High-voltage source meter system

Abstract

The utility model discloses a high-voltage source meter system. The high-voltage source meter system comprises a control module, a conversion module and at least two high-voltage modules, wherein the control module is used for outputting a control signal; the conversion module is connected with the control module and used for receiving the control signal and generating a mode selection signal according to the control signal, and the conversion module is provided with at least two data interfaces; and the at least two high-voltage modules are connected with the data interfaces in a one-to-one correspondence manner and are used for executing an output function or a measurement function according to the mode selection signal. By arranging the conversion module with the plurality of data interfaces and the plurality of high-voltage modules, the number of high-voltage output channels can be effectively increased, the integration level of the system is improved, the cost is reduced, and the test efficiency of a chip can be improved; moreover, the high-voltage module can switch the output or measurement function of the current / voltage according to the control signal, and meets the different demands of a user for testing.

Description

Technical Field

[0001] This utility model relates to the field of electronic instruments, and in particular to a high-voltage source meter system. Background Technology

[0002] A source meter is a precision DC test and measurement device that integrates a four-quadrant power supply, a pulse source, an ammeter, and a voltmeter. It is commonly used in the field of semiconductor chip testing and verification.

[0003] When performing analog chip testing, a high-voltage test channel is often required. For example, when testing operational amplifiers, a high-voltage source meter is needed to provide ±18V DC power. However, the existing high-voltage source meter testing solutions are expensive and can only provide a single high-voltage test channel with poor integration, resulting in low chip testing efficiency. Utility Model Content

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a high-voltage source meter system.

[0005] A first aspect of this utility model provides a high-voltage source meter system, comprising: a control module for outputting control signals; a conversion module connected to the control module for receiving and generating a mode selection signal according to the control signals, the conversion module being provided with at least two data interfaces; and at least two high-voltage modules, each high-voltage module being connected to one of the data interfaces in a corresponding manner, for performing output functions or measurement functions according to the mode selection signals.

[0006] The high-voltage source meter system provided in this embodiment of the present invention has at least the following beneficial effects: by setting up a conversion module with multiple data interfaces and multiple high-voltage modules, the number of high-voltage output channels can be effectively increased, the system integration can be improved, the cost can be reduced, and the chip testing efficiency can be improved; moreover, the high-voltage modules can switch the output or measurement function of current / voltage according to the control signal to meet the different testing needs of users.

[0007] In some embodiments of this utility model, it further includes: an analog-to-digital conversion module, one end of which is connected to the control module and the other end of which is connected to the conversion module, for acquiring the output signal of the conversion module according to the control signal; and a digital-to-analog conversion module, one end of which is connected to the control module and the other end of which is connected to the high-voltage module.

[0008] In some embodiments of this utility model, the conversion module includes: a mode switching circuit, one end of which is connected to the control module, for receiving and generating a mode selection signal according to the control signal; and an amplification circuit, the input end of which is connected to the mode switching circuit and the output end of which is connected to the high-voltage module, for generating a drive signal according to the mode selection signal to drive the high-voltage module to operate.

[0009] In some embodiments of this utility model, the conversion module further includes: a voltage measurement circuit, the input terminal of which is connected to the high-voltage module and the output terminal of which is connected to the mode switching circuit, for sampling the voltage signal emitted by the high-voltage module; and a current measurement circuit, the input terminal of which is connected to the high-voltage module and the output terminal of which is connected to the mode switching circuit, for sampling the current signal emitted by the high-voltage module.

[0010] In some embodiments of this utility model, the high-voltage module includes: a high-voltage drive circuit, the input terminal of which is connected to the conversion module; a high-voltage measurement circuit, the input terminal of which is connected to the output terminal of the high-voltage drive circuit, for performing voltage output or measurement functions according to the mode selection signal; and a high-voltage current measurement circuit, the input terminal of which is connected to the output terminal of the high-voltage drive circuit, for performing current output or measurement functions according to the mode selection signal.

