Edge passivation device

Abstract

The utility model provides edge passivation equipment which comprises a purification table for conveying a sheet box, a passivation feeding machine which is arranged at the two ends of the purification table and is used for loading material sheets to the sheet box, a passivation discharging machine which is used for unloading the material sheets to the sheet box, and a furnace body cabinet which is arranged on the side face of the purification table and is internally provided with a reaction cavity. The conveying mechanism is used for carrying the wafer box between the purification table and the furnace body cabinet, the vacuumizing equipment is arranged on one side of the furnace body cabinet, and an electric cabinet and a gas cabinet are arranged in the purification table. The purification table and the furnace body cabinet are arranged in a T shape, feeding and discharging mechanisms for solar cells are arranged at the two ends of the purification table and the furnace body cabinet, the cell boxes directly circulate in the equipment, functional modules are clear, the structure is compact, the advantages of traditional coating equipment are integrated, the space is reasonably utilized on the basis that the assembling and maintaining space is reserved, and the production efficiency is improved. The equipment size is reduced.

Description

Technical Field

[0001] This utility model relates to the field of coating technology for solar cells, and specifically to an edge passivation coating device for solar cells. Background Technology

[0002] Currently, in the early stages of solar cell module manufacturing, laser non-destructive cutting (TLS) technology is used to divide a single solar cell into two or more smaller pieces, thereby reducing string current and power loss. However, carrier recombination on the newly cut surfaces (i.e., unpassivated surfaces) of the cells reduces the photoelectric conversion efficiency. To minimize the efficiency loss caused by cell cutting, a passivation coating process is applied to the cut edges of the cells, which can effectively repair the efficiency loss caused by cutting.

[0003] Existing coating equipment, such as PECVD and ALD equipment, has its necessary electrical cabinets and gas cabinets placed in separate modules or cabinets. This layout is not very reasonable, resulting in large size, large footprint, and inability to be integrated with the online screen printing of existing solar cells. Utility Model Content

[0004] In order to solve the technical problem of unreasonable equipment layout in the above-mentioned prior art coating equipment, this utility model proposes an edge passivation device.

[0005] The technical solution adopted in this utility model is:

[0006] This utility model proposes an edge passivation device, comprising: a purification table for transferring sheet boxes; a passivation loading machine and a passivation unloading machine respectively disposed at both ends of the purification table for loading sheet boxes into the sheet boxes; a furnace cabinet disposed on the side of the purification table and having a reaction chamber therein; a transport mechanism for moving sheet boxes between the purification table and the furnace cabinet; a vacuum device disposed on one side of the furnace cabinet; and an electrical cabinet and a gas cabinet disposed inside the purification table.

[0007] Furthermore, the clean bench is provided with a temporary storage position for unprocessed sheet boxes at one end corresponding to the passivation feeding machine, a temporary storage position for processed sheet boxes at the other end corresponding to the passivation unloading machine, and a sheet box transfer position in the middle corresponding to the transport mechanism.

[0008] Preferably, the purification table and the furnace cabinet are connected in a T-shape.

[0009] Furthermore, the furnace cabinet is arranged side by side with the vacuum equipment and parallel to the length direction of the purification table.

[0010] Furthermore, the clean bench includes: a frame, and a line mechanism that runs through the frame;

[0011] The two ends of the line mechanism correspond to the passivation feeding machine and the passivation unloading machine, respectively.

[0012] Furthermore, the line mechanism includes a first line and a second line;

[0013] Furthermore, one end of the first line is a temporary storage position for unprocessed wafer cassettes, which is used to connect to the output end of the passivation feeding machine, and the other end is a temporary storage position for processed wafer cassettes, which is used to connect to the input end of the passivation unloading machine. The middle part is a wafer cassette transfer position.

[0014] Furthermore, one end of the second line is used to connect to the input end of the passivation feeder, and the other end of the second line is used to connect to the output end of the passivation unfeeder.

