Detection platform deck and detection device

Abstract

The utility model discloses a detection platform deck and a detection device, and belongs to the field of detection devices. The detection carrying table comprises a carrying table and a plurality of negative pressure heads, the carrying table comprises a plurality of adsorption blocks, each adsorption block forms a main air channel and a plurality of adsorption holes which are communicated with the main air channel and are distributed at intervals, the adsorption blocks form a plurality of adsorption areas, and the negative pressure heads are arranged in the adsorption areas. The plurality of adsorption areas are used for adsorbing different areas of the to-be-detected product; the multiple negative pressure heads communicate with the multiple main air channels of the multiple adsorption blocks in a one-to-one correspondence mode, and the multiple negative pressure heads are used for communicating with multiple negative pressure sources in a one-to-one correspondence mode. According to the device, different areas of the to-be-detected product can be independently adsorbed, and the damage effect on negative pressure adsorption of other adsorption areas due to the interval between the deformation area and the adsorption area is reduced, so that the bent and deformed to-be-detected product can be efficiently corrected, and the detection efficiency is improved.

Description

Technical Field

[0001] This application belongs to the field of testing equipment technology, and in particular relates to a testing stage and a testing device. Background Technology

[0002] When inspecting mobile phones, tablets, and computer screens for defects, the edges of the product to be inspected need to be checked, and there should be no obstructions around them. In order to perform circumferential inspection on the sides of the product to be inspected, the inspection stage needs to have the functions of rotation and vacuum adsorption.

[0003] In related technologies, because the product to be tested is relatively thin, it is easy to bend and deform when it is received, which causes the image to be out of focus during the test and affects the test results. Utility Model Content

[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a testing stage and testing device that can efficiently correct the bending deformation of the product to be tested, thereby improving testing efficiency.

[0005] Firstly, this application provides a testing stage, comprising:

[0006] The stage includes multiple adsorption blocks, each adsorption block forming a main air channel and multiple adsorption holes that are connected to and spaced apart from the main air channel. The multiple adsorption blocks form multiple adsorption areas, which are used to adsorb different areas of the product to be tested.

[0007] Multiple negative pressure heads are connected one-to-one with multiple main air channels of the multiple adsorption blocks, and the multiple negative pressure heads are used to connect one-to-one with multiple negative pressure sources.

[0008] According to the testing platform provided in this application, by setting up multiple adsorption zones, each adsorption zone is connected to a corresponding negative pressure head. Each negative pressure zone achieves independent adsorption. Compared with a single negative pressure source but only one adsorption zone adsorbing the product to be tested under negative pressure, on the one hand, the flow rate can be increased to improve the adsorption flow rate. On the other hand, when facing a bent or deformed product to be tested, because multiple adsorption zones are set up, different areas of the product to be tested can be adsorbed independently, reducing the destructive effect of negative pressure adsorption on other adsorption zones caused by the gap between the deformed area and the adsorption zone. Thus, the bent or deformed product to be tested can be efficiently corrected, improving the testing efficiency.

[0009] In some embodiments, the adsorption block further forms a plurality of sub-channels arranged at intervals and connected in parallel along the extension direction of the main air channel. The plurality of sub-channels are all connected to the main air channel. The plurality of adsorption holes include multiple groups, each group including at least two adsorption holes. The plurality of sub-channels are connected to the multiple groups of adsorption holes in a one-to-one correspondence.

[0010] In some embodiments, multiple sets of adsorption pores are arranged at intervals along the extension direction of the main airway, and multiple adsorption pores in each set are arranged at intervals along the extension direction of the sub-airway.

[0011] In some embodiments, the detection stage further includes: a mounting platform and a rotary drive mechanism, wherein the rotary drive mechanism is dynamically coupled to the mounting platform; the stage includes multiple stages, and the multiple stages are all mounted on the mounting platform.

[0012] In some embodiments, the rotary drive mechanism is provided with a first clearance hole, the axis of which coincides with the rotation axis of the mounting platform;

[0013] The mounting platform has multiple mounting holes. With the extension direction of the rotation axis of the mounting platform as the projection direction, the projections of the multiple mounting holes all fall within the projection of the first clearance hole. The multiple negative pressure heads are installed in the multiple mounting holes one by one.

