Semiconductor waste liquid evaporative crystallization treatment device

Abstract

The utility model discloses a semiconductor waste liquid evaporative crystallization treatment device which comprises a frame body, the top of the frame body is fixedly connected with a reaction tank, a heating wire is arranged in the reaction tank, the top of the reaction tank is fixedly connected with a top cover, the top of the top cover is fixedly connected with a motor, and an output shaft of the motor penetrates through the top cover and is in key connection with a stirring frame. The bottom of the reaction tank is fixedly connected with an L-shaped pipe, the outer side of the L-shaped pipe is fixedly connected with a first valve, one end of the L-shaped pipe is fixedly connected with a first box body, the first box body is fixed with the frame body, one side of the first box body is fixedly connected with a connecting frame, and one side of the connecting frame is fixedly connected with a second box body; one side of the second box body is fixedly connected with a water outlet pipe. According to the utility model, through the arrangement of the filter plate, the crystallization product and the waste liquid which is not completely evaporated are filtered, so that the required crystallization product is screened out, the operation steps are simplified, and the time cost is effectively reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor waste liquid treatment technical field especially relates to a semiconductor waste liquid evaporation crystallization treatment device. BACKGROUND

[0002] Semiconductor waste liquid refers to various liquid wastes generated in the semiconductor manufacturing process, containing various toxic and harmful substances, which will cause serious harm to the environment and human health if not properly treated. Due to its complex composition and possible high toxicity, corrosivity or flammability, the collection, treatment and disposal of semiconductor waste liquid are strictly regulated.

[0003] The existing semiconductor waste liquid evaporation crystallization treatment device mixes the crystallization product and the waste liquid that has not been completely evaporated together after evaporating and crystallizing the waste liquid, and the crystals need to be separated from the waste liquid by filtration. This treatment method is low in efficiency, thereby increasing the time cost. UTILITY MODEL CONTENT

[0004] The utility model aims at solving the shortcomings in the prior art and provides a semiconductor waste liquid evaporation crystallization treatment device.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0006] A semiconductor waste liquid evaporation crystallization treatment device, comprising a frame body, a reaction tank is fixedly connected to the top of the frame body, heating wires are arranged in the reaction tank, a top cover is fixedly connected to the top of the reaction tank, a motor is fixedly connected to the top of the top cover, a stirring frame is key-connected to the output shaft of the motor through the top cover, an L-shaped pipe is fixedly connected to the bottom of the reaction tank, a first valve is fixedly connected to the outer side of the L-shaped pipe, a first box body is fixedly connected to one end of the L-shaped pipe, the first box body is fixed to the frame body, a connecting frame is fixedly connected to one side of the first box body, a second box body is fixedly connected to one side of the connecting frame, a water outlet pipe is fixedly connected to one side of the second box body, a putting opening is formed in the top of the connecting frame, an open recess is formed in the connecting frame and communicates with the putting opening, a sliding plate is slidably connected in the recess, the top surface of the sliding plate is flush with the height of the putting opening, a through groove is formed in the sliding plate, a filter plate is fixedly connected in the through groove, and a cover is fixedly connected to the top of the connecting frame.

[0007] As a further scheme of the utility model, a circular pipe is fixedly connected to the bottom of the first box body, and a filter screen is fixedly connected in the circular pipe.

[0008] As a further scheme of the utility model, a visual window is formed in one side of the circular pipe, and a second valve is fixedly connected to the bottom of the circular pipe.

[0009] As a further scheme of the utility model, the top of the sliding plate is provided with two symmetrically distributed L-shaped grooves for taking the sliding plate.

[0010] As a further scheme of the utility model, the two sides of the sliding plate are provided with mounting grooves, and sealing rings are fixedly connected in the mounting grooves.

[0011] As a further scheme of the utility model, the bottom of the cover is provided with a square groove matched with the inlet and the sliding plate, and a rubber pad is fixedly connected in the square groove.

[0012] As a further scheme of the utility model, the connecting frame is inclined.

[0013] The utility model has the advantages of:

[0014] 1. The filter plate is arranged, the crystallization product and the waste liquid not completely evaporated are filtered, and the required crystallization product is screened out, so that the operation steps are simplified, and the time cost is effectively reduced.

[0015] 2. The circular pipe and the filter screen are arranged, the crystallization product blocked by the filter plate can fall on the filter screen, and the unified collection of the crystallization product is realized, so that the scattering of the crystallization product in the treatment process is effectively avoided, and the work efficiency is improved.

