Wafer testing device

Abstract

The utility model relates to the technical field of semiconductor testing, and provides a wafer testing device. The wafer testing device comprises a detection rack and an industrial control cabinet. A first assembly space and a second assembly space are arranged around the detection rack, and the first assembly space is used for installing the test mechanism; the industrial control cabinet is rotationally connected to the detection rack and is provided with a plurality of separation cavities arranged in the vertical direction, and the industrial control cabinet is provided with a first position and a second position; wherein at the first position, the industrial control cabinet is accommodated in the second assembly space, and at least part of the industrial control cabinet is moved out of the second assembly space at the second position. According to the wafer testing device provided by the invention, the cabinet is independent of each operation module, different maintenance directions can be changed through the movement of the cabinet, the operation is convenient, and the interference to the operation modules is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a wafer testing device. Background Technology

[0002] In semiconductor testing, the rack assembly is a crucial component of the testing setup. Integrating multiple industrial PCs requires not only ease of maintenance but also the ability to function without interfering with the debugging of the internal modules. For example, in wafer optical defect detection, multiple industrial PCs typically need to operate simultaneously to handle motion control and signal transmission for each module, and to acquire images from the vision system in real time, providing sufficient computing power for data analysis.

[0003] In related technologies, the cabinet is typically integrated and mounted below the testing device, with the upper surface of the cabinet serving as a support platform for the various operating modules within the testing device. However, this setup often leads to inconvenient maintenance, especially when multiple industrial computers are integrated. This requires the testing device to have multiple openings in the corresponding cabinet locations for the maintenance of each industrial computer. Furthermore, because the operating modules are integrated on top of the cabinet, maintenance of the industrial computers may interfere with the operating modules located above. Utility Model Content

[0004] Therefore, it is necessary to provide a wafer testing device that separates the cabinet from each operating module, allowing for different maintenance directions to be changed through cabinet movement. This not only makes operation convenient but also reduces interference with the operating modules.

[0005] A wafer testing apparatus includes a testing rack and an industrial control cabinet; the testing rack surrounds a first assembly space and a second assembly space, the first assembly space being used to install a testing mechanism; the industrial control cabinet is rotatably connected to the testing rack and has a plurality of partition cavities arranged in a vertical direction, the industrial control cabinet having a first position and a second position; wherein, in the first position, the industrial control cabinet is housed in the second assembly space, and in the second position, at least a portion of the industrial control cabinet is moved out of the second assembly space.

[0006] Understandably, the first and second assembly spaces enclosed by the testing rack allow for the separate installation of the testing mechanism and the industrial control cabinet. The industrial control cabinet features vertically spaced partitions to integrate multiple industrial computers vertically, reducing its horizontal dimensions and space requirements. Furthermore, the movable connection between the industrial control cabinet and the testing rack facilitates cabinet rotation and repositioning, allowing personnel to maintain the industrial computers within from different directions, thus minimizing interference between maintenance operations and the testing mechanism.

[0007] In some embodiments, the wafer testing apparatus further includes a rotating assembly connected between the industrial control cabinet and the testing rack; the rotating assembly includes a first connecting seat and a second connecting seat, one of the first connecting seat and the second connecting seat is provided with a connecting shaft, and the other is sleeved on the connecting shaft and rotatably connected to the connecting shaft, the first connecting seat is connected to the testing rack, and the second connecting seat is connected to the industrial control cabinet.

[0008] In some embodiments, the second connecting seat includes a first support arm, a second support arm, and a locking member. The first support arm is connected to the industrial control cabinet, the second support arm is slidably connected to the first support arm and rotatably connected to the first connecting seat, and the locking member is used to lock the second support arm to the first support arm.

[0009] In some embodiments, the rotating assembly further includes an adjusting block connected to the first connecting seat or the second connecting seat, the adjusting block being capable of driving the first connecting seat or the second connecting seat to move vertically under the action of an external force.

