Molybdenum cover for metal organic chemical vapor deposition (MOCVD) reaction cavity
By setting a reinforcing ring on the outside of the molybdenum cover in the MOCVD reaction chamber and using a molding method, the deformation problem caused by the high processing difficulty of the molybdenum cover was solved, achieving high strength and long service life of the molybdenum cover, and enhancing the heat preservation effect and dustproof performance.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-06
- Publication Date
- 2026-03-10
AI Technical Summary
The existing molybdenum cover for MOCVD reaction chambers is difficult to manufacture, resulting in difficulty in controlling the amount of deformation and affecting its functionality.
A reinforcing ring is set on the outside of the molybdenum cover body. The molybdenum cover and the reinforcing ring are prepared by molding or rolling. The strength of the molybdenum cover is enhanced by the ring structure that matches the molybdenum cover body. The components are fixed by fixing screws to form a segmented connection to reduce high-temperature deformation.
It improves the strength and service life of the molybdenum cover, reduces deformation under high temperature conditions, enhances the heat preservation effect, and prevents dust from falling.
Smart Images
Figure CN223983723U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to MOCVD technical field, concretely relates to a molybdenum cover for MOCVD reaction cavity. BACKGROUND
[0002] MOCVD machine growth membrane, the uniformity and the stability of temperature of temperature field are required higher, good molybdenum cover, can carry out heat insulation protection other parts while heat preservation. But better molybdenum cover processing difficulty is bigger, deformation is difficult to control, in actual use, deformation will also slowly produce, lead to function decline, influence yield.
[0003] The information disclosed in this BACKGROUND section is only for the purpose of increasing the understanding of the background of the present utility model and should not be taken as an acknowledgement or any form of suggestion that this information forms prior art that is publicly known. CONTENT OF UTILITY MODEL
[0004] The utility model is to provide a kind of molybdenum cover for MOCVD reaction cavity, it can solve the problem of the deformation of the existing molybdenum cover processing difficulty, thereby leading to deformation when using, and then leading to the problem of the decline of use function.
[0005] In order to achieve the above-mentioned purpose, the technical scheme provided by the utility model in one embodiment is as follows:
[0006] A kind of molybdenum cover for MOCVD reaction cavity, including molybdenum cover body, the molybdenum cover body adopts sheet material, the shape of the molybdenum cover body is processed into annular, the two ends of the molybdenum cover body are butt jointed and adhered together, so as to process the sheet material into annular cover, realize the processing of molybdenum cover. The outer side of the molybdenum cover body is provided with reinforcing ring, the reinforcing ring adopts sheet material, the shape of the reinforcing ring is processed into annular that is matched with the molybdenum cover body, the inner side wall of the reinforcing ring is adhered with the outer side wall of the molybdenum cover body, the two ends of the reinforcing ring are butt jointed and adhered together. By being provided with reinforcing ring on the outer side of the molybdenum cover body, the reinforcing ring is matched with the shape of the molybdenum cover body and adhered together, so as to significantly improve the strength of the molybdenum cover body when using, effectively reduce the deformation of the molybdenum cover body when using under high temperature condition.
[0007] In one or more embodiments of the utility model, the molybdenum cover body and the reinforcing ring are both made of molybdenum material, and the molybdenum cover body and the reinforcing ring are prepared by die pressing or rolling. The molybdenum cover body and the reinforcing ring are prepared by die pressing or rolling, which ensures high processing precision and does not affect the performance of the molybdenum cover body and the reinforcing ring.
[0008] In one or more embodiments of the utility model, the center of the middle axis of the reinforcing ring coincides with the center of the middle axis of the molybdenum cover body, so that the reinforcing ring is arranged at the center of the molybdenum cover body, the force of the reinforcing ring on the molybdenum cover body is balanced, and the strength of the reinforcing ring and the reinforcing ring combination is improved.
[0009] In one or more embodiments of the utility model, the butt joint positions at the two ends of the molybdenum cover body are arranged in opposite directions to the butt joint positions at the two ends of the reinforcing ring, so that the butt joint positions at the two ends of the molybdenum cover body are reinforced by the reinforcing ring, and the deformation of the effective interface position after heating is effectively reduced.
