Graphite boat turnover device and graphite boat disassembly and assembly equipment

Abstract

The utility model provides a graphite boat turnover device and graphite boat disassembly and assembly equipment. The graphite boat turnover device provided by the utility model comprises a turnover station, a turnover driving mechanism and a clamping mechanism, the overturning station comprises a first supporting platform and a second supporting platform which are connected according to a preset angle; the first supporting platform and the second supporting platform are respectively used for supporting the side surface and the bottom surface of the graphite boat; the turnover driving mechanism is connected with the turnover station and used for rotating the turnover station, the two ends of the first supporting platform are connected with the symmetrical clamping mechanisms, the clamping mechanisms are used for clamping graphite boat feet at the two ends of the graphite boat in the length direction, and the graphite boat can be stably turned over.

Description

Technical Field

[0001] This application relates to the field of graphite boat disassembly and assembly, and more particularly to a graphite boat tilting device and graphite boat disassembly and assembly equipment. Background Technology

[0002] Graphite boats are key components used in industries such as photovoltaics and semiconductors to support silicon wafers or other materials, and are repeatedly used in high-temperature processes such as diffusion and sintering. Due to process requirements, graphite boats need to be disassembled, cleaned, maintained, and reassembled periodically.

[0003] Currently, automated loading, unloading, handling, and disassembly / assembly of graphite boats are achieved through graphite boat assembly / disassembly equipment, significantly improving production efficiency. When the graphite boat is in a vertical position, the graphite sheets are stacked vertically, which facilitates disassembly / assembly and makes it easier for handling devices to grasp them. However, graphite boats are usually stored and transported horizontally, so they need to be rotated to a vertical position for subsequent disassembly, handling, grasping, and assembly operations. Existing graphite boat assembly / disassembly equipment typically has two opposing gripper structures connected to a rotary motor. The gripper structures clamp the graphite boat, and the rotary motor drives the graphite boat to rotate 90° from a horizontal position to a vertical position.

[0004] However, this gripper structure has obvious drawbacks in its clamping and rotating method: in order to reduce the graphite boat from shifting or wobbling during rotation, the gripper structure may apply excessive pressure to the surface of the graphite boat during clamping, resulting in scratches on the surface or damage to the structure. Utility Model Content

[0005] To address the aforementioned problems, this application provides a graphite boat flipping device and a graphite boat disassembly and assembly equipment, which can achieve stable flipping of the graphite boat.

[0006] To achieve the objectives of this application, the following technical solution is provided:

[0007] In a first aspect, this application provides a graphite boat tilting device, comprising: a tilting station, a tilting drive mechanism, and a clamping mechanism;

[0008] The flipping station includes a first support platform and a second support platform connected together. The angle between the first support platform and the second support platform matches the connection angle between the side surface and the bottom surface of the graphite boat. The first support platform and the second support platform are respectively used to support the side surface and the bottom surface of the graphite boat during the flipping process.

[0009] The flipping drive mechanism is connected to the flipping station, and the flipping drive mechanism is used to rotate the flipping station;

[0010] The first support platform is connected to the symmetrical clamping mechanism along its length, and the clamping mechanism is used to clamp the graphite boat feet at both ends along the length of the graphite boat.

[0011] In one possible implementation, the clamping mechanism includes a gripper and a gripper drive module, the gripper drive module being used to drive the gripper to adjust the position of the gripper in the length direction of the first support platform and to adjust the opening size of the gripper.

[0012] In one possible implementation, the gripper drive module includes a first translation drive module and a first lifting drive module;

[0013] The first translation drive module is used to drive the gripper to move along the length direction of the flipping station to adjust the position of the two grippers in the length direction of the first support platform;

[0014] The first lifting drive module is used to drive the gripper to move in a direction perpendicular to the plane of the first support platform.

[0015] In one possible implementation, the gripper includes: a first gripper, a second gripper, and a third gripper;

[0016] The first clamping member and the second clamping member are arranged opposite to and parallel to each other, and the second clamping member and the third clamping member are perpendicularly connected.

[0017] The first clamping member is vertically connected to the first support platform via a first translation drive module. The free end of the telescopic rod of the first translation drive module is vertically connected to the first clamping member. The free end of the telescopic rod of the first lifting drive module is connected to the second clamping member. The first translation drive module is used to drive the gripper to move along the length direction of the first support platform. The first lifting drive module is used to drive the second clamping member and the third clamping member to move along a direction perpendicular to the plane of the first support platform.

