Vacuum cavity preparation device and system of absolute pressure sensor

Abstract

The utility model relates to the technical field of sensors, and provides an absolute pressure sensor vacuum cavity preparation device and system.The device comprises a vacuum box, a laser and a workpiece moving device, the laser is arranged outside the vacuum box, and the workpiece moving device rotates to move all absolute pressure sensors to welding points for welding of sealing holes; therefore, preparation of a plurality of absolute pressure sensor vacuum cavities is completed. According to the utility model, vacuum cavity preparation of a plurality of pressure sensors is realized through one-time vacuum pumping, and the laser is integrated outside the vacuum box, so that the technical problems of long time, more consumed inert gas and higher cost of a vacuum pumping process in the prior art are solved, and the vacuum pumping time is shortened; and by welding the sealing hole of the sensor, the welding area is reduced, the production efficiency is further improved, and the cost is reduced.

Description

Technical Field

[0001] This application relates to the field of sensor technology, and in particular to a vacuum cavity fabrication apparatus and system for an absolute pressure sensor. Background Technology

[0002] Based on the different reference pressures, pressure sensors are divided into gauge pressure sensors and absolute pressure sensors. Gauge pressure sensors use ambient air pressure as their reference pressure, while absolute pressure sensors use the vacuum level within a vacuum chamber. Gauge pressure sensors are formed by creating a vacuum chamber to create an absolute pressure sensor, typically involving processes such as welding an absolute pressure cap, evacuation, and encapsulation. In existing vacuum chamber fabrication systems, the vacuum chamber of an absolute pressure sensor is generally created by welding the outer shell to the sensor substrate, and this welding method involves multiple points, resulting in low production efficiency. Furthermore, the vacuum chamber has a large volume, the evacuation process is time-consuming, consumes a large amount of inert gas, and is therefore costly. Utility Model Content

[0003] To address the aforementioned problems, this application provides a vacuum cavity fabrication apparatus and system for an absolute pressure sensor, which solves the technical problems raised in the background section of this application.

[0004] To achieve the objectives of this application, the following technical solution is provided:

[0005] The first aspect of this application provides a vacuum cavity fabrication apparatus for an absolute pressure sensor, comprising: a laser disposed outside a vacuum chamber; and a welding apparatus, comprising a workpiece moving device and a vacuum chamber, wherein the workpiece moving device is disposed inside the vacuum chamber and includes a rotating platform, the rotating platform having multiple stations for placing absolute pressure sensors, the rotating platform moving each absolute pressure sensor to a welding station for welding by rotation, the position of the welding station corresponding to the sealing hole position of each absolute pressure sensor, and the laser fabricating the vacuum cavity of the absolute pressure sensor by irradiating the sealing hole.

[0006] Furthermore, the vacuum chamber also includes a chamber body, a laser window, a viewing window, a vacuum pump interface, and an air inlet interface; the laser window is located on the top of the chamber body; the viewing window is located on one side of the chamber body and is fixedly connected to the chamber body; the vacuum pump interface and the air inlet interface are located on adjacent sides of the viewing window, the vacuum pump interface is used to connect to a vacuum pump outside the chamber body, and the air inlet interface is used to connect to external gas.

[0007] Furthermore, the welding device also includes: a vacuum pump located outside the housing and connected to the vacuum pump interface; a drive device located outside the housing and one end fixedly connected to the workpiece moving device, the housing of the drive device being sealed to the bottom of the housing, and the drive device being able to drive the workpiece moving device to move.

[0008] Furthermore, the position of the welding station corresponds to the position of the laser window, and the positions of the welding station, the laser window, and the laser outside the housing are on the same straight line.

[0009] Furthermore, the box body is also provided with a base, which is fixedly connected to the bottom of the box body.

[0010] Furthermore, the external gas includes inert gas and atmospheric pressure.

[0011] The second aspect of this application provides a vacuum cavity fabrication system for an absolute pressure sensor, implemented based on the apparatus described in the first aspect, comprising:

[0012] An execution unit is used to control a vacuum pump, a laser, and a drive device, and is communicatively connected to a central processing unit; the central processing unit is communicatively connected to the execution unit and is used to issue control commands to the execution unit; a feedback unit is communicatively connected to both the execution unit and the central processing unit, and is used to acquire and monitor the processing data of the execution unit and feed the processing data back to the staff or the central processing unit.