[0015] Furthermore, the first and second lines within the frame are arranged parallel to each other at intervals, with the first line positioned above the second line.

[0016] Furthermore, the transport mechanism is a robotic arm mechanism for handling the film box.

[0017] Compared with existing technologies, the purification table and furnace cabinet of this utility model adopt a T-shaped layout and are equipped with feeding and unloading mechanisms for solar cells at both ends. The cell boxes circulate directly in the equipment. The functional modules are clear and the structure is compact. It combines the advantages of traditional coating equipment, makes reasonable use of space while retaining assembly and maintenance space, and reduces the size of the equipment. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure in an embodiment of the present utility model;

[0020] Figure 2 This is a system diagram in an embodiment of the present utility model;

[0021] Figure 3 This is a front view of the purification table in an embodiment of this utility model;

[0022] Figure 4 This is a flow diagram of the chip cassette in an embodiment of this utility model;

[0023] 1. Passivation feeding machine; 2. Passivation unloading machine; 3. Furnace cabinet; 4. Cleanroom workbench;

[0024] 41. Rack;

[0025] 42. Linear Mechanism; 421. First Linear Mechanism; 422. Second Linear Mechanism;

[0026] 401. Temporary storage location for unprocessed film cassettes; 402. Film cassette transfer location; 403. Temporary storage location for processed film cassettes;

[0027] 30. Gas holder;

[0028] 40. Electrical cabinet;

[0029] 50. Transportation agencies;

[0030] 6. Vacuum equipment. Detailed Implementation

[0031] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0032] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0033] Traditional CVD and PVD coating equipment can also perform coating and passivation processes on the cut surfaces of solar cells, but each has its own application drawbacks and limitations. For example, both are large in size, require a large floor space, and cannot be integrated with existing online screen printing processes for solar cells.

[0034] In response, this utility model proposes an edge passivation device, specifically an edge passivation coating device for solar cells, used to perform a coating passivation process on the cut edges of the solar cells.

[0035] like Figure 1 , 2 As shown, the edge passivation equipment specifically includes: a purification table 4, a passivation feeder 1, a passivation unfeeder 2, a furnace cabinet 3, a transport mechanism 50, an electrical cabinet 40, a gas cabinet 30, and a vacuum pumping device 6.

[0036] Clean station 4 is used for transporting wafer cassettes, specifically in a linear fashion, allowing wafer cassettes to be transported from one end to the other, or vice versa. A passivation feeder 1 is located at the left end of clean station 4, receiving empty wafer cassettes from clean station 4 and transferring wafers (silicon wafers or solar cells) into them. A passivation unloading machine 2 is also located at the left end of clean station 4, receiving processed wafer cassettes from clean station 4 and transferring processed wafers (silicon wafers or solar cells) from the cassettes to the next processing unit, such as a screen printing machine. The furnace cabinet 3 contains a reaction chamber for the coating process of the sheet metal. The furnace cabinet 3 is located on one side of the central part of the clean bench. After the sheet metal cassettes loaded from the passivation feeder 1 are transported to the central part of the clean bench, a transport mechanism 50 moves the cassettes containing the unprocessed sheet metal from the clean bench to the furnace cabinet 3 for the coating process. After the coating process in the furnace cabinet 3 is completed, the transport mechanism 50 moves the cassettes containing the processed sheet metal from the furnace cabinet 3 back to the central part of the clean bench, and then transfers them to the passivation unloading machine at the other end of the clean bench for unloading. A vacuum pump is installed side-by-side on the right side of the furnace cabinet 3 for evacuating the reaction chamber. The clean bench integrates an electrical cabinet 40 for power control of the equipment and a gas cabinet 30 for regulating the gas supply during the coating process.

[0037] The purification table of this utility model adopts a linear layout and is equipped with feeding and unloading mechanisms for solar cells at both ends. The cell boxes circulate directly in the equipment. The functional modules are clear and the structure is compact. It combines the advantages of traditional coating equipment and makes reasonable use of space while retaining assembly and maintenance space, thereby reducing the size of the equipment.