[0010] In some embodiments, the wafer testing apparatus further includes a limiting component connected between the industrial control cabinet and the testing rack; the limiting component includes a first limiting seat and a second limiting seat, the first limiting seat being connected to the testing rack and the second limiting seat being connected to the industrial control cabinet, one of the first limiting seat and the second limiting seat having a limiting groove recessed therein and the other having a limiting protrusion protruding therein; in the first position, the limiting protrusion can be inserted into the limiting groove; in the second position, the limiting protrusion disengages from the limiting groove.

[0011] In some embodiments, one of the limiting grooves is further provided with an assembly hole communicating with the limiting groove; the limiting component also includes an elastic post, which is inserted into the assembly hole and partially located in the limiting groove, and the elastic post is configured to elastically engage with the limiting protrusion in response to the insertion of the limiting protrusion relative to the limiting groove.

[0012] In some embodiments, the limiting component further includes a limiting block connected to one of the industrial control cabinet and the testing rack; in the first position, the limiting block can abut against the other of the industrial control cabinet and the testing rack.

[0013] In some embodiments, the industrial control cabinet includes a support frame and an industrial control computer. The support frame surrounds a plurality of partition cavities, and each partition cavity contains an industrial control computer. The support frame has a rotating side and a free side that are opposite to and spaced apart along a first direction. The rotating side is rotatably connected to the testing frame, and the support frame has a cable tray on the rotating side. The first direction, the vertical direction, and the thickness direction of the industrial control cabinet are arranged at angles to each other.

[0014] In some embodiments, the industrial control cabinet further includes multiple cable dividers arranged at intervals along the vertical direction, each of which is connected to the support frame.

[0015] In some embodiments, the first assembly space and the second assembly space are arranged along the thickness direction of the industrial control cabinet;

[0016] The wafer testing device also includes a door, which is rotatably connected to the side of the testing rack away from the first assembly space, and is used to cover the side of the industrial control cabinet away from the first assembly space when in the first position. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the industrial control cabinet in the second position of the wafer testing device provided in this application;

[0019] Figure 2 A schematic diagram of the industrial control cabinet in the first position of the wafer testing device provided in this application;

[0020] Figure 3 This is a schematic diagram of the industrial control cabinet in the wafer testing apparatus provided in this application;

[0021] Figure 4 A cross-sectional view of the industrial control cabinet in the wafer testing apparatus provided in this application;

[0022] Figure 5 A schematic diagram of the upper rotating component in the wafer testing apparatus provided in this application;

[0023] Figure 6 A cross-sectional view of the upper rotating component in the wafer testing apparatus provided in this application;

[0024] Figure 7 This is a cross-sectional view of the lower rotating component in the wafer testing apparatus provided in this application.

[0025] Reference numerals: 10. Testing frame; 11. Frame column; 12. Frame beam; 13. Frame enclosure; 20. Industrial control cabinet; 21. Support frame; 22. Industrial computer; 23. Cable divider; 24. Integrated base; 25. Enclosure panel; 30. Casters; 31. Mounting base; 32. Wheel; 40. Rotating assembly; 40a. Upper rotating assembly; 40b. Lower rotating assembly; 41. First connecting seat; 42. Second connecting seat; 43. Connecting shaft; 44. Adjusting block; 45. Rotating bearing; 50. Limiting assembly; 51. First limiting seat; 52. Second limiting seat; 53. 54. Elastic column; 60. Limiting block; 70. Operating terminal; 101. Door; 102. First assembly space; 102. Second assembly space; 201. Separation cavity; 202. Rotating side; 203. Free side; 204. Cable tray; 211. Cabinet upright; 212. Cabinet crossbeam; 401. Assembly cavity; 411. Base; 412. Support body; 421. First support arm; 422. Second support arm; 431. First end; 432. Second end; 501. Limiting groove; 502. Limiting protrusion; 503. Assembly hole; 4201. Rotating hole; 4220. Adjustment hole. Detailed Implementation

[0026] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0027] It should be noted that when a component is referred to as being "fixed to" or "attached to" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0029] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0030] Unless otherwise defined, all technical and scientific terms used in this application's specification have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application's specification is for the purpose of describing particular embodiments only and is not intended to be limiting of this application.

