Device for keeping distance between MFA probe and measured object

Abstract

The utility model provides a device for keeping a distance between an MFA probe and a measured object, which comprises a fixed connecting block and four arc-shaped pieces with the same structure, one end of each arc-shaped piece is provided with a connecting block, one side surface of each connecting block is flush with one side surface of each arc-shaped piece, at least two hole seats are arranged on one arched surface of each arc-shaped piece at intervals, and the hole seats are arranged on the arc-shaped piece. A first inserting hole is formed in the top surface of the hole seat, an inserting block is arranged on the side face, away from the end face of the arc-shaped piece, of the connecting block, a square inserting hole is formed in the connecting block, the central axis of the square inserting hole is parallel to the end face of the arc-shaped piece, and the size of the inserting block is matched with that of the square inserting hole; the four arc-shaped pieces are mutually spliced into an integrated structure, each connecting block is provided with a connecting inserting hole, the bottom of the fixed connecting block is provided with inserting columns corresponding to the connecting inserting holes in a one-to-one mode, the inserting columns and the connecting inserting holes are mutually connected in an inserted mode, the top of the fixed connecting block is provided with a second inserting hole, and the four inwards-concave arc-shaped faces of the integrated structure are located on the same spherical surface.

Description

Technical Field

[0001] This utility model relates to a device for maintaining distance between an MFA probe and the object being measured. Background Technology

[0002] Devices that maintain a constant distance between an MFA (Micro-Focus Alignment) probe and the object being measured are primarily used in the fields of magnetic field measurement and detection. MFA probes are typically used for high-precision measurements, such as in semiconductor manufacturing and magnetic field measurement. Maintaining a constant distance aims to ensure measurement accuracy and avoid measurement errors caused by distance variations. Therefore, efforts have been made to improve the aforementioned technical solutions. Air-float distance maintaining devices utilize air-float technology to maintain the distance between the probe and the object being measured through gas pressure. They offer several advantages: non-contact operation, reduced wear, and suitability for high-precision environments. However, they also have disadvantages: system complexity, high cost, and strict requirements for gas purity and pressure control.

[0003] Optical distance-keeping device: Uses laser or infrared sensors to monitor distance in real time and adjusts probe position through a feedback control system.

[0004] It has the following advantages: high accuracy, fast response speed, and suitability for dynamic environments. However, it also has disadvantages: the system is complex, costly, and requires high precision in the calibration and maintenance of optical sensors.

[0005] Electromagnetic distance maintaining device: This device uses electromagnetic force to maintain the distance between the probe and the object being measured. It has the following advantages: non-contact operation and fast response. Disadvantages include: sensitivity to electromagnetic interference, system complexity, and high cost.

[0006] Existing limitations and shortcomings: 1. Accuracy and stability: Air-flotation and electromagnetic devices have high requirements for the environment and media, making it difficult to maintain stability in complex environments; 2. Complexity and cost: Optical and electromagnetic devices are complex systems, costly, and difficult to maintain. Air-flotation devices require high-purity gas and precise pressure control, increasing system complexity and cost; 3. Environmental adaptability: Existing technologies have poor adaptability to different environments, making it difficult to meet diverse application needs.

[0007] Existing technologies have issues with accuracy, stability, complexity, and cost in maintaining a constant distance between the MFA probe and the object being measured. Summary of the Invention

[0008] The problem to be solved by this invention is to provide a device for maintaining the distance between an MFA probe and the object being measured, thereby overcoming the shortcomings of the prior art.

[0009] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a device for maintaining distance between an MFA probe and the object being measured, comprising a fixed connecting block and four arc-shaped components with identical structures. One end of each arc-shaped component has a connecting block, and one side of the connecting block is flush with one side of the arc-shaped component. At least two hole seats are spaced apart on the arched surface of the arc-shaped component. The top surface of each hole seat has a first insertion hole. The connecting block has an insertion block on the side facing away from the end face of the arc-shaped component. The connecting block has an insertion square hole, the central axis of which is parallel to the end face of the arc-shaped component. The size of the insertion block is adapted to the size of the insertion square hole.

[0010] The four arc-shaped components are spliced ​​together to form an integral structure. The integral structure has a cross-shaped projection on the horizontal plane. Adjacent arc-shaped components are connected to each other by a plug-in block on one arc-shaped component and a plug-in square hole on another arc-shaped component. Each connecting block has a connecting hole. The bottom of the fixed connecting block has a plug-in post corresponding to each connecting hole. The plug-in post and the connecting hole are plugged into each other. The top of the fixed connecting block has a second plug-in hole. The four concave arc-shaped surfaces of the integral structure are located on the same spherical surface, and the top surface of the hole seat is located on the same spherical surface.

[0011] Optionally, a snap-fit ​​block is provided on one side of the connecting block with the insertion square hole. A rectangular groove is formed between the snap-fit ​​block and the end face of the arc-shaped component. After two adjacent arc-shaped components are inserted, the end of the connecting block of one arc-shaped component can extend into the rectangular groove of the other arc-shaped component, and the side of the end of the connecting block contacts the three inner sides of the rectangular groove respectively.