[0014] The plurality of negative pressure heads pass through the first clearance hole and are connected to the plurality of negative pressure sources.

[0015] In some embodiments, the plurality of stages include a first stage and a second stage symmetrically distributed along the rotation axis of the mounting stage as the center of symmetry. Both the first stage and the second stage include a first adsorption block close to the rotation axis of the mounting stage and a second adsorption block away from the rotation axis of the mounting stage.

[0016] The end of the main air passage of each second adsorption block is connected to one of the plurality of negative pressure heads, and the middle part of the main air passage of each first adsorption block located at both ends is connected to another of the plurality of negative pressure heads.

[0017] In some embodiments, the mounting platform further forms a first sub-channel and a second sub-channel, the first sub-channel extending along the extension direction of the main air channel of the second adsorption block and communicating with both ends of the main air channel of the second adsorption block, and the second sub-channel communicating with the first sub-channel and connected to one of the plurality of negative pressure heads.

[0018] In some embodiments, the stage further includes a base, on which the plurality of adsorption blocks are mounted, and the base is mounted on the mounting platform, with the plurality of bases flush with the top surface of the mounting platform away from the mounting platform.

[0019] In some embodiments, the adsorption block is a polyetheretherketone (PEEK) block; and / or,

[0020] The side of the adsorption block facing the product to be tested is black; and / or...

[0021] The overall flatness β of the adsorption block facing the product to be tested satisfies: -0.03mm≤β≤0.03mm.

[0022] Secondly, this application provides a testing apparatus, including the testing stage described in any one of the above-mentioned methods.

[0023] According to the detection device provided in this application, by setting up multiple adsorption zones, each adsorption zone is connected to a corresponding negative pressure head, and each negative pressure zone achieves independent adsorption. Compared with a single negative pressure source but only one adsorption zone adsorbing the product to be tested under negative pressure, on the one hand, the flow rate can be increased to improve the adsorption flow rate. On the other hand, when facing a bent or deformed product to be tested, because multiple adsorption zones are set up, different areas of the product to be tested can be adsorbed independently, reducing the destructive effect of negative pressure adsorption on other adsorption zones caused by the gap between the deformed area and the adsorption zone. Thus, the bent or deformed product to be tested can be efficiently corrected, improving the detection efficiency.

[0024] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0025] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0026] Figure 1 This is one of the structural schematic diagrams of the detection device provided in the embodiments of this application;

[0027] Figure 2 This is a second schematic diagram of the detection device provided in the embodiments of this application;

[0028] Figure 3 yes Figure 2 Sectional view of AA;

[0029] Figure 4 This is the third schematic diagram of the detection device provided in the embodiments of this application;

[0030] Figure 5 This is the fourth schematic diagram of the detection device provided in the embodiments of this application;

[0031] Figure 6 This is the fifth schematic diagram of the detection device provided in the embodiments of this application;

[0032] Figure 7 yes Figure 6 Sectional view at point BB;

[0033] Figure 8 yes Figure 6 Sectional view at CC;

[0034] Figure 9 yes Figure 6 Sectional view at point DD;

[0035] Figure 10 This is the sixth schematic diagram of the detection device provided in the embodiments of this application.

[0036] Figure label:

[0037] Detection device 100;

[0038] Detection stage 1, stage 11, first stage 111, second stage 112, base 113, adsorption block 12, main air channel 121, adsorption hole 122, sub-air channel 123, first adsorption block 124, second adsorption block 125;

[0039] 2. Negative pressure head, 3. Mounting platform, 31. Mounting hole, 32. First sub-channel, 33. Rotary drive mechanism, 4. First clearance hole, 41. Negative pressure source, 5.

[0040] 200 products to be tested. Detailed Implementation

[0041] The embodiments of this application are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0042] The screens of mobile phones, tablets and computers are mostly made of CG transparent glass. When detecting defects in CG transparent glass, it is necessary to conduct the inspection on a testing platform. There are requirements for the flatness, background, smoothness and anti-static performance of the testing platform.