[0011] In some embodiments of this utility model, the high-voltage measurement circuit includes: two first voltage followers, the input terminals of the two first voltage followers being connected to the output terminal of the high-voltage drive circuit; and a first differential amplifier, the two input terminals of the first differential amplifier being respectively connected to the output terminals of the two first voltage followers, and the output terminal of the first differential amplifier being connected to the conversion module.

[0012] In some embodiments of this utility model, the high-voltage current measurement circuit includes: two second voltage followers, the input terminals of the two second voltage followers being connected to the output terminal of the high-voltage drive circuit; a second differential amplifier, the two input terminals of the second differential amplifier being respectively connected to the output terminals of the two second voltage followers; and a third differential amplifier, the inverting input terminal of the third differential amplifier being connected to the output terminal of the second differential amplifier, and the output terminal being connected to the conversion module.

[0013] In some embodiments of this utility model, the high-voltage module further includes: a range selection circuit, one end of which is connected to the high-voltage drive circuit, and the other end is connected to the input terminals of the high-voltage voltage measurement circuit and the high-voltage current measurement circuit, respectively, for selecting different current ranges for input according to the control signal to meet the output requirements of the high-voltage source meter system.

[0014] In some embodiments of this utility model, a load circuit is further included, which is connected in parallel with the high voltage measurement circuit to provide a sampling voltage to the high voltage measurement circuit.

[0015] In some embodiments of this utility model, the high-voltage module further includes a clamping circuit, one end of which is connected to the output terminal of the digital-to-analog converter module, and the other end is connected to the converter module and the high-voltage drive circuit respectively.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or related technologies, the drawings used in the description of the embodiments of this utility model or related technologies will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a connection diagram of the high-voltage source meter system according to an embodiment of the present invention;

[0019] Figure 2 This is another connection diagram of the high-voltage source meter system according to an embodiment of this utility model;

[0020] Figure 3 This is a circuit diagram of the high-voltage source meter system according to an embodiment of the present invention;

[0021] Figure 4 This is another circuit diagram of the high-voltage source meter system according to an embodiment of the present invention.

[0022] Figure label:

[0023] Control module 100, conversion module 200, mode switching circuit 210, amplifier circuit 220, voltage measurement circuit 230, current measurement circuit 240, high voltage module 300, high voltage drive circuit 310, high voltage voltage measurement circuit 320, first voltage follower 321, first differential amplifier 322, high voltage current measurement circuit 330, second voltage follower 331, second differential amplifier 332, third differential amplifier 333, range selection circuit 340, load circuit 350, clamping circuit 360, analog-to-digital conversion module 400, digital-to-analog conversion module 500. Detailed Implementation

[0024] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0025] In the description of this invention, the use of "first" and "second" is for the purpose of distinguishing technical features only, and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the order of the technical features indicated.

[0026] In the description of this invention, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0027] The following is for reference. Figure 1 This invention describes a high-voltage source meter system according to an embodiment of the present invention.

[0028] like Figure 1 As shown, the high-voltage source meter system includes a control module 100, a conversion module 200, and at least two high-voltage modules 300. The control module 100 is used to output control signals; the conversion module 200 is connected to the control module 100 and is used to receive and generate mode selection signals according to the control signals. The conversion module 200 is provided with at least two data interfaces; the at least two high-voltage modules 300 are connected to the data interfaces one by one and are used to perform output functions or measurement functions according to the mode selection signals.

