Anti-attachment plate fixing structure and vacuum coating equipment

Abstract

The utility model relates to the field of vacuum coating, and provides an anti-attachment plate fixing structure and vacuum coating equipment, the anti-attachment plate fixing structure comprises an anti-attachment plate, a positioning part and a fastener, and a plurality of first through holes are formed in the anti-attachment plate; one end of the positioning part is fixedly mounted on the inner side wall of the coating cavity, the other end of the positioning part penetrates through the first through hole of the anti-adhesion plate, and a fastening hole is further formed in the part, exceeding the anti-adhesion plate, of the positioning part; the fastener is inserted into the fastening hole and attaches the guard plate to the positioning member in an abutting manner. The vacuum coating equipment comprises the anti-adhesion plate fixing structure. After the first through hole of the anti-attachment plate is aligned with the positioning component, the fastening piece is inserted into the fastening hole of the positioning component, and the anti-attachment plate is fixed to the positioning component; when the anti-adhesion plate is cleaned in the later period, only the fastener needs to be disassembled, the positioning component does not need to be disassembled and assembled repeatedly at the moment, frequent disassembly and assembly of the threaded hole in the film coating cavity and the positioning component can be effectively prevented, and the irreparable problems such as damage to the threaded hole in the inner wall of the film coating cavity and thread slipping are avoided.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating, and further to a protective plate fixing structure and vacuum coating equipment. Background Technology

[0002] Currently, most anti-fall plates still use screws and threaded holes inside the vacuum chamber for fixing. In actual use, the frequent disassembly and reassembly of screws due to the need for regular cleaning or replacement of the anti-fall plate can easily cause stripping and other damage to the internal threaded holes of the chamber, which is irreparable. In particular, the threaded holes machined on the surface of the vacuum chamber are prone to stripping after repeated disassembly and reassembly. Stripped threads lead to insecure fixing, causing wobbling and affecting the process results, as well as posing significant safety hazards. In addition, with screw fixing structures, after coating inside the chamber, not only the anti-fall plate but also the screws and other fasteners are coated, making it difficult to remove screws and other fasteners when replacing or cleaning the anti-fall plate, and sometimes even impossible to remove them. Utility Model Content

[0003] To address the aforementioned technical problems, the purpose of this utility model is to provide a protective plate fixing structure and a vacuum coating equipment. After the first through hole of the protective plate is aligned with the positioning component, the fastener is inserted into the fastening hole of the positioning component to fix the protective plate to the positioning component. The installation method is simple. When cleaning the protective plate later, only the fastener needs to be removed. At this time, the positioning component does not need to be repeatedly disassembled and reassembled. This can also effectively prevent frequent disassembly and reassembly of the threaded hole in the coating cavity and the positioning component, avoiding damage to the threaded hole on the inner wall of the coating cavity and irreparable problems such as stripping.

[0004] To achieve the above objectives, this utility model provides a protective plate fixing structure, including a protective plate, a positioning component, and fasteners, wherein the protective plate is provided with a plurality of first through holes;

[0005] One end of the positioning component is adapted to be fixedly installed on the inner wall of the coating cavity, and the other end of the positioning component is adapted to penetrate the first through hole of the anti-stick plate. The part of the positioning component that extends beyond the anti-stick plate is also provided with a fastening hole.

[0006] The fastener is adapted to be inserted into the fastening hole and to abut against the positioning component.

[0007] In some embodiments, the positioning component includes a fixing part, an abutting part, and a fastening part. The fixing part is adapted to be fixedly installed in a threaded hole on the inner wall of the coating cavity. The abutting part is adapted to abut against the anti-stick plate and the inner wall of the coating cavity, so that a gap space is left between the anti-stick plate and the inner wall of the coating cavity. The fastening part is disposed at the end of the abutting part away from the fixing part, and the fastening part is provided with a fastening hole and the fastening hole is arranged radially along the fastening part.

[0008] In some embodiments, a connecting auxiliary member is also included, which is adapted to be sleeved on the outside of the fastening portion and is adapted to abut against the anti-fall plate, and the fastener securely abuts against the connecting auxiliary member and the anti-fall plate.

