Efficient silicon carbide boat assembling clamp

Abstract

The utility model discloses an efficient silicon carbide boat assembling clamp which comprises a boat support and bases, the bases are fixedly arranged at the four corners of the bottom of the boat support, and a plurality of mounting plates are fixedly arranged at the top of the boat support from left to right. According to the application, the second clamping plate on the inner side of the top of the sliding plate and the corresponding first clamping plate on the outer side can be in an opposite moving state, so that the first clamping plate and the second clamping plate which move in the opposite direction can clamp and fix the wall thicknesses of silicon carbide crystal boats with different sizes; and the universality of matching the first clamping plate and the second clamping plate with different types of silicon carbide crystal boats for use is improved. Through the design of mechanical linkage, the distance between the second clamping plates at the front end and the rear end of the top of the boat support can be adjusted only by rotating a rotating rod by a worker, so that the distance between the second clamping plates can be changed along with the length change of silicon carbide crystal boats with different sizes; and the matching use effect of the first clamping plate and the second clamping plate with the silicon carbide boat is further improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to clamp equipment technical field, concretely is a kind of high-efficiency silicon carbide boat assembly fixture. BACKGROUND

[0002] Silicon carbide boat is an important high-temperature-resistant accessory used for loading wafers in furnace tubes for high-temperature processing in the photovoltaic and semiconductor industries. Compared with silicon carbide boat holders, silicon carbide boats are smaller in size but require higher assembly precision. This is because the precise positioning of silicon carbide boats directly affects the uniform heating and processing effect of wafers during high-temperature processing. Silicon carbide material has properties such as high-temperature resistance, chemical corrosion resistance, and good thermal stability, and is therefore widely used in various thermal processing processes, such as diffusion, oxidation, chemical vapor deposition (CVD), annealing, etc.

[0003] Through patent retrieval, a document with the name "Silicon carbide boat for semiconductor carrier" with the publication number "CN220189591U" is found. In this document, the boat body is placed in the storage chamber for position fixing. Since the internal space of the storage chamber is fixed, it can only be used with silicon carbide boats of a specified size, and cannot fix the position of silicon carbide boats of different sizes. This lack of versatility results in the need to frequently replace the fixture during different production batches, increasing equipment investment and maintenance costs, and reducing the flexibility of the production line, which cannot quickly respond to changes in market demand. Based on this, the utility model designs a high-efficiency silicon carbide boat assembly fixture to solve the above problems. UTILITY MODEL CONTENTS

[0004] The utility model aims to provide a kind of high-efficiency silicon carbide boat assembly fixture to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a kind of high-efficiency silicon carbide boat assembly fixture, including boat holder and base, the base is fixedly arranged at the four corners of the bottom of boat holder, the top of boat holder is fixedly arranged with a plurality of installation plates from left to right, the top of installation plate is slidably provided with sliding plate at both ends, the outer wall of sliding plate is provided with clamping assembly, the clamping assembly includes the first clamping plate arranged on the top outside of sliding plate, the second clamping plate is arranged on the inner side of the top of sliding plate, the bottom of first clamping plate and second clamping plate is fixedly arranged with sliding block, which is slidably penetrated into sliding plate and installation plate, the inner thread of sliding block is provided with screw rod, the inner side of sliding block is designed to be left-threadedly connected with screw rod, the outer side of sliding block is designed to be right-threadedly connected with screw rod, the inside of installation plate and sliding plate is integrally provided with a clearance hole, the clearance hole is a through hole, the clearance hole is sleeved on the outside of sliding block, and the side view cross section of first clamping plate and second clamping plate is designed as L-shaped.

[0006] Further, the bottom of the sliding plate is fixed with a sliding frame, the front cross section of the sliding frame is in U-shaped design, and the bottom surface of the sliding frame is higher than the bottom surface of the base.

