Combined separation table and combined separation equipment

Abstract

The embodiment of the utility model provides a combined separation table and combined separation equipment, relates to the technical field of semiconductors, and is used for improving the uniformity of the thickness of a plating layer of a mask plate. The combined separating table comprises a fixing plate, a plurality of first supporting structures and a plurality of second supporting structures. The first supporting structure comprises a first supporting piece and a first adjusting piece. A plurality of first supports configured to support the tray; the first adjusting piece is configured to adjust the included angle between the first supporting piece and the fixing plate. The second supporting structure comprises a second supporting piece and a second adjusting piece. The plurality of second supporting pieces are configured to support the mask plate; the mask plate is located on the side, away from the fixing plate, of the tray and forms a gap with the tray. The second supporting pieces and the first supporting pieces are arranged at intervals; the second adjusting piece is connected with the fixing plate and / or the second supporting piece; the second adjusting piece is configured to adjust the included angle between the second supporting piece and the fixing plate. The combined separation table is used for supporting the mask plate.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor, and in particular, to a combination separation table and a combination separation device. BACKGROUND

[0002] The semiconductor manufacturing process includes wafer processing steps, oxidation steps, photolithography steps, etching steps, thin film deposition steps and packaging and testing steps. In the photolithography step, a pattern on a mask plate is transferred to a wafer by exposure to form an integrated circuit.

[0003] In the above-mentioned process, the quality of the mask plate can be improved by plating a layer on the mask plate. The process of plating a layer on the mask plate in the process chamber is as follows: first, the mask plate is placed on a tray (the shape of the tray is circular, and the diameter of the tray is equal to the diameter of the wafer, so that the same robot can be used for the transportation of the tray and the wafer, which is beneficial to improve the versatility of the robot and reduce the cost of the equipment), and then the tray and the mask plate are placed in the process chamber for plating treatment of the mask plate. Before plating the mask plate, the cleanliness of the upper surface of the mask plate needs to be maintained. During the transportation of the mask plate, the robot can only clamp the mask plate from the lower surface or the side surface of the mask plate. In order to facilitate the disengagement of the robot from the mask plate, there is a gap between the mask plate and the tray (the robot moves away from the mask plate through the gap and disengages from the mask plate). The combination separation table can support the tray and the mask plate, and make the mask plate on the upper side of the tray and have a gap with the tray.

[0004] However, after the mask plate is placed on the tray, the mask plate is not parallel to the horizontal plane (the mask plate is inclined), which results in that the mask plate placed in the process chamber is also inclined, thereby causing poor uniformity of the thickness of the plated layer of the mask plate. Utility model content

[0005] The present application discloses a combination separation table and a combination separation device, which are used to improve the uniformity of the thickness of the plated layer of the mask plate.

[0006] In a first aspect, this application provides a combined separation stage, comprising a fixed plate, a plurality of first support structures, and a plurality of second support structures. The plurality of first support structures are spaced apart circumferentially along the fixed plate; each first support structure includes a first support member and a first adjusting member. The first support member is located on one side of the fixed plate along a first direction; the first direction intersects the fixed plate; the plurality of first support members are configured as a support tray; the first adjusting member is connected to the fixed plate and / or the first support member; the first adjusting member is configured to adjust the included angle between the first support member and the fixed plate. The plurality of second support structures are spaced apart circumferentially along the fixed plate. Each second support structure includes a second support member and a second adjusting member. The second support member is located on the side of the fixed plate closer to the first support member; the plurality of second support members are configured as a support mask plate; the mask plate is located on the side of the tray away from the fixed plate and has a gap with the tray; the second support member and the first support member are spaced apart; the second adjusting member is connected to the fixed plate and / or the second support member; the second adjusting member is configured to adjust the included angle between the second support member and the fixed plate.

[0007] In the aforementioned combined separation stage, the processes of adjusting the angle between the tray supported by the first support member and the horizontal plane, and adjusting the angle between the mask supported by the second support member and the horizontal plane, are independent of each other. That is, the processes of adjusting the angle between the tray supported by the first support member and the horizontal plane, and adjusting the angle between the mask supported by the second support member and the horizontal plane, are independent of each other and do not affect each other. The angle between the tray supported by the first support member and the horizontal plane, and the angle between the mask supported by the second support member and the horizontal plane, can both be 0. The tray and the mask can both be parallel to the horizontal plane. This reduces the risk of the mask tilting during the process of the robot lifting the tray. Then, the mask is placed parallel to the process cavity, which makes the coating thickness on the mask uniform and improves the uniformity of the coating thickness on the mask.

[0008] In one possible implementation, the first support member includes a first support plate and a first support column. The first support column is fixedly connected to the first support plate; a plurality of the first support columns are configured to support the tray. And / or, the second support member includes a second support plate and a second support column. The second support column is fixedly connected to the second support plate; a plurality of the second support columns are configured to support the mask plate.

[0009] In one possible implementation, the fixing plate includes a first sub-plate, a second sub-plate, and a third sub-plate. The second sub-plate is disposed around the first sub-plate and has a gap with it; the plurality of third sub-plates are located between the first sub-plate and the second sub-plate and are spaced apart circumferentially along the first sub-plate; the first sub-plate and the second sub-plate are connected by the third sub-plates. In this way, the positioning element on the robotic arm can be aligned with the positioning element on the combined separation stage through the gap between the first and second sub-plates, allowing the tray to be placed at a preset position on the combined separation stage, thereby reducing the risk that the mask plate will at least partially fall outside the first receiving groove.

[0010] In one possible implementation, the orthographic projection of the second support column onto the third sub-plate lies within the third sub-plate. Multiple second support plates are integrally formed, each being polygonal in shape, with one second support column located at a corner of the polygon. This minimizes the portion of the second support plate that can obscure the gap between the first and second sub-plates, facilitating alignment between the positioning components on the robotic arm and the positioning components on the assembly / separation stage.

[0011] In one possible implementation, the plurality of first support plates are integrally formed and arranged around the plurality of second support structures. In this way, the first support members can support the edges of the pallet, thereby reducing the risk of deformation (bending or twisting) of the pallet edges and improving the flatness of the pallet.

[0012] In one possible implementation, the end of the first support column away from the fixed plate is an arc surface and protrudes in a direction away from the first support plate; and / or, the end of the second support column away from the fixed plate is an arc surface and protrudes in a direction away from the second support plate. In this way, the first support column and the pallet make point contact, and after the pallet moves horizontally, the position of contact between the first support column and the pallet remains unchanged, thereby reducing the risk of pallet tilting due to changes in the position of contact between the first support column and the pallet.

[0013] In one possible implementation, the plurality of first support plates are integrally formed; and / or, the plurality of second support plates are integrally formed. This can improve the processing efficiency of the first support plates and shorten the production cycle of the combined separation table.

[0014] In one possible implementation, the first adjusting member is movable relative to the fixed plate along the first direction and drives the first supporting member to move relative to the fixed plate to adjust the angle between the first supporting member and the fixed plate; and / or, the second adjusting member is movable relative to the fixed plate along the first direction and drives the second supporting member to move relative to the fixed plate to adjust the angle between the second supporting member and the fixed plate.

[0015] In one possible implementation, one of the first support member and the fixed plate has a first threaded hole, the first adjusting member passes through the first threaded hole and is threadedly connected to the first threaded hole, and abuts against the other of the first support member and the fixed plate; and / or, one of the second support member and the fixed plate has a second threaded hole, the second adjusting member passes through the second threaded hole and is threadedly connected to the second threaded hole, and abuts against the other of the second support member and the fixed plate.

[0016] In one possible implementation, the combined separation platform further includes a first fixing structure and / or a second fixing structure. The first fixing structure is detachably connected to the fixing plate and the first support member; and / or, the second fixing structure is detachably connected to the fixing plate and the second support member. After the first adjusting member adjusts the angle between the first support member and the fixing plate, the first fixing structure fixes the fixing plate 11 and the first support member, which can reduce the risk of the pallet colliding with the first support member and causing a change in the angle between the first support member and the fixing plate, and helps to keep the pallet parallel to the horizontal plane.