[0029] In existing technologies, high-voltage source meter systems have low integration; a single PXIe slot can only provide one high-voltage channel, necessitating multiple PXIe chassis in practical applications, leading to increased testing costs and reduced testing efficiency. Therefore, this invention proposes a novel high-voltage source meter system capable of providing multiple high-voltage channels to meet user testing needs. The high-voltage source meter system of this invention includes a control module 100, a conversion module 200, and a high-voltage module 300. The high-voltage module 300 is connected to the conversion module 200 via a data interface. The control module 100 outputs control signals, the conversion module 200 generates corresponding mode selection signals based on the control signals, and the high-voltage module 300 performs current / voltage output or voltage / current measurement functions based on the mode selection signals. The conversion module 200 has at least two data interfaces, and the number of high-voltage modules 300 is equal to the number of data interfaces, with each module connected in a one-to-one correspondence. It is understood that the number of data interfaces can be adjusted according to actual requirements. Figure 1 The illustration shows a scenario with two data interfaces, where one PXIe slot in the high-voltage source meter system can provide a dual-channel high-voltage path, effectively improving system integration. In other embodiments, the conversion module 200 can be configured with eight data interfaces, each connecting to one of eight high-voltage modules 300, thereby achieving the integration of eight high-voltage channels.

[0030] The high-voltage source meter system provided in this embodiment of the present invention has at least the following beneficial effects: by setting up a conversion module 200 with multiple data interfaces and multiple high-voltage modules 300, the number of high-voltage output channels can be effectively increased, the system integration can be improved, the cost can be reduced, and the chip testing efficiency can be improved; and the high-voltage module 300 can switch the output or measurement function of current / voltage according to the control signal to meet the different testing needs of users.

[0031] In some embodiments of this utility model, reference is made to Figure 1 and Figure 2 The high-voltage source meter system also includes an analog-to-digital converter module 400 and a digital-to-analog converter module 500. One end of the analog-to-digital converter module 400 is connected to the control module 100 and the other end is connected to the converter module 200. It is used to collect the output signal of the converter module 200 according to the control signal. One end of the digital-to-analog converter module 500 is connected to the control module 100 and the other end is connected to the high-voltage module 300.

[0032] Specifically, one end of the analog-to-digital converter 400 is connected to the control module 100, and the other end is connected to the conversion module 200. It is used to acquire the output signal generated by the conversion module 200 based on the control signal issued by the control module 100. The digital-to-analog converter is located between the control module 100 and the high-voltage module 300, and is used to output a preset voltage to the high-voltage module 300. Figure 1Taking the two high-voltage modules 300 as an example, the analog-to-digital converter (ADC) module 400 contains two high-resolution ADC channels, each connected to one of the two pins of the converter module 200, for acquiring the analog signal output by the converter module 200. The digital-to-analog converter (DAC) contains four high-resolution DAC channels, with each pair of DAC channels forming a group. Each group of DAC channels is connected to one high-voltage module 300 to output a preset voltage value to the high-voltage module 300. It can be understood that when there are eight high-voltage channels, the ADC module 400 contains eight high-resolution ADC channels, and the DAC contains sixteen high-resolution DAC channels. By setting up analog-to-digital converter module 400 and digital-to-analog converter module 500, the operation of converter module 200 and high-voltage module 300 can be monitored and adjusted. The analog-to-digital converter module 400 can collect the output signal of converter module 200 and send it back to the host computer for data analysis. The digital-to-analog converter module 500 can output a preset voltage to the high-voltage module 300 to avoid the problem of the output of the high-voltage module 300 exceeding the threshold of the external load due to abnormal external load, thereby causing damage to the external load.

[0033] In some embodiments of this utility model, reference is made to Figures 1 to 3 The conversion module 200 includes a mode switching circuit 210 and an amplifier circuit 220. One end of the mode switching circuit 210 is connected to the control module 100 and is used to receive and generate a mode selection signal according to the control signal. The input end of the amplifier circuit 220 is connected to the mode switching circuit 210 and the output end is connected to the high voltage module 300. It is used to generate a drive signal according to the mode selection signal to drive the high voltage module 300 to operate.