[0031] Please see Figure 1 and Figure 2 One embodiment of this application provides a wafer testing apparatus, including a testing rack 10 and an industrial control cabinet 20. The testing rack 10 surrounds a first assembly space 101 and a second assembly space 102, the first assembly space 101 being used to mount testing mechanisms. The industrial control cabinet 20 is movably connected to the testing rack 10. The industrial control cabinet 20 has a first position and a second position. In the first position, the industrial control cabinet 20 is housed in the second assembly space 102; in the second position, at least a portion of the industrial control cabinet 20 is moved out of the second assembly space 102.

[0032] In other words, the first assembly space 101 and the second assembly space 102 enclosed by the testing rack 10 can be used to separately install the testing mechanism and the industrial control computer 22. The first assembly space 101 is used to install the testing mechanism, and the second assembly space 102 is used to install the industrial control cabinet 20, ensuring that the assembly of the two does not interfere with each other. Because of the movable connection between the industrial control cabinet 20 and the testing rack 10, it is easy to move the industrial control cabinet 20 relative to the testing rack 10 to adjust to different positions, such as being housed within or removed from the second assembly space 102. This allows personnel to easily maintain the industrial control computer 22 inside the industrial control cabinet 20 from different directions, reducing mutual interference between maintenance operations and the testing mechanism.

[0033] The first assembly space 101 and the second assembly space 102 are arranged along the X-axis. When the industrial control cabinet 20 is housed in the second assembly space 102, workers can perform maintenance from the side of the industrial control cabinet 20 away from the first assembly space 101 along the X-axis. When the industrial control cabinet 20 is moved out of the second assembly space 102, workers can perform maintenance from multiple directions around the industrial control cabinet 20. For example... Figure 1 As shown, Figure 1 The diagram shows the industrial control cabinet 20 being moved out of the second assembly space 102, allowing workers to perform maintenance on the industrial control cabinet 20 from both sides along the Y-axis. This is merely an example.

[0034] In some specific embodiments, the first assembly space 101 and the second assembly space 102 are connected, facilitating electrical connection between the testing mechanism and the industrial control cabinet 20 via cables. The testing frame 10 includes frame columns 11 and frame beams 12, both of which are provided in multiples and connected to form a frame structure, separating the first assembly space 101 and the second assembly space 102. The testing frame 10 also includes a frame enclosure 13, which surrounds the aforementioned frame structure. A partition may also be provided between the first assembly space 101 and the second assembly space 102, and the partition may have openings to facilitate the passage of the aforementioned cables. This is only an example.

[0035] like Figure 3 As shown, in actual use, the industrial control cabinet 20 is provided with multiple partitions 201 arranged in the vertical direction. Each partition 201 can be used to install an industrial control computer 22, thereby integrating and assembling multiple industrial control computers 22 in the vertical direction, reducing the size and space occupied by the industrial control cabinet 20 in the horizontal direction.

[0036] Furthermore, the industrial control cabinet 20 can be rotatably connected to the testing frame 10, for example, by using a pivot or hinge to achieve a rotatable connection. Of course, the structure for achieving a rotatable connection includes, but is not limited to, pivots and hinges. Alternatively, the industrial control cabinet 20 can also be slidably connected to the testing frame 10, for example, by using a slide rail and slider, or a slide rail and roller. The key is to ensure that the position of the industrial control cabinet 20 relative to the testing frame 10 can be adjusted.

[0037] Please see Figures 1 to 3In some specific embodiments, the wafer testing apparatus also includes casters 30, which are installed at the bottom of the industrial control cabinet 20. The casters 30 facilitate the movement of the industrial control cabinet 20, reducing wear and tear during movement. The industrial control cabinet 20 has a rectangular or square projection along its vertical direction, and casters 30 can be installed at each of its four corners. Each caster 30 also has a self-locking function to ensure the stability of the industrial control cabinet 20 when it is stopped. When the industrial control cabinet 20 is rotatably connected to the testing rack 10, one side of the industrial control cabinet 20 needs to be rotatably connected to the testing rack 10 via hinges or pivots, while the other side of the industrial control cabinet 20 has two corresponding casters 30 at its two corners. This is only an example.