[0017] In one possible implementation, one of the first support member and the fixing plate has a third threaded hole, and the other of the first support member and the fixing plate has a third through hole; the first fixing structure includes a first fastener; the first fastener passes through the third through hole and is threadedly connected to the third threaded hole to fix the fixing plate and the first support member. And / or, one of the second support member and the fixing plate has a fourth threaded hole, and the other of the second support member and the fixing plate has a fourth through hole; the second fixing structure includes a second fastener; the second fastener passes through the fourth through hole and is threadedly connected to the fourth threaded hole to fix the fixing plate and the second support member.

[0018] In one possible implementation, the combined separation stage further includes multiple third support structures. Each third support structure includes a third support member and a third adjusting member. The third support member is located on the side of the fixing plate near the first support member; the third support member is spaced apart from the first and second supports; the multiple third supports are configured to support a cover plate; the cover plate is located on the side of the mask away from the tray and has a gap with the mask; the third adjusting member is connected to the fixing plate and / or the third support member; the third adjusting member is configured to adjust the angle between the third support member and the fixing plate. During the coating process on the mask, the cover plate can shield the sidewalls of the mask, reducing the risk of coating material adhering to the sidewalls of the mask. This reduces the risk of mask contamination of the wafer during the photolithography step. The processes of adjusting the angle between the tray supported by the first support member and the horizontal plane, adjusting the angle between the tray supported by the third support member and the horizontal plane, and adjusting the angle between the mask supported by the second support member and the horizontal plane are independent of each other. The angles between the tray and the horizontal plane, the angle between the mask and the horizontal plane, and the angle between the cover plate and the horizontal plane can all be equal at the same time. The tray, mask, and cover plate can all be parallel to the horizontal plane at the same time. This reduces the risk of mask tilting when the robot lifts the tray. Then the mask is placed parallel to the process cavity, which makes the coating thickness on the mask plate uniform and helps to improve the uniformity of the coating thickness on the mask plate.

[0019] In one possible implementation, the third support member includes a third support plate and a third support column, the third support column being fixedly connected to the third support plate; a plurality of the third support columns are configured to support the tray.

[0020] In one possible implementation, the plurality of the third support plates are integrally formed. This can improve the processing efficiency of the third support plates and shorten the production cycle of the combined separation table.

[0021] In one possible implementation, multiple first support plates are integrally formed, multiple second support plates are integrally formed, and a third support plate is arranged around the second support plates, with the first support plates arranged around the third support plate. In this way, the eighth through hole on the pallet is close to the center of the pallet, which can increase the rigidity of the pallet's edges, thereby reducing the risk of edge deformation.

[0022] In one possible implementation, the end of the third support column away from the fixed plate is an arc surface and protrudes in a direction away from the third support plate. In this way, the third support column and the cover plate make point contact, and after the cover plate moves horizontally, the contact position between the third support column and the cover plate remains unchanged, thereby reducing the risk of the cover plate tilting due to changes in the contact position between the third support column and the cover plate.

[0023] In one possible implementation, the third adjusting member can move relative to the fixed plate along the first direction and drive the third support member to move relative to the fixed plate to adjust the included angle between the third support member and the fixed plate.

[0024] In one possible implementation, one of the third support member and the fixed plate has a fifth threaded hole, the third adjusting member passes through the fifth threaded hole and is threadedly connected to the fifth threaded hole, and abuts against the other of the third support member and the fixed plate.

[0025] In one possible implementation, the combined separation platform further includes a third fixing component, which is detachably connected to the fixing plate and the third support member. Thus, after the third adjusting member adjusts the angle between the third support member and the fixing plate, the third fixing structure secures the fixing plate and the third support member, reducing the risk of the cover plate colliding with the third support member and causing a change in the angle between the third support member and the fixing plate, and helping to maintain the cover plate parallel to the horizontal plane.

[0026] In one possible implementation, one of the third support member and the fixing plate has a sixth threaded hole, and the other of the first support member and the fixing plate has a sixth through hole; the third fixing assembly includes a third fastener that passes through the sixth through hole and is threadedly connected to the sixth threaded hole to fix the fixing plate and the third support member.

[0027] Secondly, this application provides a combined separation device, which includes a combined separation stage and a tray in any of the above embodiments, the tray being configured to support a mask plate.

[0028] The above-described combined separation device has the same structure and beneficial technical effects as the combined separation table provided in some of the above embodiments, and will not be described again here.

[0029] In one possible implementation, the combined separation device further includes a plurality of fourth support columns. These fourth support columns are disposed on and connected to the tray, with one end of each fourth support column being arc-shaped and protruding away from the tray. One of the fourth support columns is configured to support a mask plate. Thus, during the process of the tray supporting the mask plate, the fourth support column and the mask plate are in point contact. Even after the mask plate moves, the contact position between the fourth support column and the mask plate remains unchanged, thereby reducing the risk of mask plate tilting due to changes in the contact position between the fourth support column and the mask plate. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 A structural diagram of the combined separation device provided in the embodiments of this application, including a tray;

[0032] Figure 2A A structural diagram of a combined separation stage provided in an embodiment of this application;

[0033] Figure 2B Another structural diagram of the combined separation stage provided in the embodiments of this application;

[0034] Figure 3 A front view of the combined separation device provided in the embodiments of this application;

[0035] Figure 4A for Figure 2A Cross-sectional view along the cutting line AA;

[0036] Figure 4B for Figure 2B Cross-sectional view along the cutting line BB;

[0037] Figure 5A for Figure 2A Cross-sectional view along the cutting line CC;

[0038] Figure 5B for Figure 2B Cross-sectional view along the cutting line DD;

[0039] Figure 6 A structural diagram showing the first adjusting member having a first surface and a second surface provided in the embodiments of this application;

[0040] Figure 7 A structural diagram showing the first adjusting member having a third surface and a fourth surface provided in the embodiments of this application;

[0041] Figure 8 A structural diagram of the combined separation device provided in this application embodiment, including a tray and a cover plate;

[0042] Figure 9A for Figure 2A Cross-sectional view along the cutting line EE;

[0043] Figure 9B for Figure 2B Cross-sectional view along the cutting line FF;

[0044] Figure 10 A structural diagram showing the first adjusting member having a fifth surface and a sixth surface provided in the embodiments of this application;

[0045] Figure 11 for Figure 3 Enlarged view of G in the middle;

[0046] Figures 12A-12H This is a diagram illustrating the steps of placing the mask plate into the tray and cover plate according to an embodiment of this application.

[0047] Figures 13A-13H A diagram illustrating the steps of separating the mask plate from the tray and cover plate in an embodiment of this application.

[0048] Explanation of reference numerals in the attached figures:

[0049] 100-Combined Separation Equipment;

[0050] 10-Combined Separation Stage;

[0051] 11-Fixing plate;

[0052] 111 - First sub-board; 112 - Second sub-board; 113 - Third sub-board

[0053] 12-First supporting structure;

[0054] 121 - First support component;

[0055] 1211 - First support plate; 1212 - First support column;

[0056] 122 - First adjusting element;

[0057] 1221 - First surface; 1222 - Second surface;

[0058] 13-Second support structure;

[0059] 131 - Second support component;

[0060] 1311 - Second support plate; 1312 - Second support column;

[0061] 132 - Second adjusting element;

[0062] 1321 - Third surface; 1322 - Fourth surface;

[0063] 14-First fixed structure;

[0064] 141 - First fastener;

[0065] 15-Second fixed structure;

[0066] 151 - Second fastener;

[0067] 16-Third supporting structure;

[0068] 161 - Third support component;

[0069] 1611 - Third support plate; 1612 - Third support column;

[0070] 162 - Third adjusting component;

[0071] 1621 - Fifth surface; 1622 - Sixth surface;

[0072] 17-Third fixed structure;

[0073] 171 - Third fastener;

[0074] 101 - First threaded hole; 102 - Second threaded hole; 103 - Third threaded hole; 104 - Fourth threaded hole; 105 - Fifth threaded hole; 106 - Sixth threaded hole;

[0075] 203 - Third through hole; 204 - Fourth through hole;

[0076] 20-pallets;

[0077] 21-First receiving groove; 22-Seventh through hole; 23-Eighth through hole;

[0078] 30 - Cover plate;

[0079] 31 - First opening;

[0080] 40 - Fourth Support Column;

[0081] 1000 - Mask plate. Detailed Implementation

[0082] The technical solutions in some embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments provided in this disclosure are within the scope of protection of this disclosure.