[0016] 3. The sealing ring and the cover are arranged, the rubber pad in the cover is tightly matched with the sealing ring, double sealing effects are formed, the leakage of the waste liquid is effectively blocked, the sealing effect is enhanced, the environmental pollution caused by the leakage of the waste liquid is significantly reduced, and the cleanness and safety of the working environment are ensured. DRAWINGS

[0017] Figure 1 A front side three-dimensional structure schematic view of a semiconductor waste liquid evaporation crystallization treatment device is provided for the utility model;

[0018] Figure 2 A reaction tank sectional view structure schematic view of a semiconductor waste liquid evaporation crystallization treatment device is provided for the utility model;

[0019] Figure 3 A partial enlarged structure schematic view of a semiconductor waste liquid evaporation crystallization treatment device is provided for the utility model;

[0020] Figure 4 A partial split structure schematic view of a semiconductor waste liquid evaporation crystallization treatment device is provided for the utility model.

[0021] In the figure: 1, frame body; 2, reaction tank; 3, top cover; 4, stirring frame; 5, L-shaped pipe; 6, first box body; 7, connecting frame; 8, second box body; 9, filter plate; 10, filter screen; 11, visual window; 12, round pipe; 13, cover; 14, L-shaped groove; 15, sealing ring; 16, mounting groove; 17, discharge port; 18, groove; 19, sliding plate; 20, heating wire. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. The described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0023] Reference Figures 1-4 A kind of semiconductor waste liquid evaporation crystallization processing device, including frame body 1, the top of frame body 1 is fixed with reaction tank 2 by bolt, heating wire 20 is arranged in reaction tank 2, top cover 3 is fixed on the top of reaction tank 2 by bolt, the top of top cover 3 is fixed with motor by bolt, the output shaft of motor is connected with stirring frame 4 by key through top cover 3, L-shaped pipe 5 is fixed on the bottom of reaction tank 2 by bolt, first valve is fixed on the outside of L-shaped pipe 5 by bolt, one end of L-shaped pipe 5 is fixed with first box body 6 by bolt, first box body 6 is fixed with frame body 1, connecting frame 7 is welded on one side of first box body 6, connecting frame 7 is arranged obliquely, which facilitates the crystallization to fall, second box body 8 is welded on one side of connecting frame 7, water outlet pipe is fixed on one side of second box body 8 by bolt, discharge port 17 is arranged on the top of connecting frame 7, open recess 18 that is communicated with discharge port 17 is arranged in the inside of connecting frame 7, sliding plate 19 is slidably connected in recess 18, and the height of the top surface of sliding plate 19 is consistent with the height of discharge port 17, through groove is arranged in sliding plate 19, filter plate 9 is fixed in through groove by bolt, cover 13 is fixed on the top of connecting frame 7 by bolt, when using, top cover 3 is opened, and semiconductor waste liquid added with reagent is added into reaction tank 2, at this time, top cover 3 is closed, heating wire 20 in reaction tank 2 is started, and stirring frame 4 is rotated by motor, so that reagent and semiconductor waste liquid are mixed more uniformly, semiconductor waste liquid is evaporated and concentrated by heating wire 20, after a period of time, crystallization will be produced in semiconductor waste liquid, when crystallization process is finished, first valve is opened, so that crystallization product and waste liquid that is not completely evaporated enter first box body 6 along L-shaped pipe 5, since second valve is closed, then crystallization product and waste liquid that is not completely evaporated can only move to the direction of second box body 8, at this time, crystallization product is blocked by filter plate 9 in connecting frame 7, so that crystallization product and waste liquid that is not completely evaporated are filtered, thereby, required crystallization product is screened out, which not only simplifies operation steps, but also effectively reduces time cost.

[0024] The bottom of the first box 6 is fixed with a round pipe 12 by bolts, the inside of the round pipe 12 is fixed with a filter screen 10 by bolts, one side of the round pipe 12 is provided with a visual window 11, and the bottom of the round pipe 12 is fixed with a second valve by bolts. The crystallization product will fall on the filter screen 10 in the round pipe 12. When the water outlet pipe on one side of the second box 8 is not used to discharge waste liquid, the second valve is opened. At this time, the remaining waste liquid in the round pipe 12 will flow out through the filter screen 10. Whether the remaining waste liquid is discharged is observed through the visual window 11. After the discharge, the crystallization product can be taken out by removing the round pipe 12. Thus, the crystallization product is uniformly collected. This process not only effectively avoids the scattering of the crystallization product during the treatment process, but also improves the work efficiency.

[0025] The top of the sliding plate 19 is provided with two symmetrical L-shaped grooves 14 for taking out the sliding plate 19. The sliding plate 19 can be taken out from the connecting frame 7 through the L-shaped grooves 14, which increases the applicability. The two sides of the sliding plate 19 are provided with mounting grooves 16. The mounting grooves 16 are bonded with sealing rings 15. The bottom of the cover 13 is provided with a square groove matched with the inlet 17 and the sliding plate 19 through the sealing ring 15. The square groove is bonded with a rubber pad. The rubber pad in the cover is tightly matched with the sealing ring to form a double sealing effect. Thus, the waste liquid leakage is effectively blocked. Not only the sealing effect is enhanced, but also the environmental pollution caused by the waste liquid leakage is significantly reduced. The working environment is clean and safe.