[0038] like Figure 3 As shown, the caster 30 includes a mounting base 31 and a wheel 32. The wheel 32 is rotatably connected to the mounting base 31, which is connected to the industrial control cabinet 20 to enable the caster 30 to be assembled relative to the cabinet. The mounting base 31 is equipped with a self-locking structure to lock and unlock the rotation of the wheel 32. The self-locking structure is a mature existing technology and will not be described in detail here.

[0039] Taking the industrial control cabinet 20 rotatably connected to the testing frame 10 as an example.

[0040] Please see Figure 1 , Figure 3 and Figure 4 In some embodiments, the wafer testing apparatus further includes a rotating assembly 40 connecting the industrial control cabinet 20 and the testing rack 10. That is, the rotating assembly 40 enables the industrial control cabinet 20 to rotate relative to the testing rack 10. In practical use, two rotating assemblies 40 are provided, referred to as the upper rotating assembly 40a and the lower rotating assembly 40b, which are arranged at intervals along the vertical direction (i.e., the Z-axis direction) to improve the connection reliability between the industrial control cabinet 20 and the testing rack 10. The upper rotating assembly 40a and the lower rotating assembly 40b can be located at or near the two ends of the industrial control cabinet 20 along the vertical direction. Of course, three, four, or more rotating assemblies 40 can also be provided, arranged at intervals along the vertical direction. It should be noted that the number of rotating assemblies 40 should not be excessive, as this would cause assembly inconvenience and other problems.

[0041] Please see Figure 1 , Figure 5 , Figure 6 and Figure 7Optionally, the rotating assembly 40 includes a first connecting seat 41 and a second connecting seat 42. One of the first connecting seat 41 and the second connecting seat 42 is provided with a connecting shaft 43, and the other is sleeved on the connecting shaft 43 and rotatably connected to the connecting shaft 43. The first connecting seat 41 is connected to the testing frame 10, and the second connecting seat 42 is connected to the industrial control cabinet 20. For example, the first connecting seat 41 may have the connecting shaft 43 protruding along the Z-axis direction, and the second connecting seat 42 may have a rotating hole 4201. The connecting shaft 43 passes through the rotating hole 4201, so that the second connecting seat 42 is sleeved on the connecting shaft 43. The connecting shaft 43 can rotate around its own axis within the rotating hole 4201. The axis of the connecting shaft 43 is along the Z-axis direction. A rotating bearing 45 is provided between the connecting shaft 43 and the hole wall of the rotating hole 4201 to reduce rotational wear between the two and improve rotational flexibility.

[0042] Furthermore, the connecting shaft 43 includes a first end 431 and a second end 432 connected to the first end 431, and the diameter of the first end 431 is larger than the diameter of the second end 432. The first connecting seat 41 is provided with an assembly cavity 401, the cross-section of the assembly cavity 401 along the Z-axis is stepped, including a large-diameter section and a small-diameter section connected to the large-diameter section. The first end 431 is accommodated in the large-diameter section, and the second end 432 passes through the small-diameter section and out of the assembly cavity 401 for mating with the second connecting seat 42. This arrangement is equivalent to both the assembly cavity 401 and the connecting shaft 43 having stepped surfaces, thereby utilizing the mating of the two stepped surfaces to achieve assembly and positioning of the connecting shaft 43; and, screws can be used to fasten the first end 431 to the first connecting seat 41.

[0043] Alternatively, the connecting shaft 43 can also be integrally formed with the first connecting seat 41, or fixed by welding, bonding, etc. This is just an example.

[0044] In other embodiments, the second connecting seat 42 may have a connecting shaft 43 protruding along the Z-axis direction, in which case the first connecting shaft 43 may have a rotating hole 4201. The assembly method of the connecting shaft 43 and the second connecting seat 42 is basically similar to the assembly method of the connecting shaft 43 and the first connecting seat 41 described above, and therefore will not be repeated.

