Vertical reacting furnace and coating equipment

Abstract

The utility model discloses a vertical reaction furnace and coating equipment, which comprises a furnace tube body provided with a reaction cavity, the inner side wall of the reaction cavity is provided with a support component, one side of the support component facing the axis of the reaction cavity is provided with at least one first protective layer made of non-metallic material, and the other side of the support component is provided with at least one second protective layer made of non-metallic material. The first protective layer is used for preventing reaction gas in the reaction cavity from making contact with the supporting assembly and the inner side wall of the reaction cavity. The furnace tube body and the supporting assembly are prevented from being in contact with reaction gas in the reaction process through the first protective layer, so that the problem that a passive film is generated after the furnace tube body is in contact with the reaction gas, and the vertical reaction furnace is easily damaged due to the fact that the thermal expansion coefficients of the passive film and the furnace tube body are different is solved; therefore, the service life of the vertical reaction furnace is prolonged, the cost of the battery piece in the machining process is reduced, and the replacement efficiency of the vertical reaction furnace is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to technical field of semiconductor device especially relates to a vertical reaction furnace and coating equipment. BACKGROUND

[0002] With the continuous development of photovoltaic industry, cost reduction and efficiency improvement has become a problem that needs to be solved in each process of solar cell technology. Improving equipment capacity, reducing energy consumption of equipment, reducing labor cost and other problems have become problems faced by the industry. Especially for high temperature diffusion furnace / LPCVD low pressure deposition furnace equipment in LPCVD process, with the deposition of process attachments, a certain thickness of film will be plated on the inner surface of the reaction chamber of the reaction furnace. Because the thermal expansion coefficient of the plated film at a high temperature above 600 DEG C is different from the thermal expansion coefficient of the reaction chamber material, the service life of the reaction furnace will be sharply shortened, resulting in the need to frequently replace the reaction furnace. Each replacement needs to spend a lot of manpower and material resources, and takes a long time. At the same time, the material of the reaction furnace is quartz material, which is high in price. The series of losses caused by frequent replacement have become the pain points of the industry. SUMMARY

[0003] The utility model provides a vertical reaction furnace and coating equipment for solving the problem of short service life of the reaction furnace and frequent replacement in the prior art.

[0004] The technical scheme of the utility model is a vertical reaction furnace, which comprises a furnace pipe body provided with a reaction cavity, the inner side wall of the reaction cavity is provided with a support assembly, the side of the support assembly facing the axis of the reaction cavity is provided with at least one first protective layer made of non-metallic material, and the first protective layer is used for preventing the reaction gas in the reaction cavity from contacting the support assembly and the inner side wall of the reaction cavity.

[0005] Further, the first protective layer is arranged between the inner side wall of the reaction cavity and the support assembly, and the support assembly is made of non-metallic material.

[0006] Further, the support assembly comprises intersecting first and second support members.

[0007] The inner side wall of the reaction cavity is provided with a plurality of first support members along the circumferential direction thereof, and the inner side wall of the reaction cavity is provided with a plurality of second support members along the axial direction thereof.

[0008] Further, the outer side wall of the furnace pipe body is provided with a plurality of first support members along the circumferential direction thereof, and the outer side wall of the furnace pipe body is provided with a plurality of second support members along the axial direction thereof.

[0009] Further, a heating furnace body is arranged in the reaction cavity and along the axial direction of the furnace pipe body.

[0010] The anti-deformation structure protrudes outward and is matched with the heating furnace body.

[0011] Further, the anti-deformation structure is provided with at least one protective structure in a grid shape on the side facing the heating furnace body and along the circumferential direction or the axial direction.

[0012] Further, the protective structure is provided with at least one second protective layer made of a non-metallic material on the side facing the heating furnace body, and the second protective layer is used to prevent the reaction gas in the reaction cavity from contacting the protective structure and the anti-deformation structure.

