Coating mechanism

Abstract

The utility model discloses a coating mechanism which comprises a cover plate, a driving component, a magnetofluid transmission part and an air injection component, the cover plate covers an opening of a film coating bin for placing a silicon wafer; the driving assembly is arranged above the cover plate, an extending shaft of the driving assembly movably penetrates through the cover plate, a magnetofluid transmission part is arranged on the extending shaft, the top of the air injection assembly is connected with the magnetofluid transmission part through a transmission assembly, and a transmission mechanism converts rotary motion of the extending shaft into linear motion. The air injection assembly can move up and down, so that the distance between the air injection opening and the silicon wafer in the film coating bin is adjusted. The flexibility and accuracy in the coating process are greatly improved, fine control over the distance under different process requirements is met, and solar cells with different coating effects can be obtained at different heights.

Description

TECHNICAL FIELD

[0001] The utility model relates to solar cell piece film plating technical field especially relates to a film plating mechanism. BACKGROUND

[0002] With the sustained growth of global demand for clean energy, the photovoltaic industry, as an important part of renewable energy, is experiencing unprecedented rapid development. Photovoltaic cells, as the core components of photovoltaic systems, the improvement of their production capacity and efficiency is directly related to the competitiveness of the entire industry. However, with the development of technology, silicon wafers need to be cut into smaller units in some use scenarios, and the cross section will expose a large number of crystal defects. These defects will accelerate the recombination of electrons and holes, resulting in a decrease in cell efficiency. In order to overcome this problem, it is particularly important to perform passivation film plating treatment on the cross section of the half silicon wafer after slicing. Passivation film plating can effectively reduce the recombination rate on the cross section, reduce energy loss, and improve the overall performance of the cell.

[0003] The common equipment for silicon wafer passivation film plating on the market mainly uses jet film plating technology. However, this type of equipment faces a significant technical bottleneck in actual application, which is the inability to flexibly adjust the distance between the nozzle and the silicon wafer to achieve the best process effect at different distances. SUMMARY

[0004] The utility model discloses in order to solve the technical problem that the prior art film plating equipment cannot flexibly adjust the distance between the nozzle and the silicon wafer, and proposes a film plating mechanism.

[0005] The technical scheme adopted by the utility model is:

[0006] The utility model discloses a film plating mechanism, which comprises:

[0007] A cover plate covers the opening of the film plating chamber for placing silicon wafers.

[0008] A drive assembly is arranged above the cover plate, and the extension shaft of the drive assembly passes through the cover plate.

[0009] A magnetic fluid transmission member is connected to the extension shaft of the drive assembly.

[0010] A jet assembly is connected to the magnetic fluid transmission member through a transmission mechanism at the top, and the transmission mechanism converts the rotary motion of the extension shaft into linear motion.

[0011] Further, the transmission mechanism comprises a gear wheel and two vertical racks arranged on the top of the air jet assembly, the gear wheel is horizontally arranged around the outer wall of the magnetic fluid transmission member, the teeth of the two racks are opposite, and the gear wheel is located between the two racks and moves up and down by rotating between the two racks.

[0012] Further, the transmission mechanism comprises an externally threaded screw rod and an internally threaded sleeve, the sleeve is vertically arranged on the top of the air jet assembly, and the screw rod is vertically arranged on the magnetic fluid transmission member, the screw rod rotates with the magnetic fluid transmission member and moves up and down along the sleeve.

[0013] Further, the bottom surface of the cover plate is provided with an anti-collision block to prevent the air jet assembly from colliding with the cover plate.

[0014] Further, the driving assembly comprises a motor and a speed reducer connected with the rotating shaft of the motor, and the magnetic fluid transmission member is arranged on the protruding shaft of the speed reducer.

[0015] Further, the top center of the air jet assembly is provided with a mounting hole, and the mounting hole is provided with a mounting seat for fixing the racks.

[0016] Further, the top of the cover plate is provided with a mounting cover, the motor and the speed reducer are arranged on the top outside the mounting cover, the protruding shaft of the speed reducer passes through the mounting cover and then passes through the cover plate, and the magnetic fluid transmission member is partially located in the mounting cover.

[0017] Further, the coating mechanism further comprises a coupling, the transmission shaft of the magnetic fluid transmission member is connected with a first connecting end of the coupling, and the protruding shaft of the driving assembly is connected with a second connecting end of the coupling.

[0018] Further, the two racks are provided with limiting clamping blocks at the ends not connected with the air jet assembly.

[0019] Further, the anti-collision block is annular.

