Flying probe testing machine

Abstract

The utility model belongs to the technical field of semiconductor testing, and particularly relates to a flying probe testing machine which comprises a probe assembly driven by a voice coil motor, a camera assembly coaxially arranged and a mechanical structure used for supporting and guiding. The voice coil motor directly drives the probe, so that rapid linear motion is realized, and the needle inserting precision and the response speed are improved. The coaxial design of the camera assembly ensures accurate synchronization of image acquisition and probe action, and the test accuracy is improved. The equipment structure is simplified, the occupied space is reduced, and the installation and maintenance cost is reduced. The method is suitable for high-efficiency and high-precision batch detection of electronic components, and has remarkable technical and economic benefits.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor testing, and particularly relates to a flying probe tester. BACKGROUND

[0002] At present, the flying probe tester usually adopts a stepper motor as a mechanism for driving a probe assembly, the stepper motor is an open-loop control motor for converting an electric pulse signal into angular displacement or linear displacement, it realizes control of motor rotating speed and rotating angle by controlling pulse frequency and pulse number, and the application of the stepper motor in the flying probe tester can realize accurate movement and positioning of the probe assembly, thereby completing testing of a semiconductor device.

[0003] However, the stepper motor also has some shortcomings, such as slow response speed, low efficiency, and being easily affected by load, which limit the performance and efficiency of the flying probe tester.

[0004] The stepper motor driving system used in the existing flying probe tester has the following main defects:

[0005] 1. Slow response speed: the starting and stopping of the stepper motor need a certain time, which limits the needle insertion speed of the flying probe tester and affects the testing efficiency.

[0006] 2. Low needle insertion precision: the stepper motor is prone to stepping error when running at low speed, which will cause the needle insertion precision of the probe assembly to decrease and affect the accuracy of the testing result.

[0007] 3. Complex structure and heavy quality.

[0008] 4. Large space occupation: the stepper motor and its driving system need a large space, which increases the volume and weight of the flying probe tester and limits its application range.

[0009] 5. Time-consuming installation: the installation process of the stepper motor and its driving system is relatively complex, which needs to spend more time and labor and increases the maintenance cost of the equipment. INVENTION CONTENTS

[0010] The utility model aims at solving the above problems and provides a flying probe tester to solve the problems of slow response speed, low needle insertion precision, complex structure, heavy quality, large space occupation and time-consuming installation of the stepper motor in the existing flying probe tester.

[0011] The utility model realizes the above-mentioned purposes through the following technical solutions:

[0012] The utility model provides a flying probe tester, which comprises:

[0013] The probe assembly comprises at least one probe.

[0014] A voice coil motor, an output end of the voice coil motor is connected with the probe assembly, for driving the probe to linearly move in the Z-axis direction of the flying probe tester, so as to contact different positions of the device to be tested;

[0015] A DD motor, an output end of the DD motor is fixedly connected with a transition plate, and a fixed end of the voice coil motor is located on the transition plate.

[0016] Further, a camera assembly is further included, the camera assembly is connected to the output end of the voice coil motor, for capturing image information of the device to be tested.

[0017] Further, a cantilever support is connected between the output end of the voice coil motor and the probe assembly, the cantilever support is used for locating the probe assembly at the center of the field of view of the camera assembly.

[0018] Further, two parallel guide rails are connected in the extension direction of the transition plate, a connecting sliding block is slidably arranged on the two guide rails, and the connecting sliding block is used for connecting the output end of the voice coil motor and the probe assembly.

[0019] Further, the camera assembly includes an imaging member and a fixing member, and the fixing member is coaxially arranged with a fixed end of the cantilever support at a lower end surface of the transition plate.

[0020] The utility model discloses the beneficial effect lies in:

[0021] The utility model discloses improve the probe positioning speed and precision, reduce the system error in the testing process, simplify the equipment structure, reduce the manufacturing cost and maintenance difficulty, coaxial design improves the image acquisition quality, ensures the reliability of test result, improves the automation level of testing procedure as a whole, is applicable to large -scale production environment, effectively improves production efficiency and product quality, reduces production cost simultaneously. DRAWINGS

[0022] Figure 1 It is the overall structure schematic diagram of flying probe tester of the utility model;

[0023] Figure 2 It is the local structure schematic diagram of flying probe tester of the utility model.

[0024] In the drawing: 1, voice coil motor;2, camera assembly;3, cantilever support;4, probe assembly;5, DD motor;6, transition plate;7, guide rail;8, connecting sliding block;41, probe. DETAILED DESCRIPTION

[0025] The present application will now be described in further detail with reference to the accompanying drawings. It should be noted that the following specific embodiments are only used to further illustrate the present application and should not be construed as limiting the scope of protection of the present application. Those skilled in the art can make some non-essential improvements and adjustments to the present application based on the above application content.