[0013] Further, the second protective layer is arranged between the anti-deformation structure and the protective structure, and the anti-deformation structure is made of a non-metallic material.

[0014] Further, the outer side wall of the anti-deformation structure is provided with a plurality of third supporting members along the axial direction and / or the circumferential direction.

[0015] Further, the furnace tube body is made of a high-temperature-resistant metal material.

[0016] Further, the furnace tube body is provided with a plurality of furnace openings for the carrier to enter and exit at one end along the axial direction, and the furnace openings are communicated with the reaction cavity.

[0017] The furnace tube body is provided with at least one cooling structure around the end facing the furnace opening.

[0018] The utility model also provides a coating equipment, and the coating equipment comprises the vertical reaction furnace.

[0019] Compared with the prior art, the utility model has at least the following beneficial effects:

[0020] The utility model improves the overall rigidity of the furnace tube body through the supporting assembly, prevents the furnace tube body or the reaction cavity from being deformed due to a high-temperature environment or vacuumizing, and avoids the furnace tube body and the supporting assembly from contacting the reaction gas during the reaction process through the first protective layer, thereby solving the problem that the vertical reaction furnace is easily damaged due to the passivation film generated after the furnace tube body contacts the reaction gas, the different thermal expansion coefficients of the passivation film and the furnace tube body, and prolonging the service life of the vertical reaction furnace, reducing the cost of the battery piece in the processing process, and improving the replacement efficiency of the vertical reaction furnace. BRIEF DESCRIPTION OF DRAWINGS

[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application; the description herein and the claims of the application and the appended drawings are to be interpreted strictly; the terms "comprises", "comprising", "includes", "including" and any variations thereof are intended to cover a non-exclusive inclusion; the terms "first", "second" and the like in the description of the specification and claims of the application and the appended drawings are used for distinguishing between similar objects and not necessarily for describing a specific sequential or chronological order.

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the application, and for those skilled in the art, other drawings can also be obtained without creative labor.

[0023] Figure 1 A sectional view of the vertical reaction furnace according to the application is shown in the drawings.

[0024] Figure 2 An enlarged view of reference sign A in the drawings. Figure 1

[0025] Figure 3 A front view of the vertical reaction furnace according to the application is shown in the drawings.

[0026] Figure 4 A structural schematic view of the vertical reaction furnace according to the application in a carrier is shown in the drawings.

[0027] Reference signs:

[0028] 10, furnace tube body; 101, furnace mouth;

[0029] 20, reaction cavity;

[0030] 30, support assembly; 301, first support; 302, second support; 303, pin shaft;

[0031] 40, heating furnace body;

[0032] 50, deformation prevention structure; 501, third support;

[0033] 60, protection structure;

[0034] 70, cooling structure; 701, cooling pipeline;

[0035] 80, furnace door;

[0036] 90, tray;​

[0037] 100, carrier;

[0038] 110, thermocouple. DETAILED DESCRIPTION

[0039] In order to make the technical problems, technical solutions and beneficial effects of the present application clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application. Thus, the features described in the specification are used to illustrate one of the embodiments of the present application, but not to imply that each embodiment of the present application must have the features described. In addition, it should be noted that the specification describes many features. Although some features can be combined together to show possible system designs, these features can also be used in other combinations that are not explicitly described. Thus, unless otherwise stated, the described combinations are not intended to be limiting.

[0040] The principles and structures of the present application will be described in detail below with reference to the drawings and embodiments.

[0041] In one embodiment, with reference to the drawings and Figure 1 The present application provides a vertical reaction furnace, which comprises a furnace pipe body 10 provided with a reaction cavity 20, and a support assembly 30 is arranged on the inner side wall of the reaction cavity 20, and the support assembly 30 is used to prevent the furnace pipe body 10 from being deformed.