[0018] The snap-fit ​​space formed by the free end face of the first clamping member, the second clamping member, and the third clamping member is used to snap the graphite boat foot.

[0019] In one possible implementation, the first support platform includes a platform plate, a second translation drive module, and a lifting mechanism;

[0020] The platform plate is used to support the side of the graphite boat in a horizontal state. The platform plate is driven away from or closer to the second support platform by the second translation drive module, and the platform plate is driven to move in a direction perpendicular to the platform plate by the lifting mechanism.

[0021] In one possible implementation, the first support platform further includes a fixed platform plate, the platform plate including a first translational platform plate and a first lifting platform plate, and the lifting mechanism including a lifting component and a second lifting drive module;

[0022] The first translation platform plate is movably connected to the fixed platform plate via the second translation drive module;

[0023] The first lifting platform plate is vertically and vertically connected to the first translation platform through the lifting component and the second lifting drive module.

[0024] In one possible implementation, the lifting assembly includes a base plate, a connecting column, and a retractable module;

[0025] The base plate is connected to the first translation platform plate via a connecting column. The first translation platform plate is connected to the first lifting platform plate via the telescopic module. The base plate is connected to one end of the second lifting drive module. One end of the telescopic rod of the second lifting drive module can pass through the fixed platform plate, the first translation platform plate and the first lifting platform plate and be movably connected.

[0026] In one possible implementation, the first support platform is perpendicularly connected to the second support platform, and the connection line between the first support platform and the second support platform is parallel to the length direction of the flipping station.

[0027] The second support platform has a hollow area, the position of which corresponds to the position of the nut on the bottom surface of the graphite boat.

[0028] One possible implementation also includes a positioning controller;

[0029] The positioning controller is installed on the flipping station. The positioning controller is used to collect the position information of the graphite boat, control the flipping station to move the graphite boat to a preset area, and control the movement and clamping action of the clamping mechanism.

[0030] Secondly, this application provides a graphite boat disassembly and assembly device, including a graphite boat tilting device as described in the first aspect.

[0031] Beneficial effects: The graphite boat turning device provided in this application enables stable turning of the graphite boat. Specifically, the graphite boat is placed in the turning station. During the turning process, the first support platform and the second support platform provide support and limit the graphite boat, while the clamping mechanism clamps the graphite boat at both ends, ensuring stable force and turning of the graphite boat. This avoids damage to the graphite boat caused by excessive clamping force or uneven force in traditional turning equipment, significantly reducing the risk of breakage during the turning process, and improving the stability and reliability of operation. Attached Figure Description

[0032] The accompanying drawings are provided to further understand this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof.

[0033] Figure 1 This is a schematic diagram of the structure of a graphite boat provided in an embodiment of this application;

[0034] Figure 2 This is a schematic diagram of the structure of a graphite boat tilting device provided in an embodiment of this application;

[0035] Figure 3 A schematic diagram of the structure of a graphite boat placed on a graphite boat flipping device before being flipped, as provided in an embodiment of this application;

[0036] Figure 4 for Figure 3 A schematic diagram of the graphite boat tilting device after it has been tilted 90° at the middle tilting station;

[0037] Figure 5 A schematic diagram of the graphite boat, which is in a vertical state after being flipped, placed in a graphite boat flipping device according to an embodiment of this application;

[0038] Figure 6 This illustration shows a schematic diagram of a graphite boat in a vertical position placed on a second support platform, according to an embodiment of this application.

[0039] Figure 7 This is a schematic diagram of the structure of a clamping mechanism provided in an embodiment of this application;

[0040] Figure 8 This is a schematic diagram of a lifting mechanism provided in an embodiment of this application;

[0041] Illustrations: 1. Graphite boat; 11. Graphite boat sheet; 12. Graphite boat foot; 13. Nut; 14. Bottom surface of graphite boat; 2. Graphite boat flipping device; 3. Flipping station; 31. First support platform; 311. Fixed platform plate; 312. Platform plate; 3121. First translational platform plate; 3122. First lifting platform plate; 313. Second translational drive module; 314. Lifting mechanism; 3141. Base plate; 3142. Connecting column; 3143. Telescopic module; 3144. Second lifting drive module; 32. Second support platform; 321. Hollowed-out area; 4. Flipping drive mechanism; 5. Clamping mechanism; 51. Gripper; 511. First clamping component; 512. Second clamping component; 513. Third clamping component; 52. Gripper drive module; 521. First lifting drive module; 522. First translational drive module. Detailed Implementation

[0042] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0043] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0044] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; in the description of this application, unless otherwise stated, "multiple" means two or more.