[0026] Example 1

[0027] like Figures 1-2 As shown, this embodiment proposes a flying probe tester, including a probe assembly 4 and a voice coil motor 1. The probe assembly 4 includes at least one probe 41. The output end of the voice coil motor 1 is connected to the probe assembly 4 and is used to drive the probe 41 to move linearly in the Z-axis direction of the flying probe tester, so as to contact different positions of the device under test. The flying probe tester also includes a DD motor 5 (Direct Drive Motor), the output end of which is fixedly connected to a transition plate 6, and the fixed end of the voice coil motor 1 is located on the transition plate 6. The transition plate 6 serves to connect and fix, ensuring that the relative positions between the various components remain unchanged. The material selection of the transition plate 6 should take into account factors such as mechanical strength and corrosion resistance to ensure long-term reliability and stability.

[0028] In practice, precise positioning and control are achieved through the voice coil motor 1. The probes 41 are designed to make close contact with the object being measured, thereby measuring its resistance or other electrical parameters.

[0029] In some optional embodiments, the flying probe tester also includes a camera assembly 2 connected to the output of the voice coil motor 1, for capturing image information of the device under test in order to determine the position and status of the device under test.

[0030] In practice, the DD motor 5 drives the probe assembly 4 and the camera assembly 2 to rotate around the axis of its output end, thereby achieving omnidirectional scanning of the device under test.

[0031] In some optional embodiments, a cantilever bracket 3 is connected between the output terminal of the voice coil motor 1 and the probe assembly 4. The cantilever bracket 3 is used to position the probe assembly 4 at the center of the field of view of the camera assembly 2. For example, in conjunction with... Figure 1 The cantilever bracket 3 can be configured as a curved blade, so that the probe assembly 4 is located below the field of view of the camera assembly 2.

[0032] In some alternative embodiments, the extension direction of the transition plate 6 is connected to two parallel guide rails 7, and a connecting slider 8 is slidably provided on the two guide rails 7. The connecting slider 8 is used to connect the output end of the voice coil motor 1 to the probe assembly 4.

[0033] In some optional embodiments, the camera assembly 2 comprises an imaging part (including a lens, a light source, an imaging sensor, etc.) and a fixing part, the fixing part is coaxially arranged with the fixed end of the cantilever support 3 at the lower end surface of the transition plate 6, and specifically, the fixing part and the fixed end of the cantilever support 3 can be mounted through a fixing shaft. Wherein, through the coaxial arrangement, the vibration and deviation of the camera assembly 2 during the movement can be reduced, so as to maintain the stability of the camera during the shooting process; in addition, the coaxial arrangement helps to ensure that the imaging center line of the camera assembly 2 is aligned with the movement trajectory of the probe assembly, so as to improve the accuracy of image capture. This is crucial for subsequent image processing and analysis, as well as accurate positioning of the probe.

[0034] According to the above-mentioned embodiments of the present application, in the flying probe tester of the utility model, the fixing part of the camera assembly 2 is coaxially arranged at the fixed end of the cantilever support 3 to support and fix the camera assembly 2, and cooperates with the probe assembly 4 driven by the voice coil motor 1. In the specific implementation, the voice coil motor 1 accurately controls the probe 41 to move quickly and stably, realizes the contact test of the device to be tested, and the camera assembly 2 captures the test image in real time. The coaxial arrangement ensures the alignment accuracy of the camera and the probe, reduces the system error, and improves the image quality and test stability. The scheme significantly improves the test efficiency and accuracy, reduces the complexity and maintenance cost of the equipment, has the beneficial effects of simple structure, rapid response, accurate positioning, and is suitable for batch detection of high-precision electronic components.

[0035] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A flying probe testing machine, characterized in that: include: The probe assembly (4) includes at least one probe (41); A voice coil motor (1) is connected to the probe assembly (4) at its output end, and is used to drive the probe (41) to move linearly in the Z-axis direction of the flying probe tester so as to contact different positions of the device under test. A DD motor (5) is provided, and a transition plate (6) is fixedly connected to the output end of the DD motor (5). The fixed end of the voice coil motor (1) is located on the transition plate (6).

2. The flying probe testing machine according to claim 1, characterized in that: It also includes a camera assembly (2), which is connected to the output of the voice coil motor (1) and is used to capture image information of the device under test.

3. The flying probe testing machine according to claim 2, characterized in that: A cantilever bracket (3) is connected between the output end of the voice coil motor (1) and the probe assembly (4). The cantilever bracket (3) is used to position the probe assembly (4) at the center of the field of view of the camera assembly (2).

4. The flying probe testing machine according to claim 1, characterized in that: The transition plate (6) is connected to two parallel guide rails (7) in its extension direction. A connecting slider (8) is slidably provided on the two guide rails (7). The connecting slider (8) is used to connect the output end of the voice coil motor (1) to the probe assembly (4).

5. A flying probe testing machine according to claim 3, characterized in that: The camera assembly (2) includes an imaging element and a fixing element, wherein the fixing element and the fixing end of the cantilever bracket (3) are coaxially arranged on the lower end face of the transition plate (6).

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