CVD (chemical vapor deposition) coating regenerated fiber particle filtering device

Abstract

The utility model relates to the technical field of regenerated fiber particle filtering, and discloses a CVD (chemical vapor deposition) coating regenerated fiber particle filtering device which comprises a filtering tank, switch assemblies for switching on and off the device are arranged on the left side and the right side of the bottom of the filtering tank, and a plurality of lock catches are fixedly connected to the outer portions of the two switch assemblies. The device comprises a filtering tank, a plurality of fixing frames are fixedly connected to the left side and the right side of the exterior of the filtering tank, lock bodies are rotatably connected to the interiors of the fixing frames, a fixing ring is fixedly connected to the interior of the filtering tank, a baffle is slidably connected to the interior of the filtering tank, and a plurality of filtering limiting elements are fixedly connected to the left side of the baffle. The right side of the baffle is detachably connected with a plurality of nuts. According to the utility model, the operation is simple and convenient, the assembly and disassembly of fiber elements are greatly facilitated, and a large amount of manpower is not required to be consumed by turning screws in a narrow space when the fiber filter bag is replaced, so that the manpower and time cost can be greatly saved.

Description

Technical Field

[0001] This utility model relates to the field of regenerated fiber particle filtration technology, and in particular to a CVD-coated regenerated fiber particle filtration device. Background Technology

[0002] Semiconductor integrated circuit manufacturing processes are numerous and complex, among which photolithography, etching, and thin film deposition are the three core steps. Silicon carbide material coating is an essential technology in chip manufacturing, requiring the use of raw materials and involving complex operational procedures. Therefore, the quality of the material coating equipment and the system auxiliary parameters directly determine the performance of the final device.

[0003] In the wafer coating manufacturing process, the main coating of our products is SiC. The coating process mainly involves MTS gas entering the mold tank for reaction. After five hours of high-temperature deposition at 1280°C, MTS generates SiC which is deposited on our products. During the production process, the exhaust gas generated is filtered through recycled fiber particles and then treated by the waste gas treatment device.

[0004] However, some existing CVD-coated regenerated fiber particle filtration devices use filter fiber elements assembled in a filter to filter particulate matter. After the equipment process is completed, the fiber filter bag needs to be replaced once per batch. Due to the defects of the device, each replacement of the fiber filter bag requires a lot of manpower. Therefore, in order to address the above shortcomings, a CVD-coated regenerated fiber particle filtration device is proposed to solve the above problems. Utility Model Content

[0005] To overcome the above shortcomings, this utility model provides a CVD-coated regenerated fiber particle filter device, which aims to improve the problem that the existing CVD-coated regenerated fiber particle filter device requires a lot of trouble to disassemble the screws when replacing the fiber element.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A CVD coated regenerated fiber particle filtration device includes a filter tank. Switching assemblies for switching devices are provided on both the left and right sides of the bottom of the filter tank. Multiple latches are fixedly connected to the exterior of each of the two switching assemblies. Multiple fixing frames are fixedly connected to the exterior of both the left and right sides of the filter tank. Locking bodies are rotatably connected inside each of the fixing frames. A fixing ring is fixedly connected inside the filter tank. A baffle is slidably connected inside the filter tank. Multiple filter limiting elements are fixedly connected to the left side of the baffle. Multiple nuts are detachably connected to the right side of the baffle. A compression spring is fixedly connected to the right side of the baffle. An inlet / outlet assembly for air intake and exhaust is provided on the rear exterior of the filter tank.

[0008] As a further description of the above technical solution:

[0009] Both of the switch assemblies include a connecting base. The bottom of both connecting bases is fixedly connected to the left and right sides of the bottom of the filter tank. A fixed shaft is fixedly connected inside both connecting bases. Torsion springs are sleeved on the front and rear sides of the two fixed shafts. A cover plate is rotatably connected to the outside of both fixed shafts.

