Heat dissipation structure of vertical reaction furnace for solar cells and vertical reaction furnace

Abstract

The utility model discloses a heat dissipation structure of a vertical reaction furnace for solar cells and the vertical reaction furnace. The heat dissipation structure of the vertical reaction furnace for the solar cells comprises a flange assembly arranged at the open end of an inner furnace body, and is characterized in that the flange assembly comprises a flange connecting part used for sealing the inner furnace body; one end of the partition plate is connected with the flange connecting part, and the partition plate divides the inner furnace body into two cavities communicating with each other; and the air inlet piece and the air outlet piece are arranged on the flange connecting part and communicate with the two cavities of the inner furnace body correspondingly. On the premise that the small furnace body is not increased, the service life of the electrical elements in the inner furnace body can be prolonged, and the service life of the inner furnace body can be prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of solar cell piece's processing equipment especially relates to a heat dissipation structure for vertical reaction furnace of solar cell piece. BACKGROUND

[0002] The equipment used in the current photovoltaic industry diffusion, oxidation, annealing, doping, PECVD, LPCVD etc. process production has vertical reaction furnace and horizontal reaction furnace two types, the furnace body structure of these two types needs to first put the silicon wafer or wafer in the specific carrier, then is transmitted to the reaction cavity of furnace body and carries out process processing, through heating to the reaction cavity, and the specific reaction gas is passed in, thereby realizes the specific film coating, diffusion, oxidation and thin film deposition etc. process to the silicon wafer or wafer.

[0003] In the existing vertical furnace layout, mainly by a big reaction cavity, reaction cavity outside is provided with heating furnace wire, and the carrier and silicon wafer in the reaction cavity are heated. As the capacity (the number of carriers and the quantity of wafer loading) is increasing, the diameter of the reaction cavity is also increased. Under this background, how to prolong the service life of the electrical element in the inner furnace body and the service life of the inner furnace body becomes very difficult. SUMMARY

[0004] The utility model discloses to solve how to prolong the service life of the electrical element in the inner furnace body and the service life of the inner furnace body technical problem, proposes a kind of heat dissipation structure for vertical reaction furnace of solar cell piece, vertical reaction furnace.

[0005] The heat dissipation structure for vertical reaction furnace of solar cell piece provided by the utility model includes the flange assembly being arranged in the open end of inner furnace body, and the flange assembly includes:

[0006] Flange connecting portion, for closing inner furnace body;

[0007] Partition, one end is connected with flange connecting portion, and inner furnace body is divided into two chambers that are interconnected;

[0008] Air inlet and air outlet, are set on flange connecting portion, and respectively communicate the two chambers of inner furnace body.

[0009] Further, the air inlet includes at least two or more openings opened in the flange connecting portion, and the fan is installed at the opening.

[0010] Further, the air outlet is the air outlet hood connectable with the outside exhaust pipe.

[0011] Further, one end of the partition plate is detachably connected with the flange connecting part, the other end is located in the range of [r-x, r+x] from the closed end of the inner furnace body, and the width of the partition plate is located in the range of [R-y, R], R is the maximum diameter of the containing cavity, r is the radius of the containing cavity, and x and y are tolerance values.

[0012] Further, the heat dissipation structure further comprises cooling pipes or cooling plates arranged along the inner wall of the inner furnace body, and / or the outer wall of the inner furnace body, and / or the inner wall of the outer furnace body.

[0013] Further, the cooling pipes or cooling plates are arranged in an extendable shape along the direction from the open end to the closed end.

[0014] Further, when the heat dissipation structure is the cooling pipes arranged along the inner wall of the inner furnace body, the end of the partition plate close to the closed end of the inner furnace body is provided with an arc-shaped water receiving groove, and the side of the cooling pipes close to the closed end of the inner furnace body is located in the arc-shaped water receiving groove.

[0015] Further, the heat dissipation structure further comprises: a spiral cooling water groove arranged at the closed end of the vertical reaction furnace, and the spiral cooling water groove is coiled with the center of the closed end of the vertical reaction furnace as the center; and / or a spiral cooling water pipe arranged at the top end of the vertical reaction furnace, and the spiral cooling water pipe is coiled with the center of the top end of the vertical reaction furnace as the center.

[0016] The vertical reaction furnace for solar cell pieces provided by the utility model comprises an inner furnace body and an outer furnace body, further comprises the heat dissipation structure of the vertical reaction furnace for solar cell pieces in the above technical solution, and the inner furnace body is connected with the outer furnace body through a flange assembly.

