Polishing pad stripping device

Abstract

The utility model relates to a polishing pad stripping device which comprises a winding mechanism, the winding mechanism comprises a winding part, a holding part and a fixing part, the winding part is in a rod shape, the holding part is arranged at one end of the winding part, the fixing part is arranged on the winding part, and the fixing part is used for fixing the edge of a polishing pad. When the polishing pad winding device is applied, the edge of a polishing pad is tilted through a blade, then the tilted edge of the polishing pad is fixed to the fixing part, an operator exerts acting force on the winding part through the holding part, the winding part rotates to wind the polishing pad, and through the proportion design of the holding part and the winding part, the operator can exert force conveniently; the polishing pad can be easily stripped by an operator only by applying a small force, so that time and labor are saved, the polishing pad can be prevented from being torn by hands, the operation efficiency is effectively improved, the labor intensity and the labor cost are reduced, the operation safety is improved, and potential safety hazards are avoided.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor substrate processing technology, and in particular to a polishing pad stripping device. Background Technology

[0002] The substrate material, comprising over 90% of the total thickness of a wafer, is used to ensure sufficient strength during manufacturing, testing, and shipping. Substrate thinning processes involve grinding away a certain thickness of the back substrate material of a completed wafer (primarily a silicon wafer). This benefits subsequent packaging processes and addresses the chip's physical strength, heat dissipation, and dimensional requirements.

[0003] During the substrate thinning process, a polishing process is required to repair defects on the substrate surface. The polishing process removes defects on the substrate surface through the interaction of polishing pads and polishing fluid. Polishing pads need to be replaced after a period of use. Regular replacement of polishing pads is a key step in ensuring substrate quality and extending the service life of equipment.

[0004] Because polishing pads are attached to the machine's main plate with adhesive backing, traditional polishing pad replacement operations typically rely on the operator's physical strength and experience. This requires manually prying up large sections of the polishing pad with a blade and then tearing it off by hand, which is not only inefficient but also poses risks due to improper operation and safety hazards. Therefore, developing a tool that can efficiently, safely, and easily mechanically peel off polishing pads is of paramount importance. Utility Model Content

[0005] The purpose of this invention is to provide a polishing pad peeling device that can efficiently, safely, and easily peel the polishing pad from the machine tray.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A polishing pad peeling device includes a winding mechanism, the winding mechanism including a winding part, a holding part and a fixing part, the winding part being rod-shaped, the holding part being disposed at one end of the winding part, and the fixing part being disposed at the winding part, the fixing part being used to fix the edge of the polishing pad.

[0008] In one embodiment of this application, a heating device is also included, which is disposed on the winding portion.

[0009] In one embodiment of this application, the heating device includes a heater and a temperature detector communicatively connected to the heater. The heater is disposed within the winding section, and the temperature detector is used to detect the temperature of the winding section and control the operating state of the heater based on the detected value.

[0010] In one embodiment of this application, the fixing part is a fixing groove, which penetrates the winding part along a direction perpendicular to the axis of the winding part.

[0011] In one embodiment of this application, the winding portion includes a first sleeve portion and a first adjusting rod portion. One of the first sleeve portion and the first adjusting rod portion is connected to the gripping portion. The inner wall of the first sleeve portion is provided with an internal thread, and the first adjusting rod portion is provided with an external thread at least partially. The first adjusting rod portion and the first sleeve portion are threadedly engaged to make the length of the winding portion adjustable. The fixing groove is provided at one of the first sleeve portion and the first adjusting rod portion that is far away from the gripping portion, and when the length of the winding portion is the shortest, at least a portion of the fixing groove is blocked.

[0012] In one embodiment of this application, a support mechanism is further included, the support mechanism comprising:

[0013] Base;

[0014] A support rod, which is disposed on the base;

[0015] A support member is disposed at the end of the support rod away from the base, and the winding portion cooperates with the support member so that the winding portion can be freely rotated and supported on the support member.

[0016] In one embodiment of this application, the base is provided with wheels at its bottom.

[0017] In one embodiment of this application, the support rod includes a second sleeve portion and a second adjusting rod portion. One of the second sleeve portion and the second adjusting rod portion is connected to the base, and the other of the second sleeve portion and the second adjusting rod portion is connected to the support member. The inner wall of the second sleeve portion is provided with an internal thread, and the second adjusting rod portion is provided with an external thread at least partially. The second adjusting rod portion and the second sleeve portion are threadedly engaged to make the length of the support rod adjustable.

[0018] In one embodiment of this application, the support rod further includes a locking nut, which is threadedly engaged with the second adjusting rod portion and presses against the end face of the second sleeve portion to fix the second sleeve portion and the second adjusting rod portion relative to each other.