[0045] In the manufacturing process of solar cells, uncoated silicon wafers need to be inserted into the wafer carrier of a vacuum coating equipment and sent into the furnace tube for coating. Specifically, the silicon wafers are first fixed by setting fixing points on the graphite boat 11 of the wafer carrier (such as graphite boat 1), then the graphite boat is placed into the furnace tube, and a passivation film is deposited on the front or back of the silicon wafer. After the coating is completed, the graphite boat is removed from the furnace tube, and finally the coated silicon wafer is unloaded from the graphite boat.

[0046] Figure 1 This is a schematic diagram of the structure of a graphite boat provided in an embodiment of this application, as shown below. Figure 1As shown, the graphite boat 1 includes graphite boat sheets 11, ceramic rings, connecting rods, and electrode blocks. The graphite boat sheets 11 are arranged in parallel at a predetermined distance, and ceramic rings are placed between the graphite boat sheets 11 to ensure the spacing between them. The connecting rods sequentially pass through fixing holes opened on the first graphite boat sheet, the ceramic rings, and fixing holes opened on the second graphite boat sheet. The two ends of the connecting rods are fastened with nuts 13 to achieve a stable connection between the graphite boat sheets 11. Each graphite boat sheet 11 has multiple slots spaced apart, and each slot has multiple locking holes around it. The locking holes connect to locking points, and the silicon wafer can be fixed in the graphite boat through the locking points around the slots. For example, the connecting rods are threaded rods with insulating properties.

[0047] The graphite boat has two ends along its length, which are graphite boat feet 12. Each graphite boat foot 12 consists of boat lugs at both ends of the graphite boat sheet 11, electrode blocks, electrode rods, and nuts 13. Specifically, electrode blocks are positioned between the boat lugs, and electrode rods pass through the boat lugs and electrode blocks of the graphite boat sheet 11, with the ends of the electrode rods secured by nuts 13. The electrode rods are threaded rods.

[0048] The graphite boat flipping device 2 provided in this application embodiment is used to flip the graphite boat 1, which is in a horizontal state, to a vertical state.

[0049] The horizontal state of the graphite boat 1 means that the plane on which the graphite boat sheet 11 is located is perpendicular to the horizontal plane. The graphite boat 1 is generally placed in the furnace tube in a horizontal state to facilitate the coating of the front and back sides of the silicon wafer.

[0050] The vertical state of the graphite boat 1 means that the plane containing the graphite boat pieces 11 is parallel to the horizontal plane. When the graphite boat 1 is in a vertical state, the graphite boat pieces 11 of the graphite boat 1 are stacked in a vertical direction. This state is conducive to the disassembly and assembly of the nut 13 on the top surface of the graphite boat and to the gripping or placing of the graphite boat pieces 11, making the disassembly and assembly of the graphite boat convenient.

[0051] The side of the graphite boat refers to the end face perpendicular to the plane where the graphite boat sheet 11 is located. The bottom surface 14 of the graphite boat refers to the end face parallel to the plane where the graphite boat sheet 11 is located. The top surface of the graphite boat is opposite to and parallel to the bottom surface 14 of the graphite boat.

[0052] Figure 2 This is a schematic diagram of the structure of a graphite boat tilting device provided in an embodiment of this application, as shown below. Figure 2 As shown, the graphite boat flipping device 2 includes: a flipping station 3, a flipping drive mechanism 4, and a clamping mechanism 5.

[0053] The flipping station 3 includes a first support platform 31 and a second support platform 32 connected together. The angle between the first support platform 31 and the second support platform 32 matches the angle between the side of the graphite boat and the bottom surface 14 of the graphite boat connected together, which can ensure that the side of the graphite boat placed horizontally on the first support platform 31 can be in contact with the second support platform 32.