[0045] like Figure 5 and Figure 6As shown, in some embodiments, the connection between the first connecting seat 41 and the connecting shaft 43 is taken as an example. The first connecting seat 41 includes a seat body 411 and a support body 412. The seat body 411 is connected to the testing frame 10, and the support body 412 is connected to the side of the seat body 411 facing the second connecting seat 42 along the Z-axis. The support body 412 is provided with an assembly cavity 401 to mate with the connecting shaft 43. The seat body 411 is provided with an assembly flange protruding radially along the connecting shaft 43, and the assembly flange is provided with a waist-shaped hole, which facilitates fine adjustment of the assembly position while satisfying the connection with the testing frame 10. The seat body 411 and the support body 412 are separately arranged, which facilitates the assembly of the connecting shaft 43. The seat body 411 and the support body 412 can be fixed by welding, bonding, or screws.

[0046] In some specific embodiments, the first connecting seat 41 of the upper rotating assembly 40a is provided with a connecting shaft 43, and the second connecting seat 42 is provided with a rotating hole 4201. The first connecting seat 41 of the lower rotating assembly 40b is provided with a rotating hole 4201, and the second connecting seat 42 is provided with a connecting shaft 43.

[0047] like Figure 1 , Figure 5 and Figure 6 As shown, in some optional embodiments, the second connecting seat 42 includes a first support arm 421, a second support arm 422, and a locking member. The first support arm 421 is connected to the industrial control cabinet 20, the second support arm 422 is slidably connected to the first support arm 421, and the second support arm 422 is rotatably connected to the first connecting seat 41. The locking member is used to lock the second support arm 422 to the first support arm 421. That is, by utilizing the sliding of the second support arm 422 relative to the first support arm 421, it is convenient to fine-tune the installation position of the second support arm 422 along the Z-axis, thereby adjusting the assembly position of the first connecting seat 41 relative to the detection frame 10. The first support arm 421 is arranged in an inverted L-shape, including a first horizontal side and a first vertical side. The first horizontal side is pressed against the top edge of the industrial control cabinet 20 and connected by screws, and the first vertical side is pressed against one side edge of the industrial control cabinet 20. The second support arm 422 is also in an inverted L-shape, including a second horizontal side and a second vertical side. The first horizontal side is provided with a rotating hole 4201 to connect the aforementioned connecting shaft 43. The second vertical side is pressed against the first vertical side, and the first and second vertical sides are locked by a locking member.

[0048] The first vertical side may have a circular hole, and the second vertical side may have an elongated adjustment hole 4220. A locking member passes through the adjustment hole 4220 and is threadedly connected to the wall of the circular hole, and the locking member is pressed onto the side of the second vertical side away from the first vertical side. The adjustment hole 4220 facilitates the sliding of the second support arm 422 relative to the first support arm 421. Two locking members may be provided and arranged at intervals along the Z-axis to improve the connection reliability of the first support arm 421 and the second support arm 422.

[0049] like Figure 7 As shown, in another embodiment, the first connecting seat 41 in the lower rotating assembly 40b is L-shaped, and the second connecting seat 42 is Z-shaped with an included angle of 90 degrees. This is only an example.

[0050] like Figure 5 As shown, in actual use, the first connecting seat 41 is connected to an adjusting block 44. The adjusting block 44 can drive the first connecting seat 41 to move vertically relative to the second connecting seat 42 under the action of external force. This arrangement facilitates the adjustment of the installation position of the first connecting seat 41 and the second connecting seat 42 along the Z-axis, thereby adapting to the assembly of industrial control cabinets and testing racks and improving connection reliability. The adjusting block 44 is fastened to the first connecting seat 41 with screws, making it easy for operators to hold the adjusting block 44 to push the first connecting seat 41 to move along the Z-axis.

[0051] Alternatively, the second connecting seat 42 may be connected to the adjusting block 44, or both the first connecting seat 41 and the second connecting seat 42 may be connected to the adjusting block 44, with the two adjusting blocks 44 spaced apart to reduce interference.

[0052] Please see Figure 1 and Figure 5 In some embodiments, the wafer testing apparatus further includes a limiting component 50 connected between the industrial control cabinet 20 and the testing rack 10, for limiting the movement of the industrial control cabinet 20 and reducing impact between the industrial control cabinet 20 and the testing rack 10. The limiting component 50 includes a first limiting seat 51 and a second limiting seat 52. The first limiting seat 51 is connected to the testing rack 10, and the second limiting seat 52 is connected to the industrial control cabinet 20. One of the first limiting seat 51 and the second limiting seat 52 has a recessed limiting groove 501, and the other has a protruding limiting protrusion 502. In a first position, the limiting protrusion 502 can be inserted into the limiting groove 501; in a second position, the limiting protrusion 502 disengages from the limiting groove 501.