[0083] Unless the context otherwise requires, throughout the specification and claims, the term "comprising" is interpreted as open-ended and encompassing, meaning "including, but not limited to." In the description of the specification, terms such as "one embodiment," "some embodiments," "exemplary embodiment," "example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this disclosure. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics mentioned may be included in any suitable manner in any one or more embodiments or examples.

[0084] Hereinafter, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this disclosure, unless otherwise stated, "a plurality of" means two or more.

[0085] "At least one of A, B and C" has the same meaning as "at least one of A, B or C", both including the following combinations of A, B and C: only A, only B, only C, combinations of A and B, combinations of A and C, combinations of B and C, and combinations of A, B and C.

[0086] "A and / or B" includes the following three combinations: A only, B only, and a combination of A and B.

[0087] As used herein, “parallel,” “perpendicular,” and “equal” include the described situation and situations that are similar to the described situation, within an acceptable range of deviation, which is determined by those skilled in the art taking into account the measurement under discussion and the error associated with the measurement of a particular quantity (i.e., the limitations of the measurement system). For example, “parallel” includes absolute parallelism and approximate parallelism, where an acceptable range of deviation for approximate parallelism may be, for example, within 5°; “perpendicular” includes absolute perpendicularity and approximate perpendicularity, where an acceptable range of deviation for approximate perpendicularity may also be, for example, within 5°; “equal” includes absolute equality and approximate equality, where an acceptable range of deviation for approximate equality may be, for example, a difference between the two equals being less than or equal to 5% of either one.

[0088] The use of “applies to” or “configured to” in this article implies an open and inclusive language that does not preclude applicability to or configuration to devices that perform additional tasks or steps.

[0089] It should be noted that the directional terms such as "upper" and "lower" described in the embodiments of this application are used to describe the angles shown in the accompanying drawings and should not be construed as limiting the embodiments of this application.

[0090] Semiconductor manufacturing processes include wafer fabrication, oxidation, photolithography, etching, thin film deposition, and packaging and testing. In the photolithography step, patterns on a photomask are transferred to the wafer through exposure to form integrated circuits.

[0091] Coating the photomask can improve its quality. For example, it can increase the mask's hardness to reduce surface damage caused by friction or chemical reagents during handling and cleaning; improve the mask's corrosion resistance to reduce replacement frequency and increase production efficiency; and increase the mask's reflectivity to improve exposure energy utilization.

[0092] Depositing on a photomask can improve its quality. The process of placing the photomask in the process chamber for deposition is as follows: First, the photomask is placed on a tray (the tray is circular, and its diameter is equal to the wafer diameter, so that the same robot can be used for both tray and wafer handling, improving the robot's versatility and reducing equipment costs). Then, the tray and photomask are placed in the process chamber for deposition. Before deposition, the upper surface of the photomask must be kept clean. During photomask handling, the robot can only grip the photomask from its lower surface or side. To facilitate robot detachment, a gap exists between the photomask and the tray (the robot moves through this gap and detaches from the photomask). A combined separation stage supports the tray and photomask, positioning the photomask on top of the tray with a gap between them. The robot first lifts the tray from the assembly and separation table, then continues to move upwards. Next, the tray lifts the mask from the assembly and separation table, and the robot puts the tray and the mask together into the process cavity.

[0093] like Figure 1 As shown, some embodiments of this disclosure provide a combined separation apparatus 100, which includes a combined separation table 10 and a tray 20. The combined separation table 10 can be used to support the tray 20 and a mask 1000, with the mask 1000 located on top of the tray 20. A robotic arm lifts the tray 20 supported by the combined separation table 10, and the tray 20 lifts the mask 1000. Then, the robotic arm places the tray 20 and the mask 1000 together into a process chamber for coating of the mask 1000.

[0094] In some examples, such as Figure 1As shown, the tray 20 has a first receiving groove 21, and the mask 1000 is located within the first receiving groove 21 during the process of the tray 20 lifting the mask 1000. In this way, the sidewall of the first receiving groove 21 can restrict the movement of the mask 1000, thereby reducing the risk of the mask 1000 falling off the tray 20.

[0095] like Figure 2A and Figure 2B As shown, the combined separation platform 10 includes a fixed plate 11, multiple first support structures 12 and multiple second support structures 13.

[0096] Multiple first support structures 12 are spaced apart circumferentially along the fixed plate 11. Each first support structure 12 includes a first support member 121 located on one side of the fixed plate 11 along a first direction M1, which intersects the fixed plate 11, for example, the first direction M1 is perpendicular to the fixed plate 11. The multiple first support members 121 are configured to support the tray 20.

[0097] In some examples, the combined separation stage 10 includes three first support structures 12, which are evenly arranged along the circumference of the fixed plate 11.

[0098] like Figure 2A and Figure 2B As shown, a plurality of second support structures 13 are arranged at circumferential intervals along the fixing plate 11. Each second support structure 13 includes a second support member 131 located on the side of the fixing plate 11 closest to the first support member 121. The plurality of second support members 131 are configured to support a mask plate 1000. The mask plate 1000 is located on the side of the tray 20 away from the fixing plate 11 and has a gap between it and the tray 20.

[0099] In related technologies, the coating thickness uniformity of photomasks is poor. The inventors discovered that both the first and second supports are fixedly connected to a fixed plate. Due to processing tolerances, the angle between the tray supported by the first support and the fixed plate is not equal to the angle between the photomask supported by the second support and the fixed plate. In other words, the angle between the tray supported by the first support and the horizontal plane is not equal to the angle between the photomask supported by the second support and the horizontal plane. Therefore, regardless of how the angle between the fixed plate and the horizontal plane is adjusted, at least one of the angles between the tray supported by the first support and the fixed plate, and the angle between the photomask supported by the second support and the fixed plate, will not be zero. This results in the photomask tilting during the process of the robotic arm lifting the tray, as the angle between the photomask and the horizontal plane is not zero. The photomask is then tilted and placed into the process cavity, leading to uneven coating thickness on the photomask, resulting in poor coating thickness uniformity.

[0100] To solve the above technical problems, such asFigure 2A and Figure 2B As shown, some embodiments of this disclosure provide a combined separation stage 10, in which a first support member 121 and a second support member 131 are arranged at intervals, that is, the first support member 121 and the second support member 131 are independent of each other.

[0101] Furthermore, the first support structure 12 also includes a first adjusting member 122, which is configured to adjust the included angle between the first support member 121 and the fixed plate 11. Thus, the first adjusting member 122 can adjust the included angle between the first support member 121 and the fixed plate 11, that is, the first adjusting member 122 can adjust the included angle between the tray 20 supported by the first support member 121 and the horizontal plane. The second support member 131 also includes a second adjusting member 132, which is configured to adjust the included angle between the second support member 131 and the fixed plate 11. Thus, the second adjusting member 132 can adjust the included angle between the second support member 131 and the fixed plate 11, that is, the second adjusting member 132 can adjust the included angle between the mask plate 1000 supported by the second support member 131 and the horizontal plane.