[0043] Furthermore, since the incoming products are bent and deformed, they need to be straightened and flattened during inspection. However, the upper surface of the product cannot be exposed to external contact, so the inspection stage must be designed with vacuum adsorption. During the adsorption process, the unevenness of the product makes adsorption difficult and easily causes image defocusing during inspection, affecting the inspection results.

[0044] The following is for reference. Figures 1-10 The present application describes the detection stage 1 and the detection device 100 according to embodiments thereof.

[0045] like Figure 1 and Figure 2 As shown, the detection stage 1 in this embodiment includes a stage 11 and a plurality of negative pressure heads 2.

[0046] like Figure 3 and Figure 4As shown, the stage 11 includes multiple adsorption blocks 12. Each adsorption block 12 forms a main air channel 121 and multiple adsorption holes 122 that are connected to and spaced apart from the main air channel 121. The multiple adsorption blocks 12 form multiple adsorption zones, which are used to adsorb different areas of the product 200 to be tested.

[0047] Multiple negative pressure heads 2 are connected one-to-one with multiple main air channels 121 of multiple adsorption blocks 12, and multiple negative pressure heads 2 are used to connect one-to-one with multiple negative pressure sources 5.

[0048] In this embodiment, the stage 11 is used to fix and support the product 200 to be tested, so as to perform subsequent testing operations on the product 200. The stage 11 includes a plurality of adsorption blocks 12, which are distributed in different areas of the stage 11 to accommodate products 200 of different shapes and sizes.

[0049] Each adsorption block 12 is designed with a main air channel 121 inside. The main air channel 121 is a channel for negative pressure transmission and connects the negative pressure source 5 to the adsorption hole 122.

[0050] Multiple adsorption holes 122 are arranged on the adsorption block 12. The arrangement can be uniform or distributed as needed. All adsorption holes 122 are connected to the main air channel 121, so that the negative pressure can be uniformly and effectively transmitted to each adsorption hole 122.

[0051] The adsorption pores 122 are spaced apart to reduce mutual interference between each adsorption pore 122, while ensuring that the adsorption force can be applied evenly to the surface of the product 200 to be tested.

[0052] One adsorption block 12 forms an adsorption zone, and multiple adsorption blocks 12 form multiple adsorption zones. The negative pressure between each adsorption block 12 is independent and does not interfere with each other.

[0053] like Figure 2 As shown, one product to be tested 200 corresponds to at least two adsorption blocks 12, that is, one product to be tested 200 is supported by multiple adsorption blocks 12, and different areas on one product to be tested 200 are adsorbed by different adsorption blocks 12.

[0054] For example, multiple adsorption blocks 12 can be spaced apart along a first direction or a second direction, where the first direction is the width direction of the product 200 to be tested and the second direction is the length direction of the product 200 to be tested; or, multiple adsorption blocks 12 can be distributed in an array.

[0055] According to the size and shape of the product to be tested 200, multiple adsorption blocks 12 on the stage 11 are arranged in different distribution patterns to adsorb different areas of the product to be tested 200. Each adsorption area is responsible for adsorbing different areas of the product to be tested 200.

[0056] The arrangement of the adsorption blocks 12 can be adjusted according to the shape, size and testing requirements of the product to improve the effective transmission of negative pressure and improve the adsorption stability and efficiency of the product 200 to be tested.

[0057] The negative pressure source 5 is used to provide negative pressure to adsorb and fix the product to be tested 200.

[0058] Multiple negative pressure heads 2 correspond one-to-one with and are connected to the main air channels 121 of multiple adsorption blocks 12 on the stage 11. Each negative pressure head 2 is connected to an independent negative pressure source 5, which can independently provide negative pressure to the corresponding adsorption block 12 so that each adsorption area adsorbs the corresponding area of ​​the product to be tested 200.

[0059] In related technologies, one product to be tested corresponds to one adsorption zone, or one negative pressure source provides negative pressure for multiple adsorption zones. If the product to be tested is a bent deformable part, when the product to be tested is placed on the stage, the deformable zone of the product to be tested is separated from the adsorption zone, which will cause air leakage, resulting in insufficient adsorption flow and low adsorption force. The bent product to be tested cannot be effectively corrected when placed on it. If it is necessary to correct the product to be tested, the negative pressure flow needs to be increased.