[0038] In a specific embodiment, the conveyor line for transporting wafer cassettes from one end to the other is divided into three sections: one end corresponding to the passivation feeder 1 is the unprocessed wafer cassette temporary storage position 401, the other end corresponding to the passivation unloading machine 2 is the processed wafer cassette temporary storage position 403, and the middle section corresponding to the transport mechanism 50 is the wafer cassette transfer position 402.

[0039] In a preferred embodiment, the purification table 4 and the furnace cabinet 3 are connected in a T-shape. That is, the purification table 4 is in a straight line, with the passivation feeding machine 1 at the left end and the passivation unloading machine at the right end. The furnace cabinet 3 is located on the upper side of the middle of the purification table, forming an overall T-shape. The electrical cabinet 40 is located inside the purification table near the left end, and the gas cabinet 30 is located inside the purification table near the right end.

[0040] By incorporating the space of the electrical cabinet 40 and the gas cabinet 30 into the purification station, this layout can shorten the equipment size and improve space utilization without affecting the function of each module.

[0041] Furnace cabinet 3 primarily performs passivation on the transferred unprocessed material boxes, allowing multiple boxes to be processed simultaneously, significantly improving production capacity and solving efficiency issues. Within the reaction chamber, inert gas divides the space into multiple reaction gas chambers, with each chamber allocated the necessary space for the reaction, and the process is completed at a suitable central rotation speed.

[0042] It should also be noted that the electrical cabinet 40 and the gas cabinet 30 are commonly used components in coating equipment. Their specific functions and internal structures are also common, so they will not be described in detail.

[0043] In a specific embodiment, the furnace cabinet 3 and the vacuum pump 6 are arranged side by side and parallel to the length of the purification platform 4. Specifically, the vacuum pump is located on the right side of the furnace cabinet 3, and the gas holder 30 inside the purification platform is located at its right end. The short distance between the vacuum pump and the reaction chamber is beneficial for creating and maintaining a vacuum environment in the chamber.

[0044] like Figure 1 , 3 As shown, in a specific embodiment, the purification station includes a frame 41 and a conveyor mechanism 42. The frame 41 is located in the middle and serves as a support frame and mounting bracket. A transmission mechanism can be installed on it. The electrical cabinet 40 is located on the upper left side of the frame 41, and the gas cabinet 30 is located on the lower right side of the frame 41. The conveyor mechanism 42 is used to convey the film box to both ends and the middle. The conveyor mechanism 42 runs through the frame 41, and the two ends correspond to the passivation feeder 1 and the passivation unfeeder, respectively.

[0045] Specifically, the production line mechanism 42 includes a first production line 421 and a second production line 422; one end of the first production line 421 is a temporary storage position for unprocessed wafer cassettes, which is used to connect to the output end of the passivation feeder 1, and the other end is a temporary storage position for processed wafer cassettes, which is used to connect to the input end of the passivation unloading machine, and the middle part is a wafer cassette transfer position 402; one end of the second production line 422 is used to connect to the input end of the passivation feeder 1, and the other end of the second production line 422 is used to connect to the output end of the passivation unloading machine.

[0046] The first line 421 and the second line 422 inside the frame 41 are arranged in parallel and spaced apart vertically, with the first line 421 located above the second line 422.

[0047] like Figure 4 As shown, the specific operating logic is as follows:

[0048] Silicon wafers are neatly placed into wafer cassettes using the passivation feeder 1. After placement, the wafer cassettes are transported to the junction of the passivation feeder 1 and the unprocessed wafer cassette temporary storage position 401, about to enter the unprocessed wafer cassette temporary storage position 401. If the wafer cassettes in the unprocessed wafer cassette temporary storage position 401 are already full at this time, the wafer cassettes will be temporarily stored at the junction of the passivation feeder 1 and the unprocessed wafer cassette temporary storage position 401 (or at the passivation feeder 1) until all the wafer cassettes in the unprocessed wafer cassette temporary storage position 401 enter the reaction chamber; otherwise, they will directly enter the unprocessed wafer cassette temporary storage position 401.

