Substrate bearing structure with hidden joint seam

Abstract

The utility model relates to a substrate bearing structure with a hidden joint seam, which is accommodated in a container and comprises a pair of side bearing frames, the side bearing frames are respectively arranged on the left side and the right side of the container, each side bearing frame comprises a plurality of shelves which are stacked up and down, each shelf is provided with a bottom plate, and the bottom plates are arranged on the side bearing frames. The top face of each bottom plate extends to form a side plate, the bottom face of each bottom plate is provided with an abutting portion, the side plate of one layer of stacked frame abuts against the abutting portion of the other layer of stacked frame, a joint seam is formed at the joint of each side plate and the corresponding abutting portion, and each joint seam is adjacent to the corresponding bottom plate. Therefore, the substrate bearing structure has the characteristics of hiding the joint seam and preventing the substrate from falling into the joint seam.

Description

TECHNICAL FIELD

[0001] The present application relates to a substrate carrier, and particularly to a substrate carrier structure with hidden joint seams. BACKGROUND

[0002] Substrates such as wafers, glass, PCBs, etc. are important substrates in semiconductor processes, so containers with substrate carriers are often used as the main tool for transporting substrates. The substrate carrier is used to position the position of multiple substrates to avoid displacement and collision of multiple substrates. The container is used to protect multiple substrates from being contaminated or damaged during transportation.

[0003] In addition, the substrate carrier is composed of multiple shelves stacked with each other, so that the total height of the substrate carrier can be adjusted by increasing or decreasing the number of shelves, thereby allowing the substrate carrier to be matched with containers of various heights, thereby improving the convenience of the substrate carrier.

[0004] However, the side plates of the conventional shelves extend from the top and bottom surfaces of the bottom plate. Therefore, when multiple shelves are stacked on top of each other, the joint seams of the multiple side plates will be formed between each adjacent two bottom plates. In addition, the adjacent two joint seams at each joint seam will have a significant height difference due to different tolerances. When the substrates are placed in or taken out of the shelves, the substrates may be inserted into the joint seams or hit the height difference of the joint seams, which may cause the edges of the substrates to be damaged or broken when hitting the shelves.

[0005] Therefore, the present applicant has made great efforts to solve the above problems in the prior art by means of careful research and application of theories, which is the improvement goal of the present application. CONTENT OF THE INVENTION

[0006] The present application provides a substrate carrier structure with hidden joint seams. Each shelf has a bottom plate, the top surface of each bottom plate extends a side plate, and the bottom surface is provided with an abutting portion. The side plate of one shelf is abutted to the abutting portion of another shelf to form a joint seam. Each joint seam is adjacent to each bottom plate, so that the substrate carrier structure has the characteristics of hidden joint seams and avoids the substrates from being trapped in the joint seams.

[0007] In the embodiments of the present application, a substrate carrier structure with hidden joint seams is provided, which is accommodated in a container. The substrate carrier structure includes a pair of side carriers arranged on the left and right sides of the container, respectively. Each side carrier includes multiple shelves stacked on top of each other. Each shelf has a bottom plate. One of the top and bottom surfaces of each bottom plate extends a side plate, and the other is provided with an abutting portion. The side plate of one shelf is abutted to the abutting portion of another shelf, and the intersection of each side plate and each abutting portion forms a joint seam. Each joint seam is adjacent to each bottom plate.

[0008] In an embodiment of the present application, each of the side plates and one of the abutting portions protrudes a protrusion and the other one is provided with a strip-shaped groove, and each of the protrusions is fitted into each of the strip-shaped grooves.

[0009] In an embodiment of the present application, each of the protrusions protrudes from each of the side plates, and each of the strip-shaped grooves is formed in each of the abutting portions.

[0010] In an embodiment of the present application, each of the protrusions protrudes from each of the abutting portions, and each of the strip-shaped grooves is formed in each of the side plates.