[0007] Further, the sliding frame penetrates the mounting plate, the left and right sides of the mounting plate are integrally provided with avoiding holes, and the avoiding holes are sleeved with the outside of the sliding frame.

[0008] Further, the bottom of the sliding plate is fixed with a sliding frame, the front cross section of the sliding frame is in U-shaped design, and the bottom surface of the sliding frame is higher than the bottom surface of the base.

[0009] Further, the bottom of the sliding plate is fixed with a sliding frame, the front cross section of the sliding frame is in U-shaped design, and the bottom surface of the sliding frame is higher than the bottom surface of the base.

[0010] Further, the bottom of the sliding plate is fixed with a sliding frame, the front cross section of the sliding frame is in U-shaped design, and the bottom surface of the sliding frame is higher than the bottom surface of the base.

[0011] Further, the bottom of the sliding plate is fixed with a sliding frame, the front cross section of the sliding frame is in U-shaped design, and the bottom surface of the sliding frame is higher than the bottom surface of the base.

[0012] Further, the bottom of the sliding plate is fixed with a sliding frame, the front cross section of the sliding frame is in U-shaped design, and the bottom surface of the sliding frame is higher than the bottom surface of the base.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The utility model discloses a design of adjusting function can the second clamping plate of sliding plate top inboard and the first clamping plate corresponding with outboard are in the state of moving towards each other, and then the first clamping plate and the second clamping plate moving towards each other can clamp and fix the wall thickness of silicon carbide crystal boat of different size, so it is known that by using the device in the present application, the versatility of the first clamping plate and the second clamping plate and different types of silicon carbide crystal boat are matched and used.

[0015] 2. The utility model discloses a design of mechanical linkage, only need staff to rotate the rotating rod, the interval between the second clamping plate of the boat support top front and rear end can be adjusted and handled, so that the interval between the second clamping plate can change along with the length change of the silicon carbide crystal boat of different size, further improve the effect that the first clamping plate and the second clamping plate are matched and used with the silicon carbide crystal boat. DRAWINGS

[0016] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description, obviously, the drawings described in the following description are only some embodiments of the present application, and for the ordinary skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0017] Figure 1 It is a front view of the high-efficiency silicon carbide crystal boat assembling clamp of the present application;

[0018] Figure 2 It is an internal side view of the high-efficiency silicon carbide crystal boat assembling clamp of the present application;

[0019] Figure 3 It is an exploded view of the mounting plate and the slide plate and the first clamping plate and the second clamping plate;

[0020] Figure 4 It is an internal partial view of the boat holder.

[0021] In the drawings, the component list represented by each number is as follows:

[0022] 1-boat holder, 2-base, 3-mounting plate, 4-slide plate, 5-clamping assembly, 501-first clamping plate, 502-second clamping plate, 503-slide block, 504-screw rod, 505-clearance hole, 6-carriage, 7-avoidance hole, 8-putting rack, 9-rotating rod, 10-limiting plate, 11-weight-reducing hole. DETAILED DESCRIPTION

[0023] The technical scheme in the embodiments of the present application will be described clearly and completely in the following by combining with the drawings in the embodiments of the present application, obviously, the described embodiments are only some embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by the ordinary skilled in the art without creative labor are within the protection scope of the present application.

[0024] Embodiment 1

[0025] As Figure 1 , Figure 2 , Figure 3As shown, a high-efficiency silicon carbide crystal boat assembly clamp includes a boat holder 1 and a base 2 fixedly arranged at the four corners of the bottom of the boat holder 1, and a plurality of mounting plates 3 are fixedly arranged on the top of the boat holder 1 from left to right, a sliding plate 4 is slidingly arranged at the top of the mounting plate 3, a clamping assembly 5 is arranged on the outer wall of the sliding plate 4, the clamping assembly 5 includes a first clamping plate 501 arranged on the outer side of the top of the sliding plate 4, a second clamping plate 502 arranged on the inner side of the top of the sliding plate 4, and a sliding block 503 fixedly arranged at the bottom of the first clamping plate 501 and the second clamping plate 502 slidingly penetrates the sliding plate 4 and the mounting plate 3, a screw rod 504 is threadedly arranged in the sliding block 503, the sliding block 503 on the inner side is in left-threaded connection with the screw rod 504, and the sliding block 503 on the outer side is in right-threaded connection with the screw rod 504, and a clearance hole 505 is integrally arranged in the mounting plate 3 and the sliding plate 4, the clearance hole 505 is a through hole, the clearance hole 505 is arranged on the outside of the sliding block 503, and the side view cross section of the first clamping plate 501 and the second clamping plate 502 is in L-shaped design.