[0009] In some embodiments, the positioning component is further provided with an exhaust hole, which is adapted to connect the inner side of the threaded hole of the coating cavity and the gap space between the anti-stick plate and the coating cavity.

[0010] In some embodiments, the positioning component is a positioning pin, and the fastener is a cotter pin.

[0011] In some embodiments, a vacuum connector is also included, which is adapted to be fixedly installed inside the coating cavity and positioned above the positioning component.

[0012] The anti-stick plate is also provided with a number of second through holes, which are located above the first through holes and are adapted to be attached to the vacuum connector.

[0013] In some embodiments, the first through hole is oval-shaped, the second through hole is gourd-shaped, and the long axis of both the first and second through holes is arranged along the vertical direction.

[0014] In some embodiments, the anti-fall plate includes a first plate, a second plate, and a third plate that are bent together, the second plate being adapted to vertically connect an adjacent end of the first plate and the third plate, the first through hole being disposed on the third plate, and the second through hole being disposed on the first plate.

[0015] According to another aspect of this application, a vacuum coating apparatus is further provided, including any of the anti-sticking plate fixing structures described in the preferred embodiments above.

[0016] Compared with the prior art, the anti-sticking plate fixing structure and vacuum coating equipment provided by this utility model have at least one of the following beneficial effects:

[0017] 1. After aligning the first through hole of the anti-collision plate with the positioning component, insert the fastener into the fastening hole of the positioning component to fix the anti-collision plate on the positioning component. The installation method is simple. When cleaning the anti-collision plate later, you only need to remove the fastener. At this time, the positioning component does not need to be repeatedly disassembled and reassembled. This can also effectively prevent frequent disassembly and reassembly of the threaded hole in the coating cavity and the positioning component, and avoid damage to the threaded hole on the inner wall of the coating cavity and irreparable problems such as stripping.

[0018] 2. The connecting auxiliary part is suitable for being sleeved on the outside of the fastening part. Through the tight fit with the fastening part, the connecting auxiliary part can also abut against the anti-fall plate, so that the anti-fall plate can obtain more uniform force during installation, thereby avoiding deformation or damage caused by excessive local force.

[0019] 3. The vent hole can promptly expel excess gas from the threaded hole, maintaining a dynamic balance between the gas pressure inside the threaded hole and the gas pressure inside the vacuum chamber. This balance not only effectively prevents thread damage caused by excessive internal and external pressure differences, but also ensures the stability and reliability of the entire anti-attachment plate fixing structure in a high vacuum environment.

[0020] 4. The vacuum connector is suitable for fixed installation on the inner side of the coating cavity and is located above the positioning component. The vacuum connector plays a key supporting and positioning role in the installation of the anti-stick plate, and also provides convenience for subsequent fixing operations. Attached Figure Description

[0021] The preferred embodiments will be described below in a clear and easy-to-understand manner, in conjunction with the accompanying drawings, to further explain the above-mentioned characteristics, technical features, advantages and implementation methods of this utility model.

[0022] Figure 1 This is an overall diagram of a protective plate fixing structure;

[0023] Figure 2 This is a cross-sectional view of a type of anti-stick plate fixing structure;

[0024] Figure 3 This is a cross-sectional view of the positioning component;

[0025] Figure 4 This is the installation diagram for the anti-collision plate;

[0026] Figure 5 This is an installation diagram of other locations for the anti-collision plate;

[0027] Figure 6 This is a structural diagram of the anti-collision plate.

[0028] Explanation of icon numbers:

[0029] Anti-collision plate 1, first plate 11, second through hole 111, second plate 12, third plate 13, first through hole 131, positioning component 2, fixing part 21, abutting part 22, vent hole 221, gap space 222, fastening part 23, fastening hole 231, fastener 3, connecting auxiliary component 4, vacuum connector 5. Detailed Implementation

[0030] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the specific implementation methods of this utility model will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0031] To keep the drawings concise, each figure only schematically shows the parts relevant to the utility model, and these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some figures, only one of the components with the same structure or function is schematically depicted, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one."

