Spray head

Abstract

The utility model provides a spray header. The spraying head comprises an air guide pipe, an upper cover and a lower cover. A body of the upper cover extends in the height direction. The body comprises a first end and a second end which are vertically arranged. And the air guide pipe is fixed above the upper cover and is communicated with the cavity. The top of the lower cover is downwards provided with an annular groove, the upper cover is embedded into the annular groove, and the second end of the upper cover abuts against the annular groove. In the height direction, the distance between the first end and the second end is equal to the distance between the top face of the lower cover and the bottom face of the annular groove, the upper cover and the lower cover are in seamless connection through a friction stir welding layer, and a cavity is formed. Compared with the prior art, the body of the upper cover extends along the height direction, and the distance between the first end and the second end of the body is equal to the distance between the top surface of the lower cover and the bottom surface of the annular groove, so that the upper cover and the lower cover can be tightly attached after the upper cover is embedded into the annular groove of the lower cover through accurate size matching; and seamless connection is realized through the friction stir welding layer, so that the air tightness of the cavity is enhanced.

Description

Technical Field

[0001] This utility model relates to the field of spray head technology, and in particular to a spray head. Background Technology

[0002] In semiconductor manufacturing, gas spray heads are core components of chemical vapor deposition (CVD) equipment, functioning to uniformly and stably deliver reaction gases to the wafer surface. Existing spray head structures often employ a split design, such as connecting the upper and lower covers via bolts or traditional welding. This structure suffers from insufficient sealing. While the upper and lower covers are connected by threads, thread gaps can easily lead to gas leakage, and the difference in metal expansion under high-temperature conditions further exacerbates seal failure. Furthermore, traditional welding processes (such as arc welding and laser welding) are prone to generating porosity or microcracks at the weld seam, causing pressure fluctuations within the cavity and, in severe cases, contaminating process gases.

[0003] In view of this, it is indeed necessary to propose a spray head to solve the above problems. Utility Model Content

[0004] To achieve the above objectives, the present invention provides a spray head that can improve the sealing effect.

[0005] Therefore, the present invention provides a spray head, comprising:

[0006] The top cover extends along the height direction and includes a first end and a second end disposed at the top and bottom, respectively.

[0007] The air duct is fixed above the top cover and communicates with the cavity;

[0008] The lower cover has a downward-facing annular groove at its top, and the upper cover is embedded in the annular groove, with the second end of the upper cover abutting against the annular groove.

[0009] In the height direction, the distance between the first end and the second end is equal to the distance between the top surface of the lower cover and the bottom surface of the annular groove. The upper cover and the lower cover are seamlessly connected by a friction stir weld layer to form a cavity.

[0010] Optionally, in the height direction, the distance between the top surface of the lower cover and the bottom surface of the annular groove is 5mm.

[0011] Optionally, the second end extends downward and is provided with a closure, the outer diameter of which is equal to the inner diameter of the annular groove.

[0012] Optionally, the lower cover has at least three sets of support columns arranged in an equilateral triangle, with the top of each set of support columns abutting against the upper cover.

[0013] Optionally, the second end is provided with a closure, and the top of the support column and the bottom surface of the closure are on the same horizontal plane.

[0014] Optionally, a baffle is also provided inside the cavity. The baffle is located below the gas guide tube and is connected to the upper cover by a fastener to disperse the gas.

[0015] Optionally, a closure is provided at the second end extending downwards. In the height direction, the distance between the top surface of the baffle and the bottom surface of the closure is defined as the first distance, and the distance between the bottom surface of the closure and the bottom surface of the lower cover is defined as the second distance. The ratio of the first distance to the second distance is 0.15 ≤ 0.2.

[0016] Optionally, the air duct includes a first tube and a second tube connected vertically, and the ratio of the inner diameter of the first tube to the inner diameter of the second tube is 0.3≤0.35.

[0017] Optionally, the lower cover is provided with at least three sets of support columns, and the cavity is also provided with a baffle plate, wherein the inner diameter of the 1 / 2 second tube is less than or equal to the radius of the baffle plate and the distance between the center of any support column and the center of the baffle plate.

[0018] Optionally, the lower cover includes a spray plate and an outer wall surrounding the spray plate, the spray plate having several through holes.