[0054] The first support platform 31 and the second support platform 32 are used to support the sides and bottom surface 14 of the graphite boat during the flipping process, respectively. Before flipping, the first support platform 31 is in a horizontal state, and the second support platform 32 is in a vertical state.

[0055] The flipping drive mechanism 4 is connected to the flipping station 3 and is used to rotate the flipping station 3. For example, the flipping drive mechanism 4 includes a rotary motor, the rotating shaft of which is rotatably connected to the flipping station 3 through a bearing. The rotating shaft of the rotary motor is parallel to the length direction of the graphite boat 1 and parallel to the length direction of the flipping station 3.

[0056] The first support platform 31 is connected to a symmetrical clamping mechanism 5 along its length. The clamping mechanism 5 has a clamping space for clamping the graphite boat foot 12. Specifically, two symmetrical clamping mechanisms 5 are connected to the first support platform 31 along its length, and the openings of the two clamping mechanisms 5 are opposite each other.

[0057] See Figure 3 The diagram shown is a schematic representation of a graphite boat, which is horizontal before being flipped, placed on a graphite boat flipping device according to an embodiment of this application. Figure 4 Shown Figure 3 A schematic diagram of the graphite boat tilting device after it has been tilted 90° at the middle tilting station. Figure 5 The diagram shown is a structural schematic of the graphite boat flipping device provided in this embodiment of the application when the graphite boat is flipped to a vertical state. Figure 6 This illustration shows a schematic diagram of a graphite boat in a vertical position placed on a second support platform, as provided in an embodiment of this application.

[0058] In this embodiment, firstly, a graphite boat 1 in a horizontal state is placed on the flipping station 3. A first support platform 31 in a horizontal state supports the side of the graphite boat, a second support platform 32 in a vertical state is attached to the bottom surface 14 of the graphite boat, and a clamping mechanism 5 clamps the graphite boat feet 12 at both ends of the graphite boat 1, thereby ensuring the stability and fixation of the graphite boat 1 during the flipping process. Then, the rotating shaft of the flipping drive mechanism 4 drives the flipping station 3 to rotate until the graphite boat 1 is flipped to a vertical state. At this time, the vertical graphite boat 1 is placed on the horizontal second support platform 32, and the bottom surface 14 of the graphite boat is in contact with the second support platform 32.

[0059] Existing graphite boat assembly / disassembly equipment typically involves first lifting the horizontally positioned graphite boat 1 using a graphite boat tilting and transporting mechanism, then tilting it 90° to a vertical position at a certain height above the ground before transporting it to the workstation of the graphite boat assembly / disassembly mechanism. However, the graphite boat assembly / disassembly equipment using the graphite boat tilting device 2 provided in this application eliminates the transporting step and makes the graphite boat 1 more stable during the tilting process.

[0060] It should be noted that the graphite boat flipping device 2 provided in this application embodiment can flip the graphite boat 1 from a horizontal state to a vertical state, and also flip the graphite boat 1 from a vertical state to a horizontal state. The flipping drive mechanism 4 provided in this application embodiment can achieve clockwise and counterclockwise rotation. Therefore, when the application scenario of the graphite boat flipping device 2 is not limited to the graphite boat disassembly and assembly process, the graphite boat flipping device 2 can also be used to place the graphite boat 1 in a vertical state and to flip the graphite boat 1 in a vertical state to a horizontal state.

[0061] Figure 7 This is a schematic diagram of a clamping mechanism provided in an embodiment of this application, as shown below. Figure 7 As shown, the clamping mechanism 5 includes a gripper 51 and a gripper 51 drive module. The gripper 51 drive module is used to drive the gripper 51 to adjust the position of the gripper 51 in the length direction of the first support platform 31 and to adjust the opening size of the gripper 51.

[0062] The gripper 51 drive module includes a first translation drive module 522 and a first lifting drive module 521.

[0063] The first translation drive module 522 is used to drive the gripper 51 to move along the length direction of the flipping station 3, so as to adjust the position of the two grippers 51 on the first support platform 31, so that the clamping mechanism 5 can move the graphite boat 1 in the length direction of the second support platform 32, so as to facilitate the alignment of the bottom surface 14 nut 13 of the graphite boat with the disassembly and assembly positioning component; secondly, it can also ensure that the clamping mechanism 5 can clamp graphite boats 1 of different lengths, so that the graphite boat flipping device 2 of this application can be used for graphite boats 1 of different lengths.