[0034] Specifically, to achieve different measurement and output functions of the high-voltage source meter system, the conversion module 200 provided by this utility model includes a mode switching circuit 210 and an amplifier circuit 220. One end of the mode switching circuit 210 is connected to the control module 100. The control signals issued by the control module 100 carry different usage requirements. Therefore, after receiving the control signal, the mode switching circuit 210 generates a corresponding mode selection signal to achieve different measurement or output functions. For example, as... Figure 3As shown, the mode switching circuit 210 provided in this application consists of three single-pole double-throw switches S1, S2, and S3, which work in conjunction with switch S4 in the high-voltage module 300 to achieve switching between different functions. When the high-voltage source meter system is required to output voltage, switch S2 is turned on (B), switch S3 is turned on (A), and switch S4 is closed. When the high-voltage source meter system is required to output current, switch S2 is turned on (A), switch S3 is turned on (BA), and switch S4 is open. When S1 is turned on (A), the voltage measurement function is performed; when it is turned on (B), the current measurement function is performed. Depending on the control signal, the mode switching circuit 210 controls the opening and closing of different switches, thereby achieving different functions and improving switching efficiency.

[0035] An amplifier circuit 220 is positioned between the mode switching circuit 210 and the high-voltage module 300. It generates a corresponding drive signal based on the mode selection signal, thereby driving the high-voltage module 300 to perform corresponding operations. The amplifier circuit 220 amplifies the voltage setpoint output from the conversion module 200 and then inputs the amplified voltage setpoint into the high-voltage module 300, thus enabling adjustment of the voltage output value. It should be noted that... Figure 3 For ease of understanding, only the cases where the number of interfaces for the conversion module 200 and the number of interfaces for the high-voltage module 300 are shown are presented. As mentioned earlier, this number can be set to 2, 3, etc., and the connection methods are all the same, so they will not be listed and explained one by one here.

[0036] In some embodiments of this utility model, reference is made to Figures 1 to 3 As shown, the conversion module 200 also includes a voltage measurement circuit 230 and a current measurement circuit 240. The input terminal of the voltage measurement circuit 230 is connected to the high-voltage module 300, and the output terminal is connected to the mode switching circuit 210, for receiving the voltage signal emitted by the high-voltage module 300. The input terminal of the current measurement circuit 240 is connected to the high-voltage module 300, and the output terminal is connected to the mode switching circuit 210, for receiving the current signal emitted by the high-voltage module 300.

[0037] Specifically, to monitor the operating status of the high-voltage module 300, the conversion module 200 provided by this utility model further includes a voltage measurement circuit 230 and a current measurement circuit 240. The input terminals of both the voltage measurement circuit 230 and the current measurement circuit 240 are connected to the high-voltage module 300, and their output terminals are connected to the mode switching circuit 210. The voltage measurement circuit 230 can acquire the voltage signal sampled by the high-voltage module 300, and the current measurement circuit 240 can acquire the current signal sampled by the high-voltage module 300, thereby realizing a closed-loop circuit signal within the conversion module 200, and thus enabling the high-voltage source meter system to function as a precision voltage source or a precision current source.

[0038] In some embodiments of this utility model, reference is made to Figure 3 and Figure 4 As shown, the high-voltage module 300 includes a high-voltage drive circuit 310, a high-voltage measurement circuit 320, and a high-voltage current measurement circuit 330. The input terminal of the high-voltage drive circuit 310 is connected to the conversion module 200. The input terminal of the high-voltage measurement circuit 320 is connected to the output terminal of the high-voltage drive circuit 310, and is used to perform voltage output or measurement functions according to the mode selection signal. The input terminal of the high-voltage current measurement circuit 330 is connected to the output terminal of the high-voltage drive circuit 310, and is used to perform current output or measurement functions according to the mode selection signal. Figure 3 and Figure 4 The diagrams show the case where the number of interfaces for the conversion module 200 and the number of interfaces for the high-voltage module 300 are both 1. When the number of interfaces for the conversion module 200 and the number of interfaces for the high-voltage module 300 are 2, 3, etc., the circuit connection is the same as shown in the diagram, so it will not be described in detail here.