[0102] In this configuration, the process of adjusting the angle between the tray 20 supported by the first support member 121 and the horizontal plane is independent of the process of adjusting the angle between the mask plate 1000 supported by the second support member 131 and the horizontal plane. In other words, the process of adjusting the angle between the tray 20 supported by the first support member 121 and the horizontal plane is independent of the process of adjusting the angle between the mask plate 1000 supported by the second support member 131 and the horizontal plane, meaning that the process of adjusting the angle between the tray 20 supported by the first support member 121 and the horizontal plane does not affect each other. The angle between the tray 20 supported by the first support member 121 and the horizontal plane, and the angle between the mask plate 1000 supported by the second support member 131 and the horizontal plane, can both be 0. The tray 20 and the mask plate 1000 can both be parallel to the horizontal plane. This reduces the risk of the mask plate 1000 tilting when the robot lifts the tray 20. Then, the mask plate 1000 is placed parallel into the process cavity, which can make the coating thickness of the mask plate 1000 uniform and improve the uniformity of the coating thickness on the mask plate 1000.

[0103] In some embodiments, such as Figure 2A , Figure 2B and Figure 3 As shown, the first support member 121 includes a first support plate 1211 and a first support column 1212. The first support column 1212 is fixedly connected to the first support plate 1211, and multiple first support columns 1212 are configured to support the tray 20.

[0104] In some examples, the first support column 1212 is integrally formed with the first support plate 1211.

[0105] In other examples, the first support column 1212 and the first support plate 1211 are fixedly connected by welding.

[0106] In some other examples, the first support column 1212 and the first support plate 1211 are fixedly connected by adhesive bonding.

[0107] In some other examples, the first support column 1212 and the first support plate 1211 are detachably connected. For example, the first support column 1212 and the first support plate 1211 are fixedly connected by bolts. Another example is that the first support column 1212 and the first support plate 1211 are fixedly connected by threads. Yet another example is that the first support column 1212 and the first support plate 1211 are fixedly connected by pins. Still another example is that the first support column 1212 and the first support plate 1211 are fixedly connected by an interference fit.

[0108] In some examples, such as Figure 3 As shown, the first support column 1212 is located on the side of the first support plate 1211 that is close to the fixed plate 11;

[0109] In other examples, the first support column 1212 is located around the periphery of the first support plate 1211.

[0110] In some examples, such as Figure 2A and Figure 2B As shown, multiple first support plates 1211 are integrally formed. This improves the processing efficiency of the first support plates 1211 and shortens the production cycle of the combined separation table 10.

[0111] In addition, the first support plate 1211 is arranged around a plurality of second support structures 13. In this way, the first support 121 can support the edge of the tray 20, thereby reducing the risk of deformation (bending or twisting) of the edge of the tray 20 and improving the flatness of the tray 20.

[0112] For example, the first support plate 1211 can be a circular ring, an elliptical ring, a regular polygonal ring, a rectangular ring, or an irregular ring.

[0113] In some examples, the height of the first support column 1212 is 5mm to 20mm.

[0114] For example, the height of the first support column 1212 is 5mm, 6mm, 7mm, 9mm, 10mm, 12mm, 15mm, 16mm, 18mm or 20mm.

[0115] In some examples, the axial cross-section of the first support column 1212 is circular, and the diameter of the first support column 1212 is 4mm to 8mm.

[0116] For example, the diameter of the first support column 1212 is 4mm, 4.2m, 4.8mm, 5m, 5.5mm, 6mm, 6.4m, 7mm, 7.5mm or 8mm.

[0117] In some examples, the combined separation platform 10 includes three first support columns 1212, and the line connecting the centers of the three first support columns 1212 is in the shape of an acute triangle, an obtuse triangle, or a right triangle.

[0118] In some embodiments, such as Figure 2A , Figure 2B and Figure 3 As shown, the second support member 131 includes a second support plate 1311 and a second support column 1312. The second support column 1312 is fixedly connected to the second support plate 1311, and multiple second support columns 1312 are configured to support the mask plate 1000.

[0119] In some examples, the second support column 1312 is integrally formed with the second support plate 1311.

[0120] In other examples, the second support column 1312 and the second support plate 1311 are fixedly connected by welding.

[0121] In some other examples, the second support column 1312 and the second support plate 1311 are fixedly connected by adhesive bonding.

[0122] In some other examples, the second support column 1312 and the second support plate 1311 are detachably connected. For example, the second support column 1312 and the second support plate 1311 are fixedly connected by bolts. Another example is that the second support column 1312 and the second support plate 1311 are fixedly connected by threads. Yet another example is that the second support column 1312 and the second support plate 1311 are fixedly connected by pins. Still another example is that the second support column 1312 and the second support plate 1311 are fixedly connected by an interference fit.

[0123] In some examples, such as Figure 3 As shown, the second support column 1312 is located on the side of the second support plate 1311 near the fixed plate 11.

[0124] In other examples, the second support column 1312 is located around the second support plate 1311.

[0125] In some examples, such as Figure 3 As shown, the tray 20 has a seventh through hole 22, and the second support column 1312 passes through the seventh through hole 22 and contacts the mask plate 1000.

[0126] In some examples, such as Figure 2A and Figure 2BAs shown, multiple second support plates 1311 are integrally formed. This improves the processing efficiency of the second support plates 1311 and shortens the production cycle of the combined separation table 10.

[0127] For example, the shape of the second support plate 1311 can be circular, elliptical, regular polygonal, triangular, rectangular, or irregular.

[0128] In this article, "circular or elliptical" refers to a shape that is generally circular or elliptical, but is not limited to a standard circle or ellipse. That is, "circular or elliptical" here includes not only basic circular or elliptical shapes, but also shapes that resemble circles or ellipses.

[0129] In this article, "triangle" refers to a shape that is triangular in overall form, but is not limited to a standard triangle. That is, "triangle" here includes not only the shape of a basic triangle, but also shapes that resemble triangles. For example, the intersection of two adjacent sides of a triangle (i.e., the corner) is curved, meaning the corner is smooth and the shape is a rounded triangle.

[0130] In some examples, the height of the second support column 1312 is 20mm to 50mm.

[0131] For example, the height of the second support column 1312 is 20mm, 21mm, 24mm, 25mm, 28mm, 30mm, 32mm, 37mm, 40mm, 45mm or 50mm.

[0132] In some examples, the axial cross-section of the second support column 1312 is circular, and the diameter of the second support column 1312 is 4mm to 8mm.

[0133] For example, the diameter of the second support column 1312 is 4mm, 4.2m, 4.8mm, 5m, 5.5mm, 6mm, 6.4m, 7mm, 7.5mm or 8mm.

[0134] For example, the diameter of the second support column 1312 is the same as the diameter of the first support column 1212.

[0135] In some examples, the combined separation platform 10 includes three second support columns 1312, and the line connecting the centers of the three second support columns 1312 is in the shape of an acute triangle, an obtuse triangle, or a right triangle.

[0136] For example, the line connecting the centers of the three second support columns 1312 forms an equilateral triangle.

[0137] In some embodiments, such as Figure 2A and Figure 2BAs shown, the fixing plate 11 includes a first sub-plate 111, a second sub-plate 112, and a third sub-plate 113. The second sub-plate 112 is disposed around the first sub-plate 111 and has a gap with the first sub-plate 112. A plurality of third sub-plates 113 are located between the first sub-plate 111 and the second sub-plate 112 and are spaced apart circumferentially along the first sub-plate 111. The first sub-plate 111 and the second sub-plate 112 are connected by the third sub-plates 113.

[0138] With this configuration, during the process of the robotic arm placing the tray 20 onto the combined separation table 10, the positioning element on the robotic arm can be aligned with the positioning element on the combined separation table 10 through the gap between the first sub-plate 111 and the second sub-plate 112, so that the tray 20 can be placed in a preset position on the combined separation table 10, thereby reducing the risk that the mask plate 1000 is at least partially located outside the first receiving groove 21.

[0139] It should be noted that when the actual position of the pallet 20 is the same as the preset position, the mask plate 1000 is exactly located in the first receiving groove 21 during the process of the robot lifting the pallet 20.

[0140] In some examples, the first sub-plate 111 is circular, the second sub-plate 112 is annular, and the third sub-plate 113 is an isosceles trapezoid.

[0141] In some embodiments, such as Figure 2A and Figure 2B As shown, the orthographic projection of the second support column 1312 onto the third sub-plate 113 is located within the third sub-plate 113. In this way, the second support column 1312 can support the edge of the mask plate 1000, thereby reducing the risk of deformation of the edge of the mask plate 1000 and improving the flatness of the mask plate 1000.