[0032] It should also be further understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0033] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] Furthermore, in the description of this application, the terms "first," "second," etc., are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance. It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

[0035] refer to Figures 1 to 3This utility model provides a protective plate fixing structure, including a protective plate 1, a positioning component 2, and a fastener 3. The protective plate 1 is provided with a plurality of first through holes 131. One end of the positioning component 2 is adapted to be fixedly installed on the inner side wall of the coating cavity, and the other end of the positioning component 2 is adapted to penetrate through the first through hole 131 of the protective plate 1. The part of the positioning component 2 that extends beyond the protective plate 1 is also provided with a fastening hole 231. The fastener 3 is adapted to be inserted into the fastening hole 231 and to abut against the positioning component 2 to install the protective plate 1.

[0036] In this embodiment, after the first through hole 131 of the anti-stick plate 1 is aligned with the positioning component 2, the fastener 3 is inserted into the fastening hole 231 of the positioning component 2, and the anti-stick plate 1 can be fixed on the positioning component 2. The installation method is simple. When cleaning the anti-stick plate 1 later, only the fastener 3 needs to be removed. At this time, the positioning component 2 does not need to be repeatedly disassembled and reassembled. This can also effectively prevent the frequent disassembly and reassembly of the threaded hole in the coating cavity and the positioning component 2, and avoid damage to the threaded hole on the inner wall of the coating cavity and irreparable problems such as stripping.

[0037] Specifically, in this application, the positioning component 2 plays a crucial supporting and connecting role. One end of it is used to firmly fix and install itself on the inner wall of the coating cavity, providing a stable foundation for the entire fixing structure through its tight fit with the inner wall of the coating cavity. The other end of the positioning component 2 passes through the first through hole 131 on the anti-attachment plate 1, ensuring the precise alignment of the anti-attachment plate 1 during installation. In addition, the portion of the positioning component 2 that extends beyond the anti-attachment plate 1 is also provided with a fastening hole 231. The fastener 3 is inserted into the fastening hole 231 on the positioning component 2 and abuts against the anti-attachment plate 1. Through the locking action of the fastener 3, the anti-attachment plate 1 is firmly fixed to the positioning component 2, thereby achieving stable installation of the anti-attachment plate 1 within the coating cavity. Fastener 3, by inserting into fastening hole 231 and abutting against anti-attachment plate 1, can firmly fix anti-attachment plate 1 to positioning component 2, effectively preventing anti-attachment plate 1 from loosening or shifting due to vibration or external force during use, ensuring the stability of anti-attachment plate 1 throughout the coating process; at the same time, fastener 3 makes the connection between anti-attachment plate 1 and positioning component 2 more reliable, reducing coating quality problems or equipment failures caused by loose connection. Moreover, by inserting positioning component 2 into the first through hole 131 of anti-attachment plate 1 and then fixing it with fastener 3, the entire installation process can be completed quickly. When maintenance or replacement of anti-attachment plate 1 is required, fastener 3 can be easily disassembled, allowing anti-attachment plate 1 to be quickly removed from positioning component 2, greatly improving the maintenance efficiency of coating equipment.

[0038] More specifically, the positioning component 2 includes a fixing part 21, an abutting part 22, and a fastening part 23. The fixing part 21 is adapted to be fixedly installed in a threaded hole on the inner wall of the coating cavity. The abutting part 22 is adapted to abut against the anti-stick plate 1 and the inner wall of the coating cavity, leaving a gap space 222 between the anti-stick plate 1 and the inner wall of the coating cavity. The fastening part 23 is located at the end of the abutting part 22 away from the fixing part 21, and the fastening part 23 is provided with a fastening hole 231, which is radially arranged along the fastening part 23. The fixing part 21 is located at one end of the positioning component 2, and its shape and size are adapted to the threaded hole on the inner wall of the coating cavity, so that it can be firmly embedded in the threaded hole, thereby realizing the stable fixation of the positioning component 2 in the coating cavity. This not only ensures the installation accuracy of the positioning component 2, but also provides a solid foundation for the entire fixing structure. The abutting part 22 is located between the fixing part 21 and the fastening part 23. It is adapted to abut against the anti-stick plate 1 and the inner wall of the coating cavity, so that a certain gap space 222 can be maintained between the anti-stick plate 1 and the inner wall of the coating cavity. This gap space 222 can effectively prevent the anti-stick plate 1 from directly contacting the inner wall of the coating cavity and causing wear. The fastening part 23 is located at the end of the abutting part 22 away from the fixing part 21 and is the key part for connecting the positioning component 2 and the fastener 3. The fastening part 23 is provided with a fastening hole 231, which is arranged along the radial direction of the fastening part 23 and is adapted to the shape and size of the fastener 3. When the fastener 3 is inserted into the fastening hole 231 and abuts against the anti-stick plate 1, it can further enhance the fixing effect of the anti-stick plate 1 and ensure its stability during the coating process. Through the coordinated action of the fixing part 21, the abutting part 22 and the fastening part 23, the positioning part 2 not only achieves its own firm installation in the coating cavity, but also provides precise positioning and stable support for the anti-stick plate 1.

