Reaction furnace convenient to disassemble and assemble and processing equipment

Abstract

The reaction furnace comprises a furnace tube and a furnace door which jointly form a reaction chamber, the two ends of the furnace tube in the axial direction of the furnace tube are a furnace tube closed end and a furnace tube open end respectively, and the furnace door covers the furnace tube open end. The shape of the peripheral side of the open end of the furnace tube allows the furnace tube to be disassembled and assembled from the gas source component end of the processing equipment, and the shape of the peripheral side of the open end of the furnace tube is a plane shape or a convex shape; according to the utility model, the stepped structure of the opening end of the existing furnace tube is changed into the linear structure or the convex structure, so that the end part of the furnace tube of the reaction furnace can pass through the limiting end of processing equipment, the furnace tube of the reaction furnace can be detached from the gas source component end, the labor is greatly saved, and the replacement efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of solar photovoltaic cell manufacturing, more particularly, relates to a reaction furnace and processing equipment convenient to dismount. BACKGROUND

[0002] With the continuous development of photovoltaic industry, the temperature and capacity of TOPCon (Tunnel Oxide Passivated Contact, full name: tunnel oxide passivated contact technology) cell diffusion equipment are improved, and the structure size of the equipment is getting larger and larger (the inner diameter of the furnace pipe has reached 480 mm, and there is a trend of continuous increase). However, the service life of the furnace pipe of the TOPCon diffusion equipment is much lower than that of the phosphorus extension, and the reaction furnace needs to be replaced frequently. And the reaction furnace usually uses a quartz tube, the price of quartz is high, and a series of losses caused by frequent replacement have become the pain points of the industry. In addition, with the continuous increase of labor cost, reducing labor debugging and maintenance cost, reducing cost and increasing efficiency have become urgent problems to be solved in the industry.

[0003] The mainstream processing equipment used for diffusion is to replace the reaction furnace from the reaction furnace inlet of the purification component end, that is, to dismount and assemble the reaction furnace from the inside of the purification table machine. The space is very limited, and there is a certain personnel safety hazard. Each replacement consumes a lot of time and manpower, causing great loss of production capacity.

[0004] Therefore, how to provide a design scheme for conveniently replacing the reaction furnace is a problem to be solved in the industry. Utility model content

[0005] The utility model aims at providing a reaction furnace and processing equipment convenient to dismount, so as to solve the problem of inconvenient dismounting of the reaction furnace in the prior art.

[0006] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of:

[0007] The utility model provides a reaction furnace convenient to dismount first, the reaction furnace includes the furnace pipe and the furnace door which jointly form the reaction chamber, the two ends of the furnace pipe along the axial direction are respectively the furnace pipe closed end and the furnace pipe open end, the furnace door cover is arranged at the furnace pipe open end, and the outer peripheral side shape of the furnace pipe open end allows the furnace pipe to be dismounted and assembled from the gas source component end of the processing equipment.

[0008] Further, the furnace door and the furnace pipe open end are sealingly connected through a sealing element.

[0009] Further, the outer peripheral side shape of the furnace pipe open end is a planar shape.

[0010] Further, the outer peripheral side of the furnace pipe open end is provided with a cooling structure.

[0011] Further, the outer peripheral side of the open end of the furnace tube is in a convex shape.

[0012] Further, the outer peripheral side of the open end of the furnace tube is provided with a heat insulation protrusion, and the heat insulation protrusion is provided with a cooling structure.

[0013] Further, the furnace tube has a furnace tube extension section, the open end of the furnace tube is one end of the furnace tube extension section, and the furnace tube extension section is provided with the heat insulation protrusion and the fixing protrusion at intervals in the axial direction of the furnace tube extension section, and the fixing protrusion is provided with the cooling structure.

[0014] Further, the outer peripheral side of the open end of the furnace tube is provided with the heat insulation protrusion and the fixing protrusion at intervals in the axial direction of the furnace tube, and the heat insulation protrusion is provided with the cooling structure.

[0015] Further, the side of the furnace door facing the reaction chamber is provided with a heat preservation layer and a heat insulation layer, and the furnace door is provided with the cooling structure.

[0016] The utility model also provides a kind of processing equipment, including gas source component, purification component and the reaction component between gas source component and purification component, reaction component is placed with the reaction furnace of the foregoing convenient dismounting inside.

