Modular front-end plumbing system

Abstract

A kit of parts for forming a foreline (112) for coupling a process chamber (108) to a vacuum pumping and / or abatement system (110), the kit comprising: a plurality of foreline sections (122, 124); wherein each foreline section (122, 124) is a tube comprising: a first end portion (122a, 124a) that is substantially straight; a second end portion (122b, 124b) that is substantially straight, opposite the first end portion (122a, 124a); and an intermediate portion (122c, 124c) disposed between the first and second end portions (122a-b, 124a-b) and connected to the first and second end portions (122a-b, 124a-b) by respective bends (122d-e, 124d-e), the first and second end portions (122a-b, 124a-b) being substantially parallel to each other; the intermediate portion (122c, 124c) being inclined with respect to the first and second end portions (122a-b, 124a-b); and the foreline sections (122, 124) being configured to be attached together so as to form a continuous foreline (112).

Description

TECHNICAL FIELD

[0001] The present invention relates to a modular foreline system for forming a foreline for coupling a process chamber of a semiconductor manufacturing plant to a vacuum pumping and / or abatement system. BACKGROUND

[0002] Semiconductor manufacturing plants manufacture integrated circuit chips. Many processes performed on silicon wafers, such as etching processes, involve the use of gaseous environments and often require the use of high vacuums and reduced gas pressures.

[0003] Vacuum pumps are used to provide these reduced gas pressures in the process chambers, to provide chamber evacuation, and to maintain the flow of process gases.

[0004] The vacuum pumps are coupled to the process chambers by a foreline. SUMMARY

[0005] In one aspect, a modular system of foreline components is provided that can be connected together to provide a foreline for a vacuum pumping system. The modular system allows the foreline to be built from standard components.

[0006] In a first aspect, a kit of parts for forming a foreline for coupling a process chamber to a vacuum pumping and / or abatement system is provided. The kit comprises a plurality of foreline sections. Each foreline section is a tube comprising a first end portion that is substantially straight, a second end portion that is substantially straight, opposite the first end portion, and an intermediate portion disposed between the first end portion and the second end portion and connected to the first end portion and the second end portion by respective elbows. The first end portion and the second end portion are substantially parallel to each other. The intermediate portion is inclined with respect to the first end portion and the second end portion. The foreline sections of the plurality of foreline sections are configured to be attached together so as to form a continuous foreline.

[0007] The first end portion that is substantially straight, the second end portion that is substantially straight, and the intermediate portion can be integrally formed.

[0008] Each foreline section can be a tube, a conduit, or a pipe.

[0009] Each foreline section can comprise respective means for heating the foreline section, such that the heating of each foreline section is independently controllable.

[0010] The kit of parts can further comprise one or more further foreline segments, each further foreline segment being a substantially straight tube, wherein the further foreline segments are configured to be attached to the foreline segments and to each other so as to form a continuous foreline. Each further foreline segment can comprise respective means for heating the further foreline segment, such that heating of each further foreline segment is independently controllable.

[0011] Each of the one or more further foreline segments can have a length greater than or equal to ten times a diameter of the further foreline segment.

[0012] The intermediate portion can have a length greater than or equal to ten times a diameter of the intermediate portion.

[0013] An angle between the first end portion and the intermediate portion can be between 30° and 60°. An angle between the second end portion and the intermediate portion can be between 30° and 60°. The angles can be the same. The angle(s) can be approximately 45°.

[0014] Each of the plurality of foreline segments can have a diameter selected from a range of diameters consisting of: 40 mm, 63 mm, 80 mm, 100 mm, 160 mm, 200 mm, 250 mm, and 300 mm.

[0015] The kit of parts can further comprise one or more elements selected from the group of elements consisting of: one or more traps configured to be attached to a respective foreline segment; one or more reactors configured to be mounted within a respective foreline segment; one or more bellows configured to be attached to an end of a respective foreline segment; and one or more filters configured to be coupled to a respective foreline segment.

[0016] For each foreline segment, a distal end of the first end portion can comprise a first flange. For each foreline segment, a distal end of the second end portion can comprise a second flange.

[0017] In a further aspect, there is provided a foreline comprising a plurality of foreline segments of any of the foregoing aspects of the kit of parts coupled together.

[0018] The foreline can comprise exactly two foreline segments and exactly three substantially straight further foreline segments. The foreline segments and the further foreline segments can be attached together alternately.