[0011] In an embodiment of the present application, each of the side plates extends upward from a top surface of each of the bottom plates, and each of the abutting portions is formed in a bottom surface of each of the bottom plates.

[0012] In an embodiment of the present application, each of the side plates extends downward from a bottom surface of each of the bottom plates, and each of the abutting portions is formed in a top surface of each of the bottom plates.

[0013] In an embodiment of the present application, at least one pair of fixing members is further included, each of the shelves extends at least one hollow sleeve, each of the fixing members is threaded through and clamped to a plurality of the hollow sleeves, so that the plurality of the hollow sleeves are closely stacked with each other.

[0014] In an embodiment of the present application, the number of the hollow sleeves of each of the shelves is two, each of the two hollow sleeves extends from a front end and a rear end of an outer side of each of the shelves respectively, and the number of the fixing members is two pairs.

[0015] In an embodiment of the present application, the hollow sleeve located at the rear end of each of the shelves extends a hook along an axial direction thereof, and a cross section of each of the hooks is in an L shape.

[0016] In an embodiment of the present application, each of the fixing members includes a screw rod threaded through a plurality of the hollow sleeves and two bolts screwed to two ends of each of the screw rods.

[0017] Based on the above, the joint seam of the substrate carrying structure of the present application is hidden in a lower edge or an upper edge of each of the bottom plates, so that when the substrate is taken and placed on the shelves, the substrate is not easily trapped in or interfered by the joint seam with a height difference, and the joint seam has protrusions and strip-shaped grooves which are recessed and fitted into each other, so that the side plates and the abutting portions are more closely abutted at the joint seam and present a hidden and seamless state, thereby achieving the characteristics of the substrate carrying structure of the present application with hidden joint seams and avoiding the substrate from being trapped in the joint seam. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 FIG. 4 is a perspective view of the substrate carrying structure of the present application in a use state.

[0019] Figure 2 Partial sectional view of the substrate carrying structure of the present application at the front side of the container.

[0020] Figure 3 Partial sectional view of the substrate carrying structure of the present application at the back side of the container.

[0021] Figure 4 Partial sectional view of the substrate carrying structure of the present application in use.

[0022] Figure 5 Perspective exploded view of the side carrier of the present application.

[0023] Figure 6 Perspective exploded view of the layer shelf of the present application with upper and lower stacks.

[0024] Figure 7 Partial sectional view of the layer shelf of the present application. Figure 6 Enlarged view of the selected portion of the partial sectional view.

[0025] Figure 8 Partial sectional view of the layer shelf of the present application. Figure 6 Enlarged view of the selected portion of the partial sectional view.

[0026] Figure 9 Partial sectional view of the layer shelf of the present application.

[0027] Figure 10 Partial sectional view of the layer shelf of the present application. Figure 9 Enlarged view of the selected portion of the partial sectional view.

[0028] Figure 11 Partial sectional exploded view of the layer shelf of the present application with upper and lower stacks.

[0029] Figure 12 Another partial sectional exploded view of the layer shelf of the present application with upper and lower stacks.

[0030] Figure 13 Perspective assembled view of the side carrier of the present application.

[0031] Figure 14 Partial sectional assembled view of the side carrier of the present application.

[0032] Figure 15 Partial sectional view of the side carrier of the present application. Figure 14 Enlarged view of the selected portion of the partial sectional view.

[0033] Figure 16 Another partial sectional assembled view of the side carrier of the present application.

[0034] Figure 17 Enlarged view of another embodiment of the spring member of the present application.

[0035] Figure 18This is a schematic diagram showing the usage state of another embodiment of the spring clip of this application.