[0142] In addition, multiple second support plates 1311 are integrally formed, and the shape of the second support plate 1311 is polygonal, with a second support column 1312 located at one corner of the polygon. In this way, the portion of the second support plate 1311 that can cover the gap between the first sub-plate 111 and the second sub-plate 112 is smaller, which facilitates the alignment of the positioning components on the robot arm and the positioning components on the combined separation table 10.

[0143] In some embodiments, such as Figure 4A and Figure 4B As shown, the end of the first support column 1212 away from the fixed plate 11 is curved and protrudes away from the first support plate 1211. In this way, the first support column 1212 and the tray 20 are in point contact. After the tray 20 moves horizontally, the contact position between the first support column 1212 and the tray 20 remains unchanged, thereby reducing the risk of the tray 20 tilting due to changes in the contact position between the first support column 1212 and the tray 20.

[0144] In some embodiments, such as Figure 5A and Figure 5B As shown, the end of the second support column 1312 away from the fixed plate 11 is an arc surface and protrudes in a direction away from the second support plate 1311. In this way, the second support column 1312 and the mask plate 1000 make point contact. After the mask plate 1000 moves horizontally, the contact position between the second support column 1312 and the mask plate 1000 remains unchanged, thereby reducing the risk of the mask plate 1000 tilting due to changes in the contact position between the second support column 1312 and the mask plate 1000.

[0145] In some embodiments, such as Figure 4A and Figure 4B As shown, the first adjusting member 122 can move relative to the fixed plate 11 along the first direction M1 and drive the first supporting member 121 to move relative to the fixed plate 11, so as to adjust the included angle between the first supporting member 121 and the fixed plate 11.

[0146] In some examples, one of the first support member 121 and the fixed plate 11 has a first threaded hole 101, and a first adjusting member 122 passes through and is threadedly connected to the first threaded hole 101, and abuts against the other of the first support member 121 and the fixed plate 11. In this way, rotating the first adjusting member 122 can move the first adjusting member 122 relative to the fixed plate 11 to adjust the included angle between the first support member 121 and the fixed plate 11.

[0147] For example, such as Figure 4A and Figure 4B As shown, the first support plate 1211 has a first threaded hole 101, the first adjusting member 122 passes through the first threaded hole 101 and is threadedly connected to the first threaded hole 101, and abuts against the fixed plate 11.

[0148] For example, the first adjusting member 122 is a screw or bolt.

[0149] In other examples, the combined separation platform 10 further includes a first drive structure connected to a first adjustment member 122. The first drive structure is fixedly connected to one of a first support member 121 and a fixed plate 11, and the first adjustment member 122 abuts against the other of the first support member 121 and the fixed plate 11. Thus, the first drive structure drives the first adjustment member 122 to move along a first direction M1, thereby driving the first support member 121 to move relative to the fixed plate 11 to adjust the included angle between the first support member 121 and the fixed plate 11.

[0150] For example, the first drive structure includes a hydraulic cylinder, a pneumatic cylinder, or a linear motor.

[0151] In other embodiments, such as Figure 6As shown, the first adjusting member 122 can move relative to the fixed plate 11 along the second direction M2, and drive the first supporting member 121 to move relative to the fixed plate 11, so as to adjust the included angle between the first supporting member 121 and the fixed plate 11. The second direction M2 is parallel to the fixed plate 11.

[0152] For example, the first adjusting member 122 has a first surface 1221 and a second surface 1222, and the angle between the first surface 1221 and the second surface 1222 is less than 90° and greater than 0°. The first surface 1221 is connected to one of the first support member 121 and the fixing plate 11, and the second surface 1222 abuts against the other of the first support member 121 and the fixing plate 11.

[0153] In some embodiments, such as Figure 5A and Figure 5B As shown, the second adjusting member 132 can move relative to the fixed plate 11 along the first direction M1 and drive the second supporting member 131 to move relative to the fixed plate 11, so as to adjust the included angle between the second supporting member 131 and the fixed plate 11.

[0154] In some examples, one of the second support member 131 and the fixed plate 11 has a second threaded hole 102, and the second adjusting member 132 passes through and is threaded into the second threaded hole 102, and abuts against the other of the second support member 131 and the fixed plate 11. In this way, rotating the second adjusting member 132 can move the second adjusting member 132 relative to the fixed plate 11 to adjust the included angle between the second support member 131 and the fixed plate 11.

[0155] For example, the second support plate 1311 has a second threaded hole 102, the second adjusting member 132 passes through the second threaded hole 102 and is threadedly connected to the second threaded hole 102, and abuts against the fixing plate 11.

[0156] For example, the second adjusting member 132 is a screw or bolt.

[0157] In other examples, the combined separation platform 10 further includes a second drive structure connected to a second adjustment member 132. The second drive structure is fixedly connected to one of the second support member 131 and the fixed plate 11, and the second adjustment member 132 abuts against the other of the second support member 131 and the fixed plate 11. Thus, the second drive structure drives the second adjustment member 132 to move along a first direction M1, thereby driving the second support member 131 to move relative to the fixed plate 11 to adjust the included angle between the second support member 131 and the fixed plate 11.

[0158] For example, the second drive structure includes a hydraulic cylinder, a pneumatic cylinder, or a linear motor.

[0159] In other embodiments, such asFigure 7 As shown, the second adjusting member 132 can move relative to the fixed plate 11 along the second direction M2, and drive the second supporting member 131 to move relative to the fixed plate 11, so as to adjust the included angle between the second supporting member 131 and the fixed plate 11.

[0160] For example, the second adjusting member 132 has a third surface 1321 and a fourth surface 1322, and the angle between the third surface 1321 and the fourth surface 1322 is less than 90° and greater than 0°. The third surface 1321 is connected to one of the first support member 121 and the fixing plate 11, and the fourth surface 1322 abuts against the other of the first support member 121 and the fixing plate 11.

[0161] In some embodiments, such as Figure 4A and Figure 4B As shown, the combined separation platform 10 also includes a first fixing structure 14. The first fixing structure 14 is detachably connected to the fixing plate 11 and the first support member 121. That is, the first fixing structure 14 has a first state and a second state. In the first state, the first fixing structure 14 is not in operation. At this time, the first support member 121 can move relative to the fixing plate 11, and the first adjusting member 122 can adjust the included angle between the first support member 121 and the fixing plate 11, that is, the first adjusting member 122 can adjust the included angle between the tray 20 supported by the first support member 121 and the horizontal plane. In the second state, the first fixing structure 14 is in operation. At this time, the first fixing structure 14 fixes the fixing plate 11 and the first support member 121, and the first adjusting member 122 cannot adjust the included angle between the tray 20 supported by the first support member 121 and the horizontal plane.

[0162] With this configuration, after the first adjusting member 122 adjusts the included angle between the first support member 121 and the fixed plate 11, the first fixing structure 14 fixes the fixed plate 11 and the first support member 121. This reduces the risk of the pallet 20 colliding with the first support member 121, causing the included angle between the first support member 121 and the fixed plate 11 to change, and helps to keep the pallet 20 parallel to the horizontal plane.

[0163] In some examples, such as Figure 4A As shown, one of the first support member 121 and the fixing plate 11 has a third threaded hole 103, and the other of the first support member 121 and the fixing plate 11 has a third through hole 203. The first fixing structure 14 includes a first fastener 141, which passes through the third through hole 203 and is threadedly connected to the third threaded hole 103 to fix the fixing plate 11 and the first support member 121.

[0164] For example, the fixing plate 11 has a third threaded hole 103, the first support plate 1211 has a third through hole 203, and the first fastener 141 passes through the third through hole 203 and is threadedly connected to the third threaded hole 103 to fix the fixing plate 11 and the first support 121. In this case, the first fastener 141 is a bolt.

