Baking device for silylene heating material processing

Abstract

The utility model discloses a baking device for silylene heating material processing, and relates to the technical field of silylene heating material processing. A baking device for silylene heating material processing comprises a baking box, a sealing box door is rotationally connected to the baking box, a material supporting plate is fixedly connected to the inner bottom end of the baking box, the baking device further comprises a mounting frame, the mounting frame is fixedly connected to the baking box, and an air cylinder is fixedly connected to one side in the mounting frame. A silylene material is placed on the material supporting plate and placed into the baking box, the sealing box door is closed to enable the interior of the baking box to be in a closed state, the air suction pump operates to vacuumize the interior of the baking box through the connecting pipe, and inert gas is conveyed into the baking box through the air storage cylinder and the air conveying pipe. The inert gas can play a protection role in the baking process of the silylene heating material, so that the material is prevented from reacting with oxygen or other active gases in the air at a high temperature, and the conductivity and the thermal stability of silylene are not influenced.

Description

TECHNICAL FIELD

[0001] The utility model relates to silicon heating material processing technical field especially relates to a kind of baking equipment for silicon heating material processing. BACKGROUND

[0002] As a two-dimensional honeycomb structure of silicon atom monolayer material, silicene exhibits great application potential in the field of nanoelectronics, optoelectronic devices and other fields due to its unique electronic properties, high mobility and the characteristics of compatibility with existing silicon-based semiconductor technology. However, silicene material is extremely sensitive to environmental conditions, especially in the high-temperature processing process, it is easy to be affected by oxidation or other chemical reactions, which not only damages its excellent physical properties, but also may cause irreversible structural damage. Traditional baking equipment is usually operated in air or can only provide limited protection atmosphere options. For new two-dimensional materials such as silicene, ordinary baking methods cannot meet its special processing requirements, especially when high-temperature heat treatment is needed, oxygen and other active ingredients in the air may trigger unnecessary side reactions, affecting the quality and reliability of the final product.

[0003] We propose a kind of baking equipment for silicon heating material processing, the baking equipment can maintain a pure, controllable inert gas environment throughout the processing flow, to ensure that silicene remains stable throughout the baking and subsequent cooling process. SUMMARY

[0004] In order to overcome the shortcomings of existing baking equipment that cannot provide stable environment for silicene heating material during baking, and silicene material is easy to be oxidized and affect its performance, the utility provides a kind of baking equipment for silicon heating material processing, the baking equipment can maintain a pure, controllable inert gas environment throughout the processing flow, to ensure that silicene remains stable throughout the baking and subsequent cooling process.

[0005] The technical implementation scheme of the utility model is: a kind of baking equipment for silicon heating material processing, including baking oven, sealing box door is rotatably connected on baking oven, material supporting plate is fixedly connected to the bottom end in baking oven, still including installation frame, installation frame is fixedly connected on baking oven, gas storage cylinder is fixedly connected in one side in installation frame, gas storage cylinder top is communicated with gas delivery pipe, gas delivery pipe tail end is communicated with baking oven top, suction pump is fixedly connected in the other side in installation frame, connecting pipe is communicated between suction pump and baking oven, cooling assembly is equipped on baking oven, cooling assembly is used to cool and cool the inside of baking oven, locking assembly is equipped in baking oven for locking material supporting plate.

[0006] Optionally, handle is fixedly connected on sealing box door and material supporting plate.

[0007] Optionally, the cooling assembly comprises a water pipe frame fixedly connected in the baking oven, both ends of the water pipe frame penetrating out of the baking oven, and a cooler fixedly connected to the baking oven and in communication with one end of the water pipe frame.

[0008] Optionally, the locking assembly comprises equidistantly distributed sliding plates slidably connected to the bottom end of the baking oven, and locking blocks fixedly connected between the sliding plates on the same side and in connection with equidistantly distributed elastic members between the locking blocks and the baking oven.

[0009] Optionally, the front end of the locking block near the side of the material supporting plate is obliquely arranged for extrusion with the material supporting plate.

[0010] Optionally, the elastic member is a spring.