[0017] Compared with prior art, the beneficial effects of the reaction furnace and the processing equipment provided by the utility model are that: the utility model allows the furnace tube to be disassembled from the gas source component end of the processing equipment by setting the shape of the outer peripheral side of the open end of the furnace tube, which facilitates the timely installation or disassembly of the furnace tube, greatly saves labor costs and installation and maintenance costs, and breaks down the barriers in the industry that the furnace tube cannot be disassembled from the tail of the gas source component. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can obtain other drawings according to these drawings without creating any creative labor.

[0019] Figure 1 It is a schematic diagram of a processing equipment in related art.

[0020] Figure 2 It is a schematic diagram of a reaction furnace in related art.

[0021] Figure 3 It is a schematic diagram of a reaction furnace provided by the first embodiment of the utility model.

[0022] Figure 4 It is a schematic diagram of a reaction furnace provided by the second embodiment of the utility model.

[0023] Figure 5This is a schematic diagram of the reactor provided in Embodiment 3 of this utility model;

[0024] Figure 6 This is a schematic diagram of the reactor provided in Embodiment 4 of this utility model;

[0025] Figure 7 This is a schematic diagram of the reactor provided in Embodiment 5 of the present invention;

[0026] The main markings in the attached figures are as follows:

[0027] 1. Purification components; 2. Reaction components; 3. Gas source components; 4. Reactor inlet; 5. Reactor;

[0028] 51. Furnace tube; 52. Furnace door; 53. Heating element; 54. Sealing element; 55. Thermal insulation structure; 56. Cooling structure; 57. Extended section of furnace tube; 58. Thermal insulation protrusion; 59. Fixing protrusion. Detailed Implementation

[0029] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0030] Currently, under the TOPCON process route, the diffusion furnace temperature exceeds 1000℃, which poses a significant challenge to the lifespan of quartz reactors used in the industry. An excessively short lifespan for quartz components leads to frequent reactor replacements, resulting in substantial waste of human and material resources.

[0031] like Figure 1 The diagram shows a processing equipment in the relevant technology. The reactor 5 enters from the reactor inlet 4 at the end of the purification component 1 and is eventually fixed inside the reaction component 2. The existing method of disassembling and assembling the reactor 5 has the following drawbacks: 1) The purification platform is high, making internal protection measures difficult and posing a certain risk to personnel safety; 2) The internal space of the purification platform restricts the disassembly and assembly of the reactor 5. Due to the compact internal structure of the purification platform, each disassembly and assembly requires significant manpower, resources, and time, resulting in substantial losses; 3) The furnace tubes of the reactor 5 are very long, requiring 3-4 people to carry, install, and maintain them. Furthermore, the furnace tubes are made of fragile materials (such as quartz), making them prone to collisions and damage with other components in the processing equipment. Therefore, the reactor 5 needs to be carefully handled when entering or leaving the processing equipment. Figure 1 The components adjacent to the reactor inlet 4 shown are disassembled to prevent damage to the reactor 5. Therefore, in related technologies, the reactor 5 takes a long time and requires considerable manpower to enter or exit the processing equipment, causing significant inconvenience to the installation and maintenance of the reactor 5 within the processing equipment.

[0032] As Figure 2 shown is a reaction furnace in the related art, wherein the end of the furnace tube of the reaction furnace 5 is in a stepped shape, which can avoid the sealing ring between the furnace door and the furnace tube from directly contacting the high-temperature gas, and increase the service life of the sealing ring. However, the stepped shape of the end of the furnace tube blocks the end of the furnace tube of the reaction furnace 5 from passing through the limiting end of the processing equipment, so that the reaction furnace 5 cannot be disassembled from the end of the gas source component 3, and the installation and maintenance of the reaction furnace 5 are inconvenient.

[0033] Therefore, the utility model changes the structure of the reaction furnace, so that the reaction furnace can be disassembled from the end of the gas source component of the processing equipment, the space for replacing the furnace tube of the reaction furnace can be increased, the disassembly and maintenance are convenient, the replacement efficiency is improved, and the labor cost is reduced. The reaction furnace can be conveniently replaced, the sealing element is not burned out, the equipment can be stably operated and not leak, the safety risk of personnel is reduced, the cost is reduced and the efficiency is increased, and the operation and maintenance cost of the equipment is reduced.