[0017] The heat dissipation structure is arranged in the inner furnace body, the hot air of the inner furnace body is swept, the service life of the electrical element in the inner furnace body is prolonged, the service life of the inner furnace body is prolonged, and the temperature of the inner furnace body can be adjusted. BRIEF DESCRIPTION OF DRAWINGS

[0018] The utility model will be described in detail in combination with embodiments and drawings, in which:

[0019] Figure 1 It is the vertical state schematic diagram of an embodiment of the utility model.

[0020] Figure 2 It is the three-dimensional schematic diagram of an embodiment of the utility model.

[0021] Figure 3 It is the cross section schematic diagram of another embodiment of the utility model.

[0022] Figure 4It is the stereogram of the inner furnace body of one embodiment of the utility model.

[0023] Figure 5 It is the top view schematic diagram of the reaction furnace of the utility model.

[0024] Mark explanation:

[0025] Flange connecting portion, 2, partition, 3, air inlet, 4, air outlet, 5, cooling pipe, 6, arc water collecting groove, 7, cooling plate, 8, inner furnace body, 9, outer furnace body, 10, carrier. Specific implementation

[0026] In order to make the technical problem, technical scheme and beneficial effect of the utility model to be solved more clear and obvious, the utility model is further described in detail below by combining with the drawings and embodiments.It should be understood that the specific embodiments described here are only used to explain the utility model, and are not used to limit the utility model.

[0027] Therefore, one feature indicated in the specification will be used to explain one feature of one embodiment of the utility model, and it is not suggested that each embodiment of the utility model must have the explained feature.In addition, it should be noted that the specification describes many features.Although certain features can be combined together to show possible system design, these features can also be used in other combinations that are not explicitly explained.Thus, unless otherwise explained, the explained combination is not intended to be limited.

[0028] As shown in Figure 1 , Figure 2 The heat dissipation structure of the vertical reaction furnace for solar cell chips provided by the utility model, including flange assembly, is set at the open end of the inner furnace body 8 of the vertical reaction furnace.

[0029] The flange assembly includes flange connecting portion 1, partition 2, air inlet 3 and air outlet 4.

[0030] The flange connecting portion 1 is used to close the inner furnace body 8 where the heat dissipation structure is located.

[0031] One end of the partition 2 is connected with the flange connecting portion 1, and the inner furnace body 8 is divided into two chambers that are communicated with each other.

[0032] The air inlet 3 and the air outlet 4 are set on the flange connecting portion 1, and the air inlet 3 and the air outlet 4 are respectively communicated with the two chambers of the inner furnace body 8, the gas for adjusting the temperature in the furnace body enters one of the chambers through the air inlet 3, reaches the other chamber, and is finally blown out through the air outlet 4.It should be noted that the inner furnace body for air inlet and outlet is not the reaction chamber, but can be the chamber adjacent to the reaction chamber, which is used for adjusting the temperature of the reaction chamber.

[0033] The utility model discloses a baffle 2, air inlet piece 3 and air outlet piece 4 adjust the temperature of inner furnace body 8 to prolong the service life of electrical element in the inner furnace body and the service life of the inner furnace body, and the whole structure does not need to increase multiple small reaction cavities in the reaction furnace, and the structure is simple and convenient to maintain.

[0034] In an embodiment, the air inlet piece 3 includes at least one or more openings on the flange connecting part 1, and a fan installed at the opening. The fan blows air into the corresponding chamber to adjust the thermal field uniformity and temperature of the reaction cavity. The utility model does not limit the number of openings. When one opening is provided, different temperature gases can be introduced to adjust the temperature of the reaction cavity according to the situation. When multiple openings are provided, different temperature gases can be introduced through each opening. When needed, different temperature gases can be introduced to adjust the thermal field uniformity and temperature of the reaction cavity, thereby prolonging the service life of electrical elements in the inner furnace body and the service life of the inner furnace body.

[0035] In a specific embodiment, the air outlet piece is an air outlet hood that can be connected to an external exhaust pipe. The air outlet hood and the flange connecting part can be an integrally formed structure, forming a hood flange, or can be a structure that is fixed together through later installation. The air outlet hood can be directly connected to the peripheral factory exhaust to exhaust the excess hot air after heat exchange with the vertical reaction furnace.

[0036] In other embodiments, the air inlet piece can be simply at least one air inlet, and the corresponding air outlet piece can be an air outlet hood with an exhaust fan, which can also achieve the effect of adjusting the temperature and thermal field uniformity of the reaction cavity.