[0010] In one or more embodiments of the utility model, the inner side wall at the interface at the two ends of the molybdenum cover body is provided with a fixed plate in a matched manner, the height of the fixed plate is the same as the height of the molybdenum cover body, and the strength of the inner side at the interface of the molybdenum cover body is improved by the fixed plate.
[0011] In one or more embodiments of the utility model, the outer side wall at the interface at the two ends of the molybdenum cover body is provided with a first butt joint plate and a second butt joint plate in a matched manner, the first butt joint plate and the second butt joint plate are arranged on the upper side and the lower side of the reinforcing ring respectively, and the strength of the outer side at the interface of the molybdenum cover body and the reinforcing ring is improved by the first butt joint plate and the second butt joint plate.
[0012] In one or more embodiments of the utility model, the upper end of the first butt joint plate is flush with the upper end of the molybdenum cover body, and the lower end of the second butt joint plate is flush with the lower end of the molybdenum cover body.
[0013] In one or more embodiments of the utility model, a plurality of first mounting holes are formed in the molybdenum cover body, a plurality of second mounting holes are formed in the reinforcing ring, the fixed plate, the first butt joint plate and the second butt joint plate, the first mounting holes and the second mounting holes are punched, and the arrangement of the first mounting holes and the second mounting holes does not affect the strength of the molybdenum cover body, the reinforcing ring, the fixed plate, the first butt joint plate and the second butt joint plate.
[0014] In one or more embodiments of the utility model, a plurality of fixed screws are arranged at the butt joint positions of the molybdenum cover body, the reinforcing ring, the fixed plate, the first butt joint plate and the second butt joint plate through the plurality of first mounting holes and the plurality of second mounting holes, the components can be stably fixed together through the fixed screws, and a plurality of fixed screws are arranged to make the stress between the components uniform.
[0015] In one or more embodiments of the utility model, the fixed screw includes a rod body and a pair of limit heads, the rod body is arranged in the first mounting hole and the second mounting hole, and the pair of limit heads respectively abut on the two side walls, the cooperation of the rod body and the limit head makes the fixed screw stably fix the components together.
[0016] Compared with the prior art, the utility model discloses through technical improvement, is used to reduce the stress release and deformation of molybdenum cover due to high temperature when using, through the mode of increasing the reinforcing rib in the whole molybdenum cover, the deformation of molybdenum cover is stabilized, the deformation of molybdenum cover is reduced, the service life of molybdenum cover is increased, and some dust in the heating process can also be blocked. BRIEF DESCRIPTION OF DRAWINGS
[0017] In order to more clearly illustrate the technical scheme in the embodiment of the utility model or prior art, the drawings needed to be used in the embodiment or prior art description will be simply introduced below, and obviously, the drawings in the following description are only some embodiments in the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creative labor.
[0018] Figure 1 It is a schematic view of a molybdenum cover for MOCVD reaction cavity in an embodiment of the utility model;
[0019] Figure 2 It is a schematic view of a molybdenum cover for MOCVD reaction cavity in an embodiment of the utility model; Figure 1 ;
[0020] Figure 3 It is a schematic view of a molybdenum cover for MOCVD reaction cavity in an embodiment of the utility model; Figure 2 ;
[0021] Figure 4 It is a sectional view of fixed screw installation place in the utility model.
[0022] MAIN REFERENCE NUMERALS EXPLANATION:
[0023] 1-molybdenum cover body, 2-reinforcing ring, 3-fixing plate, 4-first butt plate, 5-second butt plate, 6-fixed screw, 601-rod body, 602-limit head, 7-first mounting hole, 8-second mounting hole. DETAILED DESCRIPTION
[0024] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.
[0025] like Figures 1-3 As shown in one embodiment of the present invention, a molybdenum cover for an MOCVD reaction chamber can solve the problem that the existing molybdenum cover is difficult to process, resulting in difficulty in controlling the amount of deformation, which leads to deformation during use and a decrease in its functionality.