[0036] Explanation of reference numerals in the attached figures:

[0037] 100: Container;

[0038] 101: Opening;

[0039] 102: Through hole;

[0040] 10: Substrate support structure;

[0041] 1: Side support frame;

[0042] 11: Shelves;

[0043] 111: Base plate;

[0044] 112: Side panel;

[0045] 113: Butt part;

[0046] 114: convex strip;

[0047] 115: Strip-shaped ditch;

[0048] 12: Hollow sleeve;

[0049] 121: Top edge;

[0050] 122: Bottom edge;

[0051] 123: Gap;

[0052] 124: Spring clips;

[0053] 125: Lateral spring arm;

[0054] 126: Bump;

[0055] 127: Inclined surface;

[0056] 13: Hook;

[0057] 2: Fasteners;

[0058] 21: Screw;

[0059] 22: Bolt;

[0060] 221: Screw;

[0061] 222: Pressing component;

[0062] 223: Perforation;

[0063] S: Joint seam. Detailed Implementation

[0064] In the description of this application, it should be understood that the terms "front side", "rear side", "left side", "right side", "front end", "rear end", "end", "longitudinal", "lateral", "vertical", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0065] The detailed description and technical content of this application will be explained below with reference to the accompanying drawings. However, the accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application.

[0066] Please refer to Figures 1 to 16 As shown, this application provides a substrate support structure for concealing joint seams, which is housed in a container 100 and used to support substrates 200 such as wafers. The container 100 is a box with an opening 101 on the front side, but the opening 101 can be opened at any position in the container 100, and is not limited to this embodiment. This substrate support structure 10 mainly includes a pair of side support frames 1.

[0067] like Figures 1 to 16 As shown, the aforementioned side support frames 1 are fixed and arranged on the left and right sides of the container 100, respectively. Each side support frame 1 includes multiple stacked shelves 11. Each shelf 11 has a bottom plate 111. The top surface of each bottom plate 111 extends with a side plate 112 and the bottom surface is provided with an abutment portion 113. The side plate 112 of one shelf 11 in the stack abuts against the abutment portion 113 of another shelf 11. A joint seam S is formed at the junction of each side plate 112 and each abutment portion 113. Each joint seam S is arranged adjacent to each bottom plate 111.

[0068] The details are as follows: one of the side plates 112 and each abutment part 113 has a protruding ridge 114 and the other has a strip groove 115. Each ridge 114 is fitted into each strip groove 115, so that the joint seam S has ridges 114 and strip grooves 115 that are interlocked with each other, so that each side plate 112 and each abutment part 113 are more tightly fitted at the joint seam S, presenting a hidden and seamless state.

[0069] Each joint S is formed at the lower edge of each base plate 111. Since the substrate 200 will abut against the base plate 111 when each shelf 11 is placed, the joint S is formed at the lower edge of the base plate 111, which can further prevent the substrate 200 from being inserted into the joint S.

[0070] Furthermore, in this embodiment, each convex strip 114 protrudes from each side plate 112, and each strip groove 115 is formed from each abutment portion 113. However, this is not a limitation; each convex strip 114 may protrude from each abutment portion 113, and each strip groove 115 may be formed from each side plate 112.

[0071] In addition, each shelf 11 extends with one or more hollow sleeves 12, each hollow sleeve 12 having a top edge 121 and a bottom edge 122, a notch 123 provided from the top edge 121 or the bottom edge 122, and a spring piece 124 extending from the notch 123 and protruding out of the hollow sleeve 12.

[0072] Each spring piece 124 includes a transverse spring arm 125 extending from the inner periphery of the notch 123 and a protrusion 126 protruding from the transverse spring arm 125 and extending out of one of the top edge 121 and the bottom edge 122. When pressed, the protrusion 126 can elastically expand and contract and retract into the notch 123.

[0073] Furthermore, in this embodiment, each notch 123 is a hollow recess that extends upward from the bottom edge 122 and penetrates the inner and outer surfaces. The transverse elastic arm 125 extends from the left inner wall or the right inner wall of the hollow recess. The protrusion 126 protrudes from the bottom edge 122 by about 0.1 to 0.3 mm. In this embodiment, the protrusion 126 is a rectangular block, but it is not limited to this. The protrusion 126 can also be a triangular block, a trapezoidal block, or any other geometric shape. The bottom surface of each transverse elastic arm 125 is on the same plane as the bottom edge 122, and the outer surface of each transverse elastic arm 125 is on the same curved surface as the outer periphery of the hollow sleeve 12.