[0019] In a further aspect, there is provided a system comprising: a process chamber; a vacuum pumping and / or abatement system; and a foreline attached between the process chamber and the vacuum pumping and / or abatement system. The foreline is a foreline according to any of the preceding aspects. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a schematic illustration (not to scale) showing a semiconductor fabrication plant comprising a modular foreline connecting process chambers and a vacuum pumping system; and

[0021] Figure 2 is a schematic illustration (not to scale) showing an alternative modular foreline connecting process chambers and a vacuum pumping system. DETAILED DESCRIPTION

[0022] Figure 1 is a schematic illustration (not to scale) showing a semiconductor fabrication plant 100 according to an embodiment.

[0023] The semiconductor fabrication plant 100 comprises a clean room 102 and a so-called sub-fab 104. The clean room 102 and the sub-fab 104 are separated by a structure 106 forming a floor of the clean room 102 and a ceiling of the sub-fab 104.

[0024] The clean room 102 is a room in which semiconductor manufacturing is performed. Air in the clean room 102 is kept at a typical clean room purity level by a suitable gas / air filtration and distribution system (not shown).

[0025] The clean room 102 comprises a plurality of process chambers 108.

[0026] Each of the process chambers 108 is configured to receive a process gas from a process gas source (not shown) and to perform an etching process using the received process gas to chemically remove a layer from a surface of a wafer located within the process chamber 108.

[0027] The sub-fab 104 is located directly below the clean room 102. The sub-fab 104 can be a room in which an air cleanliness level is maintained above a predetermined threshold.

[0028] The sub-fab 104 comprises a plurality of gas pumping stations 110.

[0029] In this embodiment, the gas pumping stations 110 comprise one or more vacuum pumps and can additionally comprise abatement equipment. Each gas pumping station 110 is coupled to a respective one of the process chambers 108 by means of a respective foreline or suction line 112.

[0030] Each foreline 112 extends between a respective gas pumping station 110 and a pair of processing chambers 108. Each foreline 112 passes through a respective opening 114 in the structure 106.

[0031] Each gas pumping station 110 is configured to evacuate a processing chamber 108 coupled thereto and to maintain a controlled gas flow in the processing chamber 108. Each gas pumping station 110 is configured to pump exhaust gas out of a processing chamber 108 coupled thereto via its respective foreline 112. Each gas pumping station 110 can be further configured to treat the pumped exhaust gas.

[0032] In this embodiment, each foreline 112 is a modular foreline formed of a plurality of modules or modular components. In other words, each foreline 112 is formed of a kit of parts. In particular, in this embodiment, each foreline 112 comprises a plurality of foreline segments, namely, a first foreline segment 121, a second foreline segment 122, a third foreline segment 123, a fourth foreline segment 124, and a fifth foreline segment 125.

[0033] Each of the foreline segments 121-125 comprises a respective pair of flanges, one at each end of the foreline segment 121-125. In particular, the first foreline segment 121 comprises a first flange 1211 at its first end and a second flange 1212 at its second end. The second foreline segment 122 comprises a first flange 1221 at its first end and a second flange 1222 at its second end. The third foreline segment 123 comprises a first flange 1231 at its first end and a second flange 1232 at its second end. The fourth foreline segment 124 comprises a first flange 1241 at its first end and a second flange 1242 at its second end. The fifth foreline segment 125 comprises a first flange 1251 at its first end and a second flange 1252 at its second end.

[0034] Each of the flanges encloses a respective opening of the foreline segment.

[0035] The first flange 1211 at the first end of the first foreline section 121 is connected to the respective process chamber 108. The second flange 1212 at the second end of the first foreline section 121 is connected to the first flange 1221 at the first end of the second foreline section 122. The second flange 1222 at the second end of the second foreline section 122 is connected to the first flange 1231 at the first end of the third foreline section 123. The second flange 1232 at the second end of the third foreline section 123 is connected to the first flange 1241 at the first end of the fourth foreline section 124. The second flange 1242 at the second end of the fourth foreline section 124 is connected to the first flange 1251 at the first end of the fifth foreline section 125. The second flange 1252 at the second end of the fifth foreline section 125 is connected to the respective gas pumping station 110. The connections between the flanges that are connected together can be provided, for example, by bolts that pass through the flanges.