[0042] The side of the support assembly 30 facing the axis of the reaction cavity 20 is provided with at least one first protective layer (not shown, the same below) made of non-metallic material, and the first protective layer is used to prevent the reaction gas in the reaction cavity 20 from contacting the support assembly 30 and the inner side wall of the reaction cavity 20.

[0043] It should be noted that the reaction cavity 20 is formed by the inner side wall of the furnace pipe body 10, and the shapes of the reaction cavity 20 and the furnace pipe body 10 are both preferably cylindrical, and the furnace pipe body 10 is made of high-temperature-resistant metal material, such as 310S stainless steel, 304 stainless steel or 316L stainless steel, which is not limited here. The furnace pipe body 10 made of high-temperature-resistant metal material will not be damaged or deformed under high temperature conditions, so compared with the furnace pipe body 10 made of fragile quartz material in the prior art, the furnace pipe body 10 made of metal material in the present embodiment has better damage prevention and deformation prevention capabilities.

[0044] In one embodiment, with reference to the drawings and Figure 4The furnace tube body 10 is provided with at least one furnace opening 101 for the carrier 100 to enter and exit at one end along the axial direction of the furnace tube body 10, the furnace opening 101 is communicated with the reaction cavity 20, each furnace opening 101 is sealingly connected with the corresponding furnace door 80 through a flange; and the vertical reaction furnace further comprises a tray 90, which is used for carrying the carrier 100 of the battery piece after coating and the carrier 100 of the battery piece before coating into and out of the reaction cavity 20, and the reaction cavity 20 mainly provides a sealed environment, the carrier 100 filled with battery pieces is heated, and then gas is introduced for process to complete coating.

[0045] Thus, the overall rigidity of the furnace tube body 10 is improved by the support assembly 30 to prevent the furnace tube body 10 or the reaction cavity 20 from deforming due to a high-temperature environment or vacuumizing, and the furnace tube body 10 and the support assembly 30 are prevented from contacting the reaction gas during the reaction process by the first protective layer, so that the problem that the vertical reaction furnace is easily damaged due to the difference between the passivation film generated after the furnace tube body 10 contacts the reaction gas and the thermal expansion coefficient of the furnace tube body 10 can be solved, the service life of the vertical reaction furnace is prolonged, the cost of the battery piece in the processing process is reduced, and the replacement efficiency of the vertical reaction furnace is improved.

[0046] In some embodiments, the furnace tube body 10 can be made of a high-temperature-resistant metal material, so that the first protective layer can also prevent the furnace tube body 10 and the support assembly 30 from contacting the reaction gas during the reaction process, thereby avoiding the generation of dust (because the reaction gas contacting the metal will generate dust), so as to ensure the coating quality of the battery piece.

[0047] In some embodiments, the first protective layer can also be arranged between the inner side wall of the reaction cavity 20 and the support assembly 30, and the support assembly 30 is made of a non-metal material. Thus, the first protective layer in the embodiment only needs to ensure that the furnace tube body 10 does not contact the reaction gas during the reaction process.

[0048] In some embodiments, in order to ensure that the support assembly 30 can improve the overall rigidity of the furnace tube body 10, with reference to the accompanying drawings, Figure 1 The support assembly 30 comprises intersecting first support pieces 301 and second support pieces 302.

[0049] The inner side wall of the reaction cavity 20 is provided with a plurality of first support pieces 301 along the circumferential direction, and the inner side wall of the reaction cavity 20 is provided with a plurality of second support pieces 302 along the axial direction.

[0050] It should be noted that the first support 301 and the second support 302 are vertically arranged or approximately vertically arranged, and the material of the first support 301 and the second support 302 is preferably 310S stainless steel with high temperature resistance, so as to improve the overall rigidity of the furnace tube body 10. The first protective layer is made of non-metallic materials such as tiles, quartz, and ceramics that will not produce dust when in contact with the reaction gas, which is not limited here.