[0074] The optimal size of the protrusion 126 protruding from the bottom edge 122 is 0.2 mm, the optimal length of the transverse spring arm 125 is 4 to 5 mm, and the optimal thickness of the transverse spring arm 125 is 1 to 2 mm. However, the dimensions of the spring piece 124 are not limited to the aforementioned values.

[0075] Furthermore, each notch 123 may also be a perforated recess extending downward from each top edge 121 and penetrating the inner and outer surfaces. The transverse elastic arm 125 extends from the left or right inner sidewall of the perforated recess, and the protrusion 126 protrudes from the top edge 121 by approximately 0.1 to 0.3 mm. The optimal size of the protrusion 126 protruding from the top edge 121 is 0.2 mm. The top surface of each transverse elastic arm 125 is on the same plane as the top edge 121, which is not limited to the above embodiment.

[0076] In addition, in this embodiment, each shelf 11 has two hollow sleeves 12. The two hollow sleeves 12 extend from the front and rear ends of the bottom plate 111 and the side plate 112, respectively. That is, the two hollow sleeves 12 extend from the front and rear ends of the outer side of each shelf 11. The rear end of each shelf 11 is further away from the opening 101 of the container 100 than the front end. The hollow sleeve 12 at the rear end of each shelf 11 has a hook 13 extending along its axial direction. The cross section of each hook 13 is L-shaped. The hook 13 is used to snap into the carrier body of the substrate 200 and also to stop the substrate 200 so that the substrate 200 is stably fixed in the shelf 11.

[0077] Furthermore, each shelf 11 is made of plastic injection molding, but this is not a limitation. Therefore, the base plate 111, side plate 112, hollow sleeve 12, spring piece 124 and protrusion 114 are also made of plastic injection molding as a single unit and cannot be disassembled from each other.

[0078] like Figures 1 to 5 , Figures 11 to 14 , Figure 16 As shown, the substrate support structure 10 of this application also includes one or more fasteners 2, each fastener 2 passing through and clamping a plurality of hollow sleeves 12, so that the plurality of hollow sleeves 12 are tightly stacked together, such that each protrusion 126 presses against the other of each top edge 121 and bottom edge 122, that is, each spring piece 124 presses against the other of each top edge 121 and bottom edge 122.

[0079] In this embodiment, because each protrusion 126 protrudes from the bottom edge 122, the protrusion 126 of each spring piece 124 tightly abuts against each top edge 121; conversely, each protrusion 126 protrudes from the top edge 121, so that the protrusion 126 of each spring piece 124 tightly abuts against each bottom edge 122.

[0080] Further explanation is as follows: In this embodiment, there are two pairs of fasteners 2. Each fastener 2 includes a screw 21 that passes through multiple hollow sleeves 12 and two bolts 22 that are screwed to both ends of each screw 21. The two ends of the screw 21 are provided with screw holes (not shown in the figure). The two bolts 22 are screwed to the screw holes at both ends of the screw 21 and are arranged on the upper and lower ends of the stacked multiple hollow sleeves 12, so that the two bolts 22 together tightly clamp the multiple hollow sleeves 12.

[0081] As is known, the side panels of a shelf extend from the top and bottom surfaces of the base plate. Therefore, when multiple shelves are stacked, the joints of the side panels will be formed in the middle of the two adjacent base plates. Since each shelf 11 has manufacturing tolerances, the two adjacent joints at each joint will have obvious height differences due to the different tolerances. When the substrate is picked up or put down from the shelf, the substrate is easy to get stuck in the joint with the height difference or be interfered with by the joint with the height difference, which will cause the substrate picking and putting operation to fail, and may even cause damage or breakage to the substrate.