[0036] The flanges 1221-1252 can be configured to provide a vacuum-compatible seal between the foreline sections that are connected together. The flanges 1221-1252 can be compatible with any appropriate standard, such as an ISO standard for flanges.

[0037] In this embodiment, the foreline sections 121-125 are configured such that the flanges 1221-1252 are substantially horizontal.

[0038] Each of the foreline sections 121-125 can be considered to be a pipe having a substantially circular cross-section. The diameters of the foreline sections 121-125 can be substantially the same. The diameter of each of the foreline sections 121-125 can be between about 40 mm and 200 mm. For example, the diameter can be a standard ISO diameter of 40 mm, 63 mm, 80 mm, 100 mm, 160 mm, 200 mm, 250 mm, or 300 mm.

[0039] In this embodiment, the first foreline section 121, the third foreline section 123, and the fifth foreline section 125 are substantially straight foreline sections, i.e., substantially straight pipes. The first foreline section 121, the third foreline section 123, and the fifth foreline section 125 are arranged vertically.

[0040] The length of each of the first foreline section 121, the third foreline section 123, and the fifth foreline section 125 is preferably greater than or equal to ten times its diameter. For example, a straight foreline section having a diameter of about 100 mm can have a length of at least 1 m.

[0041] In this embodiment, the second foreline section 122 and the fourth foreline section 124 can be identical to each other. The second foreline section 122 and the fourth foreline section 124 are non-straight, i.e. curved foreline sections.

[0042] In particular, in this embodiment, each of the second foreline section 122 and the fourth foreline section 124 comprises a substantially straight first end portion 122a, 124a, a substantially straight second end portion 122b, 124b opposite the first end portion 122a, 124a, and an intermediate portion 122c, 124c disposed between the first end portion 122a, 124a and the second end portion 122b, 124b. The intermediate portion 122c, 124c is connected to the first end portion 122a, 124a by a first elbow 122d, 124d. The intermediate portion 122c, 124c is connected to the second end portion 122b, 124b by a second elbow 122e, 124e. The first end portion 122a, 124a and the second end portion 122b are substantially parallel to each other. The intermediate portion 122c, 124c is inclined with respect to the first end portion 122a, 124a and the second end portion 122b, 124b.

[0043] The second foreline section 122 and the fourth foreline section 124 are positioned such that the first end portion 122a, 124a and the second end portion 122b, 124b are arranged vertically.

[0044] In this embodiment, the angle 131 between the end portions 122a, 124a, 122b, 124b and the intermediate portion 122c, 124c disposed therebetween can be an angle comprised between about 30° and 60°. For example, the angle 131 can be about 30°, about 35°, about 40°, about 45°, about 50°, about 55° or about 60°. More preferably, the angle 131 is 45°. In some embodiments, the angle 131 is comprised between about 35° and 55°. In some embodiments, the angle 131 is comprised between about 40° and 50°.

[0045] The length of each intermediate portion 122c, 124c is preferably greater than or equal to ten times its diameter. For example, a straight intermediate portion having a diameter of about 100 mm can have a length of at least 1 m.

[0046] For the plurality of forelines 112, the first foreline section 121 of the forelines 112 can be substantially identical to each other. The second foreline section 122 of the forelines 112 can be substantially identical to each other. The third foreline section 123 of the forelines 112 can be substantially identical to each other. The fourth foreline section 124 of the forelines 112 can be substantially identical to each other. The fifth foreline section 125 of the forelines 112 can be substantially identical to each other.

[0047] In some embodiments, the first fore-pipe section 121 is substantially identical to the third fore-pipe section 122. In some embodiments, the first fore-pipe section 121 is substantially identical to the fifth fore-pipe section 125. In some embodiments, the second fore-pipe section 122 is substantially identical to the fourth fore-pipe section 124.

[0048] In this embodiment, each of the fore-pipe sections 121-125 has a respective vertical length or height. In particular, the first fore-pipe section 121 has a first vertical length 141, the second fore-pipe section 122 has a second vertical length 142, the third fore-pipe section 123 has a third vertical length 143, the fourth fore-pipe section 124 has a fourth vertical length 144, and the fifth fore-pipe section 125 has a fifth vertical length 145.