[0039] It is worth noting that the positioning component 2 can adopt a cylindrical or polygonal columnar structure. The fixing method between the positioning component 2 and the inner wall of the coating cavity includes, but is not limited to, threaded hole fixing connection. Welding, threaded connection or mechanical snap-fit ​​connection can also be used, which will not be further described here. The fastening part 23 is preferably a smooth cylinder to reduce friction with the first through hole 131 of the anti-collision plate 1 and facilitate installation and disassembly. The fastening hole 231 is a blind hole or a through hole. The blind hole can prevent the fastener 3 from accidentally falling off during disassembly, while the through hole facilitates the installation and disassembly of the fastener 3. The positioning component 2 is preferably a positioning pin, and the fastener 3 is preferably a cotter pin. The fastener 3 can also be a bolt, screw, snap ring or elastic clip, etc. Bolts and screws are suitable for occasions that require a large fastening force and achieve the fixing of the anti-collision plate 1 through the thread engagement with the fastening hole 231; snap rings and elastic clips are suitable for occasions that do not require a high fastening force but require quick disassembly and assembly, and achieve the abutment and fixing with the anti-collision plate 1 through elastic deformation. To improve installation accuracy and stability, a guide bevel or chamfer can be provided at the edge of the first through hole 131 to facilitate the insertion and alignment of the positioning component 2. Simultaneously, a sealing ring or gasket can be provided on the inner wall of the first through hole 131 to prevent gas leakage or contaminant entry during the coating process.

[0040] Furthermore, it also includes a connecting auxiliary member 4, which is adapted to be sleeved on the outside of the fastening part 23 and adapted to abut against the anti-fall plate 1, and the fastener 3 fastens against the connecting auxiliary member 4 and the anti-fall plate 1.

[0041] In this embodiment, the connecting auxiliary member 4 is adapted to be sleeved on the outside of the fastening part 23. Through the close cooperation with the fastening part 23, the connecting auxiliary member 4 can also abut against the anti-collision plate 1, so that the anti-collision plate 1 can obtain more uniform force during the installation process, thereby avoiding deformation or damage caused by excessive local force.

[0042] Specifically, the connecting auxiliary component 4 is adapted to be sleeved on the outside of the fastening part 23 and abuts against the anti-attachment plate 1. At this time, the connecting auxiliary component 4 plays a buffering and transition role between the fastener 3 and the anti-attachment plate 1. During the installation process, the fastener 3 not only passes through the fastening hole 231, but also tightly connects the connecting auxiliary component 4 and the anti-attachment plate 1 together. This not only ensures the firm installation of the anti-attachment plate 1 in the coating cavity, but also avoids direct extrusion damage to the surface of the anti-attachment plate 1 caused by the fastener 3 through the buffering effect of the connecting auxiliary component 4, thereby extending the service life of the anti-attachment plate 1. The connecting auxiliary component 4 is preferably a gasket. It has good mechanical properties and wear resistance. By using a gasket, the contact area between the fastener 3 and the anti-attachment plate 1 can be significantly increased, thereby distributing the fastening force more evenly, avoiding relative misalignment between the fastener 3 and the first through hole 131, which would cause the anti-attachment plate 1 to fall off accidentally, and further improving the stability and reliability of the connection.

