Anti-crush thermocompression welding conveying platform structure

Abstract

The utility model relates to the technical field of wafer thermocompression bonding, in particular to an anti-crush thermocompression bonding conveying platform structure which comprises a conveying base and a jig table, the jig table is provided with a suction cup area and a receding area, the edge of the suction cup area is continuous and arc-shaped, the receding area is located on the outer side of the suction cup area, a receding groove is formed in the receding area, and the suction cup area is located in the receding groove. The distance between the groove bottom of the avoiding groove and the bottom face of the jig table is a, the distance between the suction cup area and the bottom face of the jig table is b, an interval groove is further formed between the suction cup area and the avoiding area and is in a continuous ring shape, the distance between the groove bottom of the interval groove and the bottom face of the jig table is c, and c is larger than a and smaller than b. The fixing device has the following effects that the four corners are suspended in the receding grooves, then the corners cannot abut against the bottom faces of the receding grooves, the corners are protected, and the stable fixing effect is achieved.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of wafer thermal compression welding, in particular to a thermal compression welding conveying platform structure. BACKGROUND

[0002] In the packaging process of a wafer, a thermal compression welding treatment is often performed in a connecting step, specifically, a corresponding wafer or semi-finished product is transported by a thermal compression welding jig, and then is treated.

[0003] The lower side of the jig is provided with a suction disc structure for adsorbing the workpiece on the jig table, and the lower side is connected to the suction disc hole on the jig table through a gas pipeline, so that the workpiece is fixed.

[0004] Generally, the upper side of the jig table is provided with a mounting groove for embedding the workpiece, and the warping of the workpiece often occurs during production or processing. After the rectangular workpiece is embedded and placed in the mounting groove, the workpiece will be attached to the bottom of the mounting groove under the action of the suction disc structure. However, due to the warping, the four corners of the workpiece will first contact the bottom of the mounting groove and bear greater force, and the welding bumps on the corners are often damaged, affecting the product quality. CONTENT OF THE UTILITY MODEL

[0005] In order to reduce the possibility of damage to the corners of the rectangular workpiece during transportation, the application provides a thermal compression welding conveying platform structure.

[0006] The application provides a thermal compression welding conveying platform structure, which adopts the following technical scheme: a thermal compression welding conveying platform structure, comprising a conveying base and a jig table, the jig table is provided with a suction disc area and an avoidance area, the edge of the suction disc area is continuous and arc-shaped, the avoidance area is located outside the suction disc area, the avoidance area is provided with an avoidance groove, the distance between the bottom of the avoidance groove and the bottom surface of the jig table is a, the distance between the suction disc area and the bottom surface of the jig table is b, there is also a spacing groove between the suction disc area and the avoidance area, the spacing groove is continuous and annular, the distance between the bottom of the spacing groove and the bottom surface of the jig table is c, a

[0007] When the workpiece is attached to the jig table, the main adsorption part will be the suction disc area, and the avoidance area on the periphery can make the four corners of the rectangular workpiece embedded into the avoidance groove, and the greater depth of the avoidance groove will make the four corners suspended in the avoidance groove, so that the corners of the workpiece will not abut against the bottom surface of the avoidance groove, forming protection for the corners of the workpiece and forming a stable fixing effect.

[0008] Preferably, the avoidance groove is uniformly distributed with four avoidance grooves along the circumference, and the avoidance grooves are used for embedding the four corners of the workpiece.

[0009] By adopting the technical scheme, the four avoiding grooves can realize the positioning effect of the workpiece in the circumferential direction during placement.

[0010] Preferably, the middle part of the suction cup area has a suction cup groove, the suction cup groove has a plurality of separation cylinders, and the bottom of the suction cup groove has a first suction hole.

[0011] Preferably, the edge of the avoiding groove includes two equal-length first segments, a second segment connecting the two first segments, and the avoiding groove is an isosceles right triangle.

[0012] Preferably, the right angle of the avoiding groove has a protection groove, and the protection groove is a partial circle with the top angle of the right triangle as the center.

[0013] By adopting the technical scheme, when the workpiece with warping is placed, the corners of the workpiece can have a certain activity space in the protection groove, reducing the probability of collision and breakage of the corners of the workpiece.

[0014] Preferably, the depth of the spacing groove gradually increases from one side close to the center to the other side.

[0015] Preferably, the bottom of the spacing groove is provided with a secondary suction groove, and the bottom of the secondary suction groove has a plurality of second suction holes in the circumferential direction.

[0016] Preferably, the distance from the inner side of the secondary suction groove to the edge of the suction cup area is d, the radius of the suction cup area is e, and d is 0.1e.

[0017] By adopting the technical scheme, the magnetic suction groove is added outside the main suction cup area, the suction force of the part of the workpiece in contact with the suction cup area is increased, and the suction stability effect is improved.

[0018] Preferably, the second segment extends inward and is located in the spacing groove.