[0049] Preferably, the vertical lengths 141-145 of the fore-pipe sections 121-125 are all equal to a respective integer multiple of a common value D, where D can take any suitable value. For example, the value D can be a value in the range: 10mm-200cm, or more preferably 10mm-100cm, or more preferably 10mm-90cm, or more preferably 10mm-50cm, or more preferably 10mm-20cm, or more preferably 10mm-10cm, or more preferably 10mm-5cm, or more preferably 20mm-50mm, or more preferably 30mm-40mm. Example x values include, but are not limited to, 10mm, 11mm, 22mm, 40mm, 41mm, 42mm, 43mm, 44mm, 45mm, 46mm, 47mm, 48mm, 49mm, 50mm, 88mm, 176mm, 352mm, 704mm, 11cm, 22cm, 100cm, 175cm, 200cm, etc. Preferably, D is equal to or about 44mm. The exact value chosen for D is not important, and any suitable value can be chosen.

[0050] In some embodiments, the vertical lengths 141-145 of the fore-pipe sections 121-125 are all equal, e.g. equal to x. Thus, the vertical height of the fore-pipe 112 is 5x. The height x can be any suitable value, e.g. 1m.

[0051] In some embodiments, the vertical lengths 141-145 of the fore-pipe sections 121-125 are not all equal. For example, the first section 121, the third section 123 and the fifth section 125 can have a vertical height x, while the second section 122 and the fourth section 124 can have a vertical height y, where y is not equal to x. The vertical height of the fore-pipe 112 is then 3x+2y. The height x can be any suitable value. The height y can be any suitable value.

[0052] In this embodiment, each foreline 112 can be considered as a modular pipe or conduit comprising alternating straight sections and non-straight sections, which are detachably attached together. There are three straight sections and two non-straight sections in each foreline 112.

[0053] Each foreline 112 is a pipe comprising a plurality of bends. Preferably, these bends are swept bends having an angle, such as the angle described above, rather than abrupt bends.

[0054] Figure 2 is a schematic illustration (not to scale) showing an alternative modular foreline connecting a process chamber and a vacuum pumping system. In Figure 2 , the same elements as shown in Figure 1 and described in more detail earlier above are indicated using the same reference numerals as in Figure 1 , and will not be described again for the sake of brevity.

[0055] In this embodiment, the modular foreline 112 further comprises a plurality of traps 200 and a plurality of in-line reactors 202. Thus, in this embodiment, the kit of parts from which the foreline 112 is constructed additionally comprises a plurality of traps 200a, b and a plurality of reactors 202.

[0056] The traps 200a, b can be devices that capture gases and vapors from the exhaust gas being pumped through the foreline 112. The traps 200a, b can be any appropriate type of trap, including but not limited to ambient alumina traps.

[0057] The traps 200a, b are modular elements, which can be attached to and detached from the foreline sections 121-125. The traps 200a, b can be configured to be attached to the foreline sections at any appropriate location.

[0058] In this embodiment, a first trap 200a is connected to the second foreline section 122. In particular, in this embodiment, the second foreline section 122 further comprises a further opening, which is enclosed by a third flange 1223 (not present in the embodiment shown in Figure 1 ). The third flange 1223 is located at the first bend 122d of the second foreline section 122, opposite and vertically below the first flange 1221. The first trap 200a comprises a flange 201a, which is attached to the third flange 1223, for example by bolting.

[0059] Similarly, in this embodiment, the second trap 200b is connected to the fourth foreline segment 124. In particular, in this embodiment, the fourth foreline segment 124 further comprises a further opening surrounded by a third flange 1243 (absent in the embodiment shown in Figure 1 The second trap 200b comprises a flange 201b which is connected, for example by bolting, to the third flange 1223.

[0060] The traps 200a,b can comprise valves, for example for maintenance.

[0061] The reactor 202 can be any appropriate type of reactor for treating exhaust gas in a foreline, for example a foreline plasma reactor.

[0062] The reactor 202 is a modular element which can be attached to and detached from the foreline segments 121-125. The reactor 202 can be installable within the foreline segments 121-125. In this embodiment, the reactor 202 is positioned within straight portions of the foreline segments, in particular within the third foreline segment 123 and the fifth foreline segment 125.

[0063] Thus, a modular system for constructing a foreline of a vacuum pumping system is provided.

[0064] Advantageously, the modules (i.e. the foreline sub-segments and auxiliary devices) can be easily and efficiently arranged and attached together to provide a plurality of different system configurations. Figure 1 A plurality of different example configurations are shown in the figures. This advantageously allows a certain degree of flexibility and control in the positioning of the gas pumping system relative to each other and to the process chamber. For example, using the above-described system tends to make it possible to space the gas pumping system apart to a greater extent than, say, using straight forelines. This tends to make maintenance and repair of the gas pumping system easier.