[0060] According to the testing platform 1 provided in this application, multiple adsorption zones are set up, and each adsorption zone is connected to a corresponding negative pressure head 2. Each negative pressure zone achieves independent adsorption. Compared with a single negative pressure source 5 but only adsorption zone adsorbing the product 200 to be tested under negative pressure, on the one hand, the flow rate can be increased to improve the adsorption flow rate. On the other hand, when facing a bent and deformed product 200 to be tested, due to the setting of multiple adsorption zones, different areas of the product 200 to be tested can be adsorbed independently, reducing the destructive effect of negative pressure adsorption on other adsorption zones caused by the gap between the deformed area and the adsorption zone. Thus, the bent and deformed product 200 to be tested can be efficiently corrected, and the testing efficiency can be improved.

[0061] In some embodiments, such as Figure 3 and Figure 7 As shown, the adsorption block 12 also forms a plurality of sub-air channels 123 arranged at intervals and connected in parallel along the extension direction of the main air channel 121. The plurality of sub-air channels 123 are all connected to the main air channel 121. The plurality of adsorption holes 122 include multiple groups, each group including at least two adsorption holes 122. The plurality of sub-air channels 123 are connected to the multiple groups of adsorption holes 122 in a one-to-one correspondence.

[0062] Multiple sub-channels 123 are spaced apart along the extension direction of the main channel 121. The multiple sub-channels 123 can be evenly distributed. Multiple adsorption holes 122 in each group are spaced apart along the extension direction of the corresponding sub-channels 123. The multiple adsorption holes 122 in each group can be evenly distributed, so that the multiple adsorption holes 122 of each adsorption block 12 are arrayed.

[0063] Multiple adsorption pores 122 are arranged in an array on the adsorption block 12, which helps to distribute the adsorption force more evenly and improve the adsorption effect.

[0064] Each set of adsorption pores 122 is connected to a corresponding sub-channel 123. In this way, the negative pressure in the main channel 121 is transmitted to multiple sets of adsorption pores 122 through different sub-channels 123, which helps to distribute the adsorption force more evenly and improve the adsorption effect.

[0065] In some embodiments, such as Figure 3 As shown, multiple sets of adsorption holes 122 are evenly distributed at intervals along the extension direction of the main airway 121, and multiple adsorption holes 122 in each set are arranged at intervals along the extension direction of the sub-airway 123.

[0066] The spacing between multiple adsorption pores 122 in different groups can be equal, so that multiple adsorption pores 122 are distributed in an array on the adsorption block 12, which increases the adsorption area, improves the adsorption efficiency, and also helps to form a more uniform negative pressure distribution during the adsorption process, thereby enhancing the stability and reliability of adsorption.

[0067] In some embodiments, such as Figure 4 As shown, the testing platform 1 also includes: a mounting platform 3 and a rotary drive mechanism 4, the rotary drive mechanism 4 being dynamically coupled to the mounting platform 3; the platform 11 includes multiple platforms, all of which are mounted on the mounting platform 3.

[0068] For example, the rotary drive mechanism 4 can be an electric motor, a hydraulic motor, or other type of rotary drive.

[0069] In this embodiment, multiple stages 11 are mounted on the mounting platform 3, thereby enabling a single rotary drive mechanism 4 to drive multiple stages 11 to rotate. This improves the consistency of the rotation speed, direction, and angle of the multiple stages 11, meeting different detection requirements and increasing detection efficiency.

[0070] In some embodiments, such as Figure 1 As shown, the inspection stage 1 includes multiple stages 11, all of which are mounted on the mounting platform 3. This design allows multiple products 200 to be inspected to be processed simultaneously in one inspection process, greatly improving inspection efficiency and shortening the inspection cycle.

[0071] The stage 11 can be symmetrically distributed around the center of the mounting platform 3, or arranged in a circular or radial manner, depending on the size and shape of the mounting platform 3 and the size and quantity of the product 200 to be inspected.