[0019] By adopting the technical scheme, the depth of the second segment is greater than that of the spacing groove, and the corresponding corners of the rectangular workpiece with warping are more warped. After the inner part of the second segment extends into the spacing groove, the possibility of the corners of the workpiece contacting the bottom of the spacing groove is reduced, and avoidance is formed.

[0020] Preferably, the inner wall of the edge of the spacing groove is inclined away from the center, and the inclination angle is q.

[0021] In summary, the present application has at least one of the following beneficial technical effects:

[0022] 1. When the workpiece is attached to the fixture table, the main adsorption part will be the suction cup area, while the surrounding clearance area allows the four corners of the rectangular workpiece to be embedded in the clearance groove. The clearance groove is deeper, which will make the four corners suspended in the clearance groove, thus preventing the corners from touching the bottom surface of the clearance groove, forming protection for the corners and forming a stable fixing effect.

[0023] 2. During placement, the four clearance slots can achieve the positioning effect of the workpiece in the circumferential direction;

[0024] 3. Add a magnetic adsorption groove to the outside of the main suction cup area to increase the adsorption force on the part of the workpiece that is in contact with the suction cup area, thereby improving the adsorption stability. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of this application;

[0026] Figure 2 yes Figure 1 A magnified view of part A in the middle;

[0027] Figure 3 This is a partial sectional view of this application;

[0028] Figure 4 yes Figure 1 A magnified view of part B in the diagram.

[0029] Explanation of reference numerals in the attached drawings: 100, conveyor base; 110, jig table; 111, suction cup area; 112, spacer groove; 113, clearance area; 114, suction cup groove; 115, separation cylinder; 116, first suction hole; 117, secondary suction groove; 118, second suction hole; 120, clearance groove; 121, first section; 122, second section; 123, protective groove. Detailed Implementation

[0030] The present application will be further described in detail below with reference to the accompanying drawings.

[0031] This application discloses a structure for a pressure-damage-resistant hot press welding conveyor platform, referring to... Figure 1 It includes a transfer base 100 and a jig table 110 connected to the lower side of the base 100. The jig table 110 has a suction cup area 111, a spacer groove 112 and a clearance area 113 in sequence from the center outward.

[0032] Reference Figure 1 , Figure 2The middle part of the suction disc area 111 is a rectangular suction disc groove 114, and the groove bottom of the suction disc groove 114 is provided with four separation cylinders 115, which separate the inside of the suction disc groove 114 into a cross-shaped cavity. The bottom of the cavity, that is, the groove bottom of the suction disc groove 114 is provided with a first suction hole 116. The edge of the suction disc area 111 is continuous and arc-shaped. The diameter of the suction disc area 111 is smaller than the diagonal length of the workpiece.

[0033] Referring to Figure 1 、 Figure 3 The spacing groove 112 is continuous and annular. The depth of the spacing groove 112 gradually increases from one side close to the center to the other side. Specifically, the included angle between the bottom of the spacing groove 112 and the horizontal plane is t, and t is in the range of 0.5°-2°. The bottom of the spacing groove 112 is provided with a secondary suction groove 117, and the groove bottom of the secondary suction groove 117 is provided with a plurality of second suction holes 118 in the circumferential direction. The distance from the inner side of the secondary suction groove 117 to the edge of the suction disc area 111 is d, the radius of the suction disc area 111 is e, and d is 0.1e. That is, the secondary suction groove 117 is located inside the spacing groove 112 and in the part that is just deepened. When the workpiece is suctioned, the main suction area is the middle part of the workpiece, and the outer part of the suction disc area 111. The second suction hole 118 can increase the suction firmness of the circumferential side. Although the overall suction area is reduced, the cooperation of the first suction hole 116 and the second suction hole 118 can ensure sufficient suction force to fix the workpiece.

[0034] It is worth noting that the conveying base 100 is provided with an air channel matched with the first suction hole 116 to realize the suction function.

[0035] The diameter of the outermost edge of the spacing groove 112 needs to be smaller than the diagonal length of the workpiece. The avoidance area 113 is located outside the suction disc area 111, and the avoidance area 113 is provided with an avoidance groove 120. In the embodiment, the avoidance groove 120 is uniformly distributed in the circumferential direction and has four avoidance grooves 120. The avoidance groove 120 is used for embedding the four corners of the workpiece. In other embodiments, the avoidance groove 120 can also be an annular groove. Compared with the four separate avoidance grooves 120, the four separate avoidance grooves 120 can form a positioning effect on the workpiece in the circumferential direction.