[0053] For example, the first limiting seat 51 has a limiting protrusion 502, and the second limiting seat 52 has a limiting groove 501. When the industrial control cabinet 20 rotates relative to the testing frame 10 to be accommodated in the second assembly space 102, the second limiting seat 52 moves closer to the first limiting seat 51 so that the limiting protrusion 502 is inserted into the limiting groove 501, thereby satisfying the rotation limit of the industrial control cabinet 20. The limiting protrusion 502 has an arc surface to reduce wear between it and the groove wall of the limiting groove 501. In actual use, because the aforementioned adjusting block 44 protrudes from the first connecting seat 41, the second limiting seat 52 can also be installed on the adjusting block 44, reducing assembly interference.

[0054] Furthermore, the second limiting seat 52 is provided with an assembly hole 503 communicating with the limiting groove 501. The limiting assembly 50 also includes an elastic post 53, which is inserted into the assembly hole 503 and partially located in the limiting groove 501. The elastic post 53 is configured to elastically engage with the limiting protrusion 502 in response to the insertion of the limiting protrusion 502 relative to the limiting groove 501. In other words, by utilizing the engagement between the elastic post 53 and the limiting protrusion 502, the reliability of the engagement between the limiting protrusion 502 and the limiting groove 501 can be improved, reducing the risk that the limiting protrusion 502 may easily slide into the limiting groove 501, thereby reducing the risk that the industrial control cabinet 20 may easily be moved out of the second assembly space 102 and improving the safety of use.

[0055] The elastic post 53 has a spherical surface at one end facing the limiting protrusion 502, which mates with the arc surface of the limiting protrusion 502. This improves connection reliability, reduces wear, and facilitates the movement of the limiting protrusion 502 in and out. The limiting groove 501 has two groove walls that are opposite to each other and spaced apart along the Z-axis. The second limiting seat 52 has mounting holes 503 at corresponding positions on the two groove walls. Each mounting hole 503 corresponds to the insertion of an elastic post 53, which provides elastic limiting from both sides of the limiting protrusion 502 along the Z-axis. The elastic post 53 can be a spring pin or a ball screw, etc.

[0056] Furthermore, the second limiting seat 52 is provided with an oblong hole, which facilitates the screw to pass through the oblong hole and connect with the adjusting block 44, making it easy to adjust the position of the second limiting seat 52, thereby adjusting the matching position of the limiting groove 501 and the limiting protrusion 502 and reducing interference.

[0057] Please continue reading. Figure 1 and Figure 5 Optionally, the limiting component 50 also includes a limiting block 54, which is connected to one of the industrial control cabinet 20 and the testing rack 10. In the first position, the limiting block 54 can abut against the other of the industrial control cabinet 20 and the testing rack 10. The limiting block 54 can also be used to hard limit the rotation of the industrial control cabinet 20 relative to the testing rack 10, improving the limiting effect. For example, the limiting block 54 can be connected to the industrial control cabinet 20; specifically, the limiting block 54 is connected to the adjusting block 44 and spaced apart from the aforementioned second limiting seat 52 to reduce assembly interference. When the industrial control cabinet 20 rotates and moves into the second assembly space 102, the limiting block 54 can abut against the testing rack 10 to ensure that the rotation angle of the industrial control cabinet 20 is not too large.

[0058] In practical use, the testing rack 10 can also be equipped with a limiting structure to limit the rotation of the industrial control cabinet 20 when it rotates to move out of the second assembly space 102. Thus, by utilizing the limiting structure in conjunction with the aforementioned limiting block 54, first limiting seat 51, and second limiting seat 52, the rotation of the industrial control cabinet 20 relative to the testing rack 10 can be ensured to be between -90° and +90°, preventing excessive rotation angle of the industrial control cabinet 20 from affecting its internal structure and improving operational safety.