[0039] Specifically, the high-voltage module 300 includes a high-voltage drive circuit 310, a high-voltage voltage measurement circuit 320, and a high-voltage current measurement circuit 330. The input terminal of the high-voltage drive circuit 310 is connected to the output terminal of the amplifier circuit 220. It is used to receive the drive signal and amplify the voltage signal output by the amplifier circuit 220 according to the signal, so that the output voltage can reach 80V and the output current can reach 200mA. By setting the high-voltage drive circuit 310, the upper limit of the output voltage range of the high-voltage source meter system can be adjusted to 80V, which greatly increases the application scenarios of the system.

[0040] The input terminals of both the high-voltage voltage measurement circuit 320 and the high-voltage current measurement circuit 330 are connected to the output terminal of the high-voltage drive circuit 310. The output terminal of the high-voltage voltage measurement circuit 320 is connected to the input terminal of the voltage measurement circuit 230 of the conversion module 200, and the output terminal of the high-voltage current measurement circuit 330 is connected to the input terminal of the current measurement circuit 240 of the conversion module 200. When the user's requirement is voltage output or measurement, the high-voltage voltage measurement circuit 320 will be connected to the system and will perform the voltage output or measurement function according to the mode selection signal. When the user's requirement is current output or measurement, the high-voltage current measurement circuit 330 will be connected to the system and will perform the corresponding function. For example, when the requirement is voltage output, the high-voltage voltage measurement circuit 320 will sample the voltage of the load and attenuate the sampled voltage signal. Simultaneously, it will output the attenuated voltage signal to the voltage measurement circuit 230, which will then output a high-precision voltage sampling signal to the amplifier circuit 220, thereby achieving a high-precision voltage source output function. When the requirement is for voltage measurement, the conversion module 200 receives the signal output by the voltage measurement circuit 230, performs modulation operations such as attenuation and offset on the signal, and then sends it to the analog-to-digital conversion module 400 for conversion, thereby completing the voltage measurement function.

[0041] In some embodiments of this utility model, reference is made to Figure 4 As shown, the high voltage measurement circuit 320 includes two first voltage followers 321 and a first differential amplifier 322. The input terminals of the two first voltage followers 321 are connected to the output terminal of the high voltage drive circuit 310. The two input terminals of the first differential amplifier 322 are respectively connected to the output terminals of the two first voltage followers 321. The output terminal of the first differential amplifier 322 is connected to the conversion module 200.

[0042] Specifically, the high-voltage measurement circuit 320 includes two first voltage followers 321 and a first differential amplifier 322. The input terminal of the first voltage follower 321 is connected to the output terminal of the high-voltage drive circuit 310, and the output terminal is connected to the input terminal of the first differential amplifier 322. The first voltage follower 321 is used to couple the input impedance of the differential amplifier, which can isolate different circuits and reduce the influence of the differential input signal source impedance on the differential circuit. The first differential amplifier 322 can attenuate the voltage sampling signal while ensuring signal accuracy.

[0043] In some embodiments of this utility model, reference is made to Figure 4 The high-voltage current measurement circuit includes two first voltage followers 331, a second differential amplifier 332, and a third differential amplifier 333. The input terminals of the two first voltage followers 331 are connected to the output terminal of the high-voltage drive circuit 310. The two input terminals of the second differential amplifier 332 are respectively connected to the output terminals of the two first voltage followers 331. The inverting input terminal of the third differential amplifier 333 is connected to the output terminal of the second differential amplifier 332, and the output terminal is connected to the conversion module 200.

[0044] Specifically, the input of the second differential amplifier 332 is connected to two first voltage followers 331. The second differential amplifier 332 is used to eliminate high common-mode voltage during current sampling. However, because the input impedance of the second differential amplifier 332 is low, the accuracy of current sampling will be low. Therefore, two first voltage followers 331 are set at its input for processing. The first voltage followers 331 couple the input impedance of the second differential amplifier 332 to increase the input impedance of the second differential amplifier 332, thereby improving the sampling accuracy and precision.