[0165] In other examples, such as Figure 4B As shown, one of the first adjusting member 122 and the fixing plate 11 has a third threaded hole 103, and the other of the first adjusting member 122 and the fixing plate 11 has a third through hole 203. The first fixing structure 14 includes a first fastener 141. The first fastener 141 passes through the third through hole 203 and is threadedly connected to the third threaded hole 103 to fix the fixing plate 11 and the first support member 121.

[0166] For example, the fixing plate 11 has a third threaded hole 103, the first adjusting member 122 has a third through hole 203, and the first fastener 141 passes through the third through hole 203 and is threadedly connected to the third threaded hole 103 to fix the fixing plate 11 and the first supporting member 121. In this case, the first fastener 141 is a bolt.

[0167] In other examples, the first fixing structure 14 includes a first snap-fit.

[0168] In some embodiments, such as Figure 5A and Figure 5B As shown, the combined separation platform 10 also includes a second fixing structure 15. The second fixing structure 15 is detachably connected to the fixing plate 11 and the second support member 131. That is, the second fixing structure 15 has a third state and a fourth state. In the third state, the second fixing structure 15 is not in operation. At this time, the second support member 131 can move relative to the fixing plate 11, and the second adjusting member 132 can adjust the included angle between the second support member 131 and the fixing plate 11, that is, the second adjusting member 132 can adjust the included angle between the tray 20 supported by the second support member 131 and the horizontal plane. In the fourth state, the second fixing structure 15 is in operation. At this time, the second fixing structure 15 fixes the fixing plate 11 and the second support member 131, and the second adjusting member 132 cannot adjust the included angle between the second support member 131 and the fixing plate 11.

[0169] With this configuration, after the second adjusting member 132 adjusts the included angle between the second support member 131 and the fixed plate 11, the second fixing structure 15 fixes the fixed plate 11 and the second support member 131. This reduces the risk of the mask plate 1000 colliding with the second support member 131, which could cause the included angle between the second support member 131 and the fixed plate 11 to change. This is beneficial for keeping the mask plate 1000 parallel to the horizontal plane.

[0170] In some examples, such as Figure 5AAs shown, one of the second support member 131 and the fixing plate 11 has a fourth threaded hole 104, and the other of the second support member 131 and the fixing plate 11 has a fourth through hole 204. The second fixing structure 15 includes a second fastener 151, which passes through the fourth through hole 204 and is threadedly connected to the fourth threaded hole 104 to fix the fixing plate 11 and the second support member 131.

[0171] For example, the fixing plate 11 has a fourth threaded hole 104, the second support plate 1311 has a fourth through hole 204, and the second fastener 151 passes through the fourth through hole 204 and is threadedly connected to the fourth threaded hole 104 to fix the fixing plate 11 and the second support 131. In this case, the first fastener 141 is a bolt.

[0172] In other examples, such as Figure 5B As shown, one of the second adjusting member 132 and the fixing plate 11 has a fourth threaded hole 104, and the other of the second adjusting member 132 and the fixing plate 11 has a fourth through hole 204. The second fixing structure 15 includes a second fastener 151. The second fastener 151 passes through the fourth through hole 204 and is threadedly connected to the fourth threaded hole 104 to fix the fixing plate 11 and the second support member 131.

[0173] For example, the fixing plate 11 has a fourth threaded hole 104, the second adjusting member 132 has a fourth through hole 204, and the second fastener 151 passes through the fourth through hole 204 and is threadedly connected to the fourth threaded hole 104 to fix the fixing plate 11 and the second supporting member 131. In this case, the first fastener 141 is a bolt.

[0174] In other examples, the second fixing structure 15 includes a second snap-fit.

[0175] In some embodiments, such as Figure 3 As shown, the combined separation device 100 also includes a cover plate 30 having a first opening 31 that exposes the mask plate 1000 and covers the edge of the mask plate 1000.

[0176] With this configuration, during the coating process on the mask 1000, the cover plate 30 can shield the sidewalls of the mask 1000, reducing the risk of coating material adhering to the sidewalls of the mask 1000. This reduces the risk of the mask 1000 contaminating the wafer during the photolithography step.

[0177] Based on this, such as Figure 2A , Figure 2B , Figure 3 and Figure 8As shown, the combined separation stage 10 also includes a plurality of third support structures 16. The plurality of third support structures 16 are spaced apart circumferentially along the fixed plate 11. Each third support structure 16 includes a third support member 161. The third support member 161 is located on the side of the fixed plate 11 closest to the first support plate 1211, and is spaced apart from the first support member 121 and the second support member 131. The plurality of third support members 161 are configured to support a cover plate 30, which is located on the side of the mask plate 1000 away from the tray 20 and has a gap with the mask plate 1000. The third support member 161 is spaced apart from the first support member 121 and the second support member 131, meaning that the third support member 161 is independent of the first support member 121 and the second support member 131.

[0178] Furthermore, the third support structure 16 also includes a third adjusting member 162. The third adjusting member 162 is connected to the fixed plate 11 and / or the third support member 161, and is configured to adjust the angle between the third support member 161 and the fixed plate 11. Thus, the third adjusting member 162 can adjust the angle between the third support member 161 and the fixed plate 11, that is, the third adjusting member 162 can adjust the angle between the cover plate 30 supported by the third support member 161 and the horizontal plane.

[0179] With this configuration, the processes of adjusting the angle between the tray 20 supported by the first support member 121 and the horizontal plane, adjusting the angle between the tray 20 supported by the third support member 161 and the horizontal plane, and adjusting the angle between the mask plate 1000 supported by the second support member 131 and the horizontal plane are independent of each other. The angles between the tray 20 and the horizontal plane, the angles between the mask plate 1000 and the horizontal plane, and the angles between the cover plate 30 and the horizontal plane can all be 0. The tray 20, the mask plate 1000, and the cover plate 30 can all be parallel to the horizontal plane at the same time. This reduces the risk of the mask plate 1000 tilting when the robot lifts the tray 20. Then, the mask plate 1000 is placed parallel to the process cavity, which makes the coating thickness on the mask plate 1000 uniform and helps to improve the uniformity of the coating thickness on the mask plate 1000.

[0180] In some embodiments, such as Figure 2A , Figure 2B and Figure 3 As shown, the third support member 161 includes a third support plate 1611 and a third support column 1612. The third support column 1612 is fixedly connected to the third support plate 1611, and multiple third support columns 1612 are configured to support the tray 20.

[0181] In some examples, the third support column 1612 is integrally formed with the third support plate 1611.

[0182] In other examples, the third support column 1612 and the third support plate 1611 are fixedly connected by welding.

[0183] In some other examples, the third support column 1612 and the third support plate 1611 are fixedly connected by adhesive.

[0184] In some other examples, the third support column 1612 and the third support plate 1611 are detachably connected. For example, the third support column 1612 and the third support plate 1611 are fixedly connected by bolts. Another example is that the third support column 1612 and the third support plate 1611 are fixedly connected by threads. Yet another example is that the third support column 1612 and the third support plate 1611 are fixedly connected by pins. Still another example is that the third support column 1612 and the third support plate 1611 are fixedly connected by an interference fit.

[0185] In some examples, such as Figure 3 As shown, the third support column 1612 is located on the side of the third support plate 1611 closest to the fixed plate 11;

[0186] In other examples, the third support column 1612 is located around the periphery of the third support plate 1611.

[0187] In some examples, such as Figure 3 As shown, the tray 20 has an eighth through hole 23, and the third support column 1612 passes through the eighth through hole 23 and contacts the mask plate 1000.

[0188] In some examples, such as Figure 2A and Figure 2B As shown, multiple third support plates 1611 are integrally formed. This improves the processing efficiency of the third support plates 1611 and shortens the production cycle of the combined separation table 10.

[0189] In some embodiments, a plurality of first support plates 1211 are integrally formed, a plurality of second support plates 1311 are integrally formed, a third support plate 1611 is disposed around the second support plate 1311, and a first support plate 1211 is disposed around the third support plate 1611.

[0190] With this configuration, the eighth through hole 23 on the tray 20 is close to the center of the tray 20, which can make the edge of the tray 20 more rigid, thereby reducing the risk of edge deformation of the tray 20.