[0012] Optionally, each of the first and second insertion holes has a distance retaining rod of equal length, one end of which is inserted into the first or second insertion hole, and the other end of each distance retaining rod is located on the same spherical surface.

[0013] Optionally, each of the distance holding rods is connected to a distance holding sleeve, with one end of the distance holding rod extending into the distance holding sleeve from one end of the distance holding sleeve, and the other end of each of the distance holding sleeves located on the same spherical surface.

[0014] The advantages and positive effects of this utility model are: simple structure, lower cost, strong adaptability, which can effectively improve measurement accuracy and stability, while reducing system complexity and cost. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of a single arc-shaped component structure according to a specific embodiment of this utility model;

[0016] Figure 2 This is a schematic diagram of the assembly method for the four curved parts;

[0017] Figure 3 yes Figure 2 A schematic diagram of the assembled structure;

[0018] Figure 4 This is a schematic diagram of the fixed connection block structure;

[0019] Figure 5 This is a schematic diagram of the working state of a specific embodiment of this utility model;

[0020] Figure 6 yes Figure 5 Schematic diagram of the separation state at a local location in the middle;

[0021] In the diagram: 1. Arc-shaped component; 2. Hole seat; 2-1. First insertion hole; 3. Connecting block; 3-1. Connecting insertion hole; 3-2. Insertion square hole; 3-3. Insertion block; 3-4. Fastening block; 4. Fixed connecting block; 4-1. Second insertion hole; 4-2. Insertion post; 5. Distance holding rod; 6. Distance holding sleeve rod. Detailed Implementation

[0022] The present invention will be further described in detail below with reference to specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention. In the description of the present invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In the description of the present invention, it should be noted that unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a mechanical connection or an electrical connection; it can refer to a direct connection or an indirect connection through an intermediate medium; it can refer to the internal connection of two components. For those skilled in the art, the specific meaning of the above terms in the present invention can be understood through specific circumstances.

[0023] This invention provides a device for maintaining distance between an MFA probe and the object being measured, comprising a fixed connecting block 4 and four identical arc-shaped components 1, such as... Figure 1As shown, one end of the arc-shaped component 1 has a connecting block 3. One side of the connecting block 3 is flush with one side of the arc-shaped component 1. Two hole seats 2 are spaced apart on the arched side of the arc-shaped component 1. The top surface of the hole seat 2 has a first insertion hole 2-1. On the side of the connecting block 3 facing away from the end face of the arc-shaped component 1, there is an insertion block 3-3. The connecting block 3-3 has an insertion square hole 3-2. The central axis of the insertion square hole 3-2 is parallel to the end face of the arc-shaped component 1. The size of the insertion block 3-3 is adapted to the size of the insertion square hole 3-2.

[0024] like Figure 3 As shown, the four arc-shaped parts 1 are spliced ​​together to form a single structure. The single structure has a cross-shaped projection on the horizontal plane, as shown. Figure 2 As shown, adjacent arc-shaped parts 1 are connected to each other by a plug-in block 3-3 on one arc-shaped part 1 and a plug-in square hole 3-2 on the other arc-shaped part 1. Each connecting block 3 has a connecting plug hole 3-1, as shown. Figure 4 As shown, the bottom of the fixed connecting block 4 has insertion posts 4-2 that correspond one-to-one with the connecting holes 3-1. The insertion posts 4-2 and the connecting holes 3-1 are inserted into each other. The top of the fixed connecting block 4 has a second insertion hole 4-1. The four concave arc-shaped surfaces of the integral structure are located on the same spherical surface, and the top surface of the hole seat 2 is located on the same spherical surface. Figure 2 As shown, during the assembly of the integrated structure, firstly, two sets of adjacent arc-shaped parts 1 are interlocked, then the two sets of interlocked arc-shaped parts 1 are interlocked facing each other, and finally, the four arc-shaped parts 1 are fixed together with a fixing connecting block to form a structure as shown. Figure 5 The structure shown is as follows. In use, the integrated structure is fitted onto the spherical MFA probe. At this time, the inner arc surface of the integrated structure contacts the surface of the spherical probe, and the surface of the object to be measured contacts the top surface of the hole seat 2. This ensures that the distance between the probe and the object to be measured is limited by the size of the hole seat on the aforementioned distance maintaining device during each measurement, thereby ensuring that the distance between the probe and the object to be measured remains consistent.

[0025] To ensure the stability of the integrated structure, a snap-fit ​​block 3-4 is further improved by setting a snap-fit ​​block 3-4 on one side of the connecting block 3 with the insertion square hole 3-2. A rectangular groove is formed between the snap-fit ​​block 3-4 and the end face of the arc-shaped part 1. After two adjacent arc-shaped parts 1 are inserted, the end of the connecting block 3 of one arc-shaped part 1 can extend into the rectangular groove of the other arc-shaped part 1. The side of the end of the connecting block 3 contacts the three inner sides of the rectangular groove respectively. The setting of the rectangular groove enables the four connecting blocks 3 of the integrated structure to snap together to form a stable splicing structure, avoiding displacement between the four arc-shaped parts 1 within the integrated structure, which would affect the measurement accuracy.