[0026] like Figures 1-3 As shown, a molybdenum shroud for an MOCVD reaction chamber includes a molybdenum shroud body 1. The molybdenum shroud body 1 is made of sheet metal and is machined into a ring shape. The two ends of the molybdenum shroud body 1 are butt-jointed and bonded together to form a ring-shaped shroud. A reinforcing ring 2 is provided on the outer side of the molybdenum shroud body 1. The reinforcing ring 2 is also made of sheet metal and is machined into a ring shape that matches the molybdenum shroud body 1. The inner sidewall of the reinforcing ring 2 is bonded to the outer sidewall of the molybdenum shroud body 1, and the two ends of the reinforcing ring 2 are butt-jointed and bonded together. By providing a reinforcing ring 2 on the outer side of the molybdenum shroud body 1, and by setting the reinforcing ring 2 to be a ring shape that matches the molybdenum shroud body 1 and bonded together, the strength of the molybdenum shroud body 1 during use is significantly improved, effectively reducing deformation of the molybdenum shroud body 1 under high-temperature conditions.
[0027] Preferably, by setting the molybdenum cover body 1 on the outside of the molybdenum cover body 1, the molybdenum cover body 1 can stabilize the deformation of the molybdenum cover by adding reinforcing ribs as a whole, thereby reducing deformation and increasing the service life of the molybdenum cover. At the same time, it can also prevent some dust from falling during the heating process and improve the heat preservation effect of the molybdenum cover during use. Meanwhile, the molybdenum cover body 1 and the reinforcing ring 2 adopt a segmented connection to reduce stress release and deformation caused by high temperature, effectively delaying the deformation time of the molybdenum cover under high temperature conditions.
[0028] Furthermore, both the molybdenum cover body 1 and the reinforcing ring 2 are made of molybdenum material. The molybdenum cover body 1 and the reinforcing ring 2 are prepared by molding or rolling. By molding or rolling, the molybdenum cover body 1 and the reinforcing ring 2 are prepared with high processing precision, and their performance is not affected during processing.
[0029] like Figures 1-3As shown, the center of the central axis of the reinforcing ring 2 coincides with the center of the central axis of the molybdenum cover body 1, so that the reinforcing ring 2 is set at the center of the molybdenum cover body 1, so that the force of the reinforcing ring 2 on the molybdenum cover body 1 is balanced, and the strength of the reinforcing ring 2 and the reinforcing ring 2 combined is improved.
[0030] like Figures 1-3 As shown, the docking positions at both ends of the molybdenum cover body 1 are set in the opposite direction to the docking positions at both ends of the reinforcing ring 2, so that the docking positions at both ends of the molybdenum cover body 1 are reinforced by the reinforcing ring 2, effectively reducing the deformation of the interface position after heating.
[0031] like Figure 3 As shown, a fixing plate 3 is installed on the inner side wall of the interface at both ends of the molybdenum cover body 1 in a fitted manner. The height of the fixing plate 3 is the same as the height of the molybdenum cover body 1. The fixing plate 3 improves the strength of the inner side of the interface of the molybdenum cover body 1.
[0032] like Figure 1 and Figure 2 As shown, a first mating plate 4 and a second mating plate 5 are fitted together on the outer side wall of the interface at both ends of the molybdenum cover body 1. The first mating plate 4 and the second mating plate 5 are respectively set on the upper and lower sides of the reinforcing ring 2, thereby improving the strength of the outer side of the interface between the molybdenum cover body 1 and the reinforcing ring 2.
[0033] like Figure 1 and Figure 2 As shown, the upper end of the first docking plate 4 is flush with the upper end of the molybdenum cover body 1, and the lower end of the second docking plate 5 is flush with the lower end of the molybdenum cover body 1.
[0034] like Figure 4 As shown, the molybdenum cover body 1 has multiple first mounting holes 7, and the reinforcing ring 2, fixing plate 3, first mating plate 4 and second mating plate 5 each have multiple second mounting holes 8. The first mounting holes 7 and second mounting holes 8 are all made by stamping. The stamping method ensures that the setting of the first mounting holes 7 and second mounting holes 8 will not affect the strength of the molybdenum cover body 1, reinforcing ring 2, fixing plate 3, first mating plate 4 and second mating plate 5.