[0072] In some embodiments, such as Figure 8 and Figure 10 As shown, the rotary drive mechanism 4 is provided with a first clearance hole 41, the axis of the first clearance hole 41 coincides with the rotation axis of the mounting platform 3; the mounting platform 3 is formed with multiple mounting holes 31, with the extension direction of the rotation axis of the mounting platform 3 as the projection direction, the projections of the multiple mounting holes 31 all fall into the projection of the first clearance hole 41, and the multiple negative pressure heads 2 are installed in the multiple mounting holes 31 one by one; the multiple negative pressure heads 2 pass through the first clearance hole 41 and are connected to the multiple negative pressure sources 5.

[0073] The rotary drive mechanism 4 can be a hollow motor. A first clearance hole 41 is provided on the rotary drive mechanism 4. The axis of the first clearance hole 41 coincides with the rotation axis of the mounting platform 3, and the axis of the first clearance hole 41 also coincides with the rotation axis of the output end of the rotary drive mechanism 4. During rotation, the rotation axis of the first clearance hole 41 coincides with the rotation axis of the output end of the rotary drive mechanism 4.

[0074] During rotation, the multiple mounting holes 31 of the mounting platform 3 are always connected to the first clearance hole 41, so that when the mounting platform 3 rotates, the mounting holes 31 and the negative pressure head 2 inside them will not interfere with the rotation drive mechanism 4, thereby improving the stability and safety of the mounting platform 3, and also reducing the excessive entanglement of the connecting pipe between the negative pressure head 2 and the negative pressure source 5 during rotation.

[0075] The mounting holes 31 can be arranged in a circular array around the rotation axis of the mounting platform 3, and the number of mounting holes 31 corresponds to the number of adsorption blocks 12.

[0076] The negative pressure source 5 is connected to multiple negative pressure heads 2 through the first clearance hole 41. This design not only simplifies the connection structure, but also reduces the problem of tangling or damage to the negative pressure connection wires during the rotation of the mounting platform 3.

[0077] In this embodiment, this design ensures that no structure or component related to the axis of rotation is disturbed or obstructed during the rotation of the mounting platform 3.

[0078] In some embodiments, such as Figure 2 and Figure 5 As shown, the plurality of platforms 11 include a first platform 111 and a second platform 112 symmetrically distributed along the rotation axis of the mounting platform 3 as the center of symmetry. Both the first platform 111 and the second platform 112 include a first adsorption block 124 close to the rotation axis of the mounting platform 3 and a second adsorption block 125 away from the rotation axis of the mounting platform 3.

[0079] The first platform 111 and the second platform 112 are symmetrically distributed along the rotation axis of the mounting platform 3, which can improve the stability and balance of rotation.

[0080] like Figure 6 As shown, the first platform 111 includes a first adsorption block 124 close to the rotation axis of the mounting platform 3 and a second adsorption block 125 away from the rotation axis of the mounting platform 3. The second platform 112 also includes a first adsorption block 124 close to the rotation axis of the mounting platform 3 and a second adsorption block 125 away from the rotation axis of the mounting platform 3.

[0081] The dual-stage design allows the testing stage 1 to simultaneously carry two products 200 to be tested, improving testing efficiency. At the same time, the symmetrical layout facilitates simultaneous or alternating testing of products on both stages, enhancing testing flexibility.

[0082] like Figure 7 and Figure 8 As shown, the end of the main air passage 121 of each second adsorption block 125 is connected to one of the plurality of negative pressure heads 2, and the middle part of the main air passage 121 of each first adsorption block 124 located at both ends is connected to another of the plurality of negative pressure heads 2.

[0083] Wherein, along the rotation axis of the mounting platform 3 is the projection direction, at least a portion of the projection of the first adsorption block 124 falls into the projection of the first clearance hole 41, at least a portion of the projection of the main air passage 121 of the first adsorption block 124 falls into the projection of the mounting hole 31, and the middle part of the main air passage 121 can be any area between the two ends, or it can be the symmetrical center along the axial direction of the main air passage 121.