[0019] In one embodiment of this application, the support member is annular or an upward-opening arc shape.

[0020] As can be seen from the above technical solutions, this utility model discloses a polishing pad peeling device, which includes a winding mechanism, a holding part, and a fixing part. The winding part is rod-shaped, the holding part is disposed at one end of the winding part, and the fixing part is disposed at the winding part. The fixing part is used to fix the edge of the polishing pad.

[0021] In application, first use a blade to pry up the edge of the polishing pad, then fix the pried edge of the polishing pad to the fixing part. The operator applies force to the winding part through the grip part, causing the winding part to rotate and wind the polishing pad. Through the proportional design of the grip part and the winding part, it is not only convenient for the operator to apply force, but also the operator only needs to apply a small force to easily peel off the polishing pad, saving time and effort. It can avoid tearing the polishing pad by hand, effectively improving work efficiency, reducing labor intensity and labor costs, improving work safety, and avoiding safety hazards. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the winding mechanism of a polishing pad peeling device provided in one embodiment of the present invention;

[0024] Figure 2 A schematic diagram of the winding mechanism of the polishing pad peeling device provided in another embodiment of the present invention;

[0025] Figure 3 A cross-sectional view of the winding mechanism of a polishing pad peeling device provided in another embodiment of the present invention;

[0026] Figure 4 A schematic diagram of the support mechanism of the polishing pad peeling device provided in this embodiment of the utility model.

[0027] In the picture:

[0028] 100 is the winding mechanism; 110 is the gripping part; 120 is the winding part; 121 is the first sleeve part; 122 is the first adjusting rod part; 130 is the fixing part; 140 is the heating device;

[0029] 200 is the support mechanism; 210 is the base; 220 is the support rod; 221 is the second sleeve part; 222 is the second adjusting rod part; 223 is the locking nut; 230 is the support component; 240 is the traveling wheel. Detailed Implementation

[0030] The core of this utility model is to provide a polishing pad peeling device, the structural design of which enables the polishing pad to be peeled off from the machine plate in a highly efficient, safe and convenient manner.

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0032] Please see Figure 1 , Figure 1 This is a schematic diagram of the winding mechanism of a polishing pad peeling device provided in one embodiment of the present invention.

[0033] This utility model discloses a polishing pad peeling device, which includes a winding mechanism 100, a winding part 120, a holding part 110, and a fixing part 130.

[0034] The winding part 120 is rod-shaped and is used to wrap the polishing pad around the winding part 120 by rotation. The winding part 120 is made of high-strength lightweight material, such as stainless steel tube or aluminum alloy tube, so that it has sufficient rigidity and durability. For the convenience of operators, the length of the winding part 120 should be controlled within 1200 mm to 1250 mm.

[0035] A grip portion 110 is disposed at one end of the winding portion 120. The grip portion 110 is for the operator to grip and forms a lever arm with the winding portion 120 to facilitate the operator's exertion of force. The grip portion 110 can be a straight rod, an arc-shaped rod, or a ring, as long as it facilitates the operator's exertion of force. In one specific embodiment of this invention, such as... Figure 1 As shown, the gripping part 110 adopts a straight rod-shaped structure, which together with the winding part 120 forms a T-shaped structure with a total length of 450 mm to 500 mm.

[0036] A fixing part 130 is disposed on the winding part 120. The fixing part 130 is used to fix the edge of the polishing pad. The fixing part 130 can fix the edge of the polishing pad in various ways, such as clamping, winding, etc. In one embodiment of this application, the fixing part 130 is disposed at the end of the winding part 120 away from the holding part 110. Of course, it should be noted that in other embodiments, the fixing part 130 may also be disposed in the middle of the winding part 120.

[0037] Compared with the prior art, the polishing pad peeling device provided in this embodiment of the utility model first uses a blade to pry up the edge of the polishing pad, and then fixes the pried edge of the polishing pad to the fixing part 130. The operator applies force to the winding part 120 through the gripping part 110, so that the winding part 120 rotates and winds the polishing pad. Through the proportional design of the gripping part 110 and the winding part 120, it is not only convenient for the operator to apply force, but also the operator only needs to apply a small force to easily peel off the polishing pad, saving time and effort, avoiding tearing the polishing pad by hand, effectively improving work efficiency, reducing labor intensity and labor costs, improving work safety, and avoiding safety hazards.