[0010] As a further description of the above technical solution:

[0011] The inlet and outlet assembly includes an exhaust gas outlet pipe, the front side of which is fixedly connected to the rear side of the filter canister, an exhaust gas inlet pipe is fixedly connected to the rear side of the filter canister, and an argon gas pre-charge inlet pipe is fixedly connected to the left side of the exhaust gas inlet pipe.

[0012] As a further description of the above technical solution:

[0013] The lock body is externally slidably connected to the inside of the buckle, and the two adjacent sides of the cover plates respectively contact the left and right sides of the outside of the filter tank;

[0014] As a further description of the above technical solution:

[0015] The left side of the baffle contacts the right side of the fixing ring, and the internal thread of the nut is connected to the external right side of the filter limiting element;

[0016] As a further description of the above technical solution:

[0017] One end of the compression spring is fixedly connected to the right side of the baffle, and the other end of the compression spring is in contact with the side of the cover plate near the fixing ring.

[0018] This utility model has the following beneficial effects:

[0019] 1. In this utility model, when it is necessary to replace the fiber element, the cover of the filter tank is opened, and the cover moves the compression spring. The compression spring no longer squeezes the baffle. At this time, there is no need to remove the nut of the fiber element. The fiber element can be taken out directly by removing the spring. During installation, the fiber element and the baffle are put in, the cover is closed, and the cover squeezes the compression spring, so that the baffle and the buckle overlap and fix it. The operation is simple and greatly facilitates the loading and unloading of the fiber element. There is no need to tighten screws in a narrow space when replacing the fiber filter bag, which consumes a lot of manpower, thus greatly saving manpower and time costs.

[0020] 2. In this invention, after the process is completed, argon gas is injected into the filter canister through the argon pre-filling inlet pipe to purge any remaining flammable and explosive mixture of gases inside the canister, thus fully diluting the internal gas composition. Previously, when the filter was opened to replace fiber elements, flammable and hazardous chemicals such as MTS in the residual exhaust gas could spontaneously combust upon contact with air, posing a significant safety hazard. Now, with argon purging and dilution, the gas concentration is effectively reduced, preventing spontaneous combustion when the canister is opened to replace fiber elements, thus ensuring the personal safety of operators and the safety of the production environment. Attached Figure Description

[0021] Figure 1 This is a perspective view of a CVD-coated regenerated fiber particle filtration device proposed in this utility model;

[0022] Figure 2 This is a schematic diagram of the filter tank structure of a CVD coated regenerated fiber particle filtration device proposed in this utility model.

[0023] Figure 3 This is a schematic diagram of the baffle structure of a CVD coated regenerated fiber particle filter device proposed in this utility model;

[0024] Figure 4 This is a schematic diagram of the fixed shaft structure of a CVD coated regenerated fiber particle filtration device proposed in this utility model.

[0025] Legend:

[0026] 1. Filter canister; 2. Connecting base; 3. Fixed shaft; 4. Torsion spring; 5. Cover plate; 6. Lock; 7. Fixed frame; 8. Lock body; 9. Fixed ring; 10. Baffle; 11. Filter limiting element; 12. Nut; 13. Compression spring; 14. Exhaust gas outlet pipe; 15. Exhaust gas inlet pipe; 16. Argon pre-charge inlet pipe. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] Reference Figures 1 to 2This utility model provides an embodiment of a CVD-coated regenerated fiber particle filtration device, comprising a filter tank 1, which serves as the core housing structure of the entire device. Switching components for switching devices are provided on both the left and right sides of the bottom of the filter tank 1. Each switching component includes a connecting base 2, the bottom of which is fixedly connected to the left and right sides of the bottom of the filter tank 1. A fixed shaft 3 is fixedly connected inside each of the two connecting bases 2. The connecting bases 2 are the basic support structure for the switching components, providing a stable installation position for the fixed shaft 3. Torsion springs 4 are fitted on the front and rear sides of the two fixed shafts 3. When the cover plate 5 is opened, the torsion springs 4 undergo elastic deformation to store energy; when the cover plate 5 is closed, the torsion springs 4 release energy, pushing the cover plate 5 to automatically close, allowing the cover plate 5 to tightly fit the filter tank 1, enhancing the device's sealing performance and facilitating operation. The cover plates 5 are rotatably connected to the outside of each of the two fixed shafts 3. During device operation, the cover plates 5 rotate around the fixed shafts 3, realizing the opening and closing operations of the device. The adjacent sides of the two cover plates 5 are in contact with the left and right sides of the filter tank 1, respectively.