[0059] like Figure 1 and Figure 3 As shown in the illustration, as one of the examples, the industrial control cabinet 20 includes a support frame 21 and an industrial control computer 22. The support frame 21 surrounds a plurality of partition cavities 201, and each partition cavity 201 houses an industrial control computer 22. The support frame 21 has a rotating side 202 and a free side 203 that are opposite to and spaced apart along a first direction. The rotating side 202 is rotatably connected to the testing frame 10, and the support frame 21 has a cable tray 204 on the rotating side 202. The first direction, the vertical direction, and the thickness direction of the industrial control cabinet 20 are all angled together. Taking the projection of the industrial control cabinet 20 along the Z-axis as a rectangle as an example, the first direction can be the length direction of the industrial control cabinet 20. Taking the X-axis as an example, the Y-axis is the thickness direction of the industrial control cabinet 20.

[0060] Understandably, the cable tray 204 facilitates the organization of cables between the industrial control computer 22 and the testing mechanism, alleviating cable clutter and other issues. Since the cable tray 204 is located on the rotating side 202, when the industrial control computer cabinet 20 is moved out of the second assembly space 102, the cable tray 204 is closer to the first assembly space 101, reducing cable paths and facilitating cable arrangement. The aforementioned casters 30 can be located on the free side 203 of the support frame 21. All of the aforementioned rotating components 40 are connected to the support frame 21.

[0061] Please continue reading. Figure 1 and Figure 3 In practical use, the industrial control cabinet 20 also includes a baffle 25, which is connected to the support frame 21 to protect the industrial control computer 22 installed in the partition cavity 201. The industrial control cabinet 20 also includes an operating terminal 60, which can be a keyboard and is connected to one side of the cabinet's thickness for easy manual operation and control. The operating terminal 60 is rotatably connected to the baffle 25, and when the industrial control cabinet 20 is housed in the second assembly space 102, the operating terminal 60 is positioned facing the first assembly space 101. The industrial control cabinet 20 also includes a display terminal, which displays parameter information and is installed above the operating terminal 60 for easy visual observation by the operator. The operating terminal 60 can be a keyboard, and the display terminal is a screen.

[0062] Furthermore, the industrial control cabinet 20 also includes an integrated base 24, which is connected to the rotating side 202 of the support frame 21. The integrated base 24 can be made of U-shaped steel or C-shaped steel to form the aforementioned cable tray 204.

[0063] The supporting frame 21 includes multiple cabinet uprights 211 and cabinet crossbeams 212, which are connected to each other. A baffle 25 is connected to the cabinet uprights 211 and cabinet crossbeams 212. An integrated base 24 can be connected to one of the cabinet uprights 211. There are four cabinet uprights 211, located at the four corners. This is only an example.

[0064] In some embodiments, the industrial control cabinet 20 further includes a plurality of cable dividers 23 arranged at intervals along the vertical direction, each cable divider 23 being connected to the support frame 21. The cable dividers 23 are used for cable fixing and arrangement.

[0065] In some other embodiments, the first assembly space 101 and the second assembly space 102 are arranged along the thickness direction of the industrial control cabinet 20. When the industrial control cabinet 20 is housed in the second assembly space 102, the thickness direction of the industrial control cabinet 20 is along the X-axis direction, that is, the first assembly space 101 and the second assembly space 102 are arranged along the X-axis direction.

[0066] like Figure 1 and Figure 2 As shown, the wafer testing apparatus also includes a door 70, which is rotatably connected to the side of the testing rack 10 facing away from the first assembly space 101. This door 70 is used to cover the side of the industrial control cabinet 20 facing away from the first assembly space 101 when in the first position. In other words, the door 70 provides protection for the industrial control cabinet 20 when it is housed in the second assembly space 102. When it is necessary to remove the industrial control cabinet 20 or for maintenance, the door 70 can be opened. There are two doors 70, forming a double-door configuration. The doors 70 are rotatably connected to the testing rack 10 via hinges.

[0067] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0068] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A wafer testing device, characterized in that, include: The testing frame (10) is provided with a first assembly space (101) and a second assembly space (102), wherein the first assembly space (101) is used to install the testing mechanism; An industrial control cabinet (20) is movably connected to the testing frame (10) and has multiple partition cavities (201) arranged in a vertical direction. The industrial control cabinet (20) has a first position and a second position. In the first position, the industrial control cabinet (20) is housed in the second assembly space (102), and in the second position, at least a portion of the industrial control cabinet (20) is moved out of the second assembly space (102).