[0036] Referring to Figure 1 、 Figure 4The edge of the avoiding groove 120 includes two first segments 121 of equal length, a second segment 122 connecting the two first segments 121, and the avoiding groove 120 is in the shape of an isosceles right triangle. The right angle of the avoiding groove 120 has a protection groove 123, which is a circular-arc-shaped groove with the vertex of the right angle of the right triangle as the center. In this embodiment, the edge of the protection groove 123 is a circular-arc segment, and the corresponding center of the circular-arc segment extends at an angle range of 200° to 280°, and the opening of the circular-arc shape faces the base of the isosceles right triangle. After the workpiece is placed, the four corner tips of the workpiece can be accommodated in the protection groove 123, and when the corners deviate during suction, a certain space for movement can also be achieved.

[0037] The distance between the bottom of the avoiding groove 120 and the bottom surface of the jig table 110 is a, the distance between the suction disc area 111 and the bottom surface of the jig table 110 is b, and the distance between the bottom of the spacing groove 112 and the bottom surface of the jig table 110 is c, a < c < b. When placing a workpiece with warping, the corners of the workpiece are embedded into the avoiding groove 120 and remain suspended, reducing the probability of collision and breakage of the corners of the workpiece, and at the same time, the middle part can be more stably fixed by the suction disc area 111. At the same time, in order to further reduce the possibility of the corners being pressed, the second segment 122 extends inward and is located in the spacing groove 112, and the depth of the second segment 122 is greater than that of the spacing groove 112. Since the rectangular workpiece with warping has a greater degree of warping at the corresponding corners, in this embodiment, the inward portion of the second segment 122 extends into the spacing groove 112, which can reduce the possibility of the corners of the workpiece touching the bottom of the spacing groove 112 and forming an avoiding effect.

[0038] Reference Figure 3 In order to protect the edges of the workpiece, in this embodiment, the inner wall of the edge of the spacing groove 112 is inclined away from the center, and the included angle between the bottom surface of the spacing groove 112 and the side surface of the spacing groove 112 is q. Specifically, in this embodiment, q ranges from 96° to 103°.

[0039] The embodiments of the specific implementation are preferred embodiments of the present application, but do not limit the protection scope of the present application, so that: any equivalent changes made according to the structure, shape, principle of the present application should be covered within the protection scope of the present application.

Claims

1. A pressure-resistant hot press welding conveyor platform structure, comprising a conveyor base (100) and a fixture table (110), characterized in that: The fixture platform (110) has a suction cup area (111) and a clearance area (113). The edge of the suction cup area (111) is continuous and arc-shaped. The clearance area (113) is located outside the suction cup area (111). The clearance area (113) has a clearance groove (120). The distance from the bottom of the clearance groove (120) to the bottom surface of the fixture platform (110) is a. The distance from the suction cup area (111) to the bottom surface of the fixture platform (110) is b. There is also a gap groove (112) between the suction cup area (111) and the clearance area (113). The gap groove (112) is continuous and annular. The distance from the bottom of the gap groove (112) to the bottom surface of the fixture platform (110) is c. a < c < b.

2. The anti-pressure damage hot-press welding conveyor platform structure according to claim 1, characterized in that: The clearance groove (120) is evenly distributed in four directions along the circumference, and the clearance groove (120) is used for the four corners of the workpiece to be embedded.

3. The anti-pressure damage hot-press welding conveyor platform structure according to claim 2, characterized in that: The suction cup area (111) has a suction cup groove (114) in the middle, and the suction cup groove (114) has a plurality of separation cylinders (115) inside, and the bottom of the suction cup groove (114) has a first suction hole (116).

4. The anti-pressure damage hot press welding conveyor platform structure according to claim 3, characterized in that: The edge of the clearance groove (120) includes two first segments (121) of equal length and a second segment (122) connecting the two first segments (121). The clearance groove (120) is an equilateral right triangle.

5. The anti-pressure damage hot-press welding conveyor platform structure according to claim 4, characterized in that: The right angle of the clearance groove (120) has a protective groove (123), which is a partial circle centered on the vertex of a right triangle.

6. The anti-pressure damage hot press welding conveyor platform structure according to claim 5, characterized in that: The depth of the spacer groove (112) gradually increases from the side closest to the center to the other side.

7. The anti-pressure damage hot-press welding conveyor platform structure according to claim 6, characterized in that: The bottom of the spacer groove (112) is provided with a secondary adsorption groove (117), and the bottom of the secondary adsorption groove (117) has a number of second adsorption holes (118) along the circumferential direction.

8. The anti-pressure damage hot-press welding conveyor platform structure according to claim 7, characterized in that: The distance d between the inner side of the secondary adsorption groove (117) and the edge of the suction cup area (111) is d, and the radius of the suction cup area (111) is e, where d is 0.1e.

9. The anti-pressure damage hot-press welding conveyor platform structure according to claim 8, characterized in that: The second segment (122) extends inward and is located within the spacer slot (112).

10. The anti-pressure damage hot-press welding conveyor platform structure according to claim 9, characterized in that: The inner wall of the edge of the spacer groove (112) is inclined toward the side away from the center, and the inclination angle is q.

Images