Modular front-end plumbing system

The modular design of the pre-stage piping system solves the problems of difficult installation and inconvenient maintenance of vacuum pumping systems in semiconductor manufacturing plants, enabling flexible installation and efficient maintenance, ensuring the performance consistency of each processing chamber, reducing the footprint, and improving production efficiency.

CN115956161BActive Publication Date: 2026-03-24EDWARDS LTD
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Patent Information

Application Number
CN202180049913.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2020-07-24
Filing Date
2021-07-22
Publication Date
2026-03-24
Estimated Expiration
2041-07-22

AI Technical Summary

Technical Problem

In the prior art, the front-end piping design of vacuum pumping systems in semiconductor manufacturing plants lacks flexibility and consistency, resulting in difficult installation, inconvenient maintenance, and large footprint, making it difficult to achieve performance matching between multiple processing chambers.

Method used

The modular fore-piping system allows for flexible combinations of standardized pipe sections and auxiliary devices to form continuous fore-piping systems, including heated pipe sections, traps, and reactors. It provides independent control and efficient layout, supporting a variety of system configurations.

Benefits of technology

It enables flexible installation and convenient maintenance of the front-end piping system, reduces the floor space, ensures performance consistency between processing chambers, simplifies temperature management and maintenance processes, and improves production efficiency.

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Abstract

A kit of parts for forming a foreline (112) for coupling a process chamber (108) to a vacuum pumping and / or abatement system (110), the kit comprising: a plurality of foreline sections (122, 124); wherein each foreline section (122, 124) is a tube comprising: a first end portion (122a, 124a) that is substantially straight; a second end portion (122b, 124b) that is substantially straight, opposite the first end portion (122a, 124a); and an intermediate portion (122c, 124c) disposed between the first and second end portions (122a-b, 124a-b) and connected to the first and second end portions (122a-b, 124a-b) by respective bends (122d-e, 124d-e), the first and second end portions (122a-b, 124a-b) being substantially parallel to each other; the intermediate portion (122c, 124c) being inclined with respect to the first and second end portions (122a-b, 124a-b); and the foreline sections (122, 124) being configured to be attached together so as to form a continuous foreline (112).
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