[0011] Compared with the prior art, the utility model has the advantages that: the silicon material is placed on the material supporting plate and put into the baking oven, the baking oven is in a closed state after the sealing door is closed, the baking oven is vacuumized by the suction pump through the connecting pipe, and the inert gas is transported into the baking oven through the gas cylinder and the gas pipe, the inert gas can protect the silicon material during the baking process, prevent the material from reacting with oxygen or other active gas in the air at high temperature, and affect the conductivity and thermal stability of the silicon, and the water in the water pipe frame flows to take away the heat to cool the baking oven after the baking is completed, so that the silicon material is cooled in the inert gas environment in the baking oven, and the quality of the silicon material is further ensured. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a perspective structural schematic view of the utility model.

[0013] Figure 2 It is a sectional view structural schematic view of the utility model.

[0014] Figure 3 It is a perspective structural schematic view of the water pipe frame and the cooler of the utility model.

[0015] Figure 4 It is a perspective structural schematic view of the locking block, the elastic member and the sliding plate of the utility model.

[0016] In the above drawings: 1: baking oven, 2: sealing door, 3: material supporting plate, 4: mounting frame, 5: gas cylinder, 6: gas pipe, 7: suction pump, 8: connecting pipe, 9: water pipe frame, 10: cooler, 11: locking block, 12: elastic member, 13: sliding plate. DETAILED DESCRIPTION

[0017] References to embodiments herein mean that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the present invention. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0018] Example 1: A baking apparatus for processing silene heating materials, such as... Figures 1-4 As shown, the oven includes a baking oven 1, a sealed door 2, a material tray 3, a mounting frame 4, an air cylinder 5, an air supply pipe 6, an air intake pump 7, a connecting pipe 8, a cooling assembly, and a locking assembly. The sealed door 2 is rotatably connected to the front of the baking oven 1. The material tray 3 is fixedly connected to the lower side of the baking oven 1. Handles are fixedly connected to the right side of the sealed door 2 and the front side of the material tray 3. The mounting frame 4 is fixedly connected to the top of the baking oven 1. The air cylinder 5 is fixedly connected to the left side of the mounting frame 4. The air supply pipe 6 is connected to the upper side of the air cylinder 5. The tail end of the air supply pipe 6 is connected to the upper side of the baking oven 1. The air intake pump 7 is fixedly connected to the right side of the mounting frame 4. The connecting pipe 8 connects the air intake pump 7 to the lower right side of the baking oven 1. The baking oven 1 is equipped with a cooling assembly for cooling the interior of the baking oven 1. The baking oven 1 is equipped with a locking assembly for locking the material tray 3.

[0019] When using the device, the operator controls the sealing box door 2 to rotate forward and open, then pulls out the material tray 3 forward, and places the silene material to be heated and baked on the material tray 3. After the silene material is placed, the operator controls the material tray 3 to move backward into the baking oven 1, locks the material tray 3 using the locking component, and then closes the sealing box door 2, making the inside of the baking oven 1 sealed. At this time, the operator controls the suction pump 7 to operate, and the suction pump 7 operates to first remove the air from the baking oven 1 through the connecting pipe 8, making the inside of the baking oven 1 a vacuum state. Then, inert gas is supplied into the baking oven 1 through the air storage cylinder 5 and the gas supply pipe 6. Finally, the baking oven 1 is used to heat the silene material. The material is heated and baked, and the inert gas plays a protective role during the baking process of the silanene heating material, preventing the material from reacting with oxygen or other active gases in the air at high temperatures, which would affect the conductivity and thermal stability of the silanene. During the baking process, the staff can control the continuous supply of inert gas to replace the old inert gas in the baking oven 1, or stop the supply after a certain amount of inert gas is added. After baking is completed, the baking oven 1 stops heating and the interior of the baking oven 1 is cooled down by the cooling components, thereby cooling down the silanene material. This allows the silanene material to cool down in the inert gas environment inside the baking oven 1, further ensuring the quality of the silanene material.