[0034] Embodiment one

[0035] The processing equipment provided in the embodiment comprises a gas source component, a purification component, and a reaction component located between the gas source component and the purification component, and a reaction furnace convenient to disassemble is placed in the reaction component. The gas source component mainly provides the gas required for diffusion, the reaction component mainly makes the silicon wafer diffuse at high temperature, and the purification component mainly provides a clean space to complete the transportation of the silicon wafer and its carrier.

[0036] Please refer to Figure 3 , the reaction furnace 5 comprises a furnace tube 51 and a furnace door 52 which jointly form a reaction chamber. The furnace tube 51 is made of quartz material, the furnace tube 51 is provided with a heating element 53, and the two ends of the furnace tube 51 in the axial direction are respectively a furnace tube closed end and a furnace tube open end. The furnace door 52 is arranged on the furnace tube open end, the opening and closing of the furnace door 52 is controlled to control the in and out of the carrier, the furnace door 52 is provided with a sealing element 54 in sealing connection with the furnace tube open end, and the shape of the outer periphery side of the furnace tube open end allows the furnace tube 51 to be disassembled from the end of the gas source component of the processing equipment.

[0037] It should be understood that the end of the furnace tube of the reaction furnace 5 in the industry at present is mostly in a stepped structure to prolong the service life of the sealing ring. However, due to the particularity of the stepped structure, the furnace tube 51 of the reaction furnace 5 cannot be disassembled from the tail of the reaction processing equipment (i.e. the tail of the gas source component). The embodiment sets the shape of the outer periphery side of the furnace tube open end to allow the furnace tube 51 to be disassembled from the end of the gas source component of the processing equipment, which is convenient for timely installation or disassembly of the furnace tube 51, greatly saves the labor cost and the installation and maintenance cost, and breaks the barrier that the furnace tube 51 of the reaction furnace 5 cannot be disassembled from the tail of the gas source component in the industry.

[0038] In the embodiment, the outer peripheral side of the open end of the furnace tube is in a planar shape. It should be understood that, in order to facilitate the furnace tube 51 of the reaction furnace 5 to be detached from the gas source component end of the processing equipment, the present embodiment changes the stepped structure of the open end of the existing furnace tube into a linear structure, so that there is no obstruction between the end of the furnace tube of the reaction furnace 5 and the limiting end of the processing equipment, and thus the furnace tube 51 can be directly detached from the gas source component end of the processing equipment; by pulling out the reaction furnace 5 from the gas source component end, without the need to detach the components at the inlet of the reaction furnace, the installation and maintenance time of the reaction furnace 5 is saved. Moreover, after the present embodiment changes the stepped structure of the open end of the existing furnace tube into a linear structure for the reaction furnace 5, the processing difficulty is greatly reduced, the material cost is saved, the service life is improved, and the maintenance cost of the equipment is greatly reduced.

[0039] In the embodiment, the side of the furnace door 52 facing the reaction chamber is provided with a heat preservation layer and a heat insulation layer to form a heat preservation and insulation structure 55, which can ensure the uniformity of the temperature of the open end of the furnace tube, and at the same time, insulate the heat from being transmitted to the furnace door 52, so as to prevent excessive heat from causing damage to the furnace door 52 and the sealing element 54, and prolong the service life of the sealing element 54. The heat preservation layer is made of heat preservation cotton material, and the heat insulation layer is made of heat insulation cotton material.

[0040] In the embodiment, the furnace door 52 is provided with a cooling structure 56. The cooling structure 56 can be filled with cooling liquid or cooling gas, so that the cooling structure 56 can cool the furnace door 52 and the sealing element 54, which is also beneficial to prolong the service life of the sealing element 54.

[0041] Embodiment Two

[0042] Please refer to Figure 4 , on the basis of the foregoing embodiment one, the outer peripheral side of the open end of the furnace tube is additionally provided with a cooling structure 56.

[0043] It should be understood that, after the present embodiment changes the stepped structure of the open end of the existing furnace tube into a linear structure, in order to avoid damage to the sealing element 54 between the furnace door 52 and the furnace tube 51 due to high temperature, the present embodiment also adopts that the outer peripheral side of the open end of the furnace tube is provided with a cooling structure 56, and the cooling structure 56 can be filled with cooling gas or cooling liquid, so that the sealing element 54 can be cooled in time, avoiding damage to the sealing element 54 due to direct contact with high-temperature gas, thereby reducing the maintenance frequency of the reaction furnace 5 and prolonging the service life of the reaction furnace 5.