[0013] This application provides a vacuum chamber fabrication apparatus for absolute pressure sensors. By reducing the volume of the vacuum chamber and arranging the laser outside the vacuum chamber, the vacuuming time is greatly reduced, further improving production efficiency, reducing the consumption of inert gas, and lowering costs. The workpiece moving device moves each absolute pressure sensor to the welding point for welding the sealing hole by rotation, thereby completing the fabrication of multiple absolute pressure sensor vacuum chambers. Thus, multiple pressure sensor vacuum chambers can be fabricated in one vacuuming operation, reducing the area of ​​the welding point and further improving the fabrication efficiency. Attached Figure Description

[0014] The accompanying drawings are provided to further understand this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof.

[0015] Figure 1 This is a front view of a vacuum chamber fabrication apparatus for an absolute pressure sensor provided in an embodiment of this application;

[0016] Figure 2 A top view of a vacuum cavity fabrication apparatus for an absolute pressure sensor provided in an embodiment of this application;

[0017] Figure 3 This is a schematic diagram of the absolute pressure sensor provided in the embodiments of this application;

[0018] Figure 4 A system architecture diagram of a vacuum chamber fabrication system for an absolute pressure sensor is provided in this application embodiment;

[0019] The attached figures are labeled as follows: 1. Laser; 2. Laser beam; 3. Laser window; 4. Viewing window; 5. Absolute pressure sensor; 6. Workpiece moving device; 7. Drive device; 8. Vacuum chamber; 9. Vacuum pump interface; 10. Air inlet interface; 11. Sealing hole; 12. Vacuum chamber; 13. Housing; 14. Sensor body; 15. Connector; 16. Lead wire. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; in the description of this application, unless otherwise stated, "multiple" means two or more.

[0022] according to Figure 1 and Figure 2 The vacuum chamber fabrication apparatus for an absolute pressure sensor provided in this application includes: a vacuum chamber 8, a workpiece moving device 6, a laser 1, a vacuum pump, and a driving device 7. The workpiece moving device 6 includes a rotating platform with multiple placement slots for placing absolute pressure sensors 5. Each absolute pressure sensor 5 is fixed on the rotating platform by engaging with the hole shaft of the placement slot. The platform rotates the placed absolute pressure sensors 5 to a welding station to seal and weld the vacuum chamber 12 of each absolute pressure sensor 5, thereby fabricating the vacuum chambers of multiple pressure sensors. The position of the welding station corresponds to the position of the sealing hole 11 of each absolute pressure sensor 5.

[0023] Furthermore, according to Figure 3As shown, the absolute pressure sensor includes a housing 13 and a sensor body 14, with an absolute pressure cavity (vacuum cavity) 12 between the housing 13 and the sensor body 14. A lead wire 16 passes through the absolute pressure cavity 12 and is fixedly connected to the sensor body 14 via a connector 15. The sealing hole 11, welded using the vacuum box provided in this specific embodiment, is the connection hole of the intermediate connector 15. Preferably, in this embodiment, the connector 15 is a Kovar pin with a 0.5mm connection hole.

[0024] Preferably, the vacuum pump, laser 1 and drive device 7 are located outside the vacuum chamber 8, thereby greatly reducing the vacuuming time, further improving production efficiency, reducing the consumption of inert gas and reducing costs.