[0064] The first lifting drive module 521 is used to drive the gripper 51 to move in a direction perpendicular to the plane of the first support platform 31.

[0065] In another embodiment of this application, a gripper 51 is provided, including: a first gripper 511, a second gripper 512, and a third gripper 513. The first gripper 511 and the second gripper 512 are opposite to and parallel to each other, and the second gripper 512 and the third gripper 513 are perpendicularly connected.

[0066] For example, the first clamping member 511 is vertically connected to the first support platform 31 via a first translation drive module 522, specifically to the fixed platform plate 311 of the first support platform 31. The free end of the telescopic rod of the first translation drive module 522 is connected to the first clamping member 511, and the free end of the telescopic rod of the first lifting drive module 521 is connected to the second clamping member 512. The first translation drive module 522 drives the gripper 51 to move along the length of the fixed platform plate 311, and the second lifting drive module 3144 drives the second clamping member 512 and the third clamping member 513 to move along a direction perpendicular to the plane of the fixed platform plate 311.

[0067] It should be noted that the structures at both ends of the graphite boat 1 along its length are graphite boat feet 12. Graphite boat feet 12 are formed by multiple electrode blocks connected in series along the width of the graphite boat. The graphite boat feet 12 can be approximated as a cuboid structure, including a first side perpendicular to the graphite boat sheet 11, as well as a second side and a third side. The first side is perpendicularly connected to the second side, and the second side is perpendicularly connected to the third side. The first side and the third side are parallel and opposite to each other. The second clamping member 512 of the gripper 51 is parallel to the second side, and the third clamping member 513 is parallel to the first side. When the gripper 51 clamps the graphite boat feet 12, the second clamping member 512 abuts against the second side to apply a clamping force perpendicular to the second side, and the third clamping member 513 abuts against the first side to apply a tensile force perpendicular to the first side.

[0068] Another embodiment of this application provides a first support platform 31, which includes a platform plate 312, a second translation drive module 313, and a lifting mechanism 314.

[0069] The platform plate 312 is used to support the side of the graphite boat. The platform plate 312 is driven away from or closer to the second support platform 32 by the second translation drive module 313, and the platform plate 312 is driven to move in the vertical direction by the lifting mechanism 314.

[0070] In another embodiment of this application, a first support platform 31 is provided. The first support platform 31 further includes a fixed platform plate 311. The gripper 51 is movably connected to the fixed platform plate 311 via a first translation drive module 522. Specifically, the telescopic rod of the first translation drive module is parallel to the fixed platform plate, and one end of the telescopic rod is perpendicularly connected to a first clamping member. The platform plate 312 includes a first translation platform plate 3121 and a first lifting platform plate 3122. The lifting mechanism 314 includes a lifting assembly and a second lifting drive module 3144. See [link to relevant documentation]. Figure 8 The diagram shown is a structural schematic of a lifting mechanism 314 provided in an embodiment of this application.

[0071] The first translation platform plate 3121 is movably connected to the fixed platform plate 311 via the second translation drive module 313.

[0072] The first lifting platform plate 3122 is vertically connected to the first translation platform via the second lifting drive module 3144.

[0073] The lifting assembly includes a base plate 3141, a connecting column 3142, and a telescopic module 3143. The telescopic module 3143 includes a sleeve and a sleeve rod, with the sleeves movably connected to each other.

[0074] The base plate 3141, the first translation platform, and the first lifting platform are arranged in parallel from bottom to top. The base plate 3141 is connected to the first translation platform plate 3121 via a connecting column 3142. The first translation platform plate 3121 is connected to the first lifting platform plate 3122 via a telescopic module 3143. The base plate 3141 is connected to the second lifting drive module 3144. The telescopic rod of the second lifting drive module 3144 can pass through the fixed platform plate 311, the first translation platform plate 3121, and the first lifting platform plate 3122 for movable connection.