[0038] It is foreseeable that since the polishing pad is attached to the machine tray with adhesive, even with the help of the winding mechanism 100, a considerable amount of force is required to remove the polishing pad from the machine tray. In order to further save time and effort, in one embodiment of this application, the winding mechanism 100 also includes a heating device 140. The heating device 140 can cover the entire winding section 120 to heat the entire winding section 120, or the heating device 140 can be partially set corresponding to the fixing section 130. When replacing the polishing pad, the heating device 140 is first activated to heat the winding section 120 to a predetermined temperature, such as raising the temperature of the winding section 120 to 45°C to 50°C. The increase in temperature softens the adhesive, making it easier to peel the polishing pad from the machine tray and helping to prevent adhesive residue.

[0039] In order to control the temperature of the winding section 120 within a reasonable range, so as to ensure that the heated adhesive softens and is not easily left behind, while reducing energy consumption, in a specific embodiment of this application, the heating device 140 includes a heater and a temperature detector communicatively connected to the heater. The heater includes, but is not limited to, a resistance wire. The heater is disposed inside the winding section 120. The temperature detector is used to detect the temperature of the winding section 120 and control the working state of the heater according to the detected value. The temperature detector includes, but is not limited to, a thermocouple. That is, the temperature detector controls the on and off of the heater so that the temperature of the winding section 120 is always kept at a preset temperature.

[0040] Specifically, such as Figure 1 As shown, in one embodiment of this application, the fixing part 130 is a fixing groove. The fixing groove passes through the winding part 120 in a direction perpendicular to the axis of the winding part 120. In application, the raised edge of the polishing pad is passed through the fixing groove, and then the winding part 120 is rotated to conveniently and quickly fix the raised edge of the polishing pad to the winding part 120.

[0041] Of course, in addition to the aforementioned fixing groove, in other embodiments, the fixing part 130 may also adopt other structures. For example, the fixing part 130 may be a long strip-shaped clip provided on the winding part 120. One end of the long strip-shaped clip is connected to the operating mechanism provided on the grip part 110 through an operating harness or operating lever passing through the winding part 120. This allows the operator to control the opening and closing of the long strip-shaped clip through the operating mechanism provided on the grip part 110, thereby achieving the clamping and fixing of the raised edge of the polishing pad.

[0042] To further improve the fixing effect on the raised edge of the polishing pad, the fixing part 130 may include a fixing groove provided on the winding part 120 and a strip-shaped clamp provided in the fixing groove. In use, the raised edge of the polishing pad is passed through the fixing groove and clamped and fixed by the strip-shaped clamp, thereby improving the stability of fixing the raised edge of the polishing pad and preventing the polishing pad peeling device from separating from the polishing pad during the winding process.

[0043] To enable the polishing pad peeling device provided in this application embodiment to peel polishing pads of different specifications, in one embodiment of this application, such as... Figure 2 and Figure 3 As shown, the winding part 120 adopts a telescopic structure, that is, the winding part 120 includes a first sleeve part 121 and a first adjusting rod part 122. One of the first sleeve part 121 and the first adjusting rod part 122 is connected to the gripping part 110. At least one of the first sleeve part 121 and the first adjusting rod part 122 is provided with the heating device 140. The inner wall of the first sleeve part 121 is provided with an internal thread, and the first adjusting rod part 122 is provided with an external thread at least partially. The first adjusting rod part 122 and the first sleeve part 121 are threadedly engaged so that the length of the winding part 120 is adjustable.

[0044] The fixing groove is located in the first sleeve portion 121 and the first adjusting rod portion 122, away from the grip portion 110. When the length of the winding portion 120 is the shortest, at least part of the fixing groove is covered. That is, as the length of the winding portion 120 is adjusted, the length of the exposed part of the fixing groove can also be adjusted accordingly. The longer the side of the winding portion 120 is, the longer the length of the exposed part of the fixing groove is, until the fixing groove is completely exposed. This allows the operator to adjust the length of the winding portion 120 according to the size of the polishing pad, making the operation more convenient.

[0045] from Figure 1 As can be seen, the gripping part 110 is disposed at one end of the winding part 120, and the winding part 120 is relatively long. During the process of peeling off the polishing pad, it is difficult for the operator to ensure the stability of the winding part 120. Therefore, in one embodiment of this application, such as Figure 4As shown, the polishing pad stripping device also includes a support mechanism 200, which includes a base 210, a support rod 220, and a support member 230.

[0046] The base 210 provides an installation position and support for the support rod 220 and the support member 230. The support rod 220 is disposed on the base 210, and the support member 230 is disposed at the end of the support rod 220 away from the base 210. The winding part 120 cooperates with the support member 230 so that the winding part 120 can be freely rotated and supported on the support member 230.