[0082] In comparison, such as Figures 1 to 9 , Figures 11 to 13 , Figure 16 As shown, in the usage state of the substrate support structure 10 of this application, the joint seam S is concealed at the lower or upper edge of each base plate 111, so that when the substrate 200 is placed on or off the shelf 11, the substrate 200 is not easily trapped in the joint seam S with high and low step differences or interfered with by the joint seam S with high and low step differences, and the joint seam S has interlocking convex and concave convex ridges 114 and strip grooves 115 inside.

[0083] This allows the side plate 112 and the abutting part 113 to fit more tightly at the joint seam S, creating a concealed and seamless state, so that the substrate support structure 10 of this application has the characteristics of concealing the joint seam S and preventing the substrate 200 from sinking into the joint seam S.

[0084] In addition, such as Figures 1 to 11 , Figures 13 to 15 As shown, each shelf 11 of the substrate support structure 10 of this application has manufacturing tolerances, which cause height tolerances of each hollow sleeve 12 or unevenness of the stacked surfaces. This results in an overall dimensional error after multiple hollow sleeves 12 are stacked due to the aforementioned tolerances or unevenness, leading to misassembly with the container 100. This causes the substrate support structure 10 to be too tall to fit inside the container 100, or too short to cause loosening and shaking inside the container 100. However, because each hollow sleeve 12... 2. It has a protruding spring piece 124, and the two bolts 22 can be tightened or loosened relative to the screw 21 to adjust the force of clamping multiple hollow sleeves 12, thereby adjusting the amount of compression deformation of the spring piece 124. The height tolerance of each hollow sleeve 12 or the unevenness of the stacked surface can be adjusted by the spring piece 124 abutting against another hollow sleeve 12 and the expansion and contraction of the corresponding notch 123. That is, the height of the base plate bearing structure 10 is tightened and adjusted by increasing or decreasing the deformation of the spring piece 124 by the locking force of the two bolts 22.

[0085] Among them, such as Figures 2 to 3 As shown, each bolt 22 in this embodiment includes a screw 221 and a clamping assembly 222. Each clamping assembly 222 has a through hole 223. The bottom plate of the container 100 has multiple through holes 102. The clamping assembly 222, positioned above the screw 21, is sandwiched between the container 100 and the screw 21. The screw 221, positioned above the screw 21, passes through the through hole 223, is housed within the clamping assembly 222, and is screwed into the upper threaded hole of the screw 21. The clamping assembly 222, positioned below the screw 21, is located in the container 100. The screw 221, located outside the screw 21 and passing through the through hole 102, passes through the through hole 223, accommodates the clamping assembly 222, and is screwed into the lower screw hole of the screw 21. When the screw 221, located above and below the screw 21, locks the screw 21, it clamps the clamping assembly 222, thereby clamping the stacked hollow sleeves 12 and fixing the substrate support structure 10 in the container 100. However, this is not a limitation, the bolt 22 may be simply the screw 221, omitting the clamping assembly 222.

[0086] In this way, the total height of the multiple hollow sleeves 12 of the stack can be eliminated by the compression spring piece 124 of the fastener 2 to eliminate assembly tolerances, so as to achieve the advantage of precise assembly dimensions of the substrate support structure 10 of this application.

[0087] like Figures 17 to 18 As shown, another embodiment of the spring clip 124 of this application is presented.Figures 17 to 18 Implementation examples and Figures 6 to 11 , Figures 14 to 15 The embodiments are largely the same. Figures 17 to 18 Implementation examples and Figures 6 to 11 , Figures 14 to 15 The difference between the embodiments lies in the structure of the spring piece 124.

[0088] The details are as follows: Each spring piece 124 includes a transverse spring arm 125 extending from the inner periphery of the notch 123 and an inclined surface 127 protruding from the surface of the transverse spring arm 125 away from the notch 123. Each inclined surface 127 gradually protrudes from one of the top edge 121 and the bottom edge 122 towards the end of the transverse spring arm 125, and tightly abuts against the other of the top edge 121 and the bottom edge 122. This achieves the same effect as... Figures 1 to 16 Functions and effects.