[0043] It is worth noting that during installation, the fastening part 23 first passes through the first through hole 131 and the connecting auxiliary part 4, and the fastener 3 then passes through the fastening hole 231, tightly connecting the connecting auxiliary part 4 and the anti-collision plate 1 together. This not only ensures a firm connection between the anti-collision plate 1 and the positioning part 2, but also further disperses the fastening force through the action of the connecting auxiliary part 4, so that the anti-collision plate 1 remains stable throughout the entire installation process. In addition, the presence of the connecting auxiliary part 4 also provides a buffer layer for the fastener 3, effectively reducing the wear that may occur when the fastener 3 is in direct contact with the anti-collision plate 1, thereby extending the service life of the anti-collision plate 1.

[0044] Furthermore, the positioning component 2 is also provided with an exhaust hole 221, which is adapted to connect the inner side of the threaded hole of the coating cavity and the gap space 222 between the anti-stick plate 1 and the coating cavity.

[0045] In this embodiment, the vent 221 can promptly discharge excess gas from the threaded hole, maintaining a dynamic balance between the gas pressure inside the threaded hole and the gas pressure inside the vacuum chamber. This balance not only effectively prevents thread damage caused by excessive internal and external pressure differences, but also ensures the stability and reliability of the entire anti-attachment plate fixing structure in a high vacuum environment.

[0046] Specifically, in the high-vacuum coating process, the coating chamber needs to maintain extremely low gas pressure to ensure high quality and efficiency. However, due to the irregular shape of the bottom of the threaded hole, the positioning component 2 cannot completely fill the threaded hole during installation, resulting in a certain space between the bottom of the threaded hole and the positioning component 2. If the gas in this space cannot be discharged in time, it may lead to a rapid accumulation of internal and external pressure difference. This pressure difference will not only affect the fixing stability of the anti-stick plate 1, but may also generate huge pressure on the threaded connection parts of the coating chamber, leading to thread damage, seal failure, and even more serious equipment failure. Therefore, the vent 221 is suitable for connecting the inner side of the threaded hole of the coating cavity and the gap space 222 between the anti-stick plate 1 and the coating cavity. This vent 221 is used for venting in the high vacuum cavity. The vent 221 can guide the gas to flow smoothly from the inside of the threaded hole to the inside of the vacuum cavity, avoiding gas accumulation. At the same time, by balancing the gas pressure, the vent 221 effectively reduces the mechanical stress caused by the pressure difference inside the threaded hole, thereby extending the service life of the threaded hole and avoiding damage to the threads caused by the internal and external pressure difference. It also ensures the stability of the gas pressure in the gap space 222 between the anti-stick plate 1 and the coating cavity, further enhancing the stability of the entire fixed structure.

[0047] It is worth noting that the vent 221 within the positioning component 2 not only solves the problem of thread damage caused by internal and external pressure differences in the high-vacuum coating chamber, but also further improves the performance and reliability of the entire anti-attachment plate fixing structure by optimizing the gas flow path. The opening position of the vent 221 is not fixed and can be processed according to actual installation requirements, as long as this vent 221 is used for venting within the high-vacuum chamber to avoid thread damage caused by internal and external pressure differences; in addition, the length of the positioning component 2 can also be adjusted at will, and installing multiple positioning components 2 can effectively support the anti-attachment plate 1, preventing damage to the substrate caused by sagging or deformation.

[0048] Further, refer to Figures 4 to 6 It also includes a vacuum connector 5, which is suitable for being fixedly installed inside the coating cavity and positioned above the positioning component 2; the anti-stick plate 1 is also provided with a number of second through holes 111, which are positioned above the first through hole 131 and are suitable for being attached to the vacuum connector 5.

[0049] In this embodiment, the vacuum connector 5 is suitable for fixed installation on the inner side of the coating cavity and is located above the positioning component 2. The vacuum connector 5 can play a key supporting and positioning role in the installation process of the anti-stick plate 1, and also provides convenience for subsequent fixing operations.