[0065] The modules can be manufactured and prepared prior to designing and installing the system, thereby reducing cost and lead time.

[0066] The space (or footprint) occupied by an installed vacuum pumping and / or abatement system tends to be an important factor in the design of the system. A reduced footprint tends to result in reduced cost and / or higher productivity. Advantageously, with the above-described modular system, greater control over the footprint of the installed system tends to be provided.

[0067] The modular system described above tends to accelerate the manufacturing and installation of foreline in semiconductor fabrication plants. The modular system is a kit of parts that includes a plurality of tubes, each tube having a standard length and diameter. The kit can allow for the construction of a plurality of forelines, each of which has a different shape or configuration, while still having the same number of elbows and straight segments as the other forelines. Thus, forelines that are configured / shaped differently tend to provide substantially the same vacuum performance as each other. This tends to facilitate chamber matching, i.e., matching of performance between a plurality of different processing chambers.

[0068] Conventionally, forelines with highly variable customizations tend to make it difficult to install a temperature management system (TMS). Also, consistent quality control of custom forelines tends to be difficult to ensure. The modular foreline system described above tends to solve these problems.

[0069] The modular foreline system described above tends to provide consistent geometry and conductance to each processing chamber, support fabrication / fab layout changes, incorporate standardized interfaces and dimensional (diameter and length) increments, facilitate inclusion of integrated TMS with metrology, allow inclusion of foreline traps / branches, facilitate foreline cleaning, repair and maintenance, and support installation of instrumentation and leak testing.

[0070] In the above embodiments, the modular foreline system (i.e., the kit of parts) includes a plurality of straight segments (e.g., the first, third, and fifth segments) and a plurality of segments that include a plurality of elbows (e.g., the second and fourth segments). However, in other embodiments, the kit includes different parts. In some embodiments, the straight segments can be omitted. In some embodiments, segments that are shaped differently can be included, e.g., segments that have only a single elbow can be included.

[0071] In the above embodiments, each foreline includes exactly three straight segments and exactly two segments that include a plurality of elbows, which are attached together alternately. However, in other embodiments, each foreline includes a different number of straight segments (e.g., none, fewer than three, more than 3) and / or a different number of segments that include a plurality of elbows (e.g., one, more than two). The segments that make up the foreline can be attached together in different configurations, e.g., not the alternating arrangement shown in FIGS. 1A-1C. Figure 1 and Figure 2 FIG. 1C.

[0072] In the above embodiments, the pre-pipe sections of the modular system are not heated; that is, they are not equipped with corresponding heating devices for heating the gas flowing through them. However, in other embodiments, one or more, or more preferably all, of the pre-pipe sections of the modular system are heated, i.e., they include corresponding heating devices for heating the gas flowing through them. Examples of heating devices include, but are not limited to, sheaths that can be wrapped around the pipe section and controlled to heat it. Preferably, the respective heating devices are independently controllable from each other. Thus, the assembled pre-pipe includes multiple independently controllable heating zones along its length.

[0073] In some of the above embodiments, the modular fore-piping system (i.e., the kit of parts) includes one or more traps and one or more reactors. In some embodiments, the traps are omitted, and in some embodiments, the reactors are omitted. In other embodiments, the modular fore-piping system includes one or more different types of devices to replace or supplement the traps and / or reactors. Examples of different types of devices that may be included in the kit include, but are not limited to, filters (such as in-line filters for installation within sections), bellows sections for providing variable-length attachments between devices / sections, temperature sensors, pressure sensors, heating controls, temperature management systems, etc.