[0191] For example, the third support plate 1611 can be a circular ring, an elliptical ring, a regular polygonal ring, a rectangular ring, or an irregular ring.

[0192] In some examples, the height of the third support column 1612 is 40mm to 70mm.

[0193] For example, the height of the third support column 1612 is 40mm, 45mm, 50mm, 52mm, 57mm, 59mm, 60mm, 64mm, 68mm or 70mm.

[0194] In some examples, the axial cross-section of the third support column 1612 is circular, and the diameter of the third support column 1612 is 4mm to 8mm.

[0195] For example, the diameter of the third support column 1612 is 4mm, 4.2m, 4.8mm, 5m, 5.5mm, 6mm, 6.4m, 7mm, 7.5mm or 8mm.

[0196] In some examples, the combined separation platform 10 includes three third support columns 1612, and the line connecting the centers of the three third support columns 1612 is in the shape of an acute triangle, an obtuse triangle, or a right triangle.

[0197] For example, the line connecting the centers of the three third support columns 1612 forms an equilateral triangle.

[0198] In some embodiments, such as Figure 9A and Figure 9B As shown, the end of the third support column 1612 away from the fixed plate 11 is an arc surface and protrudes in a direction away from the third support plate 1611. In this way, the third support column 1612 and the cover plate 30 are in point contact. After the cover plate 30 moves horizontally, the contact position between the third support column 1612 and the cover plate 30 remains unchanged, thereby reducing the risk of the cover plate 30 tilting due to changes in the contact position between the third support column 1612 and the cover plate 30.

[0199] In some embodiments, such as Figure 9A and Figure 9B As shown, the third adjusting member 162 can move relative to the fixed plate 11 along the first direction M1 and drive the third supporting member 161 to move relative to the fixed plate 11, so as to adjust the included angle between the third supporting member 161 and the fixed plate 11.

[0200] In some examples, one of the third support member 161 and the fixed plate 11 has a fifth threaded hole 105, and the third adjusting member 162 passes through and is threaded into the fifth threaded hole 105, and abuts against the other of the third support member 161 and the fixed plate 11. In this way, rotating the third adjusting member 162 can move the third adjusting member 162 relative to the fixed plate 11 to adjust the included angle between the third support member 161 and the fixed plate 11.

[0201] For example, the third support plate 1611 has a fifth threaded hole 105, the third adjusting member 162 passes through the fifth threaded hole 105 and is threadedly connected to the fifth threaded hole 105, and abuts against the fixing plate 11.

[0202] In other examples, the combined separation platform 10 further includes a third drive structure connected to a third adjustment member 162. The third drive structure is fixedly connected to one of the first support member 121 and the fixed plate 11, and the third adjustment member 162 abuts against the other of the third support member 161 and the fixed plate 11. Thus, the third drive structure drives the third adjustment member 162 to move along a first direction M1, thereby driving the third support member 161 to move relative to the fixed plate 11 to adjust the angle between the third support member 161 and the fixed plate 11.

[0203] For example, the third drive structure includes a hydraulic cylinder, a pneumatic cylinder, or a linear motor.

[0204] In other embodiments, such as Figure 10 As shown, the third adjusting member 162 can move relative to the fixed plate 11 along the second direction M2, and drive the third supporting member 161 to move relative to the fixed plate 11, so as to adjust the included angle between the third supporting member 161 and the fixed plate 11.

[0205] For example, the third adjusting member 162 has a fifth surface 1621 and a sixth surface 1622, and the angle between the fifth surface 1621 and the sixth surface 1622 is less than 90° and greater than 0°. The fifth surface 1621 is connected to one of the third support member 161 and the fixing plate 11, and the sixth surface 1622 abuts against the other of the third support member 161 and the fixing plate 11.

[0206] In some embodiments, such as Figure 9A and Figure 9B As shown, the combined separation platform 10 also includes a third fixing structure 17. The third fixing structure 17 is detachably connected to the fixing plate 11 and the third support member 161. The third fixing structure 17 has a fifth state and a sixth state. In the fifth state, the third fixing structure 17 is not in operation. At this time, the third support member 161 and the fixing plate 11 are movably set, and the third adjusting member 162 can adjust the included angle between the third support member 161 and the fixing plate 11, that is, the third adjusting member 162 can adjust the included angle between the tray 20 supported by the third support member 161 and the horizontal plane. In the sixth state, the third fixing structure 17 is in operation. At this time, the third fixing structure 17 fixes the fixing plate 11 and the third support member 161.

[0207] With this configuration, after the third adjusting member 162 adjusts the included angle between the third support member 161 and the fixed plate 11, the third fixing structure 17 fixes the fixed plate 11 and the third support member 161. This reduces the risk of the cover plate 30 colliding with the third support member 161, which could cause the included angle between the third support member 161 and the fixed plate 11 to change. This helps to keep the cover plate 30 parallel to the horizontal plane.

[0208] In some examples, such as Figure 9A As shown, one of the third support member 161 and the fixing plate 11 has a sixth threaded hole 106, and the other of the third support member 161 and the fixing plate 11 has a sixth through hole 206. The third fixing structure 17 includes a third fastener 171, which passes through the sixth through hole 206 and is threadedly connected to the third threaded hole 103 to fix the fixing plate 11 and the third support member 161.

[0209] For example, the fixing plate 11 has a sixth threaded hole 106, the third support plate 1611 has a sixth through hole 206, and the third fastener 171 passes through the sixth through hole 206 and is threadedly connected to the sixth threaded hole 106 to fix the fixing plate 11 and the third support 161.

[0210] In other examples, such as Figure 9B As shown, one of the third adjusting member 162 and the fixing plate 11 has a sixth threaded hole 106, and the other of the third adjusting member 162 and the fixing plate 11 has a sixth through hole 206. The third fixing structure 17 includes a third fastener 171, which passes through the sixth through hole 206 and is threadedly connected to the third threaded hole 103 to fix the fixing plate 11 and the third support member 161.

[0211] For example, the fixing plate 11 has a sixth threaded hole 106, the third adjusting member 162 has a sixth through hole 206, and the third fastener 171 passes through the sixth through hole 206 and is threadedly connected to the third threaded hole 103 to fix the fixing plate 11 and the third supporting member 161.

[0212] In other examples, the third fixing structure 17 includes a third snap-fit.

[0213] In some embodiments, such as Figure 3 and Figure 11 As shown, the combined separation device 100 also includes a plurality of fourth support columns 40, which are disposed on and connected to the tray 20. The end of each fourth support column 40 away from the tray 20 is arc-shaped and protrudes in a direction away from the tray 20. One of the fourth support columns 40 is configured to support the mask plate 1000. Thus, during the process of the tray 20 supporting the mask plate 1000, the fourth support column 40 and the mask plate 1000 are in point contact. After the mask plate 1000 moves, the contact position between the fourth support column 40 and the mask plate 1000 remains unchanged, thereby reducing the risk of the mask plate 1000 tilting due to changes in the contact position between the fourth support column 40 and the mask plate 1000.

[0214] Based on the above structure, the leveling steps of the combined separation stage 10 are as follows:

[0215] First, a tray 20 or a first planar fixture is placed on the plurality of first support members 121. Then, a level is placed on the tray 20 or the planar fixture. It is determined whether the level reading is the required value (e.g., the level reading is 0). If the level reading is the required value, the fixing plate 11 and the first support member 121 are fixed using the first fixing structure 14. If the level reading is not the required value, the included angle between the fixing plate 11 and the first support member 121 is adjusted using the first adjusting member 122 until the level reading is the required value.

[0216] Next, a mask plate 1000 or a second planar fixture is placed on the plurality of second support members 131, and a level is placed on the mask plate 1000 or the second planar fixture. It is determined whether the level reading is the required value (e.g., the level reading is 0). If the level reading is the required value, the fixing plate 11 and the second support member 131 are fixed using the second fixing structure 15. If the level reading is not the required value, the included angle between the fixing plate 11 and the second support member is adjusted using the second adjusting member 132 until the level reading is the required value.