[0044] Embodiment Three

[0045] Please refer to Figure 5The difference between the embodiment and the aforementioned embodiment one is that the outer periphery of the open end of the furnace tube is in a convex shape, and the outer periphery of the open end of the furnace tube is provided with a cooling structure 56.

[0046] It should be understood that the embodiment changes the stepped structure of the open end of the existing furnace tube into a convex structure, and the convex structure can just pass through the end of the processing equipment, so that the furnace tube 51 of the reaction furnace 5 can be detached from the gas source part end of the processing equipment.

[0047] Specifically, the outer periphery of the open end of the furnace tube is provided with a heat insulation protrusion 58, and the heat insulation protrusion 58 is provided with a cooling structure 56.

[0048] It should be understood that the heat insulation protrusion 58 can avoid the sealing element 54 directly opposite to the open end of the furnace tube, and avoid the heat in the furnace tube 51 directly opposite to the sealing element 54, so that the sealing element 54 is not easily damaged, and the service life of the sealing element 54 is prolonged. Moreover, the heat insulation protrusion 58 is provided with the cooling structure 56, and cooling gas or cooling liquid can be introduced into the cooling structure 56, so that the sealing element 54 can be cooled in time, and the service life of the sealing element 54 is also prolonged.

[0049] Embodiment four

[0050] Please refer to Figure 6 The difference between the embodiment and the aforementioned embodiment one is that the outer periphery of the open end of the furnace tube is in a convex shape, and the outer periphery of the open end of the furnace tube is provided with a cooling structure 56.

[0051] It should be understood that the embodiment changes the stepped structure of the open end of the existing furnace tube into a convex structure, and the convex structure can just pass through the end of the processing equipment, so that the furnace tube 51 of the reaction furnace 5 can be detached from the gas source part end of the processing equipment.

[0052] Specifically, the furnace tube 51 has a furnace tube lengthening section 57, the open end of the furnace tube is one end of the furnace tube lengthening section 57, the furnace tube lengthening section 57 is provided with heat insulation protrusions 58 and fixing protrusions 59 along the axial direction thereof, the fixing protrusions 59 are provided with cooling structures 56, and the thickness of the heat preservation and insulation structure 55 on the furnace door 52 is consistent with the length of the furnace tube lengthening section 57.

[0053] It should be understood that by setting the furnace tube extension 57 to increase the overall length of the furnace tube 51, a larger size carrier can be adapted. The heat insulation protrusion 58 is close to the open end of the furnace tube, and the heat insulation protrusion 58 can avoid the sealing element 54 being directly opposite the open end of the furnace tube, avoiding the heat in the furnace tube 51 being directly emitted to the sealing element 54 to cause the sealing element 54 to be easily damaged, which is beneficial to prolong the service life of the sealing element 54. Moreover, the thickness of the heat preservation structure 55 on the furnace door 52 is consistent with the length of the furnace tube extension 57, and especially the thickness of the heat insulation layer in the heat preservation structure 55 is increased, which better insulates the heat from being transmitted to the furnace door 52, so as to prevent excessive heat from causing damage to the furnace door 52 and the sealing element 54, and is also beneficial to prolong the service life of the sealing element 54. Moreover, the fixing protrusion 59 is away from the open end of the furnace tube relative to the heat insulation protrusion 58, and the setting of the fixing protrusion 59 can more stably fix the furnace tube 51 in the reaction component, avoiding the furnace tube 51 from shaking to affect the processing quality. Moreover, the fixing protrusion 59 is closer to the heating element 53 on the body of the furnace tube 51 relative to the heat insulation protrusion 58, and the cooling structure 56 is provided on the fixing protrusion 59. The cooling gas or cooling liquid can be introduced into the cooling structure 56, so that the furnace tube extension 57 can be cooled in time, which can reduce the heat conducted to the furnace door 52 and the sealing element 54 through the furnace tube extension 57, and is also beneficial to prolong the service life of the sealing element 54.

[0054] Example Five

[0055] For reference Figure 7 The difference between the present embodiment and the aforementioned example one is that the outer peripheral side shape of the open end of the furnace tube is a convex shape, and the cooling structure 56 is also provided.

[0056] It should be understood that the present embodiment adopts the convex structure by changing the stepped structure of the open end of the existing furnace tube, and the convex structure can also just pass through the limiting end of the processing equipment, so that the furnace tube 51 of the reaction furnace 5 can be disassembled from the gas source component end of the processing equipment.