[0045] The output of the second differential amplifier 332 is connected to the input of the third differential amplifier 333, and the output of the third differential amplifier 333 is connected to the conversion module 200 to transmit the sampled current signal to the conversion module 200 for processing, thereby realizing the current output function and sampling function.

[0046] In some embodiments of this utility model, such as Figure 4 As shown, the high-voltage module 300 also includes a range selection circuit 340. One end of the range selection circuit 340 is connected to the high-voltage drive circuit 310, and the other end is connected to the input terminals of the high-voltage voltage measurement circuit 320 and the high-voltage current measurement circuit 330, respectively. It is used to select different current ranges for input according to the control signal to meet the output requirements of the high-voltage source meter system.

[0047] Specifically, the gear selection circuit 340 consists of multiple sampling resistors and multiple analog switches, each with a different resistance value. A resistor with an appropriate resistance value is selected based on the requirements for current output and measurement accuracy, thereby meeting the user's needs. In some embodiments, such as... Figure 4 As shown, five resistors can be set, each connected to an analog switch. By controlling the on / off state of the analog switches, the corresponding resistor can be connected to the circuit to meet different user requirements for accuracy and current output. The sampling resistor values ​​are 5 ohms, 500 ohms, 5000 ohms, 20000 ohms, and 200000 ohms. It is understood that the resistance value of the sampling resistors can be set and adjusted according to actual usage requirements, and the number of sampling resistors and the corresponding number of analog switches can also be set as needed.

[0048] In some embodiments of this utility model, such as Figures 2 to 4 As shown, the high-voltage source meter system also includes a load circuit 350, which is connected in parallel with the high-voltage measurement circuit 320 to provide a sampling voltage to the high-voltage measurement circuit 320. Specifically, the load circuit 350 and the high-voltage measurement circuit 320 are connected in parallel. The current output by the high-voltage drive circuit 310 is processed by the range selection circuit 340 and then output to the load circuit 350. The high-voltage current measurement circuit 330 samples the current signal in the range selection circuit 340 to complete the current sampling of the load circuit 350. The high-voltage measurement circuit 320 samples the voltage across the load circuit 350 and sends the sampled voltage back to the conversion module 200, thereby realizing the output function of the voltage source.

[0049] In some embodiments of this utility model, such as Figure 4 As shown, the high-voltage module 300 also includes a clamping circuit 360. One end of the clamping circuit 360 is connected to the output terminal of the digital-to-analog converter module 500, and the other end is connected to the converter module 200 and the high-voltage drive circuit 310 respectively.

[0050] Specifically, the clamping circuit 360 is a window comparator consisting of two amplifier circuits 220, each with a diode. The input of the clamping circuit 360 is connected to the output of the digital-to-analog converter module 500. The digital-to-analog converter module 500 outputs a preset value to the clamping circuit 360. By comparing the output current of the amplifier circuit 220 with the preset value, the switching on and off of the two diodes in the clamping circuit 360 is controlled, thereby controlling the connection or disconnection of the clamping circuit 360. Furthermore, by setting up the clamping circuit 360, the entire high-voltage source meter system can be protected, preventing damage to the circuit components of the external load due to overcurrent.

[0051] The following is for reference. Figures 2 to 4 A high-voltage source meter system according to an embodiment of the present invention is described in detail with reference to a specific example. It is to be understood that the following description is merely illustrative and not intended to limit the scope of the present invention.

[0052] Taking eight high-voltage modules 300 as an example, the high-voltage source meter system proposed in this utility model mainly consists of a control module 100, a conversion module 200 with eight data interfaces, eight high-voltage modules 300, an analog-to-digital conversion module 400, and an analog-to-digital conversion module 400. The high-voltage modules 300 are connected to the corresponding data interfaces. The control module 100 is mainly composed of an FPGA, capable of performing PXIe interface connection, data acquisition, and logic control functions. One PXIe slot can provide eight high-voltage channels, reducing the cost of the PXIe chassis while improving chip testing efficiency. The conversion module 200 integrates a mode switching circuit 210, an amplifier circuit 220, a voltage measurement circuit 230, and a current measurement circuit 240. While realizing different functions of the high-voltage source meter system, it improves the system's integration, reduces its size, and simplifies circuit design.