[0020] Compared with existing technologies, this invention proposes a coating mechanism, including a cover plate, a drive assembly, a magnetohydrodynamic (MHD) transmission component, and an air jet assembly. The cover plate covers the opening of the coating chamber used to hold silicon wafers. The drive assembly is positioned above the cover plate, with its extension shaft passing through it. A MHD transmission component is mounted on the extension shaft. The top of the air jet assembly is connected to the MHD transmission component via a transmission mechanism that converts the rotational motion of the extension shaft into linear motion. This allows the air jet assembly to move up and down, thereby adjusting the distance between the air jet nozzle and the silicon wafers inside the coating chamber. This significantly improves the flexibility and precision of the coating process, meeting the fine control of spacing required for different processes, and enabling solar cells with different coating effects at different heights. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model.

[0023] 1. Jet assembly; 2. Cover plate; 21. Anti-collision block; 3. Transmission mechanism; 4. Magnetohydrodynamic transmission component; 5. Motor; 6. Reducer; 7. Coupling. Detailed Implementation

[0024] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0025] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0026] To address the technical problem that existing coating equipment cannot flexibly adjust the distance between the nozzle and the silicon wafer, this utility model proposes a coating mechanism.

[0027] like Figure 1 As shown, the coating mechanism proposed in this utility model includes: a cover plate 2, a drive assembly, a magnetohydrodynamic transmission component 4, an air jet assembly 1, and a transmission mechanism 3.

[0028] The cover plate 2 is shaped the same as the opening of the coating chamber, and covers the opening of the coating chamber. The driving assembly is arranged above the cover plate 2, and the extension shaft of the driving assembly passes through the cover plate 2. The transmission shaft of the magnetic fluid transmission member 4 is connected with the extension shaft of the driving assembly, the top of the air jet assembly 1 is connected with the magnetic fluid transmission member 4 through the transmission mechanism 3, and the transmission mechanism 3 converts the rotary motion of the extension shaft into linear motion, so that the air jet assembly 1 can move up and down, thereby changing the distance between the air jet port of the air jet assembly 1 and the silicon wafer in the coating chamber.

[0029] Through the combination of the driving assembly and the magnetic fluid transmission member 4, and the ingenious design of the transmission mechanism 3 for converting the rotary motion into linear motion, the air jet assembly 1 can easily move up and down, thereby accurately adjusting the distance between the air jet port and the silicon wafer in the coating chamber. The flexibility and accuracy in the coating process are greatly improved, the fine control of the distance under different process requirements is met, and different heights can obtain different coating effects of the solar cell pieces.

[0030] In the embodiment, the transmission mechanism 3 includes: a gear and two vertical racks arranged at the top of the air jet assembly 1, the racks are inclined thread racks, the gear is horizontally arranged around the outer wall of the magnetic fluid transmission member 4, the teeth of the two racks are opposite, and the gear is located between the two racks and moves up and down by rotating between the two racks.

[0031] In another embodiment, the transmission mechanism includes: an external thread screw rod and an internal thread sleeve, the sleeve is vertically arranged at the top of the air jet assembly, and the screw rod is vertically arranged on the magnetic fluid transmission member 4. The external thread of the screw rod is matched with the internal thread of the sleeve, so that the screw rod rotates with the magnetic fluid transmission member 4 and moves up and down along the sleeve.

[0032] In other embodiments, the transmission mechanism 3 can also be a worm gear structure. As long as the transmission mechanism 3 converts the rotary motion of the driving assembly into linear motion for adjusting the distance between the air jet assembly 1 and the silicon wafer.

[0033] The anti-collision block 21 is arranged at the corresponding position of the bottom surface of the cover plate 2 and the air jet assembly 1, and the anti-collision block 21 is annular to prevent the air jet assembly 1 from colliding with the cover plate 2 due to excessive up and down adjustment of the air jet assembly 1. The anti-collision block 21 can also be block-shaped, and a plurality of anti-collision blocks can be arranged on the bottom surface of the cover plate 2.

[0034] In the embodiment, the driving assembly includes: a motor 5 and a speed reducer 6 connected with the rotating shaft of the motor 5, and the magnetic fluid transmission member 4 is arranged on the extension shaft of the speed reducer 6. The speed reducer 6 is connected with the rotating shaft of the motor 5, the speed reducer 6 is connected with the top cover, the extension shaft of the speed reducer 6 passes through the cover plate 2, and the magnetic fluid transmission member 4 is arranged on the extension shaft.

[0035] Further, the top of the cover plate 2 is provided with a mounting cover, the motor 5 and the speed reducer 6 are arranged on the top outside the mounting cover, the speed reducer 6 is fixed with the mounting cover, and the extending shaft of the speed reducer 6 passes through the mounting cover and then passes through the cover plate 2, and the magnetic fluid part is located in the mounting cover.