[0019] Compared with the prior art, the technical solution of the embodiments of this utility model has the following beneficial effects:

[0020] The body of the upper cover of this invention extends along the height direction, and the distance between its first and second ends is equal to the distance between the top surface of the lower cover and the bottom surface of the annular groove. This precise dimensional matching allows the upper cover to fit tightly into the annular groove of the lower cover, and the tops of the upper and lower covers are flush, forming an aesthetically pleasing and stable structure. Furthermore, the seamless connection between the upper cover and the annular groove of the lower cover via friction stir welding effectively prevents porosity or micro-cracks at the weld, thereby enhancing the airtightness of the cavity. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a spray head conforming to a preferred embodiment of the present utility model;

[0022] Figure 2 yes Figure 1 Cross-sectional view of the central sprinkler head;

[0023] Figure 3 yes Figure 1 Schematic diagram of the upper and middle covers;

[0024] Figure 4 yes Figure 3 Cross-sectional view of the upper and middle covers;

[0025] Figure 5 yes Figure 1 Schematic diagram of the middle and lower cover;

[0026] Figure 6 yes Figure 5 Cross-sectional view of the lower cover.

[0027] The components in the attached diagram are labeled as follows:

[0028] Air delivery tube 1, first tube 11, second tube 12;

[0029] Top cover 2, body 21, first end 211, second end 212, first peripheral wall 213, bottom wall 214, sealing member 22, second peripheral wall 221, fixing part 23, abutting part 231, guide part 232, fixing hole 24.

[0030] Lower cover 3, spray plate 31, through hole 311, outer side wall 32, annular groove 33, first wall 331, second wall 332, support column 34, connecting column 341, inner side wall 35;

[0031] Cavity 4, baffle 5, fastener 6;

[0032] 100 spray heads. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0034] It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the structures and / or processing steps closely related to the present invention are shown in the accompanying drawings, while other details that are not closely related to the present invention are omitted.

[0035] Additionally, it should be noted that the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0036] Please see Figures 1 to 6 As shown, an embodiment of this utility model provides a spray head 100. The spray head 100 includes an air guide pipe 1, an upper cover 2, and a lower cover 3. The lower cover 3 is fixed below the upper cover 2, and the upper cover 2 and the lower cover 3 are fixedly connected by a friction stir weld layer (not shown), forming a sealed cavity 4. The air guide pipe 1 is fixed above the upper cover 2 and communicates with the cavity 4. Gas enters the interior of the cavity 4 through the air guide pipe 1. The height extension direction of the air guide pipe 1 is defined as the height direction.

[0037] The gas guide tube 1 includes a first tube 11 and a second tube 12 connected vertically. Furthermore, the gas guide tube 1 adopts a stepped inner diameter design, i.e., 0.3 ≤ inner diameter of the first tube 11 / inner diameter of the second tube 12 ≤ 0.35. In this embodiment, the inner diameter of the first tube 11 is 9.66 mm, and the inner diameter of the second tube 12 is 30.73 mm. This design allows the gas flow velocity to gradually adapt to the flow state within the cavity 4 as it passes through the gas guide tube 1, avoiding abrupt changes in gas velocity. This reduces eddies and turbulence generated when the gas enters the cavity 4, allowing the gas to enter the cavity 4 more smoothly, facilitating a more stable gas delivery process, improving the uniformity of gas distribution within the cavity 4, and thus enhancing the effect of the chemical vapor deposition (CVD) process. Simultaneously, by reducing abrupt changes in gas velocity, pressure fluctuations within the cavity 4 can be reduced. A stable air pressure environment helps maintain the gas flow state and distribution within cavity 4, avoiding problems such as gas flow disturbance or excessively high or low local pressure caused by pressure fluctuations, thus further improving the performance and stability of the spray head.

[0038] Please see Figures 3 to 4 As shown, the upper cover 2 includes a concentrically arranged body 21 and a sealing member 22. The sealing member 22 is located below the body 21. The body 21 extends along the height direction and includes a first end 211 and a second end 212 arranged vertically. The sealing member 22 extends downward from the second end 212. A first peripheral wall 213 and a second peripheral wall 221 are respectively provided on the outer sides of the body 21 and the sealing member 22. The body 21 also includes a bottom wall 214 for connecting the first peripheral wall 213 and the second peripheral wall 221. The second peripheral wall 221 of the sealing member 22 abuts against the lower cover 3, which helps to improve the sealing performance of the cavity 4.

[0039] The upper cover 2 also includes a concentrically arranged fixing part 23, which is fixedly connected to the air guide tube 1, thus fixing the upper cover 2 and the air guide tube 1. In this embodiment, the fixing part 23 is a through hole. Specifically, the fixing part 23 penetrates the upper cover 2, and an abutment part 231 is provided at the bottom of the fixing part 23 for abutting the second tube 12. A guide part 232 is provided at the end of the fixing part 23 near the first end 211 to facilitate welding the air guide tube 1 and the upper cover 2 together. The guide part 232 has a chamfer.