[0029] Reference Figures 1 to 3 Both switch assemblies are externally fixedly connected to multiple latches 6. Multiple fixing frames 7 are fixedly connected to the left and right sides of the filter tank 1. The fixing frames 7 provide the installation position and rotation space for the lock body 8, allowing the lock body 8 to smoothly cooperate with the latches 6 to lock and unlock the cover plate 5, ensuring the normal opening and closing of the device. The lock body 8 is rotatably connected inside each of the multiple fixing frames 7. When the device is closed, the lock body 8 slides inside the latches 6, firmly locking the cover plate 5 onto the filter tank 1, ensuring the device will not open accidentally during operation and improving the device's safety and stability. The lock body 8 is externally slidably connected to the inside of the latches 6. A fixing ring 9 is fixedly connected inside the filter tank 1, and a baffle 10 is slidably connected inside the filter tank 1. The fixing ring 9 provides support and positioning for the baffle 10, changing the original structure where the baffle plate was directly welded shut, allowing the baffle 10 to slide within the filter tank 1. When installing fiber elements, the baffle 10 can be positioned by the fixing ring 9 and cooperate with the filter limiting element 11 to fix the fiber elements; when replacing fiber elements, the baffle 10 can be moved under the action of the compression spring 13 to facilitate the removal and installation of fiber elements.

[0030] The left side of the baffle 10 contacts the right side of the fixing ring 9. Multiple filter limiting elements 11 are fixedly connected to the left side of the baffle 10. When installing the fiber element, the fiber element is sleeved on the filter limiting element 11 to ensure the correct installation position of the fiber element in the filter tank 1 and to ensure the stability of the filtration effect. Multiple nuts 12 are detachably connected to the right side of the baffle 10. The internal threads of the nuts 12 are connected to the external right side of the filter limiting element 11. A compression spring 13 is fixedly connected to the right side of the baffle 10. One end of the compression spring 13 is fixedly connected to the right side of the baffle 10, and the other end of the compression spring 13 is in contact with the side of the cover plate 5 near the fixing ring 9. When the cover plate 5 is closed, the cover plate 5 squeezes the compression spring 13, causing the compression spring 13 to generate elastic force, pushing the baffle 10 to move to the left, so that the baffle 10 fits tightly with the fixing ring 9, and at the same time fixes the fiber element. When the cover plate 5 is opened, the compression spring 13 is no longer squeezed, its elastic force disappears, and the baffle 10 can move inside the filter tank 1, which facilitates the removal of the fiber element and realizes the quick loading and unloading of the fiber element.

[0031] Reference Figure 1 , Figure 2 and Figure 4 The filter tank 1 has an inlet / outlet assembly on its outer rear side for inlet and outlet gas. This assembly includes a tail gas outlet pipe 14, the front of which is fixedly connected to the outer rear side of the filter tank 1. The tail gas outlet pipe 14 is used to discharge the filtered tail gas. A tail gas inlet pipe 15 is fixedly connected to the outer rear side of the filter tank 1. The tail gas generated during the process enters the filter tank 1 through the tail gas inlet pipe 15 and undergoes filtration within the filter tank 1. An argon pre-filling inlet pipe 16 is fixedly connected to the left side of the tail gas inlet pipe 15. After the process is completed, argon gas is introduced into the filter tank 1 through this pre-filling pipe. Argon gas can pre-purge any remaining flammable and explosive gas mixture inside the tank, effectively diluting the internal gas components, reducing the gas concentration, and preventing spontaneous combustion when opening the tank to replace fiber elements, thus improving the safety of the device.