[0084] In this embodiment, the middle part of the main air passage 121 of the first adsorption block 124 near the rotation axis of the mounting platform 3 is connected to the corresponding negative pressure head 2, which can shorten the negative pressure transmission path and reduce the problem of uneven negative pressure caused by uneven airflow distribution or pipe length difference during rotation. At the same time, the middle connection also facilitates the layout and fixation of the first adsorption block 124, reduces the negative pressure loss caused by excessive pipe length or excessive bends, and improves the negative pressure transmission efficiency.

[0085] In this embodiment, the end of the main air passage 121 of the second adsorption block 125, which is away from the rotation axis of the mounting platform 3, is connected to the corresponding negative pressure head 2.

[0086] Among them, such as Figure 4As shown, one end of the main air channel 121 of the second adsorption block 125 is connected to the corresponding negative pressure head 2, or both ends of the main air channel 121 of the second adsorption block 125 are connected to the corresponding negative pressure head 2. Negative pressure can be supplied from both ends of the main air channel 121 to the middle, which can minimize the loss in the negative pressure transmission process and provide stable adsorption force.

[0087] In some embodiments, such as Figure 8 As shown, the mounting platform 3 also has a first sub-channel 32 and a second sub-channel 33. Both the first sub-channel 32 and the second sub-channel 33 consist of two sub-channels.

[0088] The first sub-channel 32 extends along the extension direction of the main air channel 121 of the second adsorption block 125 and is connected to both ends of the main air channel 121 of the second adsorption block 125. There are two first sub-channels 32, and the two first sub-channels 32 are connected to the two main air channels 121 of the second adsorption block 125 in a one-to-one correspondence.

[0089] The first sub-channel 32 is connected to both ends of the main air channel 121 of the second adsorption block 125, which improves the uniformity of negative pressure distribution in the main air channel 121 of the second adsorption block 125, thereby providing stable adsorption force.

[0090] The second sub-channel 33 is connected to the first sub-channel 32 and is connected to one of the multiple negative pressure heads 2. There are two second sub-channels 33, and the two second sub-channels 33 are respectively connected to the corresponding first sub-channels 32.

[0091] The negative pressure generated by the negative pressure source 5 can enter the second sub-channel 33 through the negative pressure head 2, then enter the first sub-channel 32, and then be transmitted to the main air channel 121 of the second adsorption block 125.

[0092] The extension directions of the first sub-channel 32 and the second sub-channel 33 can be set at an angle, for example, at 90°; the two first sub-channels 32 and the two second sub-channels 33 can be centrally distributed around the rotation axis of the mounting platform 3, so as to connect the centrally distributed multiple mounting holes 31 and the symmetrically distributed first platform 111 and second platform 112.

[0093] In this embodiment, the structure of the first sub-channel 32 and the second sub-channel 33 formed by the mounting platform 3 can transmit negative pressure more effectively. The first sub-channel 32 is connected to both ends of the main air channel 121 of the second adsorption block 125, which improves the uniform distribution of negative pressure in the second adsorption block 125, while the second sub-channel 33 provides a convenient path for negative pressure to enter the first sub-channel 32. The design of the first sub-channel 32 and the second sub-channel 33 makes the layout of the negative pressure pipeline more reasonable and compact, which helps to reduce the pipeline length and the number of bends, thereby reducing negative pressure loss and improving negative pressure transmission efficiency.

[0094] In some embodiments, such as Figure 6 andFigure 9 As shown, the stage 11 also includes a base 113, and multiple adsorption blocks 12 are installed on the base 113. The base 113 is installed on the mounting platform 3, and the multiple bases 113 are flush with the top surface of the mounting platform 3 away from each other.

[0095] Multiple adsorption blocks 12 on the same stage 11 are used to adsorb the same product 200 to be tested. Installing multiple adsorption blocks 12 on the same base 113 can make it easier to place multiple adsorption blocks 12 on the same plane and reduce the difficulty of installation.

[0096] The multiple adsorption blocks 12 and the multiple bases 113 can be fastened together by adhesive or fasteners.

[0097] Among them, such as Figure 9 As shown, the base 113 may be provided with a second clearance hole, which is connected to the first clearance hole to transmit negative pressure.