[0053] When the high-voltage source meter system performs its voltage source output function, switch S2 is turned on (B), switch S3 is turned on (A), and switch S4 is closed. The FDAC pin in the conversion module 200 provides a set value. This set value is amplified by the amplifier circuit 220 and then sent to the high-voltage drive circuit 310 for further amplification, enabling the high-voltage drive circuit 310 to output a voltage up to 80V and a current up to 200mA. The voltage output from the high-voltage drive circuit 310 is processed by the range selection circuit 340 to meet the requirements of different current outputs and measurement accuracy, and is then output to the load circuit 350. The high-voltage measurement circuit 320 samples the voltage of the load circuit 350, attenuates the sampled voltage signal to 1 / 4 of its original value, and feeds it back to the voltage measurement circuit 230 of the conversion module 200 to adjust the voltage output, thus completing the voltage source output function.

[0054] Meanwhile, the analog-to-digital converter circuit, clamping circuit 360, high-voltage drive circuit 310, range selection circuit 340, and high-voltage current measurement circuit 330 also form a secondary loop to achieve overvoltage protection. When the voltage source output function is normal, the two diodes in the clamping circuit 360 are in the open state, so the secondary loop is in a saturated state; when an overcurrent occurs in the voltage source output, one of the diodes in the secondary loop will flip, thus forming a circuit. At this time, the magnitude of the output current is determined by the circuit in which the diode is located, thereby achieving the overvoltage protection function of clamping current and preventing overcurrent damage to other components in the circuit.

[0055] When the high-voltage source meter system performs the current source output function, switch S2 is turned on (A), switch S3 is turned on (B), and switch S4 is turned off. The FDAC pin in the conversion module 200 provides a set value. This set value is amplified by the amplifier circuit 220 and then sent to the high-voltage drive circuit 310 for further amplification, enabling the high-voltage drive circuit 310 to output a voltage up to 80V and a current up to 200mA. The voltage output from the high-voltage drive circuit 310 is processed by the range selection circuit 340 to meet the requirements of different current outputs and measurement accuracy, and is then output to the load circuit 350. The high-voltage current measurement circuit 330 samples the current signal from the range selection circuit 340, thus sampling the load circuit 350. Simultaneously, the high-voltage current measurement circuit 330 eliminates the common-mode voltage in the sampled current signal and feeds the eliminated current signal back to the current measurement circuit 240 of the conversion module 200 to adjust the current output, thereby completing the current source output function.

[0056] At this point, the conversion module 200, high-voltage drive circuit 310, range selection circuit 340, and high-voltage measurement circuit 320 form a secondary loop. When the current source is operating normally, the two diodes in the conversion module 200 are in the open state, and the secondary loop is in a saturated state. When an overvoltage occurs in the current output, one of the diodes in the secondary loop will flip, thus forming a circuit. At this time, the magnitude of the output voltage is determined by the circuit containing that diode, thereby achieving overvoltage control of the circuit.

[0057] When the high-voltage source meter system needs to perform voltage or current measurement functions, only switch S1 needs to be controlled. When switch S1 is on (A), the high-voltage source meter system performs voltage measurement; when switch S1 is on (B), the high-voltage source meter performs current measurement. The conversion module 200 modulates the output signals of the voltage measurement circuit 230 and the current measurement circuit 240 by attenuation, offset, etc., and sends the modulated signals to the analog-to-digital conversion module 400 for processing, thereby completing the corresponding measurement function.

