310 can be effectively fixed.

[0032] As attached Figure 2As shown, the guide plate 320 includes a first part 322, a turning part 323, and a second part 324. The first part 322 extends vertically and is fixed on the bracket 400. The turning part 323 bends from the outside of the image acquisition device toward the image acquisition device, thereby causing the second part 324 to extend horizontally and be perpendicular to the first part 322. The second part 324 is located between the end plate 110 where the lens and the detection hole 111 are located. A clearance notch 325 corresponding to the lens is provided at the second part 324. The first part 322 forms a first straight groove 327, the turning part 323 has an arc-shaped groove 328, and the second part 324 has a second straight groove 329 perpendicular to the first straight groove. The first straight groove, the arc-shaped groove, and the second straight groove are sequentially connected to form the curved guide groove 321. Furthermore, the first straight groove can extend from the upper end to the lower end of the first portion 322 and / or the second straight groove can also extend to both ends of the second portion 324. In this case, the baffle 310 can be inserted into the curved guide groove 321 from the upper end of the first straight groove or from the far end of the second straight groove away from the turning portion 323.

[0033] As attached Figure 2 As shown, the first part 322 is provided with a clearance opening 326 for the plate clamp 340 to move up and down reciprocally, and the guide groove 321 extends to both sides of the guide plate 320. At this time, the baffle 310 can be inserted into the guide groove from the side of the guide plate 320, and the upper end of the first straight groove can extend close to the upper end of the first part 322 but maintain a certain distance. At the same time, the second straight groove extends close to the far end of the second part 324 and maintains a certain distance.

[0034] Furthermore, to prevent external fog from seeping into the outer cover 100 through the gap between the end plate 110 where the detection hole 111 is located and the guide plate 320, the second part 324 and the end plate 110 where the detection hole 111 is located are sealed by a sealing ring (not shown in the figure).

[0035] In the above embodiment, the hole-masking component 300 is used to detect the shading of the hole 111. Of course, in other embodiments, the hole-masking component 300 can also be used in other scenarios where holes need to be shading, such as for shading light-transmitting holes.

[0036] Example 2

[0037] This embodiment discloses a semiconductor device processing apparatus, including any of the vision inspection components described above.

[0038] This utility model has many other embodiments. All technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of this utility model.

Claims

1. A visual inspection component, comprising an outer casing and an image acquisition component disposed within the outer casing, wherein a detection hole is provided on an end plate of the outer casing opposite to the lens of the image acquisition component, characterized in that: The cover is provided with a hole shielding assembly, which comprises a bendable baffle and a driver for driving the baffle to move along a bending guide groove of a guide plate, a telescopic shaft of the driver is parallel to a lens optical axis of the image acquisition assembly, the telescopic shaft is extended to drive the baffle to shield the detection hole, and the telescopic shaft is retracted to drive the baffle to move to the outside of the detection hole.

2. The vision inspection assembly of claim 1, wherein: The driver is an electric cylinder, a gas cylinder, a hydraulic cylinder or a linear motor.

3. The vision inspection assembly of claim 1, wherein: The telescopic shaft is connected to the upper end of the baffle through a plate clamp, the plate clamp is provided with a slot for inserting the baffle and a connecting hole for fixing the baffle at the slot.

4. The vision inspection assembly of claim 3, wherein: The connecting hole comprises screw holes and through holes on both sides of the slot, and the hole diameter of the screw holes is smaller than that of the through holes.

5. The vision inspection assembly of claim 1, wherein: The guide plate comprises a first part, a turning part and a second part, the first part is fixed on a support extending into the cover, the second part is perpendicular to the first part and is located between an end plate where the lens and the detection hole are located, the second part is provided with an avoidance notch corresponding to the lens, the first part is formed with a first straight groove, the turning part is provided with an arc-shaped groove, and the second part is provided with a second straight groove perpendicular to the first straight groove, the first straight groove, the arc-shaped groove and the second straight groove are sequentially communicated to form the bending guide groove.

6. The vision inspection assembly of claim 5, wherein: The first part is provided with an avoidance opening for reciprocating movement of the plate clamp, and the bending guide groove extends to both sides of the guide plate.

7. The vision inspection assembly of claim 5, wherein: The second part and the end plate where the detection hole is located are sealed through a sealing ring.

8. The vision inspection assembly of any of claims 1-7, wherein: The cover is arranged on a support, and a part of the support extending out of the cover is provided with an external connecting plate.

9. A hole shielding assembly characterized by: The hole shielding assembly comprises a bendable baffle and a driver for driving the baffle to move along a bending guide groove of a guide plate, a telescopic shaft of the driver is parallel to a lens optical axis of the image acquisition assembly, the telescopic shaft is extended to drive the baffle to shield the detection hole, and the telescopic shaft is retracted to drive the baffle to move to the outside of the detection hole.

10. A semiconductor device processing apparatus, characterized by: The visual detection assembly comprises the visual detection assembly according to any one of claims 1-8.

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