Quartz tube cleaning device for battery piece diffusion furnace

Abstract

The utility model relates to the technical field of cleaning equipment, in particular to a quartz tube cleaning device for a battery piece diffusion furnace, which comprises a rack, and a transfer mechanism, a placing mechanism and a cleaning mechanism which are arranged on the rack, the transfer mechanism is used for grabbing and placing a quartz tube, so that the quartz tube is transferred between the placing mechanism and the cleaning mechanism; the placing mechanism is used for placing a quartz tube, the cleaning mechanism is used for cleaning the quartz tube, the cleaning mechanism comprises a rotating seat, a water spraying pipe, a rotating driving part and a plurality of inner wall cleaning brushes, and through the design of the inner wall cleaning brushes and the water spraying pipe, the inner wall cleaning brushes and the water spraying pipe have a high-pressure water spraying synergistic effect, the stain removal rate is high, and automatic transferring and positioning are achieved; and the damage risk caused by manual operation is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to cleaning equipment technical field especially is related to a quartz tube cleaning device for battery piece diffusion furnace. BACKGROUND

[0002] The diffusion furnace quartz tube is the core container of the diffusion furnace and is used for carrying the semiconductor wafer to carry out processes such as doping and oxidation at high temperature.In the photovoltaic cell production process, the diffusion furnace quartz tube is prone to deposit residues on the inner wall due to long-term contact with chemicals and needs to be cleaned regularly.The traditional cleaning method relies on manual operation or single spraying equipment and has the following problems: manual cleaning is low in efficiency and difficult to completely remove stubborn stains on the inner wall;the existing mechanical cleaning device can only be washed in one direction and lacks brushing function, resulting in incomplete cleaning;the quartz tube needs to be repeatedly disassembled and assembled during the cleaning process, which is prone to damage. SUMMARY

[0003] The utility model solves the technical problems that the existing diffusion furnace quartz tube is prone to deposit residues on the inner wall due to long-term contact with chemicals and needs to be cleaned regularly.The traditional cleaning method relies on manual operation or single spraying equipment and has the problem of low cleaning efficiency, and provides a quartz tube cleaning device for battery piece diffusion furnace.

[0004] The utility model adopts the technical scheme that a quartz tube cleaning device for battery piece diffusion furnace includes a rack, a transfer mechanism, a placing mechanism and a cleaning mechanism arranged on the rack, the transfer mechanism is used for grabbing and placing the quartz tube to transfer the quartz tube between the placing mechanism and the cleaning mechanism, the placing mechanism is used for placing the quartz tube, and the cleaning mechanism is used for cleaning the quartz tube, the cleaning mechanism includes a rotating seat, a water spraying pipe, a rotating drive part and a plurality of inner wall cleaning brushes, the rotating seat is rotationally connected with the rack, the rotating drive part is fixedly connected with the rack, the output end of the rotating drive part is transmissionally connected with the rotating seat, the rotating seat is provided with a through hole in the center for the water spraying pipe to pass through, the water spraying end of the water spraying pipe passes through the through hole of the rotating seat, the water spraying end of the water spraying pipe is uniformly provided with water spraying holes, the inner wall cleaning brushes are fixedly connected with the rotating seat, and the inner wall cleaning brushes are circumferentially and intervally distributed around the water spraying pipe, the cleaning end of the inner wall cleaning brush is outward along the radial direction of the rotating seat, the high-pressure water spraying of the water spraying pipe and the inner wall cleaning brushes are cooperatively used to remove the stains, and the automatic transfer and positioning can avoid the damage caused by manual operation.

[0005] In order to solve the problem that the quartz tube with a closed end is difficult to clean, the cleaning mechanism further includes a top cleaning brush, the top cleaning brush is fixedly connected with the side wall cleaning brush, the cleaning end of the top cleaning brush faces upward, and the top cleaning brush has a ring structure.

[0006] In order to solve the problem of how to arrange the rotary driving part, further comprising the rotary driving part comprises a motor, a first transmission gear and a second transmission gear matched with the first transmission gear, the motor is fixedly connected with the rack, the output end of the motor is in transmission connection with the first transmission gear, and the second transmission gear is arranged on the rotary seat, and the first transmission gear is in mesh with the second transmission gear.

[0007] In order to solve the problem of inconvenient preparation and storage of the quartz tube, further comprising the placing mechanism comprises a placing rack, the placing rack is fixedly connected with the rack, and the placing rack is in a shape of a "∩".