[0074] Figure Labels

[0075] 100-Semiconductor Manufacturing Plant

[0076] 102 Clean Room

[0077] 104-Sub-manufacturing plant

[0078] 106-Structure

[0079] 108-Processing Chamber

[0080] 110-Gas Pumping Station

[0081] 112-Pre-pipeline

[0082] 114-Opening

[0083] 121 - First upstream pipeline section

[0084] 122 - Second upstream pipeline section

[0085] 123 - Third upstream pipeline section

[0086] 124 - Fourth upstream pipeline section

[0087] 125 - Fifth upstream pipeline section

[0088] 1211-1252-Flange

[0089] 122a - First end section of the second pre-stage piping section

[0090] 122b - Second end section of the second pre-stage piping segment

[0091] 122c - The middle section of the second pre-stage piping section

[0092] 122d - First bend of the second upstream pipeline section

[0093] 122e - Second bend in the second upstream pipeline section

[0094] 124a - First end section of the fourth upstream pipeline

[0095] 124b - The second end section of the fourth upstream pipeline segment

[0096] 124c - The middle section of the fourth pre-stage piping section

[0097] 124d - First bend of the fourth upstream pipeline section

[0098] 124e - Second bend of the fourth upstream pipeline section

[0099] 131-Angle

[0100] 141 - First vertical length

[0101] 142 - Second vertical length

[0102] 143 - Third vertical length

[0103] 144 - Fourth vertical length

[0104] 145 - Fifth vertical length

[0105] 200a, b - traps

[0106] 201a, b - flange

[0107] 202-Reactor

Claims

1. A component kit for forming a fore-stage piping system for connecting a processing chamber to a vacuum pumping and / or exhaust system, the component kit comprising: Multiple upstream piping sections; among which, Each upstream piping section consists of the following components: The first part is basically straight; The second end portion is essentially straight, and it is opposite to the first end portion; and The middle section is disposed between the first end section and the second end section and is connected to the first end section and the second end section by a corresponding elbow; The first end portion and the second end portion are substantially parallel to each other; The middle portion is inclined relative to the first end portion and the second end portion; and The preceding pipe sections are configured to be attached together to form a continuous preceding pipe. The component kit further includes one or more additional pre-pipe sections, each additional pre-pipe section being a substantially straight pipe, wherein the additional pre-pipe sections are configured to attach to the pre-pipe sections and to each other to form a continuous pre-pipeline, wherein the vertical length of each pre-pipe section and each additional pre-pipe section is all equal to a corresponding integer multiple of a common value.

2. The parts kit according to claim 1, wherein, Each upstream piping section includes a corresponding device for heating that upstream piping section, so that the heating of each upstream piping section is independently controllable.

3. The parts kit according to claim 1, wherein, Each additional pre-pipe section includes a corresponding device for heating that additional pre-pipe section, such that heating of each additional pre-pipe section is independently controllable.

4. The parts kit according to claim 3, wherein, Each of the one or more additional upstream piping segments has a length greater than or equal to ten times the diameter of the additional upstream piping segment.

5. The parts kit according to any one of claims 1 to 4, wherein, The middle portion has a length that is greater than or equal to ten times the diameter of the middle portion.

6. The parts kit according to any one of claims 1 to 4, wherein: The angle between the first end portion and the middle portion, and the angle between the second end portion and the middle portion, are between 30° and 60°.

7. The parts kit according to claim 6, wherein, The angle is 45°.

8. The parts kit according to any one of claims 1 to 4, wherein, Each of the plurality of upstream piping sections has a diameter selected from a range of the following: 40 mm, 63 mm, 80 mm, 100 mm, 160 mm, 200 mm, 250 mm and 300 mm.

9. The parts kit according to any one of claims 1 to 4, further comprising one or more elements selected from the group consisting of: One or more traps are configured to be attached to the corresponding upstream piping section; One or more reactors are configured to be installed within a corresponding fore-feed section; One or more bellows, which are configured to be attached to the end of a corresponding upstream piping section; as well as One or more filters are configured to be connected to the corresponding upstream piping section.

10. The parts kit according to any one of claims 1 to 4, wherein, For each upstream pipe section, the distal end of the first end portion includes a first flange, and the distal end of the second end portion includes a second flange.

11. A pre-piping system comprising a plurality of pre-piping sections connected together in a component kit according to any one of claims 1 to 10.

12. The pre-pipeline according to claim 11, wherein, when claim 11 is subordinate to claim 2, The upstream piping consists of exactly two upstream piping sections and exactly three additional, substantially straight upstream piping sections.

13. The upstream pipeline according to claim 12, wherein, The preceding piping section and the other preceding piping section are alternately attached together.

14. A system comprising: Processing chamber; Vacuum pumping and / or emission reduction systems; as well as Fore-stage piping, which is attached between the processing chamber and the vacuum pumping and / or emission reduction system; wherein, The upstream pipeline is the upstream pipeline according to any one of claims 11 to 13.

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