[0026] The staff first places the wall thickness area at the two ends of the silicon carbide crystal boat into the position between the first clamping plate 501 and the second clamping plate 502 at the two ends of the top of the boat holder 1, so that the inner side of the first clamping plate 501 and the outer side of the second clamping plate 502 are coincided with the outer wall of the silicon carbide crystal boat, and the sliding plate 4 supports the silicon carbide crystal boat, the staff rotates the screw rod 504 at the two ends in sequence, the sliding block 503 drives the corresponding first clamping plate 501 and the second clamping plate 502 to move along the direction of the clearance hole 505 through the threaded transmission design of the screw rod 504 and the sliding block 503, at this time, the first clamping plate 501 and the second clamping plate 502 corresponding to the wall thickness of the silicon carbide crystal boat are in the state of moving towards each other, so that the first clamping plate 501 and the second clamping plate 502 in the moving state clamp and fix the wall thickness at the two ends of the silicon carbide crystal boat, and through the above-mentioned mode, the first clamping plate 501 and the second clamping plate 502 can be matched with different types and sizes of silicon carbide crystal boats.

[0027] Embodiment 2

[0028] As Figure 1 , Figure 2 , Figure 3 , Figure 4As shown, the bottom of the slide plate 4 is fixed with a slide 6, the front view of the slide 6 is U-shaped, the bottom of the slide 6 is higher than the bottom of the base 2, the slide 6 penetrates the mounting plate 3, the left and right sides of the mounting plate 3 are integrally provided with a relief hole 7, the relief hole 7 is sleeved on the outside of the slide 6, a plurality of placement racks 8 are fixed in the inside of the boat support 1 from left to right, the side view of the placement rack 8 is T-shaped, a plurality of weight reduction holes 11 are integrally arranged in the inside of the boat support 1 from front to back, the bottom of the placement rack 8 is flush with the bottom of the base 2, a rotating rod 9 is rotatably arranged in the inside of the placement rack 8, the rotating rod 9 is threaded through the slide 6, the front end of the slide 6 is left-threadedly connected with the rotating rod 9, the rear end of the slide 6 is right-threadedly connected with the rotating rod 9, a limiting plate 10 is fixed on the inside of the slide 6, the limiting plate 10 is parallel to the mounting plate 3, the limiting plate 10 is in one-to-one correspondence with the screw rod 504, and the limiting plate 10 is rotatably sleeved on the outside of the screw rod 504.

[0029] According to the operation mode in embodiment 1, when the distance between the second clamping plates 502 at the front and rear ends of the boat support 1 is greater than or less than the length of the silicon carbide crystal boat as a whole, the worker can rotate the rotating rod 9 by hand, and through the threaded transmission design of the rotating rod 9 and the slide 6, the slide 6 at the front and rear ends drives the corresponding slide plate 4 to move along the direction of the relief hole 7, and the slide plate 4 at the front and rear ends moves away from or towards each other, through the above mode, the distance between the second clamping plates 502 at the front and rear ends of the boat support 1 is expanded or reduced, and the distance between the first clamping plate 501 and the second clamping plate 502 at the front and rear ends of the boat support 1 is consistent with the length of the silicon carbide crystal boat of different sizes, which ensures the stability of the wall thickness of the silicon carbide crystal boat at the front and rear ends into the first clamping plate 501 and the second clamping plate 502. The limiting plate 10 is the mounting carrier of the screw rod 504, which not only ensures the stability of the screw rod 504 during rotation, but also prevents the screw rod 504 from moving in position along the front and rear directions of the boat support 1. The weight reduction hole 11 reduces the weight of the whole device, that is, improves the convenience of subsequent transfer of the device, and in addition, the weight reduction hole 11 leaves the displacement space of the screw rod 504.