[0075] With the above settings, the graphite boat flipping device provided in another embodiment of this application can achieve the following: before the flipping mechanism flips, when the horizontal graphite boat is placed on the first support platform 31, the first support platform 31 supports the side of the graphite boat, and the second translation drive module 313 adjusts the distance between the bottom surface 14 of the graphite boat and the second support platform 32 until the bottom surface 14 of the graphite boat and the second support platform 32 are in contact, so as to ensure that the second support platform 32 can provide support for the bottom surface 14 of the graphite boat during the flipping process. After the flipping mechanism flips 90°, the first support platform 31 is flipped to a vertical state. The graphite boat 1 is driven to move in the width direction of the second support platform 32 by the lifting mechanism 314, and the gripper 51 is driven to move in the length direction of the fixed platform plate 311 by the first translation drive module 522, thereby driving the graphite boat 1 to move in the length direction of the second support platform 32. Finally, the nut 13 on the bottom surface of the graphite boat 1 of the second support platform 32 is aligned with the hollow area 321 of the second support platform 32 and passes through the hollow area 321 to reach the working range of the nut 13 fixing device of the assembly and disassembly component.

[0076] Since the clamping mechanism 5 always clamps the graphite boat 1, in order to adapt to the lifting mechanism 314 driving the graphite boat 1 to move in the width direction of the second support platform 32, the second lifting drive module 3144 also needs to simultaneously drive the second clamping member 512 and the first clamping member 511 to move in the same direction for the same distance, so as to ensure that the clamping mechanism 5 can continuously clamp the graphite boat 1.

[0077] The assembly and disassembly components include a nut 13 fixing device. After the nut 13 on the bottom surface 14 of the graphite boat on the second support platform 32 is aligned with the nut 13 fixing device, the nut 13 fixing device clamps the nut 13 located on the bottom surface 14 of the graphite boat on the second support platform 32 (which can prevent the bottom nut 13 from rotating synchronously when disassembling the top nut 13 of the graphite boat). The nut 13 on the top surface of the graphite boat and the graphite boat sheet 11 are disassembled and assembled manually or using the assembly and disassembly device.

[0078] In another embodiment of this application, a flipping station 3 is provided. The first support platform 31 and the second support platform 32 of the flipping station 3 are vertically connected, and the connection line between the first support platform 31 and the second support platform 32 is parallel to the length direction of the flipping station 3. A graphite boat 1 in a horizontal state is placed on the flipping station 3, and the flipping drive mechanism 4 rotates the flipping station 3 by 90°. When the second support platform 32 of the flipping station 3 is in a horizontal plane, the graphite boat 1 is flipped to a vertical state.

[0079] Another embodiment of this application provides a graphite boat tilting device 2, which further includes a positioning controller. Exemplarily, the positioning controller includes a position sensor and / or a detection camera and / or a photodetector, etc., and the controller is electrically or communicatively connected to each drive mechanism and drive module.

[0080] The positioning controller is installed on the first support platform 31 and the second support platform 32. The positioning controller can collect the position information and / or image information and / or photoelectric information of the graphite boat 1, and control each drive mechanism or drive module to drive according to the position information and / or image information and / or photoelectric information, so as to clamp the graphite boat 1, rotate the flipping station 3, and move the graphite boat 1, thereby improving production efficiency and saving labor costs.

[0081] Another embodiment of this application provides a graphite boat flipping device 2 that integrates graphite boat assembly and disassembly. Specifically, a graphite boat assembly and disassembly positioning mechanism is set below a horizontal second support platform 32, and a graphite boat assembly and disassembly mechanism (such as a graphite boat nut assembly and disassembly robot and a graphite boat sheet handling mechanism) is set above it. In this way, the horizontal second support platform 32 is used as an assembly and disassembly platform for placing the graphite boat 1 in the assembly and disassembly steps. Therefore, according to the needs of the assembly and disassembly steps, a hollow area 321 is set in the second support platform 32. The position of the hollow area 321 corresponds to the distribution position of the nuts 13 on the bottom surface 14 of the graphite boat. The nuts 13 on the bottom surface 14 of the graphite boat on the second support platform 32 are aligned with the hollow area 321 and penetrate through the hollow area 321 to reach the working range of the graphite boat assembly and disassembly positioning mechanism for fixing the nuts 13.