[0037] In an embodiment, one end of the baffle 2 is detachably connected to the inner side of the flange connecting part 1 towards the inner furnace body 8, and the other end of the baffle 2 is located within the range of [r-x, r+x] from the closed end of the inner furnace body 8. r is the radius of the containing cavity, and x is the tolerance value. That is, there is a certain distance between the other end of the baffle 2 and the bottom of the inner furnace body 8, so that the air duct between the air inlet piece 3 and the air outlet piece 4 has almost the same inner diameter. Therefore, the distance between the other end of the baffle 2 and the bottom of the inner furnace body 8 can be set based on the radius of the inner furnace body 8. Of course, the length of the baffle 2 can also be set as needed, and is not limited to the range listed in this embodiment. The width of the baffle 2 is within the range of [R-y, R], where R is the maximum diameter of the containing cavity, and y is the tolerance value. In order to separate the inner furnace body 8 and facilitate disassembly, the baffle 2 is not fixed in the inner furnace body 8, but is positioned to separate the inner furnace body 8 by means of the flange connecting part. Therefore, the width of the baffle 2 is almost the same as the maximum diameter of the inner furnace body 8, but there is a gap between the baffle 2 and the inner wall of the inner furnace body 8, which facilitates the disassembly of the flange connecting part and the removal of the baffle 2 and other components on the flange connecting part.

[0038] On the basis of the above-mentioned embodiments, the heat dissipation structure in one embodiment of the present application further comprises a cooling pipe 5 or a cooling plate 7. The cooling pipe 5 and the cooling plate 7 can be used to quickly cool the vertical reaction furnace. After the reaction is completed, the vertical reaction furnace can be quickly cooled through the cooling pipe 5 or the cooling plate 7, and the effect of quickly adjusting the temperature can also be achieved during the temperature adjustment process. The installation position of the cooling pipe 5 and the cooling plate 7 can have multiple embodiments. The cooling pipe 5 or the cooling plate 7 can be installed along the inner wall of the inner furnace body 8, or can be installed along the outer wall of the inner furnace body 8, or can be installed along the inner wall of the outer furnace body 9, or can be a combination of these embodiments, which can be specifically set according to the needs of those skilled in the art. Among them Figure 1 、 Figure 2 As can be seen from the installation example of the cooling pipe 5, Figure 3 As can be seen from the installation example of the cooling plate 7.

[0039] In one embodiment, the cooling pipe 5 or the cooling plate 7 is arranged in a telescopic shape along the direction from the open end to the closed end to cool specific parts. For example, the cooling pipe 5 is installed in the inner furnace body 8, which can cool specific parts of the inner furnace body 8 chamber. When the temperature of a certain part of the inner furnace body 8 chamber is abnormally high, the cooling structure can be telescoped to the part with abnormally high temperature for targeted cooling, so that the cooling efficiency of the cooling structure is higher. For example, the cooling pipe can adopt a shape such as a bellows, and the length of the cooling pipe can be adjusted to achieve targeted cooling of specific parts. For example, the cooling plate can be made into a telescopic structure based on the existing mechanical structure, which can also achieve the purpose. When the cooling structure is applied in the inner furnace body, the cooling structure of the inner furnace body can ensure the service life of the furnace body and reduce the installation and maintenance time.

[0040] When each of the above embodiments is combined with each other, a combination of various heat dissipation modes can be formed to improve the heat dissipation efficiency of the furnace body and avoid damage to the furnace body caused by long-term high temperature.

[0041] In one embodiment, when the heat dissipation structure is a cooling pipe 5 arranged along the inner wall of the inner furnace body 8, the end of the baffle 2 close to the closed end of the inner furnace body 8 is provided with an arc-shaped water collecting groove 6, and the side of the cooling pipe 5 close to the closed end of the water collecting groove of the inner furnace body 8 is located in the arc-shaped water collecting groove 6, as shown in Figure 1 、 Figure 2 When the cooling pipe 5 leaks, the water collecting groove can play a role of containing water to avoid local temperature influence on the vertical reaction furnace, which may even damage the furnace body and related electrical elements.

[0042] On the basis of any one of the above embodiments, the heat dissipation structure of the utility model further includes the spiral cooling water tank arranged at the closed end of the vertical reaction furnace and / or the spiral cooling water pipe arranged at the top end of the vertical reaction furnace. The spiral cooling water tank and the spiral cooling water pipe are coiled with the center of the corresponding end of the vertical reaction furnace as the center. The cooling water tank and the cooling water pipe can well dissipate heat from the end face of the reaction furnace, and the volume of the reaction furnace will not be greatly increased.