[0047] When peeling off the polishing pad, since the support member 230 does not affect the rotation of the winding part 120, the operator can place the winding part 120 on the support member 230. At this time, the operator can use the support mechanism 200 to support the winding part 120, keep the winding part 120 stable during the winding of the polishing pad, and make it easier to peel off the polishing pad, which greatly improves the safety and convenience of the operation.

[0048] It is foreseeable that as the polishing pad is peeled off, the winding mechanism 100 needs to move from the peeled position to the unpeeled position. To facilitate the movement of the winding mechanism 100, in one embodiment of this application, such as... Figure 4 As shown, the bottom of the base 210 is provided with a traveling wheel 240. The number and installation position of the traveling wheel 240 can be adjusted according to the cross-sectional shape of the base 210. Specifically, in this application, the cross-sectional shape of the base 210 is rectangular. Therefore, a traveling wheel 240 is provided at each of the four corners of the bottom of the base 210. The traveling wheel 240 is a universal wheel. Of course, the cross-sectional shape of the base 210 can also be triangular, circular, etc. In this case, the number of traveling wheels 240 can be increased or decreased as needed to ensure that the base 210 is stable and can be moved easily.

[0049] It is easy to understand that the height of the machine platform and the height of the operator will affect the required height of the winding mechanism 100. In order for the support mechanism 200 to support the winding mechanism 100 at a height more convenient for the operator, in one embodiment of this application, such as... Figure 4As shown, the support rod 220 adopts a telescopic structure to adjust its height. Specifically, the support rod 220 includes a second sleeve portion 221 and a second adjusting rod portion 222. One of the second sleeve portion 221 and the second adjusting rod portion 222 is connected to the base 210, and the other of the second sleeve portion 221 and the second adjusting rod portion 222 is connected to the support member 230. The inner wall of the second sleeve portion 221 is provided with an internal thread, and the second adjusting rod portion 222 is provided with an external thread at least partially. The second adjusting rod portion 222 and the second sleeve portion 221 are threadedly engaged to make the length of the support rod 220 adjustable. In application, the user can adjust the height position of the support member 230 by rotating the second adjusting rod portion 222 relative to the second sleeve portion 221.

[0050] To ensure the stability of the support rod 220 during the peeling of the polishing pad, such as Figure 2 As shown, in one embodiment of this application, the support rod 220 further includes a locking nut 223, which is threadedly engaged with the second adjusting rod portion 222 and presses against the end face of the second sleeve portion 221 to fix the second sleeve portion 221 and the second adjusting rod portion 222 relative to each other.

[0051] Of course, the length of the support rod 220 can also be adjusted through other structures. For example, the second sleeve portion 221 can be slidably engaged with the second adjusting rod portion 222, and multiple contraction grooves can be provided circumferentially at the end where the second sleeve portion 221 engages with the second adjusting rod portion 222. Simultaneously, an external thread is provided on the outer end face of the end where the second sleeve portion 221 engages with the second adjusting rod portion 222. A threaded sleeve is fitted over the second sleeve portion 221 and the second adjusting rod portion 222 and engages with the external thread. When the operator loosens the threaded sleeve, the second sleeve portion 221 and the second adjusting rod portion 222... The end of the sleeve is no longer squeezed by the threaded sleeve, so it can expand radially to release the second adjusting rod 222, allowing the second adjusting rod 222 to slide freely axially. When the support rod 220 is adjusted to a suitable height, the operator tightens the threaded sleeve. The threaded sleeve applies a radial force to the end of the second sleeve 221 that mates with the second adjusting rod 222. The end of the second sleeve 221 that mates with the second adjusting rod 222 contracts radially to clamp the second adjusting rod 222, thus achieving relative fixation between the second sleeve 221 and the second adjusting rod 222.

[0052] Alternatively, a locking pin structure can be used to achieve relative fixation and height adjustment between the second sleeve portion 221 and the second adjusting rod portion 222. Specifically, a locking pin hole is provided on one of the two portions, and multiple adjusting pin holes are provided axially on the other. The locking pin passes through the locking pin hole and engages with one of the adjusting pin holes to lock the two portions relative to each other. When the locking pin is pulled out, the two portions can move axially relative to each other to achieve height adjustment.

[0053] It is foreseeable that if relative rotation occurs between the second sleeve portion 221 and the second adjusting rod portion 222, the adjusting pin hole and the locking pin hole will be difficult to align. Therefore, in order to facilitate the alignment of the adjusting pin hole and the locking pin hole, a guide groove can be provided on one of the mating surfaces of the second sleeve portion 221 and the second adjusting rod portion 222, and a guide slider can be provided on the other mating surface of the second sleeve portion 221 and the second adjusting rod portion 222. The guide groove is provided along the axial direction of the second sleeve portion 221 and the second adjusting rod portion 222, and the guide slider is slidably disposed in the guide groove to circumferentially limit the second sleeve portion 221 and the second adjusting rod portion 222, prevent relative rotation between the two, and facilitate the alignment of the adjusting pin hole and the locking pin hole.