[0040] Please see Figures 5 to 6 As shown, the lower cover 3 is fixed below the upper cover 2. The lower cover 3 includes a spray plate 31 and an outer wall 32 surrounding the spray plate 31. The spray plate 31 is provided with a plurality of through holes 311. Gas inside the cavity 4 flows out through the through holes 311.

[0041] An annular groove 33 is formed downwards at the top of the outer wall 32. The inner diameter of the annular groove 33 is equal to the outer diameter of the closure 22. The annular groove 33 includes a first wall 331 and a second wall 332 connected in sequence. The bottom of the spray plate 31 has an inner wall 35 extending from the bottom towards the second wall 332. The extending direction of the inner wall 35 is the same as the extending direction of the first wall 331. The first wall 331 and the inner wall 35 are arranged opposite to each other. The annular groove 33 abuts against the second end 212 of the upper cover 2. Through the tight fit between the annular groove 33 and the closure 22, a physical sealing barrier is formed, blocking more than 70% of potential leakage paths. The friction stir weld layer fills the gap between the outer walls 32 of the upper cover 2 and the lower cover 3 to further improve the airtightness of the cavity 4.

[0042] Preferably, in the height direction, the distance between the first end 211 and the second end 212 is equal to the distance between the top surface of the lower cover 3 and the bottom surface of the annular groove 33. The distance between the top surface of the lower cover 3 and the bottom surface of the annular groove 33 is equivalent to the distance between the top of the first wall 331 and the second wall 332. That is, the height of the first peripheral wall 213 is equal to the height of the first wall 331. During assembly, the second end 212 of the upper cover 2 is at least partially embedded in the annular groove 33, the first peripheral wall 213 abuts against the first wall 331, the bottom wall 214 abuts against the second wall 332, and the second peripheral wall 221 abuts against the inner wall 35, so that the top surface of the upper cover 2 is flush with the highest point of the outer wall 32 of the lower cover 3. The first wall 331, the second wall 332, and the inner wall 35 abut against the first peripheral wall 213, the bottom wall 214, and the second peripheral wall 221 of the upper cover 2, respectively, forming a multi-directional limiting structure, which increases the shear strength by 40% after welding. Then, the outer walls 32 of the upper cover 2 and the lower cover 3 are welded together by friction stir welding to form a seamless, sealed cavity 4. When the vent pipe 1 is closed, a sealed space is formed between the upper cover 2, the lower cover 3, and the vent pipe 1. The tight fit between the annular groove 33 and the sealing component 22, achieved by friction stir welding, eliminates the defects of traditional welds and improves the airtightness of the cavity 4. The friction stir welding process has a small heat-affected zone, which reduces residual welding stress and prevents the support column 34 from detaching from the upper cover 2 under high-temperature conditions.

[0043] In this embodiment, the distance between the top surface of the lower cover 3 and the bottom surface of the annular groove 33 in the height direction is 5mm. That is, the depth of the annular groove 33 is 5mm.

[0044] In some embodiments, the lower cover 3 is provided with at least three sets of support columns 34, which extend from the spray plate 31 to the upper cover 2, with the top of the support column 34 abutting against the bottom surface of the closure member 22. Furthermore, the top of the support column 34 and the bottom surface of the closure member 22 are on the same horizontal plane. During welding, the support columns 34 provide support for the upper cover 2, facilitating welding. A connecting column 341 is provided at the top of the support column 34 for fixed connection with the upper cover 2. The upper cover 2 is provided with a fixing hole 24, and the connecting column 341 is threadedly connected to the fixing hole 24, thus fixing the support column 34 and the upper cover 2. The engagement of the connecting column 341 with the fixing hole 24 achieves pre-positioning, preventing welding misalignment.

[0045] In this embodiment, the lower cover 3 is provided with six sets of support columns 34 arranged in an equilateral triangle, with the top of the support columns 34 abutting against the lower surface of the upper cover 2. This arrangement increases the supporting force of the support columns 34 on the upper cover 2, makes the upper cover 2 subject to uniform force, reduces deformation during welding, and is beneficial for stable welding.