[0032] Working Principle: In the operation of a CVD coated regenerated fiber particle filter device, after the process is completed, argon gas is first injected into the filter tank 1 through the argon pre-filling inlet pipe 16 on the left side of the exhaust gas inlet pipe 15. This pre-purges the remaining flammable and explosive mixture in the tank, fully diluting the internal gas composition and preventing spontaneous combustion when the tank is opened. When it is necessary to replace the fiber element, the cover plate 5 of the filter tank 1 is opened. The cover plate 5 moves the compression spring 13, which no longer presses against the baffle 10. Because the fixed ring 9 welded inside the filter tank 1 changes the original structure of the directly welded clamping plate, the clamping plate is in a movable state. At this time, there is no need to disassemble the nut 12 of the fiber element in a confined space; the fiber element can be removed directly by removing the spring. During installation, the fiber element and baffle 10 are placed in, and the cover plate 5 is closed. The cover plate 5 compresses the compression spring 13, causing the baffle 10 and the buckle to overlap and fix, thereby achieving rapid installation and replacement of the fiber element. The entire process effectively solves the problems of spontaneous combustion and high labor costs associated with replacing fiber filter bags in existing technologies.

[0033] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A CVD-coated regenerated fiber particle filtration device, comprising a filter tank (1), characterized in that: The filter tank (1) has switch components for switching devices on both the left and right sides of its bottom. Multiple latches (6) are fixedly connected to the outside of each of the two switch components. Multiple fixing frames (7) are fixedly connected to the left and right sides of the filter tank (1). Lock bodies (8) are rotatably connected inside the multiple fixing frames (7). A fixing ring (9) is fixedly connected inside the filter tank (1). A baffle (10) is slidably connected inside the filter tank (1). Multiple filter limiting elements (11) are fixedly connected to the left side of the baffle (10). Multiple nuts (12) are detachably connected to the right side of the baffle (10). A compression spring (13) is fixedly connected to the right side of the baffle (10). An inlet / outlet assembly for air inlet / outlet is provided on the rear side of the filter tank (1).

2. The CVD coated regenerated fiber particle filter device according to claim 1, characterized in that: Both of the switch assemblies include a connecting base (2), the bottom of both connecting bases (2) is fixedly connected to the bottom left and right sides of the filter tank (1), a fixed shaft (3) is fixedly connected inside both connecting bases (2), torsion springs (4) are sleeved on the front and rear sides of the two fixed shafts (3), and a cover plate (5) is rotatably connected to the outside of both fixed shafts (3).

3. The CVD coated regenerated fiber particle filter device according to claim 1, characterized in that: The inlet and outlet assembly includes an exhaust gas outlet pipe (14), the front side of which is fixedly connected to the rear side of the filter canister (1), an exhaust gas inlet pipe (15) is fixedly connected to the rear side of the filter canister (1), and an argon gas pre-charge inlet pipe (16) is fixedly connected to the left side of the exhaust gas inlet pipe (15).

4. The CVD coated regenerated fiber particle filter device according to claim 2, characterized in that: The lock body (8) is externally slidably connected to the inside of the latch (6), and the two cover plates (5) are respectively in contact with the left and right sides of the outside of the filter tank (1).

5. The CVD coated regenerated fiber particle filter device according to claim 1, characterized in that: The left side of the baffle (10) is in contact with the right side of the fixing ring (9), and the internal thread of the nut (12) is connected to the external right side of the filter limiting element (11).

6. The CVD coated regenerated fiber particle filter device according to claim 2, characterized in that: One end of the compression spring (13) is fixedly connected to the right side of the baffle (10), and the other end of the compression spring (13) is in contact with the side of the cover plate (5) near the fixing ring (9).

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