[0050] Specifically, the anti-stick plate 1 is suitable for being installed on the surrounding side walls, top wall, and bottom wall of the coating cavity to ensure cleanliness within the coating cavity. When the anti-stick plate 1 is fixedly installed on the surrounding side walls of the coating cavity, a second through hole 111 is provided on the anti-stick plate 1 to facilitate its fixation. The second through hole 111 is preferably gourd-shaped, allowing the anti-stick plate 1 to be attached to the vacuum connector 5 through the second through hole 111. This not only provides a preliminary fixing point for the anti-stick plate 1 but also ensures the stability and alignment accuracy of the anti-stick plate 1 during installation. The long axis of the second through hole 111 is arranged vertically, which further optimizes the connection between the anti-stick plate 1 and the vacuum connector 5, allowing the anti-stick plate 1 to be more firmly attached to the vacuum connector 5. The anti-stick plate 1 also has a first through hole 131, preferably oval in shape. The first through hole 131 is adapted to the positioning component 2, allowing the positioning component 2 to smoothly pass through the first through hole 131. The long axis of the first through hole 131 is also set vertically, which not only ensures the precise alignment between the positioning component 2 and the anti-collision plate 1, but also facilitates subsequent fastening operations. The oval-shaped first through hole 131 and the gourd-shaped second through hole 111 can not only perfectly fit with the corresponding components (positioning component 2 and vacuum connector 5), but also provide sufficient space to accommodate possible installation errors or component tolerances, and improve the fault tolerance of the installation.

[0051] More specifically, firstly, the protective plate 1 is hung on the vacuum connector 5 through the second through hole 111, providing an initial fixing point for the protective plate 1 and ensuring its stability during subsequent installation. Then, the positioning component 2 is inserted into the first through hole 131, further enhancing the fixing effect of the protective plate 1. Finally, by installing the connecting auxiliary component 4 and fasteners 3, the protective plate 1 and positioning component 2 are tightly connected together, thus achieving a secure installation of the protective plate 1. This installation sequence design fully considers the convenience and reliability of actual operation. By first using the second through hole 111 to hang the protective plate 1 on the vacuum connector 5, shaking or displacement of the protective plate 1 during installation can be effectively avoided, thereby improving the accuracy and efficiency of installation. Subsequently, the positioning component 2 is inserted and the fasteners 3 are installed, further enhancing the fixing effect of the protective plate 1 and ensuring its stability during use.

[0052] It is worth noting that the vacuum connector 5 is preferably a vacuum-specific screw. During use, because the upper vacuum connector 5 serves for positioning and support, it does not need to be removed during the disassembly and cleaning of the anti-stick plate 1. Therefore, it will not damage the threaded holes machined on the inner wall of the coating cavity. The lower positioning component 2, once its external thread is fixed to the inner wall of the coating cavity, does not need to be disassembled. After aligning the first through hole 131 on the anti-stick plate 1 and installing it in place, the fastener 3 can be inserted. Later, when cleaning the anti-stick plate 1, only the fastener 3 needs to be removed. This positioning component 2 does not require repeated disassembly and assembly, effectively preventing damage to the threaded holes on the inner wall of the coating cavity and irreparable problems such as stripping.

[0053] Furthermore, the protective plate 1 includes a first plate 11, a second plate 12, and a third plate 13 that are bent and arranged. The second plate 12 is adapted to vertically connect one adjacent end of the first plate 11 and the third plate 13. A first through hole 131 is provided on the third plate 13, and a second through hole 111 is provided on the first plate 11.

[0054] In this embodiment, the anti-collision plate 1 adopts a three-section bending structure, which not only optimizes the spatial layout of the anti-collision plate 1, but also further enhances its fixation stability and functionality in the coating cavity.

[0055] Specifically, the first plate 11 and the third plate 13 are arranged parallel to each other. The second plate 12 vertically connects to the adjacent ends of the first plate 11 and the third plate 13, forming a stable three-dimensional structure. This allows the anti-stick plate 1 to better withstand various external forces within the coating cavity, preventing displacement or damage due to vibration or impact. Furthermore, this bent structure allows the anti-stick plate 1 to better adapt to the limited space within the coating cavity, while providing sufficient installation space for other components (such as the vacuum connector 5 and the positioning component 2), thereby improving the space utilization rate of the entire coating equipment.

[0056] The first through hole 131 is provided on the third plate 13, and the second through hole 111 is provided on the first plate 11, making the installation process of the anti-collision plate 1 more convenient and efficient. First, the anti-collision plate 1 is hung on the vacuum connector 5 through the second through hole 111 located above, then the positioning component 2 is inserted through the first through hole 131 below, and finally the fastener 3 is installed. This sequence not only improves the installation accuracy, but also reduces possible errors during the installation process.

