Mounting structure of wafer turntable bottom measurement sensor

Abstract

The utility model discloses a mounting structure of a bottom measuring sensor of a wafer rotary table, which comprises a bottom plate, an upper disc is rotatably mounted on the bottom plate, a containing groove corresponding to the bottom measuring sensor is arranged on the upper disc, a mounting base is mounted in the containing groove, a sensor driving cylinder is vertically mounted on the mounting base in an inserted manner, and the sensor driving cylinder drives the bottom measuring sensor to rotate. The upper surface of the mounting base is a reference surface, the bottom of the sensor driving air cylinder is in contact with the reference surface, the mounting base is provided with an airflow channel communicated with the sensor driving air cylinder, the airflow channel is communicated with an air cylinder driving air source, and the sensor driving air cylinder is provided with a bottom measuring sensor in a lifting mode. The sensor driving air cylinder is further provided with a sensor wire harness connected with a bottom measuring sensor, and the upper disc is provided with an auxiliary fixing device for assisting the sensor driving air cylinder in vertical installation and stabilization. The mounting structure can ensure that the mounting precision is higher when the bottom measuring sensor is mounted, the mounting difficulty is effectively reduced, and later overhaul and maintenance are facilitated.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, specifically to an installation structure for a wafer turntable bottom sensor. Background Technology

[0002] A wafer refers to a silicon wafer used in the fabrication of silicon semiconductor integrated circuits. It is circular in shape and needs to be placed on a wafer turntable. During photolithography, the wafer needs to undergo multiple etching processes. On the wafer turntable, a bottom-gauge sensor is required to determine whether the wafer is placed correctly and to determine the subsequent processing height, ensuring accurate and stable processing. The bottom-gauge sensor is installed inside the wafer turntable, using the bottom of the turntable as a reference. Currently, the bottom-gauge sensor includes a sensor head and a cylinder that drives the sensor head to rise and fall. The cylinder is connected to an airflow interface. Then, the cylinder is directly fixed to the bottom of the wafer turntable. The installation and fixing are relatively cumbersome. When it is necessary to replace the cylinder or the sensor head, the air pipe on the airflow interface must be disconnected one by one, which is also very cumbersome. In addition, the bottom of the cylinder cannot be effectively guaranteed to be flush, affecting the accuracy of the bottom-gauge. Utility Model Content

[0003] The technical problem to be solved by this utility model is: a mounting structure for a wafer turntable bottom-testing sensor, which can ensure higher installation accuracy of the bottom-testing sensor, effectively reduce installation difficulty, and facilitate subsequent inspection and maintenance.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model is: a mounting structure for a wafer turntable bottom-testing sensor, including a base plate, an upper disk rotatably mounted on the base plate, a receiving groove corresponding to the bottom-testing sensor on the upper disk, a mounting base installed in the receiving groove, a sensor driving cylinder vertically inserted and mounted on the mounting base, the upper surface of the mounting base being a reference surface, the bottom of the sensor driving cylinder contacting the reference surface, an airflow channel communicating with the sensor driving cylinder on the mounting base, the airflow channel being connected to a cylinder driving air source, a bottom-testing sensor being vertically mounted on the sensor driving cylinder, a sensor wiring harness connected to the bottom-testing sensor on the sensor driving cylinder, and an auxiliary fixing device for vertically and stably mounting the sensor driving cylinder on the upper disk.

[0005] As a preferred embodiment, the mounting base is provided with an insertion port, the bottom of the sensor driving cylinder is provided with a pipe protrusion that inserts into the insertion port, the upper end face of the mounting base is provided with a sealing groove at the edge of the insertion port, a sealing ring is provided in the sealing groove, and the bottom of the sensor driving cylinder and the mounting base achieve a sealing fit by pressing the sealing ring.

[0006] As a preferred embodiment, the auxiliary fixing device includes an auxiliary rod that is vertically fixed on the upper disc, and a fixing block that clamps the auxiliary rod and the sensor drive cylinder together.

[0007] As a preferred embodiment, the auxiliary fixing device further includes an auxiliary positioning component, which has an inner positioning sleeve fitted on the auxiliary rod and an outer positioning sleeve fitted on the sensor drive cylinder, with the fixing block located above the auxiliary positioning component.

[0008] As a preferred embodiment, the auxiliary rod is provided with a limiting step, and the inner positioning sleeve abuts against the limiting step.

[0009] As a preferred embodiment, the receiving groove is a straight-line hole, and a mounting pad is provided below the mounting base to engage with the straight-line hole. The mounting pad is installed inside the straight-line hole, and the mounting base and the mounting pad are detachably fixed together. The outlet of the airflow channel is located on the side of the mounting base.