[0217] Finally, a cover plate 30 or a third plane fixture is placed on the multiple third support members 161, and a level is placed on the cover plate 30 or the third plane fixture. The level reading is checked to see if it is the required value (e.g., the level reading is 0). If the level reading is the required value, the fixing plate 11 and the third support member 161 are fixed using the third fixing structure 17. If the level reading is not the required value, the angle between the fixing plate 11 and the third support member is adjusted using the third adjusting member 162 until the level reading is the required value.

[0218] The steps for placing the mask plate 1000 into the tray 20 and cover plate 30 are as follows:

[0219] like Figure 12A As shown, the robotic arm moves the tray 20 and cover plate 30 above the combined separation table 10. Figure 12B As shown, the robotic arm moves downwards until the cover plate 30 contacts the third support member 161. The cover plate 30 is supported by the third support member 161 and cannot move further downwards. The third support member 161 is not in contact with the tray 20, and the tray 20 and the robotic arm can continue to move downwards. The tray 20 and the cover plate 30 begin to separate. Figure 12C As shown, the pallet 20 and the robotic arm continue to move downwards, separating the pallet 20 from the cover plate 30 until the pallet 20 contacts the first support member 121. The pallet 20 is then supported by the first support member 121 and cannot move further downwards. Figure 12DAs shown, the robotic arm moves the mask 1000 between the tray 20 and the cover plate, with the mask 1000 positioned above the second support 131. Figure 12E As shown, the robotic arm and mask 1000 move downwards until the mask 1000 contacts the second support 131. The mask 1000 is then supported by the second support 131 and cannot move further downwards. Figure 12F As shown, the robotic arm moves to below the cover plate 30, then moves upwards, lifting the tray 20 upwards. Figure 12G As shown, the robotic arm and tray 20 continue to move upwards, with tray 20 lifting the mask plate 1000. Figure 12H As shown, the robotic arm, tray 20, and mask plate 1000 continue to move upward, with tray 20 lifting the cover plate 30.

[0220] The steps for separating the mask plate 1000 from the tray 20 and the cover plate 30 are as follows:

[0221] like Figure 13A As shown, the robotic arm moves the tray 20, mask plate 1000, and cover plate 30 above the combined separation stage 10. Figure 13B As shown, the robot arm, tray 20, mask 1000, and cover plate 30 move downwards until cover plate 30 contacts the third support member 161. Cover plate 30 is supported by the third support member 161 and cannot move further downwards. The third support member 161 is no longer in contact with mask 1000 and tray 20, so mask 1000, tray 20, and robot arm can continue to move downwards. Tray 20 begins to separate from mask 1000 and cover plate 30. Figure 13C As shown, the mask 1000, tray 20, and robot continue to move downwards. The tray 20 separates from the mask 1000 and cover plate 30 until the mask 1000 contacts the second support 131. The mask 1000 is supported by the second support 131 and cannot move further downwards. The tray 20 is in contact with the second support 131, and the tray 20 and robot can continue to move downwards. The mask 1000 and tray 20 begin to separate. Figure 13D As shown, the pallet 20 and the robotic arm continue to move downwards, separating the pallet 20 from the mask plate 1000 until the pallet 20 contacts the first support member 121. The pallet 20 is then supported by the first support member 121 and cannot move further downwards. Figure 13E As shown, the robotic arm moves between the mask plate 1000 and the tray 20. Figure 13F As shown, the robotic arm moves upward, lifts the mask 1000, and then removes the mask 1000. Figure 13G As shown, the robotic arm moves to below the cover plate 30, then moves upwards, lifting the tray 20 upwards. Figure 13H As shown, the robotic arm and tray 20 continue to move upward, and tray 20 lifts the cover plate 30.

[0222] The foregoing preferred embodiments have further illustrated the objectives, technical solutions, and advantages of the present invention. It should be understood that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A combined separation station, characterized in that Comprising: a fixed plate; a plurality of first support structures, spaced along the circumference of the fixed plate; the first support structure comprising: a first support member, located on one side of the fixed plate along a first direction; the first direction intersects the fixed plate; a plurality of the first support members are configured to support a tray; a first adjusting member, connected to the fixed plate and / or the first support member; the first adjusting member is configured to adjust the included angle between the first support member and the fixed plate; a plurality of second support structures, spaced along the circumference of the fixed plate; the second support structure comprising: a second support member, located on one side of the fixed plate close to the first support member; a plurality of the second support members are configured to support a mask plate; the mask plate is located on the side of the tray away from the fixed plate, and has a gap with the tray; the second support member and the first support member are spaced apart; a second adjusting member, connected to the fixed plate and / or the second support member; the second adjusting member is configured to adjust the included angle between the second support member and the fixed plate.

2. The combination separation table according to claim 1, wherein: the first support member comprises: a first support plate; a plurality of first support columns, fixedly connected to the first support plate; the plurality of first support columns are configured to support the tray; and / or, the second support member comprises: a second support plate; a plurality of second support columns, fixedly connected to the second support plate; the plurality of second support columns are configured to support the mask plate.

3. The combined isolation table of claim 2, wherein, the fixed plate comprises: a first sub-plate; a second sub-plate, disposed around the first sub-plate, and having a gap with the second sub-plate; a plurality of third sub-plates, located between the first sub-plate and the second sub-plate, and spaced along the circumference of the first sub-plate; the first sub-plate and the second sub-plate are connected through the third sub-plates.

4. The combined isolation table of claim 3, wherein, the second support column has a normal projection on the third sub-plate located within the third sub-plate; a plurality of the second support plates are integrally formed; the second support plate has a polygonal shape, and one second support column is located on one corner of the polygonal shape.

5. The combined isolation station according to any one of claims 1 to 4, characterized in that the first adjusting member can move relative to the fixed plate along the first direction, and drive the first support member to move relative to the fixed plate, so as to adjust the included angle between the first support member and the fixed plate; and / or, the second adjusting member moves relative to the fixed plate along the first direction, and drives the second support member to move relative to the fixed plate, so as to adjust the included angle between the second support member and the fixed plate.

6. The combined isolation table of claim 5, wherein, one of the first support member and the fixed plate has a first threaded hole, the first adjusting member is threadedly connected with the first threaded hole through the first threaded hole, and abuts against the other of the first support member and the fixed plate; and / or, one of the second support member and the fixed plate has a second threaded hole, the second adjusting member is threadedly connected with the second threaded hole through the second threaded hole, and abuts against the other of the second support member and the fixed plate.

7. The combined isolation station according to any one of claims 1 to 6, characterized in that Further comprising: a first fixing structure, detachably connected to the fixed plate and the first support member; and / or, A second fixing structure is detachably connected with the fixing plate and the second support.

8. The combined isolation table of claim 7, wherein, One of the first support and the fixing plate has a third threaded hole, and the other of the first support and the fixing plate has a third through hole; the first fixing structure comprises: a first fastener is threadedly connected with the third threaded hole through the third through hole to fix the fixing plate and the first support; and / or, One of the second support and the fixing plate has a fourth threaded hole, and the other of the second support and the fixing plate has a fourth through hole; the second fixing structure comprises: a second fastener is threadedly connected with the fourth threaded hole through the fourth through hole to fix the fixing plate and the second support.

9. The combined isolation station according to any one of claims 1 to 8, characterized in that, Further comprising: a plurality of third support structures are spaced along the circumference of the fixing plate; The third support structure comprises: a third support is located on one side of the fixing plate close to the first support; the third support is spaced from the first support and the second support; a plurality of third supports are configured to support a cover plate; the cover plate is located on a side of the mask plate away from the tray and has a gap with the mask plate; the cover plate has a first opening, the first opening exposes the mask plate, and the cover plate covers the edge of the mask plate; a third adjusting member is connected with the fixing plate and / or the third support; the third adjusting member is configured to adjust the included angle between the third support and the fixing plate.

10. A combined separation apparatus, characterized by Comprise: The combination separation table according to any one of claims 1-9; a tray configured to support a mask plate.

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