[0049] To prevent equipment operation from being disrupted under special circumstances, the system is configured so that only when neither the furnace cabinet 3 nor the unprocessed sheet box temporary storage position 401 has any sheet boxes, the sheet boxes in the unprocessed sheet box temporary storage position will sequentially enter the sheet box transfer position 402 and be transported to the furnace cabinet 3 for processing via the transport mechanism 50 on the clean bench. After the processing is completed, they will be sequentially transported back to the sheet box transfer position 402 via the transport mechanism 50 and enter the processed sheet box temporary storage position 403. At this time, the processed sheet box temporary storage position 403 is full of processed sheet boxes, and the next step is to transfer them to the passivation unloading machine 2 for unloading. If the passivation unloading machine 2 is full, the processed sheet box temporary storage position 403 can also serve as a temporary storage and cooling unit. Finally, after all the sheet boxes entering the passivation unloading machine 2 have been unloaded, they will be transferred back to the passivation loading machine 1 via the second line 422 of the clean bench 4 to start a new round of work, and so on.

[0050] As mentioned above, the new edge passivation equipment combines the advantages of ALD and PECVD while effectively avoiding the problems of both. It produces high-quality films, has a large production capacity, and is small in size, allowing for seamless integration with screen printing equipment, thereby reducing power loss at the cut surfaces of solar cells.

[0051] It should be noted that the terminology used above is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0052] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0053] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0054] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0055] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this utility model.

[0056] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An edge passivation device, characterized in that, include: The purification table (4) for transferring the tablet box is provided with a passivation feeder (1) for loading the tablet box and a passivation unloading feeder (2) for unloading the tablet box at both ends of the purification table (4), a furnace cabinet (3) with a reaction chamber inside is provided on the side of the purification table, a transport mechanism (50) for moving the tablet box between the purification table (4) and the furnace cabinet (3), a vacuum device is provided on one side of the furnace cabinet (3), and an electrical cabinet (40) and a gas cabinet (30) are provided inside the purification table (4).

2. The edge passivation device as described in claim 1, characterized in that, The clean bench is provided with an unprocessed sheet box temporary storage position (401) at one end corresponding to the passivation feeding machine (1), and a processed sheet box temporary storage position (403) at the other end corresponding to the passivation unloading machine. A sheet box transfer position (402) is provided in the middle corresponding to the transport mechanism (50).

3. The edge passivation device as described in claim 2, characterized in that, The purification platform and the furnace cabinet (3) are connected in a T-shape.

4. The edge passivation device as described in claim 2, characterized in that, The furnace cabinet (3) is arranged side by side with the vacuum equipment and is parallel to the length direction of the purification table.

5. The edge passivation device as described in claim 2, characterized in that, The clean bench includes: a frame (41) and a line mechanism (42) that runs through the frame (41); The two ends of the line mechanism (42) correspond to the passivation feeder (1) and the passivation unfeeder (2), respectively.

6. The edge passivation device as described in claim 5, characterized in that, The line mechanism (42) includes a first line (421) and a second line (422); One end of the first line body (421) is a temporary storage position for unprocessed wafer cassettes, which is used to connect to the output end of the passivation feeding machine (1), and the other end is a temporary storage position for processed wafer cassettes, which is used to connect to the input end of the passivation unloading machine (2). The middle part is a wafer cassette transfer position (402). One end of the second line (422) is used to connect to the input end of the passivation feeder (1), and the other end of the second line (422) is used to connect to the output end of the passivation unfeeder (2).

7. The edge passivation device according to claim 6, characterized in that, The first line body (421) and the second line body (422) in the frame (41) are arranged in parallel and spaced vertically, with the first line body (421) located above the second line body (422).

8. The edge passivation device according to claim 1, characterized in that, The transport mechanism (50) is a robotic arm mechanism for transporting the cassette.

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