[0008] In order to solve the problem of different sizes of the quartz tube, further comprising the placing mechanism comprises an elastic element and two fixing blocks, the fixing blocks are in sliding connection with the placing rack, the elastic element is arranged between the two fixing blocks, the end of the elastic element is fixedly connected with the fixing block on the side, and the outer end surface of the fixing block protrudes from the placing rack.

[0009] Further comprising that the outer end surface of the fixing block is provided with a lead-in surface which is contracted from bottom to top and inward.

[0010] Further comprising the transfer mechanism comprises a horizontal moving assembly, a lifting driving assembly and a grabbing part, the lifting driving assembly is fixedly connected with the rack, the output end of the lifting driving assembly is in transmission connection with the horizontal moving assembly, the lifting driving assembly is used for providing power for lifting movement of the grabbing part, the output end of the horizontal moving assembly is in transmission connection with the grabbing part, and the horizontal moving assembly is used for providing power for horizontal movement of the grabbing part.

[0011] Further comprising that the horizontal moving assembly comprises a mounting seat, a horizontal air cylinder, a horizontal sliding rail and a horizontal sliding block matched with the horizontal sliding rail, the mounting seat is in transmission connection with the output end of the lifting driving assembly, the horizontal sliding rail is fixedly connected with the mounting seat, the horizontal sliding rail is in sliding connection with the horizontal sliding block, the horizontal air cylinder is fixedly connected with the mounting seat, the output end of the horizontal air cylinder is fixedly connected with the horizontal sliding block, and the grabbing part is fixedly connected with the horizontal sliding block.

[0012] The battery piece diffusion furnace quartz tube cleaning device has the advantages that the inner wall cleaning brush and the water spraying pipe are designed, the high-pressure water spraying of the inner wall cleaning brush and the water spraying pipe is in synergistic action, the stain removal rate is high, automatic transfer and positioning are achieved, and the damage risk caused by manual operation is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0013] The utility model is further described below in combination with the drawings and examples.

[0014] Figure 1 is the structural schematic diagram of the utility model;

[0015] Figure 2 is the utility model Figure 1An enlarged structural schematic view at A in the middle;

[0016] Figure 3 The utility model Figure 2 A structural schematic view in a sectional view state.

[0017] In the drawing: 1, rack, 2, transfer mechanism, 21, transverse moving assembly, 211, mounting seat, 212, transverse air cylinder, 213, transverse slide rail, 214, transverse sliding block, 22, lifting drive assembly, 23, grabbing piece, 3, placing mechanism, 31, placing rack, 32, elastic element, 33, fixed block, 331, lead-in surface, 4, cleaning mechanism, 41, rotary seat, 42, water spraying pipe, 43, rotary drive piece, 431, motor, 432, first transmission gear, 433, second transmission gear, 44, inner wall cleaning brush, 45, top cleaning brush. DETAILED DESCRIPTION

[0018] The utility model will be explained in further detail now in combination with the drawings. These drawings are all simplified schematic views, just to schematically show the basic structure of the utility model, so it just shows the structure related to the utility model.

[0019] As Figure 1 It is structural schematic view of the utility model, a kind of quartz tube cleaning device for battery piece diffusion furnace, it is characterized in that, including rack 1 and the transfer mechanism 2, placing mechanism 3 and cleaning mechanism 4 being arranged on rack 1, transfer mechanism 2 is used to grab and place quartz tube, so that quartz tube is transferred between placing mechanism 3 and cleaning mechanism 4, placing mechanism 3 is used to place quartz tube, cleaning mechanism 4 is used to clean quartz tube, as Figure 2 、 3 As shown, cleaning mechanism 4 includes rotary seat 41, water spraying pipe 42, rotary drive piece 43 and several inner wall cleaning brushes 44, rotary seat 41 and rack 1 are rotatably connected, rotary drive piece 43 and rack 1 are fixedly connected, the output end of rotary drive piece 43 and rotary seat 41 are transmission connection, rotary seat 41 center is provided with through-hole for water spraying pipe 42 to pass through, the water spraying end of water spraying pipe 42 passes through the through-hole of rotary seat 41, and the water spraying end of water spraying pipe 42 is uniformly distributed with water spraying hole, to realize circumferential spraying cleaning liquid, inner wall cleaning brush 44 and rotary seat 41 are fixedly connected, and inner wall cleaning brush 44 is circumferentially spaced around water spraying pipe 42, and the cleaning end of inner wall cleaning brush 44 is outward along the radial direction of rotary seat 41, by the design of inner wall cleaning brush 44 and water spraying pipe 42, inner wall cleaning brush 44 and water spraying pipe 42 are synergistically actuated by high-pressure water spraying, and the stain removal rate is high, automatic transfer and positioning, avoid the breakage risk caused by manual operation, realize quartz tube cleaning full automation, significantly reduce labor cost, improve cleaning consistency, applicable to single crystal silicon, polycrystalline silicon and other various battery piece production processes.