[0082] Another embodiment of this application provides a graphite boat disassembly and assembly device. The graphite boat disassembly and assembly device includes the graphite boat tilting device 2 provided in this application, and also includes a loading and unloading turnover mechanism, a graphite boat disassembly and assembly positioning mechanism, and a graphite boat disassembly and assembly mechanism, etc. The specific working principle is as follows:

[0083] The AGV (Automated Guided Vehicle) transports the graphite boat to the first support platform 31 of the graphite boat flipping device 2. The first support platform 31 clamps and attaches the graphite boat 1 to the second support platform 32. The flipping drive mechanism 4 rotates the flipping station 3 to flip the graphite boat 1 to a vertical state.

[0084] The graphite boat 1 is moved in the width direction of the second support platform 32 by the lifting mechanism 314, and the gripper 51 is moved in the length direction of the fixed platform plate 311 by the first translation drive module 522, thereby moving the graphite boat 1 in the length direction of the second support platform 32. Finally, the nut 13 on the bottom surface 14 of the graphite boat on the second support platform 32 is aligned with the hollow area 321 of the second support platform 32 and continues to penetrate the hollow area 321 to reach the working range of the nut fixing device of the assembly and disassembly component.

[0085] The nut fixing device fixes the nut 13 on the bottom surface 14 of the graphite boat, so that it does not rotate synchronously when the nut 13 on the top surface of the graphite boat is removed. The graphite boat disassembly and assembly robot removes the nut 13, ceramic ring and electrode block on the top surface of the graphite boat respectively. The graphite boat sheet transport mechanism sequentially picks up the boat sheets and puts them into the graphite boat sheet transmission device to transport them to the boat sheet temporary buffer mechanism. After being detected and the checkpoint is replaced by the checkpoint machine, they are sent back to the second support platform 32 for assembly. The AGV car moves the assembled graphite boat away. During this process, the scrapped boat sheets, nuts 13 and ceramic rings are automatically replaced.

[0086] For example, the drive module involved in the embodiments of this application, excluding the flipping drive mechanism, includes a drive structure such as a motor or cylinder capable of linear propulsion or retraction. Optionally, it may also include an auxiliary mechanism to assist the drive module in linear motion. For instance, the drive module can be a telescopic cylinder, and the auxiliary mechanism can be a slide rail and a slider movably connected to the slide rail, with the slider moving in the same direction as the telescopic cylinder. Alternatively, the drive module can be a linear motor, with the auxiliary mechanism including a slide rail and a slider movably connected to the slide rail, the slider moving in the same direction as the linear motor.

[0087] The beneficial effects of adopting the embodiments of this application are as follows: The graphite boat flipping device provided by this application can achieve stable flipping of the graphite boat. Specifically, the graphite boat is placed in the flipping station, and through the joint support and limiting of the two side planes of the first support platform and the second support platform, the flipping station can provide upward support force to the graphite boat during the flipping process. At the same time, the clamping mechanism applies balanced frictional force at both ends of the graphite boat, ensuring that the graphite boat is subjected to uniform force during the flipping process. Therefore, it can effectively avoid the damage to the graphite boat caused by excessive clamping force or uneven force in traditional flipping equipment, significantly reduce the risk of breakage of the graphite boat during the flipping process, and improve the stability and reliability of operation.

[0088] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit it. This application is not limited to the exact structures described above and illustrated in the accompanying drawings, and it should not be considered that the specific implementation of this application is limited to these descriptions. For those skilled in the art, various changes and modifications made without departing from the concept of this application should be considered to fall within the protection scope of this application.

Claims

1. A graphite boat flipping device, characterized by, The invention relates to a graphite boat (1) turning device, comprising: a turning station (3), a turning driving mechanism (4) and a clamping mechanism (5); the turning station (3) comprises a first support platform (31) and a second support platform (32) connected, the angle between the first support platform (31) and the second support platform (32) matches the angle between the side surface of the graphite boat and the bottom surface (14) of the graphite boat; the first support platform (31) and the second support platform (32) are respectively used for supporting the side surface of the graphite boat and the bottom surface (14) of the graphite boat during the turning process; the turning driving mechanism (4) is connected with the turning station (3), and the turning driving mechanism (4) is used for rotating the turning station (3); the first support platform (31) is connected with the clamping mechanism (5) in the length direction, and the clamping mechanism (5) is used for clamping the graphite boat feet (12) at both ends of the graphite boat (1) in the length direction.