[0098] In some embodiments, such as Figure 9 As shown, multiple fasteners are provided between the adsorption block 12 and the base 113. The multiple fasteners are distributed at intervals, which can form multiple connection points between the adsorption block 12 and the base 113, thereby improving the stability of the connection between the adsorption block 12 and the base 113.

[0099] Fasteners can be connectors such as screws or rivets.

[0100] In some embodiments, the adsorption block 12 is a polyetheretherketone block; the side of the adsorption block 12 facing the product 200 to be tested is black; the overall flatness β of the side of the adsorption block 12 facing the product 200 to be tested satisfies: -0.03mm≤β≤0.03mm.

[0101] The adsorption block 12 is made of polyetheretherketone (PEEK). PEEK blocks have antistatic properties, with an antistatic rating of 10^6-10^9, which can improve the situation where the adsorption block 12 easily attracts dust due to static electricity, reducing the difficulty of cleaning.

[0102] The side of the adsorption block 12 facing the product 200 to be tested is the bearing surface. The adsorption block 12 can be entirely black, or only the bearing surface can be black. This can reduce the interference of inconsistent background color or background processing marks on the imaging of conventional rubber-coated stages, meet optical imaging requirements, and improve imaging quality.

[0103] The overall flatness β of the bearing surface of the adsorption block 12 can be 0.01 or 0.02. The adsorption block 12 can be ground as a whole. Multiple adsorption blocks 12 are processed and assembled separately first, and then ground as a whole to improve the accuracy, improve the stability and reliability of adsorption, and meet the requirements of optical imaging.

[0104] In some embodiments, the adsorption block 12 is a polyetheretherketone block, and the side of the adsorption block 12 facing the product 200 to be tested is black.

[0105] The polyetheretherketone (PEEK) block has antistatic properties, with an antistatic rating of 10^6-10^9. This can improve the dust accumulation problem caused by static electricity in the adsorption block 12, reduce cleaning difficulty, meet optical imaging requirements, and improve imaging quality.

[0106] In some embodiments, the side of the adsorption block 12 facing the product 200 to be tested is black, and the overall flatness β of the side of the adsorption block 12 facing the product 200 to be tested satisfies: -0.03mm≤β≤0.03mm, which can reduce the interference of conventional coated stage on imaging due to inconsistent background color or background processing marks, and meet the optical imaging requirements.

[0107] In some embodiments, the adsorption block 12 is a polyetheretherketone block, and the overall flatness β of the side of the adsorption block 12 facing the product 200 to be tested satisfies: -0.03mm≤β≤0.03mm, which can improve the situation where the adsorption block 12 is prone to dust accumulation due to static electricity, reduce cleaning difficulty, and improve accuracy.

[0108] In some embodiments, the adsorption block 12 is a polyetheretherketone block, which can improve the situation where the adsorption block 12 is prone to dust accumulation due to static electricity and reduce the difficulty of cleaning.

[0109] In some embodiments, the side of the adsorption block 12 facing the product 200 to be tested is black, which can reduce the interference of the conventional rubber-coated stage on imaging due to inconsistent background color or background processing marks, meet the optical imaging requirements, and improve the imaging quality.

[0110] In some embodiments, the overall flatness β of the side of the adsorption block 12 facing the product 200 to be tested satisfies: -0.03mm≤β≤0.03mm, which improves accuracy, enhances the stability and reliability of adsorption, and meets the requirements of optical imaging.

[0111] This application embodiment also provides a detection device 100, including a detection stage as described above.

[0112] According to the detection device 100 provided in this application, by setting up multiple adsorption zones, each adsorption zone is connected to a corresponding negative pressure head 2, and each negative pressure zone achieves independent adsorption. Compared with the single negative pressure source 5 but only adsorption zone adsorbing the product 200 to be tested under negative pressure, on the one hand, the flow rate can be increased to improve the adsorption flow rate. On the other hand, when facing the bent and deformed product 200 to be tested, due to the setting of multiple adsorption zones, different areas of the product 200 to be tested can be adsorbed independently, reducing the destructive effect of negative pressure adsorption on other adsorption zones caused by the interval between the deformed area and the adsorption zone. Thus, the bent and deformed product 200 to be tested can be efficiently corrected, and the detection efficiency can be improved.