[0057] It is worth noting that the outer dimensions of the anti-stick plate 1 can be designed according to the actual coating cavity. The first through hole 131 can be machined on the plate. Furthermore, a gap space 222 can be left between the anti-stick plate 1 and the inner wall of the coating cavity, so that it will not be tightly attached to the inner wall of the cavity. This also makes it easier for operators to take it out and put it on when changing it.

[0058] Furthermore, this application provides a vacuum coating equipment, including the anti-stick plate fixing structure of any of the above embodiments. This application can fix the anti-stick plate 1 using the positioning component 2, fastener 3, and vacuum connector 5, which is also easy to replace. The structure is simple, the cost is low, and it can meet the requirement of full coverage of the cavity's interior. Furthermore, the parts can be mass-produced and centrally managed. When disassembling, cleaning, or replacing the anti-stick plate 1, it is not necessary to disassemble the positioning component 2 and vacuum connector 5 fixed to the inner wall of the coating cavity. During frequent disassembly and assembly, this effectively avoids damage to the threaded holes on the inner wall of the coating cavity, such as stripping, which is of great practical value. In addition, the connecting auxiliary component 4 and fastener 3 of this application can effectively prevent the bottom of the positioning component 2 from being coated with a film layer, thus preventing inconvenience or even inability for workers to disassemble the positioning component 2.

[0059] It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. A structure for preventing a fixing of a plate, characterized by comprising: The anti-reflective plate fixing structure comprises: an anti-reflective plate provided with a plurality of first through holes; a positioning component, one end of which is adapted to be fixedly installed on the inner side wall of the coating cavity, the other end of which is adapted to penetrate through the first through holes of the anti-reflective plate, and the part of the positioning component beyond the anti-reflective plate is further provided with a fastening hole; a fastener adapted to be inserted into the fastening hole and abuttingly installed the positioning component.

2. The anti-reflective plate fixing structure according to claim 1, wherein: the positioning component comprises a fixing part, an abutting part and a fastening part, the fixing part is adapted to be fixedly installed on the threaded hole on the inner side wall of the coating cavity, the abutting part is adapted to be abuttingly arranged between the anti-reflective plate and the inner side wall of the coating cavity, so that a gap space is left between the anti-reflective plate and the inner side wall of the coating cavity, the fastening part is arranged at the end of the abutting part away from the fixing part, and the fastening hole is arranged on the fastening part and is radially arranged along the fastening part.

3. The anti-reflective plate fixing structure according to claim 2, further comprising: a connecting auxiliary part adapted to be sleeved on the outside of the fastening part and adapted to abut against the anti-reflective plate, and the fastener fastens the connecting auxiliary part and the anti-reflective plate.

4. The anti-reflective plate fixing structure according to claim 2, wherein: an exhaust hole is further arranged in the positioning component, and the exhaust hole is adapted to communicate the inside of the threaded hole of the coating cavity and the gap space between the anti-reflective plate and the coating cavity.

5. The anti-reflective plate fixing structure according to claim 1, wherein: the positioning component is a positioning pin shaft, and the fastener is an open pin.

6. The anti-reflective plate fixing structure according to any one of claims 1-5, further comprising: a vacuum connecting part adapted to be fixedly installed on the inside of the coating cavity and oppositely located above the positioning component; the anti-reflective plate is further provided with a plurality of second through holes oppositely located above the first through holes, and the second through holes are adapted to be hung and arranged on the vacuum connecting part.

7. The anti-reflective plate fixing structure according to claim 6, wherein: the first through holes are waist-round-shaped, the second through holes are gourd-shaped, and the long axis directions of the first through holes and the second through holes are both arranged along the vertical direction.

8. The anti-reflective plate fixing structure according to claim 6, wherein: the anti-reflective plate comprises a first plate, a second plate and a third plate arranged in a bent manner, the second plate is adapted to perpendicularly connect adjacent ends of the first plate and the third plate, the first through holes are arranged on the third plate, and the second through holes are arranged on the first plate.

9. A vacuum coating apparatus, characterized by, The anti-reflective plate fixing structure according to any one of claims 1-8.

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