[0010] As a preferred embodiment, the number of bottom-measuring sensors is three and they are evenly distributed around the circumference, and the number of corresponding sensor-driven cylinders is also three. The auxiliary positioning component also includes connecting rods that sequentially connect the outer positioning sleeves.

[0011] After adopting the above technical solution, the effect of this utility model is as follows: Due to the mounting structure of the wafer turntable bottom-testing sensor, including a base plate, an upper disk is rotatably mounted on the base plate, the upper disk is provided with a receiving groove corresponding to the bottom-testing sensor, a mounting base is installed in the receiving groove, a sensor driving cylinder is vertically inserted and mounted on the mounting base, the upper surface of the mounting base is a reference surface, the bottom of the sensor driving cylinder is in contact with the reference surface, the mounting base is provided with an airflow channel communicating with the sensor driving cylinder, the airflow channel is connected to the cylinder driving air source, and the sensor... A bottom-measuring sensor is mounted on the lifting cylinder of the sensor drive unit. The sensor drive cylinder is also equipped with a sensor wiring harness connected to the bottom-measuring sensor. An auxiliary fixing device is provided on the upper disc to ensure the vertical and stable installation of the sensor drive cylinder. Inserting the sensor drive cylinder into the mounting base ensures effective communication with the airflow channel, making installation convenient. The mounting base is installed in the receiving groove, ensuring stable installation and ensuring that the height is flush. Then, the auxiliary fixing device ensures that the sensor drive cylinder can move up and down stably. The sensor wiring harness enables the bottom-measuring sensor to effectively detect, improving the usage effect.

[0012] Furthermore, since the mounting base is provided with an insertion port, the bottom of the sensor driving cylinder is provided with a pipe protrusion that inserts into the insertion port, and the upper end face of the mounting base is provided with a sealing groove at the edge of the insertion port. A sealing ring is provided in the sealing groove, and the bottom of the sensor driving cylinder and the mounting base achieve a sealing fit by squeezing the sealing ring. Inserting or pulling out the pipe protrusion can complete the connection or disconnection with the airflow channel, and the sealing ring can effectively improve the sealing effect, making the sensor driving cylinder more stable.

[0013] Furthermore, the auxiliary fixing device includes an auxiliary rod that is vertically fixed on the upper disc, and a fixing block that clamps the auxiliary rod and the sensor drive cylinder together; the fixing block enables the sensor drive cylinder to be effectively vertically fixed by relying on the auxiliary rod, thus ensuring a firm installation and stable lifting.

[0014] Furthermore, the auxiliary fixing device also includes an auxiliary positioning component, which has an inner positioning sleeve fitted on the auxiliary rod and an outer positioning sleeve fitted on the sensor driving cylinder. The fixing block is located above the auxiliary positioning component. The auxiliary positioning component can effectively ensure that the sensor driving cylinder can be accurately inserted into the mounting base in cooperation with the auxiliary rod, and can also ensure that the sensor driving cylinder and the auxiliary rod can be effectively parallel to each other, ensuring that the sensor driving cylinder can drive the bottom measuring sensor to rise and fall accurately and stably.

[0015] Furthermore, since the auxiliary rod is provided with a limiting step, the inner positioning sleeve abuts against the limiting step; thus, the auxiliary positioning component can be effectively limited at a certain height, ensuring stable and reliable mutual constraint.

[0016] Furthermore, since the receiving groove is a straight-line hole, a mounting pad is provided below the mounting base to fit and engage with the straight-line hole. The mounting pad is installed inside the straight-line hole, and the mounting base and the mounting pad are detachably fixed together. The outlet of the airflow channel is located on the side of the mounting base. First, the mounting pad is fixedly installed inside the straight-line hole, and then the mounting base is installed on the mounting pad to ensure that the airflow channel on the mounting base is exposed, which facilitates connection.

[0017] Furthermore, since there are three bottom-measuring sensors evenly distributed around the circumference, there are also three corresponding sensor-driven cylinders. The auxiliary positioning component also includes connecting rods that sequentially connect the outer positioning sleeves. In this way, the auxiliary positioning component can ensure that the corresponding sensor-driven cylinders and the corresponding auxiliary rods are effectively parallel, and also enable the three sensor-driven cylinders to constrain each other, which facilitates installation and improves the performance. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0019] Figure 1 This is a perspective view of an embodiment of the present utility model;

[0020] Figure 2 This is a structural schematic diagram of an embodiment of the present utility model;

[0021] Figure 3 This is a schematic diagram of the mounting base and sensor drive cylinder of this utility model embodiment;

[0022] Figure 4 This is a schematic diagram of the structure of the disk in an embodiment of the present invention;

[0023] Figure 5 This is a schematic diagram of the structure of the auxiliary positioning component according to an embodiment of the present invention;

[0024] In the attached diagram: 1. Base plate; 2. Upper disc; 3. Receiving groove; 4. Mounting base; 5. Sensor drive cylinder; 6. Airflow channel; 7. Bottom measuring sensor; 8. Sensor wiring harness; 9. Insertion port; 10. Pipe protrusion; 11. Sealing groove; 12. Auxiliary rod; 13. Fixing clamp; 14. Limiting step; 15. Auxiliary positioning component; 151. Inner positioning sleeve; 152. Outer positioning sleeve; 16. Connecting rod; 17. Mounting pad; 18. Semicircular groove. Detailed Implementation

[0025] The present invention will be further described in detail below through specific embodiments.