[0051] And the intersection of the first support 301 and the second support 302 is provided with a self-adapting pin shaft 303, and then the pin shaft 303 is connected with the first protective layer, so as to fix the first protective layer, thereby preventing the first protective layer from falling off and causing damage to the carrier 100 or the battery piece in the carrier 100. Of course, the connection relationship between the first support 301 and the second support 302 and the first protective layer is not only the pin shaft connection, but also the threaded connection or the buckle connection or other connection modes convenient for connecting the first protective layer, which is not limited here.

[0052] In some embodiments (not shown in the figure), in order to further improve the overall rigidity of the furnace tube body 10, prevent the furnace tube body 10 or the reaction cavity 20 from deforming due to high temperature environment or vacuumizing, avoid the vertical reaction furnace from being damaged, thereby prolonging the service life of the vertical reaction furnace, the outer side wall of the furnace tube body 10 is provided with a plurality of first supports 301 along the circumferential direction thereof, and the outer side wall of the furnace tube body 10 is provided with a plurality of second supports 302 along the axial direction thereof.

[0053] In some embodiments, referring to the accompanying Figure 1 The heating furnace body 40 is arranged in the reaction cavity 20 and along the axial direction of the furnace tube body 10, and is used for improving the temperature of the reaction cavity 20, so that the battery piece located in the reaction cavity 20 reacts with the reaction gas to complete the film coating.

[0054] The furnace tube body 10 is provided with an outwardly protruding anti-deformation structure 50 at one end or both ends along the axial direction thereof, and the anti-deformation structure 50 is matched with the heating furnace body 40.

[0055] It should be noted that the embodiment takes the end of the furnace tube body 10 away from the furnace port 101 as an example to illustrate the outwardly protruding anti-deformation structure 50. Therefore, the anti-deformation structure 50 proposed in the embodiment is equivalent to a dome.

[0056] Therefore, the utility model can avoid the deformation of the furnace tube body 10 and the reaction cavity 20 in the vacuumizing process through the anti-deformation structure 50, avoid the damage of the vertical reaction furnace, thereby prolonging the service life of the vertical reaction furnace.

[0057] In some embodiments, referring to the accompanying Figure 1The side of the deformation prevention structure 50 facing the heating furnace body 40 is provided with at least one protective structure 60 in a grid shape along the circumferential direction or the axial direction of the heating furnace body 40.

[0058] In this way, the embodiment can further improve the overall rigidity of the deformation prevention structure 50 by the protective structure 60, prevent the deformation prevention structure 50 from deforming during vacuumizing, avoid damage to the vertical reaction furnace, and thus prolong the service life of the vertical reaction furnace.

[0059] In some embodiments, the side of the protective structure 60 facing the heating furnace body 40 is provided with at least one second protective layer (not shown, same below) made of a non-metallic material, which is used to prevent the reaction gas in the reaction cavity 20 from contacting the protective structure 60 and the deformation prevention structure 50.

[0060] It should be noted that the deformation prevention structure 50 in the embodiment is part of the furnace tube body 10, and the material of the protective structure 60 in the embodiment is preferably 310S stainless steel with high temperature resistance, so as to improve the overall rigidity of the deformation prevention structure 50. The material of the second protective layer includes non-metallic materials such as tiles, quartz, and ceramics that do not generate dust when in contact with the reaction gas, which are not limited herein.

[0061] Therefore, the second protective layer in the embodiment can avoid the protective structure 60 and the deformation prevention structure 50 from contacting the reaction gas during the reaction process, so as to solve the problem that the protective structure 60 and the deformation prevention structure 50 generate a passivation film after contacting the reaction gas, the passivation film has a different thermal expansion coefficient from the protective structure 60 and the deformation prevention structure 50, and the vertical reaction furnace is easily damaged, thereby prolonging the service life of the vertical reaction furnace, reducing the cost of the battery piece in the processing process, and improving the replacement efficiency of the vertical reaction furnace.