[0026] Working principle: open the top cover 3, add the semiconductor waste liquid added with the reaction agent into the reaction tank 2, close the top cover 3, start the motor and the heating wire 20 in the reaction tank 2, the motor drives the stirring frame 4 to rotate to make the reaction agent and the semiconductor waste liquid mix more uniformly. The conductor waste liquid is evaporated and concentrated through the heating wire 20. After a period of time, the conductor waste liquid will produce crystallization. When the crystallization process is completed, the crystallization product and the waste liquid which is not completely evaporated will enter the first box 6 through the L-shaped pipe 5 after the first valve is opened. Since the second valve is closed, the crystallization product and the waste liquid which is not completely evaporated can only move to the second box 8. At this time, the crystallization product will be blocked by the filter plate 9 in the connecting frame 7. Thus, the crystallization product and the waste liquid which is not completely evaporated are filtered to screen out the required crystallization product. Not only the operation steps are simplified, but also the time cost is effectively reduced. Since the connecting frame 7 is inclined, the crystallization product will fall on the filter screen 10 in the round pipe 12. When the water outlet pipe on one side of the second box 8 is not used to discharge waste liquid, the second valve is opened. At this time, the remaining waste liquid in the round pipe 12 will flow out through the filter screen 10. Whether the remaining waste liquid is discharged is observed through the visual window 11. After the discharge, the crystallization product can be taken out by removing the round pipe 12. Thus, the crystallization product is uniformly collected. This process not only effectively avoids the scattering of the crystallization product during the treatment process, but also improves the work efficiency.

[0027] In addition, the terms "mount", "set", "connect", "socket" should be understood broadly. For example, it can be fixed connection, detachable connection, or integral structure; it can be mechanical connection or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, or internal communication between two devices, elements or components. The specific meaning of the above terms in this application can be understood by those skilled in the art according to the specific circumstances.

Claims

1. A semiconductor waste liquid evaporation crystallization treatment apparatus comprising a frame (1), characterized in that, The top of the frame body (1) is fixedly connected with a reaction tank (2), the inside of the reaction tank (2) is provided with a heating wire (20), the top of the reaction tank (2) is fixedly connected with a top cover (3), the top of the top cover (3) is fixedly connected with a motor, the output shaft of the motor is key-connected with a stirring frame (4) penetrating through the top cover (3), the bottom of the reaction tank (2) is fixedly connected with an L-shaped pipe (5), the outer side of the L-shaped pipe (5) is fixedly connected with a first valve, one end of the L-shaped pipe (5) is fixedly connected with a first box body (6), the first box body (6) is fixed with the frame body (1), one side of the first box body (6) is fixedly connected with a connecting frame (7), one side of the connecting frame (7) is fixedly connected with a second box body (8), one side of the second box body (8) is fixedly connected with a water outlet pipe, the top of the connecting frame (7) is provided with a placing opening (17), the inside of the connecting frame (7) is provided with an open groove (18) in communication with the placing opening (17), a sliding plate (19) is slidably connected in the groove (18), and the top surface height of the sliding plate (19) is consistent with the height of the placing opening (17), a through groove is formed in the sliding plate (19), and a filter plate (9) is fixedly connected in the through groove, and the top of the connecting frame (7) is fixedly connected with a cover (13).

2. The apparatus for treating semiconductor waste liquid by evaporation and crystallization according to claim 1, wherein The bottom of the first box body (6) is fixedly connected with a circular pipe (12), and the inside of the circular pipe (12) is fixedly connected with a filter screen (10).

3. The apparatus for treating semiconductor waste liquid by evaporation and crystallization according to claim 2, wherein One side of the circular pipe (12) is provided with a viewing window (11), and the bottom of the circular pipe (12) is fixedly connected with a second valve.

4. The apparatus for treating semiconductor waste liquid by evaporation and crystallization according to claim 1, wherein The top of the sliding plate (19) is provided with two symmetrically distributed L-shaped grooves (14) for taking the sliding plate (19).

5. The apparatus for treating semiconductor waste liquid by evaporation and crystallization according to claim 1, wherein Both sides of the sliding plate (19) are provided with mounting grooves (16), and sealing rings (15) are fixedly connected in the mounting grooves (16).

6. The apparatus for treating semiconductor waste liquid by evaporation and crystallization according to claim 1, wherein The bottom of the cover (13) is provided with a square groove matched with the placing opening (17) and the sliding plate (19), and a rubber pad is fixedly connected in the square groove.

7. The apparatus for treating semiconductor waste liquid by evaporation and crystallization according to claim 1, wherein The connecting frame (7) is inclined.

Images