[0025] Furthermore, the vacuum chamber 8 specifically includes: a chamber body, a workpiece moving device 6, a laser window 3, a viewing window 4, a vacuum pump interface 9, and an air inlet interface 10. The workpiece moving device 6 is located inside the chamber body, which has a sealed interior. The workpiece moving device 6 has a welding station, and its movement is controlled by an external drive device 7, moving the workpiece to the welding station for vacuum chamber sealing welding of the absolute pressure sensor 5. The laser window 3 is located on the top of the chamber body, opposite to the laser 1 outside the chamber body. The welding station, laser window 3, and external laser 1 are aligned on the same straight line. The laser beam 2 emitted by the laser 1 passes through the laser window 3 to weld the vacuum chamber sealing hole 11 of the absolute pressure sensor 5 at the welding station. The welding position is as follows: Figure 4 As shown, the vacuum cavity 12 between the housing 13 and the sensor body 14 of the absolute pressure sensor is sealed by laser welding; preferably, the laser window 3 is made of high-temperature resistant glass material; the viewing window 4 is located on one side of the box and is fixedly connected to the box by multiple connectors (such as screws); the vacuum pump interface 9 and the air inlet interface 10 are located on the adjacent side of the viewing window 4, the vacuum pump interface 9 is used to connect to a vacuum pump located outside the box, and the air inlet interface 10 is connected to an external gas delivery port to deliver inert gas or atmospheric pressure into the box; a base is also provided at the bottom of the box, and the external drive device 7 of the workpiece moving device 6 is located in the cavity between the bottom of the box and the base.

[0026] Furthermore, the outer casing of the external drive device 7 of the workpiece moving device 6 is tightly fitted with the vacuum chamber 8 through a sealing structure, ensuring the airtightness of the vacuum chamber 8 from the outside environment. The drive device 7 has a rotating shaft inside, which drives the workpiece moving device 6 to rotate.

[0027] Preferably, the driving device 7 is a motor.

[0028] The vacuum chamber 12 of the absolute pressure sensor 5 is fabricated by welding according to the system described in this embodiment, and the specific steps include the following:

[0029] a. Place multiple absolute pressure sensors 5 into the workpiece moving device 6 placement slot, close the vacuum chamber 8, and the central processing unit controls the vacuum pump to start the vacuum chamber 8 to perform a vacuuming operation.

[0030] b. When the vacuum level in the vacuum chamber 8 reaches the first set value, turn off the vacuum pump and open the gas inlet 10 (gas replacement process, gas inlet 10 is connected to inert gas) to perform gas replacement on the vacuum chamber 8.

[0031] c. After the gas replacement is completed, the vacuum chamber 8 is evacuated. Once the vacuum level in the vacuum chamber 8 reaches the second set value, the central processing unit controls the laser 1 to be turned on. The laser beam 2 emitted by the laser 1 passes through the glass of the laser window 3 and converges at the welding station (i.e., the sealing hole 11). The high temperature generated by the laser seals the vacuum chamber 12 of the first pressure sensor. After the first pressure sensor is welded, the central processing unit controls the drive device 7 to drive the workpiece moving device 6 to rotate, moving the next pressure sensor to the welding station for welding. This process is repeated to complete the sealing welding of the vacuum chamber 12 of all sensors in sequence.

[0032] d. After all pressure sensors have been welded, the central processing unit controls the opening of the air inlet 10. At this time, atmospheric pressure is introduced into the air inlet 10. Once the pressure value inside the vacuum chamber 8 is consistent with the atmospheric pressure, the welded absolute pressure sensor 5 is taken out. During the entire welding process, the feedback unit sends the workpiece preparation data of each mechanism to the designated personnel, who then monitor the preparation process; or the data is transmitted to the central processing unit for automated monitoring by artificial intelligence.

[0033] according to Figure 4 This application also provides a vacuum chamber fabrication system for an absolute pressure sensor, including a central processing unit, an execution unit, and a feedback unit. The execution unit includes a vacuum pump, a laser 1, and a drive device 7 for a workpiece moving device 6, all disposed outside the vacuum chamber 8. The drive device 7 is used to connect to and drive the workpiece moving device 6 to move. Each mechanism of the execution unit is communicatively connected to the central processing unit and is mainly responsible for implementing the instructions of the central processing unit. Optionally, the central processing unit can be a computer or other single-chip microcomputer system, used to communicate with and control each mechanism in the execution unit. The feedback unit is communicatively connected to both the execution unit and the central processing unit, used to acquire and monitor the production process, display the status of each actuator, and feed back the acquired processing data to the operator for processing, or to the central processing unit for automated monitoring by artificial intelligence.