[0054] Of course, other methods can also be used to prevent the second sleeve portion 221 from rotating relative to the second adjusting rod portion 222. For example, the cross-sections of the second sleeve portion 221 and the second adjusting rod portion 222 can be set to non-circular shapes, such as polygonal or elliptical shapes.

[0055] like Figure 4 As shown, the support member 230 only needs to be able to support the winding part 120 and not affect the rotation of the winding part 120. Therefore, the support member 230 can be a ring shape or an arc shape with the opening facing upward. This way, it can support the winding part 120 and limit the winding part 120 to a certain extent in the horizontal direction to prevent it from moving in the horizontal direction, and it does not affect the rotation of the winding part 120.

[0056] As indicated in this application and claims, unless the context clearly indicates otherwise, the words "a," "an," "a," and / or "the" are not specifically singular and may include the plural. Generally, the terms "comprising" and "including" only indicate the inclusion of expressly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements. An element defined by the phrase "comprising an..." does not exclude the presence of other identical elements in the process, method, product, or apparatus that includes the element.

[0057] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0058] It should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0059] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the core ideas of the present invention. It should be noted that those skilled in the art can make several improvements and modifications to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims

1. A polishing pad stripping apparatus, characterized by, The winding mechanism (100) comprises a winding part (120), a holding part (110) and a fixing part (130), the winding part (120) is rod-shaped, the holding part (110) is arranged at one end of the winding part (120), and the fixing part (130) is arranged on the winding part (120) and used for fixing the edge of the polishing pad.

2. The polishing pad stripping apparatus of claim 1, wherein The heating device (140) is arranged on the winding part (120).

3. The polishing pad stripping apparatus of claim 2, wherein The heating device (140) comprises a heater arranged in the winding part (120) and a temperature detector in communication connection with the heater, the temperature detector is used for detecting the temperature of the winding part (120) and controlling the working state of the heater according to the detection value.

4. The polishing pad stripping apparatus of claim 1, wherein The fixing part (130) is a fixing groove, and the fixing groove penetrates through the winding part (120) along the direction perpendicular to the axis of the winding part (120).

5. The polishing pad stripping apparatus of claim 4, wherein The winding part (120) comprises a first sleeve part and a first adjusting rod part, one of the first sleeve part and the first adjusting rod part is connected with the holding part (110), the inner wall of the first sleeve part is provided with internal threads, the first adjusting rod part is at least partially provided with external threads, the first adjusting rod part is in threaded connection with the first sleeve part, so that the length of the winding part (120) is adjustable, the fixing groove is arranged in one of the first sleeve part and the first adjusting rod part which is far away from the holding part (110), and at least part of the fixing groove is shielded when the length of the winding part (120) is the shortest.

6. The polishing pad delamination apparatus of any of claims 1-5, wherein, The support mechanism (200) comprises: a base (210); a support rod (220) arranged on the base (210); a support piece (230) arranged at one end of the support rod (220) which is far away from the base (210), and the winding part (120) is in cooperation with the support piece (230), so that the winding part (120) is freely rotatable and supported on the support piece (230).

7. The polishing pad stripping apparatus of claim 6, wherein The bottom of the base (210) is provided with a traveling wheel (240).

8. The polishing pad stripping apparatus of claim 6, wherein The support rod (220) comprises a second sleeve part (221) and a second adjusting rod part (222), one of the second sleeve part (221) and the second adjusting rod part (222) is connected with the base (210), the other one of the second sleeve part (221) and the second adjusting rod part (222) is connected with the support piece (230), the inner wall of the second sleeve part (221) is provided with internal threads, the second adjusting rod part (222) is at least partially provided with external threads, and the second adjusting rod part (222) is in threaded connection with the second sleeve part (221), so that the length of the support rod (220) is adjustable.

9. The polishing pad stripping apparatus of claim 8, wherein, The support rod (220) further comprises a locking nut (223) which is threadedly engaged with the second adjusting rod portion (222) and abuts against an end face of the second sleeve portion (221) to relatively fix the second sleeve portion (221) and the second adjusting rod portion (222).

10. The polishing pad stripping apparatus of claim 6, wherein The support member (230) is in a circular ring shape or an arc shape which is open upward.

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