2. The wafer testing apparatus according to claim 1, characterized in that, The wafer testing device also includes a rotating assembly (40) connected between the industrial control cabinet (20) and the testing rack (10); The rotating assembly (40) includes a first connecting seat (41) and a second connecting seat (42). One of the first connecting seat (41) and the second connecting seat (42) is provided with a connecting shaft (43), and the other is sleeved on the connecting shaft (43) and rotatably connected to the connecting shaft (43). The first connecting seat (41) is connected to the testing frame (10), and the second connecting seat (42) is connected to the industrial control cabinet (20).

3. The wafer testing apparatus according to claim 2, characterized in that, The second connecting seat (42) includes a first support arm (421), a second support arm (422), and a locking member. The first support arm (421) is connected to the industrial control cabinet (20). The second support arm (422) is slidably connected to the first support arm (421) and rotatably connected to the first connecting seat (41). The locking member is used to lock the second support arm (422) to the first support arm (421).

4. The wafer testing apparatus according to claim 2 or 3, characterized in that, The rotating assembly (40) further includes an adjusting block (44), which is connected to the first connecting seat (41) or the second connecting seat (42). The adjusting block (44) can drive the first connecting seat (41) or the second connecting seat (42) to move in the vertical direction under the action of external force.

5. The wafer testing apparatus according to claim 1, characterized in that, The wafer testing device also includes a limiting component (50) connected between the industrial control cabinet (20) and the testing rack (10); The limiting component (50) includes a first limiting seat (51) and a second limiting seat (52). The first limiting seat (51) is connected to the detection frame (10), and the second limiting seat (52) is connected to the industrial control cabinet (20). One of the first limiting seat (51) and the second limiting seat (52) is recessed with a limiting groove (501), and the other is protruded with a limiting protrusion (502). In the first position, the limiting protrusion (502) can be inserted into the limiting groove (501); in the second position, the limiting protrusion (502) disengages from the limiting groove (501).

6. The wafer testing apparatus according to claim 5, characterized in that, One of the devices having the limiting groove (501) also has an assembly hole (503) communicating with the limiting groove (501); The limiting component (50) further includes an elastic post (53) inserted into the mounting hole (503) and partially located in the limiting groove (501). The elastic post (53) is configured to elastically engage with the limiting protrusion (502) in response to the insertion of the limiting protrusion (502) relative to the limiting groove (501).

7. The wafer testing apparatus according to claim 5 or 6, characterized in that, The limiting component (50) further includes a limiting block (54), which is connected to one of the industrial control cabinet (20) and the testing frame (10); In the first position, the limiting block (54) can abut against the other of the industrial control cabinet (20) and the testing frame (10).

8. The wafer testing apparatus according to claim 1, characterized in that, The industrial control cabinet (20) includes a support frame (21) and an industrial control computer (22). The support frame (21) surrounds a plurality of partition cavities (201), and each partition cavity (201) is provided with an industrial control computer (22). The support frame (21) has a rotating side (202) and a free side (203) that are opposite to and spaced apart along a first direction. The rotating side (202) is rotatably connected to the detection frame (10). The support frame (21) is provided with a wiring groove (204) on the rotating side (202). The first direction, the vertical direction, and the thickness direction of the industrial control cabinet (20) are set at angles to each other.

9. The wafer testing apparatus according to claim 8, characterized in that, The industrial control cabinet (20) also includes multiple cable partitions (23) arranged at intervals along the vertical direction, and each of the cable partitions (23) is connected to the support frame (21).

10. The wafer testing apparatus according to claim 1, characterized in that, The first assembly space (101) and the second assembly space (102) are arranged along the thickness direction of the industrial control cabinet (20); The wafer testing device also includes a door (70), which is rotatably connected to the side of the testing rack (10) away from the first assembly space (101) and is used to cover the side of the industrial control cabinet (20) away from the first assembly space (101) when in the first position.

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