[0036] The use of the speed reducer 6 can reduce the rotating speed of the motor 5 and increase the torque, so that the output is more in line with the actual demand. Meanwhile, the fixed installation of the speed reducer 6 and the active design of the extending shaft ensure the reliability and flexibility of power transmission. The existence of the mounting cover provides an effective protective barrier for the magnetic fluid part, prevents the invasion of external sundries and dust, and reduces the risk of failure caused by foreign matter entering.

[0037] The coating mechanism further comprises a coupling 7, the transmission shaft of the magnetic fluid transmission part 4 is connected with the first connecting end of the coupling 7, and the extending shaft of the driving assembly is connected with the second connecting end of the coupling 7.

[0038] The top center of the air jet assembly 1 is provided with a mounting hole, and the mounting hole is provided with a mounting seat for fixing the rack. The mounting seat can be plate-shaped and arranged in the mounting hole, and one end of the rack is welded or screw-connected with the mounting seat.

[0039] Preferably, the two racks are provided with limiting clamping blocks at the ends not connected with the air jet assembly 1. The limiting clamping blocks prevent the gear from falling off the rack.

[0040] The air jet assembly in the utility model is the existing air jet assembly used for coating the wafer, and the focus of the application lies in adjusting the spacing between the air jet assembly and the silicon wafer, so the air jet assembly is not introduced in detail.

[0041] Compared with the prior art, the utility model provides a coating mechanism which comprises a cover plate 2, a driving assembly, a magnetic fluid transmission part 4 and an air jet assembly 1. The cover plate 2 covers the opening of a coating chamber for placing silicon wafers; the driving assembly is arranged above the cover plate 2, the extending shaft of the driving assembly passes through the cover plate 2, and the magnetic fluid transmission part 4 is arranged on the extending shaft, the top of the air jet assembly 1 is connected with the magnetic fluid transmission part 4 through a transmission mechanism 3, and the transmission mechanism 3 converts the rotating motion of the extending shaft into linear motion. The air jet assembly 1 can realize up-down motion, so as to adjust the spacing between the air jet and the silicon wafers in the coating chamber. The flexibility and accuracy in the coating process are greatly improved, the fine control of the spacing under different process requirements is met, and different heights can obtain different coating effects of the solar cell pieces.

[0042] It is to be noted that the terminology used above is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, steps, operations, elements, components, and / or groups thereof, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or groups thereof.

[0043] The preferred embodiments of the present application have been described above with the aid of drawing provided only by way of example and therefore changes in form and detail can be made without departing from the spirit and scope of the application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the scope of the present application.

Claims

1. A coating mechanism characterized by comprising: The utility model provides a coating mechanism for silicon wafer, which comprises the following parts: a cover plate covering the opening of a coating chamber for placing silicon wafer; a driving assembly arranged above the cover plate, with its protruding shaft passing through the cover plate; a magnetic fluid transmission device, with its transmission shaft connected to the protruding shaft of the driving assembly; a jetting assembly, with its top connected to the magnetic fluid transmission device through a transmission mechanism that converts the rotary motion of the protruding shaft into linear motion.

2. The coating mechanism of claim 1, wherein The transmission mechanism comprises a gear and two vertical racks arranged on the top of the jetting assembly, with the gear horizontally arranged around the outer wall of the magnetic fluid transmission device, the teeth of the two racks facing each other, and the gear located between the two racks and moving up and down between the two racks by rotating.

3. The coating mechanism of claim 1, wherein The transmission mechanism comprises an externally threaded screw rod and an internally threaded sleeve, with the sleeve vertically arranged on the top of the jetting assembly and the screw rod vertically arranged on the magnetic fluid transmission device, which rotates with the magnetic fluid transmission device and moves up and down along the sleeve.

4. The coating mechanism of claim 1, wherein The bottom surface of the cover plate is provided with an anti-collision block to prevent the jetting assembly from colliding with the cover plate.

5. The coating mechanism of claim 1, wherein The driving assembly comprises a motor and a speed reducer connected to the rotating shaft of the motor, and the magnetic fluid transmission device is arranged on the protruding shaft of the speed reducer.

6. The coating mechanism of claim 2, wherein A mounting hole is arranged at the center of the top of the jetting assembly, and a mounting seat is arranged at the mounting hole for fixing the racks.

7. The coating mechanism of claim 5, wherein A mounting cover is arranged on the top of the cover plate, and the motor and the speed reducer are arranged on the top outside the mounting cover, with the protruding shaft of the speed reducer passing through the mounting cover and then the cover plate, and the magnetic fluid transmission device partially located in the mounting cover.

8. The coating mechanism of claim 1, wherein The coating mechanism further comprises a coupling, with the transmission shaft of the magnetic fluid transmission device connected to the first connecting end of the coupling and the protruding shaft of the driving assembly connected to the second connecting end of the coupling.

9. The coating mechanism of claim 4, wherein The anti-collision block is annular.

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