[0020] Embodiment 2: on the basis of embodiment 1, as shown in Figure 1 、 Figure 2 and Figure 3 cooling assembly includes water pipe frame 9 and cooler 10, the oven 1 is fixedly connected with water pipe frame 9, water pipe frame 9 is distributed in the left and right upper side of the oven 1, the both ends of water pipe frame 9 are out of the oven 1, the oven 1 is fixedly connected with cooler 10 at the right front part, and the cooler 10 is communicated with the right end of water pipe frame 9.

[0021] After the silicon material is baked, the staff connects the pipeline to the left end of water pipe frame 9 and cooler 10, the water source is input into water pipe frame 9 after being cooled by cooler 10, the water circulates in water pipe frame 9, and then enters the oven 1, so that the inside of the oven 1 is cooled, the silicon material is cooled in the inert gas environment in the oven 1, and the quality of the silicon material is further ensured.

[0022] As shown in Figure 2 and Figure 4 locking assembly includes locking block 11, elastic member 12 and sliding plate 13, the left and right sides of the lower part in the oven 1 are slidably connected with three equidistantly distributed sliding plates 13, the locking block 11 is fixedly connected between the three sliding plates 13 on the same side, the front end of the locking block 11 close to one side of the material supporting plate 3 is inclined, for extrusion fitting with the material supporting plate 3, the elastic member 12 is connected between the locking block 11 and the oven 1, and the elastic member 12 is specifically a spring.

[0023] When the device is used, the material supporting plate 3 moves backward to extrude the inclined surface of the locking block 11, then the locking block 11 moves backward, the elastic member 12 deforms, the locking block 11 moves backward to drive the sliding plate 13 to slide backward, the sliding plate 13 guides the moving direction of the locking block 11, when the material supporting plate 3 is placed in the oven 1, the oven 1 is located between the left and right locking blocks 11, under the action of the elastic member 12, the locking block 11 can clamp the material supporting plate 3, and then the position of the material supporting plate 3 is fixed.

[0024] The above merely illustrates the specific implementation of the present application, but the protection scope of the present application is not limited to this, any skilled person in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A baking apparatus for processing silene heating materials, comprising a baking oven (1), a sealed oven door (2) rotatably connected to the baking oven (1), and a material tray (3) fixedly connected to the bottom of the baking oven (1), characterized in that: The installation frame (4) is fixedly connected to the baking oven (1), one side of the installation frame (4) is fixedly connected with the gas storage cylinder (5), the top end of the gas storage cylinder (5) is communicated with the gas conveying pipe (6), the tail end of the gas conveying pipe (6) is communicated with the top end of the baking oven (1), the other side of the installation frame (4) is fixedly connected with the air suction pump (7), the air suction pump (7) is communicated with the baking oven (1) through the connecting pipe (8), the baking oven (1) is provided with a cooling assembly, the cooling assembly is used for cooling the inside of the baking oven (1), and the baking oven (1) is provided with a locking assembly for locking the material supporting plate (3).

2. A silicon heating element processing oven according to claim 1, wherein: The sealing box door (2) and the material supporting plate (3) are fixedly connected with handles.

3. A silicon heating element processing oven according to claim 2, wherein: The cooling assembly comprises a water conveying pipe frame (9), the water conveying pipe frame (9) is fixedly connected in the baking oven (1), both ends of the water conveying pipe frame (9) are arranged outside the baking oven (1), the baking oven (1) is fixedly connected with the cooler (10), and the cooler (10) is communicated with one end of the water conveying pipe frame (9).

4. A silicon heating element processing oven according to claim 3, wherein: The locking assembly comprises equidistantly distributed sliding plates (13), the equidistantly distributed sliding plates (13) are slidingly connected to the bottom end of the baking oven (1), the same side sliding plates (13) are fixedly connected with the locking blocks (11), and the locking blocks (11) are connected with the equidistantly distributed elastic members (12) between the baking oven (1).

5. A silicon heating element processing oven according to claim 4, wherein: The front end of the locking block (11) is obliquely arranged on the side close to the material supporting plate (3), and is used for extruding cooperation with the material supporting plate (3).

6. A silicon heating element processing oven according to claim 5, wherein: The elastic member (12) is a spring.

Images