[0043] The above various embodiments of the utility model can be combined as required, and the heat field uniformity and temperature of the vertical reaction furnace can be adjusted by the above various embodiments or the combined technical solutions, and rapid heat dissipation of the vertical reaction furnace can also be realized. The heat dissipation control structure formed by combining different heat dissipation control modes can improve the heat dissipation efficiency of the furnace body and avoid damage caused by long-term high-temperature conditions of the furnace body.

[0044] As shown in Figure 4 , Figure 5 The utility model also protects a vertical reaction furnace for solar cell pieces, which comprises an inner furnace body 8 and an outer furnace body 9, and the heat dissipation structure of the above technical solution. The flange assembly of the heat dissipation structure is arranged at the open end of the inner furnace body 8, and the inner furnace body 8 is connected with the outer furnace body 9 through the flange assembly. The part of the outer furnace body 9 except the inner furnace body 8 is a reaction chamber for mounting a plurality of carriers 10. A plurality of solar cell pieces are placed in each carrier 10, so that the solar cell pieces can be subjected to corresponding process treatment.

[0045] In other embodiments, the inner furnace body 8 and the outer furnace body 9 can be connected through a connecting assembly, so that the inner furnace body 8 can be fixed in the outer furnace body 9. In addition, a plurality of heat insulation assemblies can be arranged between the inner furnace body 8 and the outer furnace body 9 to prevent heat loss of the inner furnace body 8 and the outer furnace body 9 and to prevent heat conduction to the outer frame outside, thereby avoiding waste of energy and affecting the service life of adjacent elements outside.

[0046] In the description of the utility model, it should be understood that the directions such as "front, back, up, down, left, right", "transverse, vertical, perpendicular, horizontal" and "top, bottom" and the like indicate the direction or position relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description. Without making the opposite statement, these direction words do not indicate and imply that the indicated device or element must have a specific direction or be constructed and operated in a specific direction, so it cannot be understood as a limitation on the protection scope of the utility model. The direction words "inner, outer" refer to the inner and outer of the contour of each component itself.

[0047] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0048] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A heat dissipation structure for a vertical reactor for solar cells, comprising a flange assembly disposed at the open end of the inner furnace body, characterized in that, The flange assembly includes: Flange connection for sealing the inner furnace body; A partition, one end of which is connected to the flange connection, divides the inner furnace body into two interconnected chambers; The air inlet and air outlet are provided on the flange connection and are respectively connected to the two chambers of the inner furnace body.

2. The heat dissipation structure of the vertical reactor for solar cells as described in claim 1, characterized in that, The air inlet includes at least one or more openings formed on the flange connection, and a fan installed at the opening.

3. The heat dissipation structure of the vertical reactor for solar cells as described in claim 1, characterized in that, The air outlet component is an air outlet cover that is connected to the external exhaust pipe.

4. The heat dissipation structure of the vertical reactor for solar cells as described in claim 1, characterized in that, One end of the partition is detachably connected to the flange connection, and the distance between the other end and the closed end of the inner furnace body is within the range of [rx, r+x]. The width of the partition is within the range of [Ry, R), where R is the maximum diameter of the cavity, r is the radius of the cavity, and x and y are tolerance values.

5. The heat dissipation structure for a vertical reactor for solar cells as described in any one of claims 1 to 4, characterized in that, The heat dissipation structure also includes cooling pipes or cooling plates arranged along the inner wall of the inner furnace body, and / or the outer wall of the inner furnace body, and / or the inner wall of the outer furnace body.

6. The heat dissipation structure of the vertical reactor for solar cells as described in claim 5, characterized in that, The cooling pipe or cooling plate is configured in a retractable shape along the direction from the open end to the closed end of the inner furnace body.

7. The heat dissipation structure of the vertical reactor for solar cells as described in claim 5, characterized in that, When the heat dissipation structure is a cooling pipe installed along the inner wall of the inner furnace body, the end of the partition plate near the closed end of the inner furnace body is provided with an arc-shaped water receiving groove, and the side of the cooling pipe near the closed end of the inner furnace body is located in the arc-shaped water receiving groove.

8. The heat dissipation structure for a vertical reactor for solar cells as described in any one of claims 1 to 4, characterized in that, The heat dissipation structure further includes: a spiral cooling water tank disposed at the closed end of the vertical reactor, the spiral cooling water tank being coiled around the center of the closed end of the vertical reactor; and / or a spiral cooling water pipe disposed at the top of the vertical reactor, the spiral cooling water pipe being coiled around the center of the top of the vertical reactor.

9. A vertical reactor for solar cells, comprising an inner furnace body and an outer furnace body, characterized in that, It also includes a heat dissipation structure for a vertical reactor for solar cells as described in any one of claims 1 to 8, wherein the inner furnace body is connected to the outer furnace body via the flange assembly.

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