[0034] By providing a vacuum chamber fabrication system for absolute pressure sensors, the fabrication process is easier to manage and the fabrication efficiency is improved. The system enables the use of a central processing unit to control the workpiece displacement, thereby allowing the fabrication of vacuum chambers for multiple pressure sensors in a single vacuuming operation. By reducing the volume of the vacuum chamber and arranging the laser and the drive device for the workpiece movement outside the vacuum chamber, the vacuuming time is greatly reduced, further improving production efficiency, reducing the consumption of inert gas, and lowering costs.

[0035] The beneficial effects of using the embodiments of this application are as follows:

[0036] 1. By arranging the laser, the drive unit of the workpiece moving device, and the vacuum pump outside the vacuum chamber, the volume of the vacuum chamber and the vacuuming time are greatly reduced.

[0037] 2. By welding the sealing holes at the connection of the sensor vacuum chamber, the welding area is reduced, which further improves production efficiency and reduces costs;

[0038] 3. Using a central processing unit to control workpiece displacement allows for the preparation of vacuum chambers for multiple pressure sensors in a single vacuuming operation. This facilitates process management, improves production efficiency, reduces inert gas consumption, and lowers costs.

[0039] In the embodiments provided in this application, it should be understood that the disclosed systems, modules, and methods can be implemented in other ways. For example, the module embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces, or indirect coupling or communication connection between modules or units, and may be electrical, mechanical, or other forms.

[0040] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit it. This application is not limited to the exact structures described above and illustrated in the accompanying drawings, and it should not be considered that the specific implementation of this application is limited to these descriptions. For those skilled in the art, various changes and modifications made without departing from the concept of this application should be considered to fall within the protection scope of this application.

Claims

1. An apparatus for producing a vacuum chamber of an absolute pressure sensor, characterized by The application relates to a welding device and a system thereof. The welding device comprises a laser (1) arranged outside a vacuum box (8), and a workpiece moving device (6) arranged inside the vacuum box (8), wherein the workpiece moving device (6) comprises a rotating platform provided with a plurality of work stations for placing absolute pressure sensors (5), the rotating platform moves each absolute pressure sensor (5) to a welding station for welding by rotation, the position of the welding station corresponds to the position of a sealed hole (11) of each absolute pressure sensor (5), and the laser (1) realizes the preparation of a vacuum cavity (12) of the absolute pressure sensor (5) by irradiating the sealed hole (11). The vacuum box (8) further comprises a box body, a laser window (3), a visual window (4), a vacuum pump interface (9) and a gas inlet interface (10), the laser window (3) is arranged on the top of the box body, the visual window (4) is arranged on one side of the box body and is fixedly connected with the box body, the vacuum pump interface (9) and the gas inlet interface (10) are arranged on the adjacent side of the visual window (4), the vacuum pump interface (9) is used for connecting a vacuum pump outside the box body, and the gas inlet interface (10) is used for connecting external gas.

2. A vacuum chamber preparation apparatus for an absolute pressure sensor according to claim 1, wherein The welding device further comprises:

3. A vacuum chamber preparation device for an absolute pressure sensor according to claim 2, characterized in that a vacuum pump arranged outside the box body and connected with the vacuum pump interface (9); a driving device (7) arranged outside the box body and fixedly connected with the workpiece moving device (6) at one end, the shell of the driving device (7) is sealingly connected with the bottom of the box body, and the driving device (7) can drive the workpiece moving device (6) to move. The position of the welding station corresponds to the position of the laser window (3), and the position of the welding station, the position of the laser window (3) and the position of the laser (1) outside the box body are located on the same straight line.

4. The vacuum chamber preparation apparatus of claim 2, wherein The box body is further provided with a base fixedly connected with the bottom of the box body.

5. The vacuum chamber preparation apparatus of claim 2, wherein, The external gas comprises inert gas and atmospheric pressure.

6. The vacuum chamber preparation apparatus of claim 2, wherein The system comprises:

7. A vacuum chamber preparation system for an absolute pressure sensor, characterized by, an execution unit for controlling the vacuum pump, the laser (1) and the driving device (7) and being in communication connection with a central processing unit; the central processing unit in communication connection with the execution unit and used for issuing control instructions to the execution unit; a feedback unit in communication connection with the execution unit and the central processing unit, used for acquiring and monitoring processing data of the execution unit and feeding back the processing data to a worker or the central processing unit. ​

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