[0057] Specifically, the outer peripheral side of the open end of the furnace tube is provided with the heat insulation protrusion 58 and the fixing protrusion 59 which are spaced apart along the axial direction thereof, and the heat insulation protrusion 58 is provided with the cooling structure 56.

[0058] It should be understood that the heat insulation protrusion 58 is close to the open end of the furnace tube, and the heat insulation protrusion 58 can avoid the sealing element 54 being directly opposite the open end of the furnace tube, avoiding the heat in the furnace tube 51 being directly emitted to the sealing element 54 to cause the sealing element 54 to be easily damaged, which is beneficial to prolong the service life of the sealing element 54. Moreover, the heat insulation protrusion 58 is provided with the cooling structure 56, and the cooling gas or cooling liquid can be introduced into the cooling structure 56, so that the sealing element 54 can be cooled in time, which is also beneficial to prolong the service life of the sealing element 54.

[0059] The utility model discloses in order to facilitate the furnace tube of reaction furnace can be detached from the gas source part end of processing equipment, the end structure of reaction furnace is changed emphatically, specifically is the straight line shape structure or convex structure of the existing furnace pipe open end's ladder shape structure is changed, make the furnace tube end of reaction furnace can pass through processing equipment limit end, thereby make the furnace tube of reaction furnace can be detached from the gas source part end, greatly save the manual work, improve the efficiency of replacement. In addition, the sealing element is sealed and connected between the furnace door and the furnace pipe open end, for prolonging the service life of sealing element, can also set up cooling structure at furnace door and furnace pipe open end, the sealing element is cooled through cooling structure, avoid the furnace pipe open end structure shape from ladder type shape change into straight line shape or convex, the sealing element between furnace door and furnace pipe end is directly contacted with high temperature gas and causes damage. The utility model provides a variety of embodiments, and the main difference lies in the design of the shape of the furnace tube end structure and the position of the cooling structure, guarantee the service life of sealing element while breaking the barrier that the furnace tube of reaction furnace cannot be disassembled from the tail of gas source part in the industry.

[0060] The above only is the preferred embodiment of the utility model, and does not use to limit the utility model, and any modification, equivalent replacement and improvement etc. that are made within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A reaction furnace which is easy to disassemble and assemble, the reaction furnace comprising a furnace tube and a furnace door which collectively form a reaction chamber, characterized in that, The furnace tube has a furnace tube closed end and a furnace tube open end at two ends along the axial direction thereof, the furnace door cover is arranged at the furnace tube open end, and the outer peripheral side shape of the furnace tube open end allows the furnace tube to be disassembled from the gas source component end of the processing equipment.

2. The detachable reaction furnace according to claim 1, wherein The furnace door and the furnace tube open end are sealingly connected through a sealing element.

3. The detachable reaction furnace according to claim 2, wherein The outer peripheral side shape of the furnace tube open end is a flat shape.

4. The detachable reaction furnace according to claim 3, wherein The outer peripheral side of the furnace tube open end is provided with a cooling structure.

5. The detachable reaction furnace according to claim 2, wherein The outer peripheral side shape of the furnace tube open end is a convex shape.

6. The detachable reaction furnace according to claim 5, wherein The outer peripheral side of the furnace tube open end is provided with a heat insulation protrusion, and the heat insulation protrusion is provided with a cooling structure.

7. The detachable reaction furnace according to claim 5, wherein The furnace tube has a furnace tube lengthening section, the furnace tube open end is one end of the furnace tube lengthening section, the furnace tube lengthening section is provided with heat insulation protrusions and fixing protrusions at intervals along the axial direction thereof, and the fixing protrusions are provided with cooling structures.

8. The detachable reaction furnace according to claim 2, wherein The outer peripheral side of the furnace tube open end is provided with heat insulation protrusions and fixing protrusions at intervals along the axial direction thereof, and the heat insulation protrusions are provided with cooling structures.

9. The easily assembled and disassembled reactor of any one of claims 1 to 8, wherein, The side of the furnace door facing the reaction chamber is provided with a heat preservation layer and a heat insulation layer, and the furnace door is provided with a cooling structure.

10. A processing apparatus, characterized by The processing equipment comprises a gas source component, a purification component, and a reaction component between the gas source component and the purification component, and the reaction component is placed with the reaction furnace convenient to disassemble according to any one of claims 1-9.

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