2. The graphite boat turnover device according to claim 1, characterized by the clamping mechanism (5) comprises a clamping jaw (51) and a clamping jaw driving module (52), and the clamping jaw driving module (52) is used for driving the clamping jaw (51) to adjust the position of the clamping jaw (51) in the length direction of the first support platform (31) and adjust the opening size of the clamping jaw (51).

3. The graphite boat turnover device according to claim 2, characterized by the clamping jaw driving module (52) comprises a first translation driving module (522) and a first lifting driving module (521); the first translation driving module (522) is used for driving the clamping jaw (51) to move along the length direction of the turning station (3) to adjust the position of the two clamping jaws (51) in the length direction of the first support platform (31); the first lifting driving module (521) is used for driving the clamping jaw (51) to move along a direction perpendicular to the plane where the first support platform (31) is located.

4. The graphite boat turnover device according to claim 3, characterized by the clamping jaw (51) comprises a first clamping piece (511), a second clamping piece (512) and a third clamping piece (513); the first clamping piece (511) is arranged opposite and parallel to the second clamping piece (512), and the second clamping piece (512) is connected perpendicularly to the third clamping piece (513); the first clamping piece (511) is connected perpendicularly to the first support platform (31) through the first translation driving module (522), the free end of the telescopic rod of the first translation driving module (522) is connected perpendicularly to the first clamping piece (511), and the free end of the telescopic rod of the first lifting driving module (521) is connected to the second clamping piece (512), wherein the first translation driving module (522) is used for driving the clamping jaw (51) to move in the length direction of the first support platform (31), and the first lifting driving module (521) is used for driving the second clamping piece (512) and the third clamping piece (513) to move along a direction perpendicular to the plane where the first support platform (31) is located; the clamping space formed by the free end face of the first clamping piece (511), the second clamping piece (512) and the third clamping piece (513) is used for clamping the graphite boat feet (12).

5. The graphite boat flipper apparatus of claim 1, wherein, The first support platform (31) comprises a platform plate (312), a second translation driving module (313) and a lifting mechanism (314); The platform plate (312) is used for supporting the side surface of the graphite boat in a horizontal state, the second translation driving module (313) is used for driving the platform plate (312) to move away from or close to the second support platform (32), and the lifting mechanism (314) is used for driving the platform plate (312) to move in a direction perpendicular to the platform plate (312).

6. The graphite boat flipper apparatus of claim 5, wherein, The first support platform (31) further comprises a fixed platform plate (311), the platform plate (312) comprises a first translation platform plate (3121) and a first lifting platform plate (3122), and the lifting mechanism (314) comprises a lifting assembly and a second lifting driving module (3144). The first translation platform plate (3121) is movably connected with the fixed platform plate (311) through the second translation driving module (313). The first lifting platform plate (3122) is liftably connected with the first translation platform through the lifting assembly and the second lifting driving module (3144).

7. The graphite boat flipper apparatus of claim 6, wherein, The lifting assembly comprises a bottom plate (3141), a connecting column (3142) and a telescopic module (3143). The bottom plate (3141) is connected with the first translation platform plate (3121) through the connecting column (3142), the first translation platform plate (3121) is connected with the first lifting platform plate (3122) through the telescopic module (3143), one end of the second lifting driving module (3144) is connected with the bottom plate (3141), and the other end of the telescopic rod of the second lifting driving module (3144) is movably connected with the fixed platform plate (311), the first translation platform plate (3121) and the first lifting platform plate (3122).

8. The graphite boat turnover apparatus according to claim 1, wherein The first support platform (31) is connected with the second support platform (32) perpendicularly, and a connection line between the first support platform (31) and the second support platform (32) is parallel to the length direction of the overturning station (3). The second support platform (32) is provided with a hollow region (321), and the hollow region (321) is located at a position corresponding to the nut (13) on the bottom surface (14) of the graphite boat.

9. The graphite boat turnover apparatus according to claim 1, wherein The overturning station (3) is further provided with a positioning controller. The positioning controller is installed on the overturning station (3) and is used for collecting position information of the graphite boat (1), controlling the overturning station (3) to move the graphite boat (1) to a preset region, and controlling movement and clamping actions of the clamping mechanism (5).

10. A graphite boat handling apparatus, characterized by comprising: The graphite boat overturning device comprises the graphite boat overturning device according to any one of claims 1-9.

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