[0026] The aforementioned device for maintaining distance between the MFA probe and the object being measured uses four identical arc-shaped parts 1 connected in a ring using a mortise and tenon joint with interference fit. A fixed connector 4 is set at the center of the ring. The mortise and tenon joint greatly reduces processing costs. The four identical arc-shaped parts 1 ensure that the same mold is used during manufacturing, so the positions of the holes 2 on each part are the same. The fixed connector 4 at the center of the ring, connected to the arc-shaped parts 1 by four plug-in pins 4-2, ensures that the position of the holes 2 around the center is consistent. This ensures the consistency of the distance and reduces errors. The mutual plugging and snap-fit ​​blocks 3-4 ensure the stability of the structure and prevent misalignment, making the distance more consistent.

[0027] like Figure 6 As shown, each of the first insertion hole 2-1 and the second insertion hole 4-1 has a distance holding rod 5 of equal length. One end of the distance holding rod 5 is inserted into the first insertion hole 2-1 or the second insertion hole 4-1, and the other end of each distance holding rod 5 is located on the same spherical surface. When it is necessary to maintain a relatively long distance between the object being measured and the probe, the distance holding rod 5 can be connected to the hole seat 2 or the fixed connecting block 4. The object being measured contacts the end of the distance holding rod 5, and the distance between the object being measured and the probe can be limited by the length of the distance holding rod 5.

[0028] like Figure 5 , Figure 6 As shown, each distance holding rod 5 is connected to a distance holding sleeve rod 6. The end of the distance holding rod 5 extends into the distance holding sleeve rod 6 from one end, and the other end of each distance holding sleeve rod 6 is located on the same spherical surface. When a greater distance needs to be maintained between the object being measured and the probe, the distance holding sleeve rod 6 can be fitted onto the distance holding rod 5, and the object being measured will contact the end of the distance holding sleeve rod 6. The distance between the object being measured and the probe is limited by the length of the distance holding sleeve rod 6.

[0029] In the above structure, depending on the measurement needs, the hole seat 2 can be used to maintain a distance of 100mm between the object being measured and the probe, the distance holding rod 5 can be used to maintain a distance of 150mm between the object being measured and the probe, and the distance holding sleeve 6 can be used to maintain a distance of 200mm between the object being measured and the probe.

[0030] The aforementioned distance maintaining rod structure adopts a "large-in-small" structure, which greatly improves work efficiency and is easy to install.

[0031] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made in accordance with the claims of this utility model should still fall within the patent coverage of this utility model.

Claims

1. A device for maintaining distance between an MFA probe and the object being measured, characterized in that: The fixed connecting block and four arc-shaped pieces are identical in structure, one end of the arc-shaped piece is provided with a connecting block, one side surface of the connecting block is flush with one side surface of the arc-shaped piece, at least two hole seats are arranged on the upper arc surface of the arc-shaped piece, the top surface of the hole seat is provided with a first plug-in hole, the side surface of the connecting block away from the end surface of the arc-shaped piece is provided with a plug-in block, the connecting block is provided with a plug-in square hole, the central axis of the plug-in square hole is parallel to the end surface of the arc-shaped piece, the size of the plug-in block is matched with the size of the plug-in square hole; The four arc-shaped pieces are spliced into an integrated structure, the integrated structure has a cross-shaped projection on the horizontal plane, the plug-in block on one of the arc-shaped pieces and the plug-in square hole on another arc-shaped piece are plugged into each other to connect adjacent arc-shaped pieces, each connecting block is provided with a connecting plug hole, the bottom of the fixed connecting block is provided with a plug-in column corresponding to the connecting plug hole, the plug-in column and the connecting plug hole are plugged into each other, the top of the fixed connecting block is provided with a second plug-in hole, the four inner concave arc surfaces of the integrated structure are located on the same spherical surface, and the top surfaces of the hole seats are located on the same spherical surface.

2. The device for maintaining a distance between an MFA probe and an object under test according to claim 1, characterized in that: The side surface of the connecting block provided with the plug-in square hole is provided with a buckling block, the buckling block and the end surface of the arc-shaped piece form a rectangular groove, after the two adjacent arc-shaped pieces are plugged in, the end portion of the connecting block of one of the arc-shaped pieces can extend into the rectangular groove of the other arc-shaped piece, and the side surface of the end portion of the connecting block is in contact with three inner side surfaces of the rectangular groove respectively.

3. The device for maintaining a distance between an MFA probe and an object under test according to claim 1 or 2, characterized in that: Each of the first plug-in hole and the second plug-in hole is provided with a distance maintaining rod with equal length, one end of the distance maintaining rod is plugged into the first plug-in hole or the second plug-in hole, and the other end of each distance maintaining rod is located on the same spherical surface.

4. The device for maintaining a distance between an MFA probe and an object under test according to claim 3, characterized in that: Each distance maintaining rod is connected with a distance maintaining sleeve rod, the end portion of the distance maintaining rod extends into the distance maintaining sleeve rod from one end of the distance maintaining sleeve rod, and the other end of each distance maintaining sleeve rod is located on the same spherical surface.

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