[0062] In some embodiments, the deformation prevention structure 50 can be made of a metal material with high temperature resistance, so that the second protective layer can also avoid the protective structure 60 and the deformation prevention structure 50 from contacting the reaction gas during the reaction process, thereby avoiding the generation of dust (because the reaction gas will generate dust when in contact with the metal), and thus ensuring the film coating quality of the battery piece.

[0063] In some embodiments, the second protective layer can also be arranged between the deformation prevention structure 50 and the protective structure 60, and the deformation prevention structure 50 is made of a non-metallic material. In this way, the second protective layer in the embodiment only needs to ensure that the protective structure 60 does not contact the reaction gas during the reaction process.

[0064] In order to further improve the overall rigidity of the deformation prevention structure 50, prevent the deformation prevention structure 50 from deforming during vacuumizing, avoid damage to the vertical reaction furnace, and thus prolong the service life of the vertical reaction furnace, refer to the accompanying drawings Figure 3The outer side wall of the deformation prevention structure 50 is provided with a plurality of third supporting members 501 in the axial direction and / or the circumferential direction thereof.

[0065] Therefore, the plurality of third supporting members 501 can be arranged in the axial direction of the outer side wall of the deformation prevention structure 50, or the plurality of third supporting members 501 can be arranged in the circumferential direction of the outer side wall of the deformation prevention structure 50, or the plurality of third supporting members 501 can be arranged in both the axial direction and the circumferential direction of the outer side wall of the deformation prevention structure 50, which is not limited in the embodiment.

[0066] In some embodiments, the deformation prevention structure 50 has a shape of a circular arc, a trapezoid, a semicircle or other irregular outwardly convex shape, which is not limited herein.

[0067] When the deformation prevention structure 50 has a trapezoidal shape, the deformation prevention structure 50 of the trapezoidal structure has a circular arc shape or a semicircular shape along the two sides of the waist length, the top of the deformation prevention structure 50 of the trapezoidal structure is arranged in a horizontal straight line, and the bottom of the deformation prevention structure 50 of the trapezoidal structure is in communication with the furnace body 40.

[0068] It should be noted that the deformation prevention structure 50 can also be arranged as a whole in an arc shape, and the closed end of the furnace body 40 and the deformation prevention structure 50 can be arranged at the same end, and the open end of the furnace body 40 and the open end of the furnace pipe body 10 can be arranged at the same end.

[0069] In some embodiments, referring to the accompanying drawings Figure 1 and 3 The furnace pipe body 10 further comprises at least one gas inlet (not shown, the same throughout the text) for introducing reaction gas and a plurality of thermocouple tubes 110; each gas inlet penetrates the deformation prevention structure 50 and extends into the reaction cavity 20, thereby being in communication with the reaction cavity 20; each thermocouple tube 110 penetrates the deformation prevention structure 50 and is arranged in the axial direction of the furnace pipe body 10.

[0070] In some embodiments, during the entry and exit of the carrier 100, a large amount of heat will flow out of the furnace opening 101, which will affect the service life of the sealing elements and metal elements of the furnace opening 101. Therefore, in order to reduce the heat transfer when the furnace door 80 contacts the reaction cavity 20 and reduce energy loss, referring to the accompanying drawings Figures 1-3 The furnace pipe body 10 is provided with a plurality of furnace openings 101 for the entry and exit of the carrier 100 at one end in the axial direction thereof, and the furnace openings 101 are in communication with the reaction cavity 20.

[0071] The furnace pipe body 10 is provided with at least one cooling structure 70 around the end facing the furnace opening 101.

[0072] The cooling structure 70 comprises a cooling pipe 701 through which a coolant flows, which is arranged around the furnace tube body 10 at one end thereof towards the furnace mouth 101, and then the temperature transfer at the furnace mouth 101 is reduced by flowing the coolant in the cooling pipe 701, thereby reducing the energy loss.