Claims

1. A high efficiency silicon carbide crystal boat assembly fixture comprising a boat holder (1) and a base (2), characterized in that: The base (2) is fixed at the four corners of the bottom of the boat support (1), the top of the boat support (1) is fixed with a plurality of mounting plates (3) from left to right, the top of the mounting plate (3) is slidably provided with a sliding plate (4) at the front and rear ends, the outer wall of the sliding plate (4) is provided with a clamping assembly (5), the clamping assembly (5) comprises a first clamping plate (501) provided on the outer side of the top of the sliding plate (4), a second clamping plate (502) is provided on the inner side of the top of the sliding plate (4), the bottom of the first clamping plate (501) and the second clamping plate (502) is fixedly provided with a sliding block (503) which slidably penetrates the sliding plate (4) and the mounting plate (3), the inside of the sliding block (503) is threadedly provided with a screw rod (504), the inside of the sliding block (503) is left threadedly connected with the screw rod (504), the outside of the sliding block (503) is right threadedly connected with the screw rod (504), the inside of the mounting plate (3) and the sliding plate (4) is integrally provided with a clearance hole (505), the clearance hole (505) is a through hole, the clearance hole (505) is sleeved on the outside of the sliding block (503), the side view cross section of the first clamping plate (501) and the second clamping plate (502) is L-shaped.

2. The high efficiency silicon carbide crystal boat assembly fixture of claim 1, wherein: The bottom of the sliding plate (4) is fixedly provided with a sliding frame (6), the front view cross section of the sliding frame (6) is U-shaped, and the bottom surface of the sliding frame (6) is higher than the bottom surface of the base (2).

3. The high efficiency silicon carbide crystal boat assembly fixture of claim 2, wherein: The sliding frame (6) penetrates the mounting plate (3), the inside of the mounting plate (3) is integrally provided with an avoiding hole (7) on the left and right sides, and the avoiding hole (7) is sleeved on the outside of the sliding frame (6).

4. The high efficiency silicon carbide crystal boat assembly fixture of claim 1, wherein: The inside of the boat support (1) is fixedly provided with a plurality of placing racks (8) from left to right at the lower end, the side view cross section of the placing rack (8) is T-shaped, and the inside of the boat support (1) is integrally provided with a plurality of weight reduction holes (11) at the front and rear ends.

5. The high efficiency silicon carbide crystal boat assembly fixture of claim 4, wherein: The bottom surface of the placing rack (8) is flush with the bottom surface of the base (2), and the inside of the placing rack (8) is rotatably provided with a rotating rod (9).

6. The high efficiency silicon carbide crystal boat assembly fixture of claim 5, wherein: The rotating rod (9) is threadedly penetrated in the sliding frame (6), the front end of the sliding frame (6) is left threadedly connected with the rotating rod (9), and the rear end of the sliding frame (6) is right threadedly connected with the rotating rod (9).

7. The high efficiency silicon carbide crystal boat assembly fixture of claim 2, wherein: The inside of the sliding frame (6) is fixedly provided with a limiting plate (10) at the upper end, and the limiting plate (10) and the mounting plate (3) are in a mutually parallel design state.

8. The high efficiency silicon carbide crystal boat assembly fixture of claim 7, wherein: The limiting plate (10) and the screw rod (504) are in one-to-one correspondence, and the limiting plate (10) is rotatably sleeved on the outside of the screw rod (504).

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