[0020] AsFigure 2 , 3 As shown, the cleaning mechanism 4 includes a top cleaning brush 45, which is fixedly connected to a side wall cleaning brush. The cleaning end of the top cleaning brush 45 faces upward, and the top cleaning brush 45 has a ring structure.

[0021] like Figure 3 As shown, the rotary drive component 43 includes a motor 431, a first transmission gear 432, and a second transmission gear 433 that matches the first transmission gear 432. The motor 431 is fixedly connected to the frame 1, and the output end of the motor 431 is connected to the first transmission gear 432. The second transmission gear 433 is arranged on the rotary seat 41, and the first transmission gear 432 and the second transmission gear 433 mesh.

[0022] In another embodiment, the rotary drive 43 can also be a drive structure that engages with a cylinder, rack, and gear.

[0023] like Figure 1 As shown, the placement mechanism 3 includes a placement frame 31, which is fixedly connected to the frame 1. The placement frame 31 has a “∩” shaped structure.

[0024] like Figure 1 As shown, the placement mechanism 3 includes an elastic element 32 and two fixing blocks 33. The fixing blocks 33 and the placement frame 31 are slidably connected. The elastic element 32 is arranged between the two fixing blocks 33. The end of the elastic element 32 is fixedly connected to the fixing block 33 on its side. The outer end face of the fixing block 33 protrudes from the placement frame 31. The elastic element 32 is a spring. The outer end face of the fixing block 33 has a guide surface 331 that contracts inward from bottom to top.

[0025] like Figure 1 As shown, the transfer mechanism 2 includes a lateral movement component 21, a lifting drive component 22, and a gripping component 23. The lifting drive component 22 is fixedly connected to the frame 1. The output end of the lifting drive component 22 is drivenly connected to the lateral movement component 21. The lifting drive component 22 is used to provide power for the lifting and lowering movement of the gripping component 23. The output end of the lateral movement component 21 is drivenly connected to the gripping component 23. The lateral movement component 21 is used to provide power for the lateral movement of the gripped component. The lifting drive component 22 can be a power mechanism such as a cylinder, electric actuator, or lead screw mechanism.

[0026] like Figure 1As shown, the transverse moving assembly 21 comprises a mounting base 211, a transverse cylinder 212, a transverse sliding rail 213 and a transverse sliding block 214 matched with the transverse sliding rail 213, the mounting base 211 is in transmission connection with the output end of the lifting driving assembly 22, the transverse sliding rail 213 is in fixed connection with the mounting base 211, the transverse sliding rail 213 is in sliding connection with the transverse sliding block 214, the transverse cylinder 212 is in fixed connection with the mounting base 211, the output end of the transverse cylinder 212 is in fixed connection with the transverse sliding block 214, the grabbing piece 23 is in fixed connection with the transverse sliding block 214, and the grabbing piece 23 can be a starting clamp jaw or a mechanical gripper.

[0027] Working principle: when in use, the quartz tube is placed on the placing rack 31, the transverse moving assembly 21 and the lifting driving assembly 22 are started, so that the grabbing piece 23 moves to the placing rack 31 where the quartz tube is placed and grabs the quartz tube, the transverse moving assembly 21 and the lifting driving assembly 22 are started again, so that the grabbing piece 23 carrying the quartz tube moves above the inner wall cleaning brush 44 and continues to move downward, so that the quartz tube covers the inner wall cleaning brush 44, at this time, the inner wall cleaning brush 44 and the water spraying pipe 42 are located inside the quartz tube, and the cleaning starts, the rotary driving piece 43 is started to drive the rotary seat 41 to rotate, the rotary seat 41 drives the inner wall cleaning brush 44 to rotate, and the water spraying pipe 42 starts to spray cleaning liquid at the same time, so that the inner wall of the quartz tube is cleaned, until the cleaning is completed; after the cleaning is completed, the transverse moving assembly 21 and the lifting driving assembly 22 are started again, so that the cleaned quartz tube is placed on the placing rack 31.