[0089] In this embodiment, each notch 123 is opened from each bottom edge 122, each inclined surface 127 is connected to each bottom edge 122 on one side and is located on the same plane, and gradually protrudes from each bottom edge 122 by about 0.1 to 0.3 mm on the other side, and each inclined surface 127 tightly abuts against each top edge 121.

[0090] In addition, the optimal size for the highest end of the inclined surface 127 to protrude from the bottom edge 122 is 0.2 mm, the optimal size for the length of the transverse spring arm 125 is 4 to 5 mm, and the optimal size for the thickness of the transverse spring arm 125 is 1 to 2 mm, but the dimensions of the spring piece 124 are not limited to the aforementioned values.

[0091] However, each notch 123 can also be formed from each top edge 121. Each inclined surface 127 is connected to each top edge 121 on one side and is located on the same plane, and gradually protrudes from each top edge 121 on the other side by about 0.1 to 0.3 mm. The optimal size of the highest end of the inclined surface 127 protruding from the top edge 121 is 0.2 mm. Each inclined surface 127 tightly abuts against each bottom edge 122. This is not limited to this embodiment.

[0092] However, the above description is merely an embodiment of this invention and should not be construed as limiting the scope of this invention. Any simple equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the patent specification shall still fall within the scope of this invention.

Claims

1. A concealed joint baseboard support structure housed within a container, characterized by, The substrate carrying structure comprises: a pair of side carriers respectively arranged at left and right sides of the container, each of the side carriers comprising a plurality of shelves stacked in upper and lower layers, each of the shelves having a bottom plate, a side plate extending from a top surface of each of the bottom plates, and an abutting portion provided at a bottom surface of each of the bottom plates, the side plate of one of the shelves stacked abutting against the abutting portion of another of the shelves, and a joint gap being formed at an intersection of each of the side plates and each of the abutting portions, each of the joint gaps being arranged adjacent to each of the bottom plates.

2. The concealed joint baseboard support structure of claim 1, wherein, One of each of the side plates and each of the abutting portions protrudes a ridge, and the other of each of the side plates and each of the abutting portions is provided with a strip-shaped groove, each of the ridges being fitted into each of the strip-shaped grooves.

3. The concealed joint base plate support structure of claim 2, wherein, Each of the ridges protrudes from each of the side plates, and each of the strip-shaped grooves is formed in each of the abutting portions.

4. The concealed joint base plate support structure of claim 2, wherein, Each of the ridges protrudes from each of the abutting portions, and each of the strip-shaped grooves is formed in each of the side plates.

5. The concealed joint substrate support structure of claim 1, wherein, Each of the side plates extends upward from a top surface of each of the bottom plates, and each of the abutting portions is formed at a bottom surface of each of the bottom plates.

6. The concealed joint substrate support structure of claim 1, wherein, Each of the side plates extends downward from a bottom surface of each of the bottom plates, and each of the abutting portions is formed at a top surface of each of the bottom plates.

7. The concealed joint substrate support structure of claim 1, wherein, Further comprising at least one pair of fixing members, each of the shelves extending at least one hollow sleeve, each of the fixing members being threaded and clamped in a plurality of the hollow sleeves, so that the plurality of the hollow sleeves are tightly stacked with each other.

8. The concealed joint baseboard support structure of claim 7, wherein, The number of the hollow sleeves of each of the shelves is two, each of the two hollow sleeves extending from front and rear ends of each of the shelves, and the number of the fixing members is two pairs.

9. The concealed joint substrate support structure of claim 8, wherein, Each of the hollow sleeves of the shelf located at the rear end extends a hook along an axial direction thereof, and a cross section of each of the hooks is in an L shape.

10. The concealed joint substrate support structure of claim 7, wherein, Each of the fixing members comprises a screw threaded in the plurality of the hollow sleeves, and two bolts screwed at both ends of each of the screws.

Images