[0058] The high-voltage source meter system provided by this utility model embodiment has at least the following beneficial effects: by setting up a conversion module 200 with multiple data interfaces and multiple high-voltage modules 300, multiple high-voltage output channels can be integrated in one PXIe slot, which improves the system integration, reduces costs, and improves chip testing efficiency; and the high-voltage module 300 can switch current / voltage output or measurement functions according to control signals to meet different user testing needs; in addition, by setting up the amplifier circuit 220 and the high-voltage drive circuit 310, the voltage output threshold of the system can be effectively improved, greatly expanding the application scenarios.

[0059] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.

Claims

1. A high voltage source meter system, characterized by, The application relates to a high-voltage signal output and measurement device. The device comprises: a control module for outputting a control signal; a conversion module connected with the control module, for receiving and generating a mode selection signal according to the control signal, the conversion module being provided with at least two data interfaces; 2. The high voltage source meter system of claim 1, wherein, at least two high-voltage modules connected with the data interfaces one by one, for executing an output function or a measurement function according to the mode selection signal. The device further comprises: an analog-digital conversion module, one end of which is connected with the control module and the other end of which is connected with the conversion module, for collecting the output signal of the conversion module according to the control signal; 3. The high voltage source meter system of claim 2, wherein, a digital-analog conversion module, one end of which is connected with the control module and the other end of which is connected with the high-voltage module. The conversion module comprises: a mode switching circuit, one end of which is connected with the control module, for receiving and generating a mode selection signal according to the control signal; 4. The high voltage source meter system of claim 3, wherein, an amplification circuit, the input end of which is connected with the mode switching circuit and the output end of which is connected with the high-voltage module, for generating a driving signal to drive the high-voltage module to operate according to the mode selection signal. The conversion module further comprises: a voltage measurement circuit, the input end of which is connected with the high-voltage module and the output end of which is connected with the mode switching circuit, for sampling the voltage signal emitted by the high-voltage module; 5. The high source meter system of claim 2, wherein, a current measurement circuit, the input end of which is connected with the high-voltage module and the output end of which is connected with the mode switching circuit, for sampling the current signal emitted by the high-voltage module. The high-voltage module comprises: a high-voltage driving circuit, the input end of which is connected with the conversion module; a high-voltage voltage measurement circuit, the input end of which is connected with the output end of the high-voltage driving circuit, for executing the output function or the measurement function of the voltage according to the mode selection signal; 6. The high-voltage source meter system of claim 5, wherein, a high-voltage current measurement circuit, the input end of which is connected with the output end of the high-voltage driving circuit, for executing the output function or the measurement function of the current according to the mode selection signal. The high-voltage voltage measurement circuit comprises: two first voltage followers, the input ends of which are connected with the output end of the high-voltage driving circuit; 7. The high voltage source meter system of claim 5, wherein, a first differential amplifier, the two input ends of which are respectively connected with the output ends of the two first voltage followers, and the output end of which is connected with the conversion module. The high-voltage current measurement circuit comprises: two second voltage followers, the input ends of which are connected with the output end of the high-voltage driving circuit; a second differential amplifier, the two input ends of which are respectively connected with the output ends of the two second voltage followers; 8. The high-voltage source meter system of claim 5, wherein, a third differential amplifier, the inverting input end of which is connected with the output end of the second differential amplifier and the output end of which is connected with the conversion module. The high-voltage module further comprises: Gear selection circuit, one end of the gear selection circuit is connected with the high-voltage drive circuit, the other end is connected with the input end of the high-voltage voltage measurement circuit and the high-voltage current measurement circuit respectively, for selecting different current gears according to the control signal to meet the output requirements of the high-voltage source table system.

9. The high-voltage source meter system of claim 5, wherein, Also includes: Load circuit, the load circuit is connected with the high-voltage voltage measurement circuit in parallel, for providing sampling voltage for the high-voltage voltage measurement circuit.

10. The high voltage source meter system of claim 5, wherein, The high-voltage module further comprises: Clamp circuit, one end of the clamp circuit is connected with the output end of the digital-analog conversion module, the other end is connected with the conversion module and the high-voltage drive circuit respectively.

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