[0028] Based on the above ideal embodiments of the present application, through the above description, relevant personnel can make various changes and modifications without deviating from the technical idea of the present application. The technical scope of the present application is not limited to the content in the specification, and must be determined according to the scope of claims.

Claims

1. A quartz tube cleaning device for a solar cell diffusion furnace, characterized in that, The utility model relates to a quartz tube cleaning device, including frame (1) and the transfer mechanism (2) of arrangement on frame (1), the mechanism (3) of placing and the cleaning mechanism (4) of arrangement, the transfer mechanism (2) is used for the quartz tube is placed, so that quartz tube is transferred between the mechanism (3) of placing and the cleaning mechanism (4), the mechanism (3) of placing is used for the quartz tube is placed, the cleaning mechanism (4) is used for cleaning quartz tube, the cleaning mechanism (4) includes rotary seat (41), water jet pipe (42), rotary drive part (43) and a plurality of inner wall cleaning brush (44), rotary seat (41) and frame (1) rotation connection, rotary drive part (43) and frame (1) fixed connection, rotary drive part (43) output and rotary seat (41) transmission connection, rotary seat (41) center is provided with the through -hole for the water jet pipe (42) passes through, the water jet pipe (42) water jet end passes through the through -hole of rotary seat (41), the water jet pipe (42) water jet end is uniformly distributed with water jet orifice, inner wall cleaning brush (44) and rotary seat (41) fixed connection, and inner wall cleaning brush (44) circumferentially spaced distribution around water jet pipe (42), the cleaning end of inner wall cleaning brush (44) is along the radial direction of rotary seat (41) and goes outward.

2. The quartz tube cleaning device for a cell diffusion furnace according to claim 1, characterized in that: The cleaning mechanism (4) includes top cleaning brush (45), the top cleaning brush (45) and side wall cleaning brush fixed connection, the cleaning end of top cleaning brush (45) is upward, and the top cleaning brush (45) is annular structure.

3. The quartz tube cleaning device for a cell diffusion furnace according to claim 1, characterized in that: The rotary drive part (43) includes motor (431), first transmission gear (432) and the second transmission gear (433) matched with first transmission gear (432), the motor (431) and frame (1) fixed connection, the output of motor (431) and first transmission gear (432) transmission connection, the second transmission gear (433) is arranged on rotary seat (41), and first transmission gear (432) is engaged with second transmission gear (433).

4. The quartz tube cleaning device for a cell diffusion furnace according to claim 1, characterized in that: The placing mechanism (3) includes placing rack (31), the placing rack (31) and frame (1) fixed connection, and the placing rack (31) is " " shape structure.

5. The quartz tube cleaning device for a cell diffusion furnace according to claim 4, characterized in that: The placing mechanism (3) includes elastic element (32) and two fixed blocks (33), the fixed block (33) and placing rack (31) sliding connection, the elastic element (32) is arranged between two fixed blocks (33), the end of elastic element (32) and the fixed block (33) of its side fixed connection, and the outer end surface of fixed block (33) is projected to placing rack (31).

6. The quartz tube cleaning device for a cell diffusion furnace according to claim 5, characterized in that: The outer end surface of fixed block (33) has from below to inside shrinkage guide surface (331).

7. The quartz tube cleaning device for a cell diffusion furnace according to claim 1, characterized in that: The transfer mechanism (2) comprises a transverse moving assembly (21), a lifting driving assembly (22) and a grabbing piece (23), the lifting driving assembly (22) is fixedly connected with the rack (1), the output end of the lifting driving assembly (22) is in transmission connection with the transverse moving assembly (21), the lifting driving assembly (22) is used for providing power for the lifting movement of the grabbing piece (23), the output end of the transverse moving assembly (21) is in transmission connection with the grabbing piece (23), and the transverse moving assembly (21) is used for providing power for the transverse movement of the grabbed piece.

8. The quartz tube cleaning device for a cell diffusion furnace according to claim 7, characterized in that: The transverse moving assembly (21) comprises a mounting seat (211), a transverse cylinder (212), a transverse sliding rail (213) and a transverse sliding block (214) matched with the transverse sliding rail (213), the mounting seat (211) is in transmission connection with the output end of the lifting driving assembly (22), the transverse sliding rail (213) is fixedly connected with the mounting seat (211), the transverse sliding rail (213) and the transverse sliding block (214) are in sliding connection, the transverse cylinder (212) is fixedly connected with the mounting seat (211), the output end of the transverse cylinder (212) is fixedly connected with the transverse sliding block (214), and the grabbing piece (23) is fixedly connected with the transverse sliding block (214).

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