[0073] Of course, according to the actual situation, the cross-sectional shape of the furnace tube body 10 at one end thereof towards the furnace mouth 101 can be circular or trapezoidal, etc., which is not limited herein.

[0074] In another embodiment, the utility model also provides a coating equipment, and the coating equipment comprises the vertical reaction furnace.

[0075] Obviously, the above-described embodiments are only a part of the embodiments of the utility model, rather than all the embodiments, and the preferred embodiments of the utility model are given in the drawings, but do not limit the patent scope of the utility model. The utility model can be realized in many different forms, and conversely, the purpose of providing these embodiments is to make the understanding of the disclosure of the utility model more thorough and comprehensive. Although the utility model is described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing specific embodiments or make equivalent replacement to part of the technical features. Any equivalent structure made by using the contents of the utility model specification and drawings, directly or indirectly applied in other related technical fields, is also within the patent protection scope of the utility model.

Claims

1. A vertical reactor, comprising a furnace tube body (10) with a reaction chamber (20), characterized in that, The inner wall of the reaction chamber (20) is provided with a support assembly (30). The support assembly (30) is provided with at least one first protective layer made of non-metallic material on the side facing the axis of the reaction chamber (20). The first protective layer is used to prevent the reaction gas in the reaction chamber (20) from contacting the support assembly (30) and the inner wall of the reaction chamber (20).

2. The vertical reactor according to claim 1, characterized in that, The first protective layer is disposed between the inner wall of the reaction chamber (20) and the support assembly (30), and the support assembly (30) is made of non-metallic material.

3. The vertical reactor according to claim 1 or 2, characterized in that, The support assembly (30) includes an intersecting first support member (301) and a second support member (302). The inner wall of the reaction chamber (20) is provided with a plurality of first support members (301) along its circumferential direction, and the inner wall of the reaction chamber (20) is provided with a plurality of second support members (302) along its axial direction.

4. The vertical reactor according to claim 3, characterized in that, The outer wall of the furnace tube body (10) is provided with a plurality of first support members (301) along its circumferential direction, and the outer wall of the furnace tube body (10) is provided with a plurality of second support members (302) along its axial direction.

5. The vertical reactor according to claim 1, characterized in that, A heating furnace body (40) is provided inside the reaction chamber (20) and along the axial direction of the furnace tube body (10). The furnace tube body (10) has an outwardly protruding anti-deformation structure (50) at one or both ends along its axial direction, and the anti-deformation structure (50) is adapted to the heating furnace body (40).

6. The vertical reactor according to claim 5, characterized in that, The anti-deformation structure (50) faces the heating furnace body (40) on one side and has at least one protective structure (60) along its circumferential or axial direction.

7. The vertical reactor according to claim 6, characterized in that, The protective structure (60) has at least one second protective layer made of non-metallic material on the side facing the heating furnace body (40). The second protective layer is used to prevent the reaction gas in the reaction chamber (20) from contacting the deformation-resistant structure (50).

8. The vertical reactor according to claim 7, characterized in that, The second protective layer is disposed between the anti-deformation structure (50) and the protective structure (60); and the anti-deformation structure (50) is made of non-metallic material.

9. The vertical reactor according to any one of claims 5 to 8, characterized in that, The outer wall of the anti-deformation structure (50) is provided with a plurality of third support members (501) along its axial direction and / or circumferential direction.

10. The vertical reactor according to claim 1 or 2, characterized in that, The furnace tube body (10) is made of high-temperature resistant metal material.

11. The vertical reactor according to claim 1, characterized in that, The furnace tube body (10) has multiple furnace ports (101) at one end along its axial direction for the entry and exit of the carrier, and the furnace ports (101) are connected to the reaction chamber (20); The furnace tube body (10) is provided with at least one cooling structure (70) around one end facing the furnace opening (101).

12. A coating apparatus, characterized in that, The coating equipment includes the vertical reactor as described in any one of claims 1 to 11.

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