[0113] In some embodiments, the detection device 100 further includes a slide rail and a plurality of detection stages slidably connected to the slide rail.

[0114] The testing platform includes multiple stages, which can simultaneously test multiple products 200 to be tested, thereby improving testing efficiency.

[0115] Multiple testing platforms can slide along rails to move the testing platforms, thus meeting various applicable scenarios.

[0116] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0117] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0118] In the description of this application, "first feature" and "second feature" may include one or more of the features.

[0119] In the description of this application, "multiple" means two or more.

[0120] In the description of this application, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or the first and second features being in contact through another feature between them.

[0121] In the description of this application, the terms "above," "over," and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0122] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0123] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. An inspection stage, characterized by, The detection platform comprises: a carrier platform, which comprises a plurality of adsorption blocks, each of which forms a main air channel and a plurality of adsorption holes distributed in communication with the main air channel and spaced apart, and the plurality of adsorption blocks form a plurality of adsorption areas for adsorbing different areas of the product to be detected; a plurality of negative pressure heads in one-to-one correspondence with the plurality of main air channels of the plurality of adsorption blocks, which are used to communicate with a plurality of negative pressure sources in one-to-one correspondence.

2. The inspection stage of claim 1, wherein, The adsorption block is also provided with a plurality of sub-air channels arranged in parallel and spaced apart along the extension direction of the main air channel, each of which is in communication with the main air channel, and the plurality of adsorption holes include a plurality of groups, each of which includes at least two adsorption holes, and the plurality of sub-air channels are in one-to-one correspondence with a plurality of groups of adsorption holes.

3. The inspection stage of claim 2, wherein, A plurality of groups of adsorption holes are arranged spaced apart along the extension direction of the main air channel, and a plurality of adsorption holes in each group are arranged spaced apart along the extension direction of the sub-air channel.

4. The inspection stage of claim 1, wherein, The detection platform further comprises a mounting table and a rotary driving mechanism, which is power-coupled with the mounting table; the carrier platform comprises a plurality of carrier platforms, each of which is mounted on the mounting table.

5. The inspection stage of claim 4, wherein, The rotary driving mechanism is provided with a first avoiding hole, the axis of which coincides with the rotation axis of the mounting table; The mounting table is provided with a plurality of mounting holes, and the projection of the mounting holes falls within the projection of the first avoiding hole in the extension direction of the rotation axis of the mounting table, and the plurality of negative pressure heads are installed in one-to-one correspondence with the plurality of mounting holes; The plurality of negative pressure heads are connected with a plurality of negative pressure sources through the first avoiding hole.

6. The inspection stage of claim 5, wherein, The plurality of carrier platforms comprise a first carrier platform and a second carrier platform symmetrically distributed about the rotation axis of the mounting table, and each of the first carrier platform and the second carrier platform comprises a first adsorption block close to the rotation axis of the mounting table and a second adsorption block away from the rotation axis of the mounting table; The end of the main air channel of each second adsorption block is connected with one of the plurality of negative pressure heads, and the middle of the main air channel of each first adsorption block located between the two ends is connected with another of the plurality of negative pressure heads.

7. The inspection stage of claim 6, wherein, The mounting table is also provided with a first sub-channel and a second sub-channel, the first sub-channel extends along the extension direction of the main air channel of the second adsorption block and communicates with both ends of the main air channel of the second adsorption block, and the second sub-channel communicates with the first sub-channel and is connected with one of the plurality of negative pressure heads.

8. The inspection stage of claim 4, wherein, The carrier platform further comprises a base, the plurality of adsorption blocks are mounted on the base, and the base is mounted on the mounting table, and the top surfaces of the plurality of bases away from the mounting table are flush.

9. The inspection stage of any one of claims 1-8, wherein, The adsorption block is a polyether ether ketone block; and / or, The side of the adsorption block facing the product to be detected is black; and / or, The overall flatness β of the side of the adsorption block facing the product to be detected satisfies: -0.03mm≤β≤0.03mm.

10. A detection device, characterized in that The detection platform comprises the detection platform according to any one of claims 1-9. The detection platform comprises the detection platform according to any one of claims 1-9.

Images