[0035] like Figures 1-4 As shown, the molybdenum cover body 1, reinforcing ring 2, fixing plate 3, first mating plate 4 and second mating plate 5 are connected to each other by multiple fixing screws 6 through multiple first mounting holes 7 and multiple second mounting holes 8. The fixing screws 6 can stably fix the components together. At the same time, multiple fixing screws 6 are provided to ensure that the force between the components is uniform.
[0036] like Figure 4As shown, the fixing screw 6 includes a rod body 601 and a pair of limiting heads 602. The rod body 601 is disposed in the first mounting hole 7 and the second mounting hole 8. The pair of limiting heads 602 respectively abut against the corresponding side walls. Through the cooperation of the rod body 601 and the limiting heads 602, the fixing screw 6 can stably fix the components together.
[0037] The specific principle is that this utility model reduces the stress release and deformation caused by high temperature during the use of molybdenum cover through technical improvements. By adding reinforcing ribs to the entire molybdenum cover, the deformation of the molybdenum cover is stabilized, reducing deformation and increasing the service life of the molybdenum cover. It can also prevent some dust from falling during the heating process.
[0038] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.
[0039] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. A molybdenum shield for a MOCVD reaction chamber, characterized in that, The molybdenum cover body is made of a plate material, and the shape of the molybdenum cover body is processed into a ring shape, the two ends of the molybdenum cover body are butted and attached together, and the outer side of the molybdenum cover body is provided with a reinforcing ring made of a plate material, the shape of the reinforcing ring is processed into a ring shape matched with the molybdenum cover body, the inner side wall of the reinforcing ring is attached to the outer side wall of the molybdenum cover body, and the two ends of the reinforcing ring are butted and attached together.
2. The molybdenum shield for a MOCVD reaction chamber according to claim 1, wherein, The molybdenum cover body and the reinforcing ring are both made of molybdenum material, and the molybdenum cover body and the reinforcing ring are prepared by a die pressing method or a rolling method.
3. The molybdenum shield for a MOCVD reaction chamber according to claim 2, wherein, The center of the central axis of the reinforcing ring coincides with the center of the central axis of the molybdenum cover body.
4. The molybdenum shield for a MOCVD reaction chamber according to claim 3, wherein, The butting positions of the two ends of the molybdenum cover body are arranged in opposite directions to the butting positions of the two ends of the reinforcing ring.
5. The molybdenum shield for a MOCVD reaction chamber according to claim 1, wherein, The inner side wall of the interface of the two ends of the molybdenum cover body is attached with a fixed plate in a butting manner, and the height of the fixed plate is the same as the height of the molybdenum cover body.
6. The molybdenum shield for a MOCVD reaction chamber according to claim 5, wherein, The outer side wall of the interface of the two ends of the molybdenum cover body is attached with a first butt plate and a second butt plate in a butting manner, and the first butt plate and the second butt plate are arranged on the upper side and the lower side of the reinforcing ring, respectively.
7. The molybdenum shield for a MOCVD reaction chamber according to claim 6, wherein, The upper end of the first butt plate is flush with the upper end of the molybdenum cover body, and the lower end of the second butt plate is flush with the lower end of the molybdenum cover body.
8. The molybdenum shield for a MOCVD reaction chamber according to claim 7, wherein, A plurality of first mounting holes are formed in the molybdenum cover body, a plurality of second mounting holes are formed in the reinforcing ring, the fixed plate, the first butt plate and the second butt plate, and the first mounting holes and the second mounting holes are punched.
9. The molybdenum shield for a MOCVD reaction chamber according to claim 8, wherein, A plurality of fixed screws are installed at the butting positions of the molybdenum cover body, the reinforcing ring, the fixed plate, the first butt plate and the second butt plate through the plurality of first mounting holes and the plurality of second mounting holes.
10. The molybdenum shield for a MOCVD reaction chamber according to claim 9, wherein, The fixed screw includes a rod body and a pair of limiting heads, the rod body is arranged in the first mounting hole and the second mounting hole, and the pair of limiting heads abut on the corresponding two side walls, respectively.