[0026] like Figures 1 to 5 As shown, a mounting structure for a wafer turntable bottom-testing sensor includes a base plate 1. An upper disc 2 is rotatably mounted on the bottom of the base plate 1. The upper disc 2 has a receiving groove 3 corresponding to the bottom-testing sensor 7. A mounting base 4 is installed within the receiving groove 3. A sensor driving cylinder 5 is vertically inserted into the mounting base 4. The upper surface of the mounting base 4 is a reference surface, and the bottom of the sensor driving cylinder 5 contacts the reference surface. The mounting base 4 has an airflow channel 6 communicating with the sensor driving cylinder 5. The airflow channel 6 is connected to a cylinder driving air source. The sensor driving cylinder 5 is lifted and lowered. The device includes a bottom-measuring sensor 7, and a sensor wiring harness 8 connected to the bottom-measuring sensor 7 is also provided on the sensor drive cylinder 5. The upper disc 2 is equipped with an auxiliary fixing device for the vertical and stable installation of the auxiliary sensor drive cylinder 5. Inserting the sensor drive cylinder 5 into the mounting base 4 ensures effective communication with the airflow channel 6, making installation convenient. The mounting base 4 is installed in the receiving groove 3, ensuring stable installation. Based on this, the installation is effectively vertical, ensuring accurate measurement. Then, the auxiliary fixing device ensures that the sensor drive cylinder 5 can rise and fall stably. The sensor wiring harness 8 enables the bottom-measuring sensor 7 to effectively detect, improving the usage effect.

[0027] In this embodiment, the mounting base 4 is provided with an insertion port 9, and the bottom of the sensor driving cylinder 5 is provided with a pipe protrusion 10 that inserts into the insertion port 9. The upper end face of the mounting base 4 is provided with a sealing groove 11 at the edge of the insertion port 9, and a sealing ring is provided in the sealing groove 11. The bottom of the sensor driving cylinder 5 and the mounting base 4 achieve a sealing fit by pressing the sealing ring. Inserting or pulling out the pipe protrusion 10 can complete the connection or disconnection with the airflow channel 6, and the sealing ring can effectively improve the sealing effect, making the sensor driving cylinder 5 more stable.

[0028] like Figure 2 As shown, the auxiliary fixing device includes an auxiliary rod 12 vertically fixed on the upper disc 2. A fixing block 13 clamps the auxiliary rod 12 and the sensor driving cylinder 5 together. There are three receiving slots 3 on the upper disc 2, and three mounting bases 4 are respectively installed in the three receiving slots 3. The sensor driving cylinder 5 is inserted and installed in each mounting base 4. The auxiliary rod 12 and the sensor driving cylinder 5 are then arranged parallel to each other. The fixing block 13 can effectively fix the sensor driving cylinder 5 with the auxiliary rod 12 as the reference. The fixing block 13 has a simple structure and is easy to use. The fixing block 13 consists of two mirror-arranged fixing half-blocks. The fixing half-blocks are provided with semi-circular grooves 18 that fit with the auxiliary rod 12 and the sensor driving cylinder 5. In this way, the semi-circular grooves 18 on the two fixing half-blocks form a complete circular groove to fix the auxiliary rod 12 and the sensor driving cylinder 5.

[0029] like Figure 5 As shown, the auxiliary fixing device also includes an auxiliary positioning component 15. The auxiliary positioning component 15 is provided with an inner positioning sleeve 151 fitted on the auxiliary rod 12 and an outer positioning sleeve 152 fitted on the sensor driving cylinder 5. The fixing block 13 is located above the auxiliary positioning component 15. First, the auxiliary positioning component 15 is fitted on the sensor driving cylinder 5. Then, the inner positioning sleeve 151 of the auxiliary positioning component 15 is fitted on the auxiliary rod 12. Then, the sensor driving cylinder 5 is inserted into the mounting base 4, completing the cooperation between the sensor driving cylinder 5 and the mounting base 4. Finally, the fixing block 13 is fixed on the auxiliary positioning component 15 to further ensure the fixation is stable and to effectively press the sensor driving cylinder 5 onto the mounting base 4.