[0046] A baffle 5 is also provided inside the cavity 4. The baffle 5 is located below the gas guide pipe 1 and is connected to the upper cover 2 via a fixing member 6, and is used to disperse the gas. In this embodiment, the baffle 5 is a disc-shaped baffle 5. Furthermore, the radius of the baffle 5 satisfies: 1 / 2 of the diameter of the second pipe 12 ≤ the radius of the baffle 5 ≤ the distance between any support column 34 and the center of the baffle 5. This arrangement allows the baffle 5 to disperse the airflow of the gas guide pipe 1 into laminar flow, thereby enabling the gas introduced through the gas guide pipe 1 to be evenly dispersed into the cavity 4.

[0047] In the height direction, the distance between the top surface of the baffle 5 and the bottom surface of the closure 22 is defined as the first distance, and the distance between the bottom surface of the closure 22 and the spray plate 31 is defined as the second distance, where 0.15 ≤ first distance / second distance ≤ 0.2. In this embodiment, the first distance is 3.18 mm and the second distance is 19.05 mm. This setting optimizes the gas diffusion path, thereby reducing the uniformity deviation of the wafer surface film thickness.

[0048] In summary, the body 21 of the upper cover 2 of this invention extends along the height direction, and the distance between its first end 211 and second end 212 is equal to the distance between the top surface of the lower cover 3 and the bottom surface of the annular groove. This precise dimensional matching allows the upper cover 2 to fit tightly into the annular groove 33 of the lower cover 3, and the tops of the upper cover 2 and the lower cover 3 are flush, forming an aesthetically pleasing and stable structure. Simultaneously, the upper cover 2 is seamlessly connected into the annular groove 33 of the lower cover 3 through friction stir welding, effectively preventing porosity or micro-cracks at the weld, thereby enhancing the airtightness of the cavity 4.

[0049] The above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model.

Claims

1. A showerhead, characterized by, The utility model relates to a kind of gas distribution device, including: Upper cover (2), the body (21) extends along height direction, the body (21) includes first end (211) and second end (212) arranged in upper and lower directions; Air guide pipe (1), fixed in the upper cover (2) and with cavity (4) communication; Lower cover (3), the top is opened annular groove (33) downwards, the upper cover (2) is embedded in the annular groove (33), and the second end (212) of the upper cover (2) is in abutment with the annular groove (33); In height direction, the distance between the first end (211) and the second end (212) is equal to the distance between the top surface of the lower cover (3) and the bottom surface of the annular groove (33), and the upper cover (2) and the lower cover (3) are connected seamlessly by friction stir welding layer, and form the cavity (4).

2. The showerhead of claim 1, wherein In height direction, the distance between the top surface of the lower cover (3) and the bottom surface of the annular groove (33) is 5mm.

3. The showerhead of claim 1, wherein The second end (212) is provided with a closure (22) extending downward, and the outer diameter of the closure (22) is equal to the inner diameter of the annular groove (33).

4. The showerhead of claim 1, wherein The lower cover (3) is provided with at least three groups of support columns (34), and is arranged in an equilateral triangle, the top end of each group of support columns (34) is in abutment with the upper cover (2).

5. The showerhead of claim 4, wherein The second end (212) is provided with a closure (22), and the top end of the support column (34) is in the same horizontal plane with the bottom surface of the closure (22).

6. The showerhead of claim 1, wherein The cavity (4) is further provided with a baffle (5), the baffle (5) is located below the air guide pipe (1), and is connected with the upper cover (2) through a fixing member (6), for dispersing gas.

7. The showerhead of claim 6, wherein The second end (212) is provided with a closure (22) extending downward, and in height direction, the distance between the top surface of the baffle (5) and the bottom surface of the closure (22) is defined as a first distance, and the distance between the bottom surface of the closure (22) and the bottom surface of the lower cover (3) is defined as a second distance, and the ratio of the first distance to the second distance is 0.15 to 0.

2.

8. The showerhead of claim 1, wherein The air guide pipe (1) includes a first pipe (11) and a second pipe (12) in communication with each other, and the ratio of the inner diameter of the first pipe (11) to the inner diameter of the second pipe (12) is 0.3 to 0.

35.

9. The showerhead of claim 8, wherein, The lower cover (3) is provided with at least three groups of support columns (34), and the cavity (4) is further provided with a baffle (5), and the inner diameter of the second pipe (12) is 1 / 2 of the inner diameter of the second pipe (12), and the radius of the baffle (5) is equal to the distance between any support column (34) and the center of the baffle (5).

10. The showerhead of claim 1, wherein The lower cover (3) includes a spray tray (31) and an outer sidewall (32) arranged around the spray tray (31), and the spray tray (31) is provided with a plurality of through holes (311).

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