[0030] like Figure 2 As shown, the auxiliary rod is provided with a limiting step 14, and the inner positioning sleeve 151 abuts against the limiting step 14; the limiting step 14 locks the inner positioning sleeve 151, thus ensuring that the auxiliary positioning component 15 will not fall, thereby limiting the auxiliary rod 12 and the sensor drive cylinder 5 at a certain height, so that the sensor drive cylinder 5 can be installed more accurately and the constraint is stable and reliable.

[0031] Furthermore, the receiving groove 3 is a straight-line hole, and the mounting base 4 is provided with a mounting pad 17 that fits into the straight-line hole. The mounting pad 17 is installed in the straight-line hole, and the mounting base 4 and the mounting pad 17 are detachably fixed. The outlet of the airflow channel 6 is located on the side of the mounting base 4. First, the mounting pad 17 is fixedly installed in the straight-line hole, and then the mounting base 4 is installed on the mounting pad 17, ensuring that the airflow channel 6 on the mounting base 4 is exposed, which facilitates connection and replacement, and improves convenience.

[0032] In this embodiment, there are three bottom-measuring sensors 7 evenly distributed around the circumference, and there are also three corresponding sensor-driving cylinders 5. The auxiliary positioning component 15 also includes a connecting rod portion 16 that sequentially connects the outer positioning sleeve portion 152. In this way, the auxiliary positioning component 15 forms a whole, constraining all three bottom-measuring sensors 7. This ensures that the corresponding sensor-driving cylinder 5 and the corresponding auxiliary rod 12 are effectively parallel, while the three sensor-driving cylinders 5 can also restrict each other, further improving the installation accuracy. Moreover, all three sensor-driving cylinders 5 can be inserted into the corresponding mounting base 4 at the same time, making installation convenient and improving the usage effect.

[0033] The above-described embodiments are merely preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Any modifications and alterations to the technical solution of the present utility model without departing from its design spirit shall fall within the protection scope defined by the claims of the present utility model.

Claims

1. A mounting structure of a wafer stage bottom sensing sensor, comprising a base plate, an upper disc being rotatably mounted on the base plate, characterized in that: The upper disc is provided with a containing groove corresponding to the bottom sensing sensor, an installation base is installed in the containing groove, a sensor driving cylinder is vertically inserted and installed on the installation base, the upper surface of the installation base is a reference surface, the bottom of the sensor driving cylinder is in contact with the reference surface, the installation base is provided with an airflow channel in communication with the sensor driving cylinder, the airflow channel is in communication with a cylinder driving gas source, the bottom sensing sensor is installed on the sensor driving cylinder, the sensor driving cylinder is further provided with a sensor wire harness connected to the bottom sensing sensor, and the upper disc is provided with an auxiliary fixing device for vertically and stably installing the auxiliary sensor driving cylinder.

2. A mounting structure for a wafer stage floor sensing sensor as defined in claim 1, wherein: The installation base is provided with an insertion port, the bottom of the sensor driving cylinder is provided with a pipe protrusion inserted into the insertion port, the edge of the upper end surface of the installation base located in the insertion port is provided with a sealing groove, a sealing ring is arranged in the sealing groove, and the bottom of the sensor driving cylinder and the installation base are sealingly matched by extruding the sealing ring.

3. A mounting structure for a wafer stage floor sensing sensor as defined in claim 2, wherein: The auxiliary fixing device comprises an auxiliary rod vertically and fixedly installed on the upper disc, and a fixed clamping block is arranged between the auxiliary rod and the sensor driving cylinder.

4. A mounting structure for a wafer stage bottom sensing sensor as set forth in claim 3, characterized by: The auxiliary fixing device further comprises an auxiliary positioning member, the auxiliary positioning member is provided with an inner positioning sleeve portion sleeved on the auxiliary rod and an outer positioning sleeve portion sleeved on the sensor driving cylinder, and the fixed clamping block is located above the auxiliary positioning member.

5. A mounting structure for a wafer stage bottom sensing sensor as set forth in claim 4, characterized by: The auxiliary rod is provided with a limiting step, and the inner positioning sleeve portion abuts against the limiting step.

6. A mounting structure for a wafer stage bottom sensing sensor as defined in claim 1, wherein: The containing groove is a straight line hole, the installation base is provided below with an installation pad block matched and clamped with the straight line hole, the installation pad block is installed in the straight line hole, the installation base and the installation pad block are detachably fixed, and the outlet of the airflow channel is arranged on the side surface of the installation base.

7. A mounting structure for a wafer stage bottom sensing sensor as defined in claim 5, wherein: The number of the bottom sensing sensors is three and is circumferentially distributed, the number of the corresponding sensor driving cylinders is also three, and the auxiliary positioning member further comprises a connecting rod portion sequentially connecting the outer positioning sleeve portions.

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