Sheet guiding mechanism and sheet loading and unloading system

The sheet guiding mechanism, which combines lateral and vertical movements, solves the problem of inserting silicon wafers into the grooves of the bottom rod of the boat structure, achieving efficient sheet introduction and reducing the risk of cards and fragments.

CN224037807UActive Publication Date: 2026-03-24LAPLACE (WUXI) SEMICON TECH CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-03-17
Publication Date
2026-03-24

AI Technical Summary

Technical Problem

In existing technologies, it is difficult to insert the sheet into the bottom bar groove of the boat structure, especially when there is alignment misalignment or silicon wafer deformation, making it difficult to achieve smooth insertion.

Method used

By setting the first driving component to drive the first carrier component to move laterally, and combining the second driving component to move up and down in the vertical direction, the second tooth groove is adjusted to correspond one-to-one with the silicon wafer to be inserted, so as to ensure that the silicon wafer can be smoothly inserted into the first tooth groove of the bottom rod.

Benefits of technology

The automated wafer insertion process reduces the probability of wafer chips and fragments, thus improving the success rate of wafer insertion.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN224037807U_ABST
    Figure CN224037807U_ABST
Patent Text Reader

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a sheet guiding mechanism and a sheet loading and unloading system, and solves the problem that in the prior art, deviated or deformed sheets are difficult to be inserted into tooth grooves of bottom rods of boat structures. The sheet guiding mechanism comprises a first bearing piece, a first driving piece and a second driving piece, and a plurality of second tooth grooves are formed in the top face of the first bearing piece. The first driving part is connected with the first bearing part, so that the second tooth grooves are in one-to-one correspondence with the sheets in the vertical direction, or the centers of the second tooth grooves are aligned with the centers of the first tooth grooves; the second driving piece is configured to drive the first bearing piece to ascend and descend so that the first bearing piece can jack the sheet in the first tooth groove or place the sheet in the second tooth groove in the first tooth groove. According to the sheet guiding mechanism and the sheet loading and unloading system, the requirement that the deviated or deformed sheet is inserted into the tooth groove of the bottom rod of the boat structure can be met, and the situation that the sheet is clamped and broken subsequently is avoided.
Need to check novelty before this filing date? Find Prior Art

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of semiconductor and photovoltaic technology, and in particular, to a sheet guiding mechanism and a sheet loading and unloading system. BACKGROUND

[0002] With the development of photovoltaic technology, solar cell sheets are widely used in various fields. When solar cell sheets are processed in different processes, a key step is to insert and remove the sheets from the boat. For a boat with a bottom rod, a sheet guiding mechanism is needed to assist in guiding the silicon sheet into the tooth groove of the bottom rod.

[0003] During the sheet insertion process, the sheet guiding mechanism is raised in the vertical direction so that the silicon sheet of the sheet insertion mechanism is first inserted into the tooth groove of the sheet guiding mechanism, and then the sheet guiding mechanism is lowered so that the silicon sheet is guided into the tooth groove of the bottom rod. However, due to the small size of the tooth groove of the bottom rod, if the boat and the sheet insertion mechanism are misaligned or the silicon sheet is deformed, the movement of the sheet guiding mechanism in the vertical direction will make it difficult to guide the silicon sheet into the tooth groove of the bottom rod. CONTENT OF THE INVENTION

[0004] Therefore, an embodiment of the present disclosure provides a sheet guiding mechanism and a sheet loading and unloading system to solve the problem that the sheet is difficult to be inserted into the tooth groove of the bottom rod of the boat structure in the related art.

[0005] In a first aspect, an embodiment of the present disclosure provides a sheet guiding mechanism configured to assist a carrying mechanism in loading and unloading a sheet, the carrying mechanism including a bottom rod provided with a plurality of first tooth grooves arranged along a first direction, the sheet guiding mechanism including: a first carrying member, a top surface of the first carrying member being provided with a plurality of second tooth grooves arranged along the first direction, the second tooth grooves being configured to carry the sheet; a first driving member connected with the first carrying member and configured to drive the first carrying member to move along the first direction, so that the second tooth grooves correspond to the sheet one by one in the vertical direction, or the centers of the second tooth grooves are aligned with the centers of the first tooth grooves; and a second driving member configured to drive the first carrying member to rise and fall along the vertical direction, so that the first carrying member lifts the sheet in the first tooth groove, or places the sheet in the second tooth groove into the first tooth groove.

[0006] In some embodiments, the sheet guiding mechanism further includes: a base; a second carrying member connected to the base, the second driving member being mounted to the base or the second carrying member; the first driving member being mounted to the second carrying member, and the first carrying member being movably connected above the second carrying member along the first direction.

[0007] In some embodiments, the first carrier comprises: a first carrier plate; one or more supporting toothed bars arranged along a second direction and connected to the first carrier plate, each supporting toothed bar having a second tooth groove, the second direction intersecting the first direction and the vertical direction; an adjusting block fixedly connected to the first carrier plate, the first driving member being connected to the adjusting block to drive the first carrier plate and the supporting toothed bars to move along the first direction; the supporting toothed bars and the bottom bars are arranged in a staggered manner, and the supporting toothed bars are located between two bottom bars at the edge.

[0008] In some embodiments, the first carrier further comprises: a first positioning member fixedly or adjustably connected to the second carrier, the first positioning member comprising a first positioning surface; when the second tooth groove corresponds to the sheet in the vertical direction and / or the center of the second tooth groove is aligned with the center of the first tooth groove, the first driving member drives the first carrier to abut against the first positioning surface.

[0009] In some embodiments, the second carrier comprises: a second carrier plate movably connected to the base along the vertical direction, the second carrier plate and the base having an accommodation space therebetween, the first driving member being arranged in the accommodation space; the second carrier plate is provided with a through hole, and the first carrier passes through the through hole to be connected to the first driving member.

[0010] In some embodiments, the second carrier comprises: a second carrier plate movably connected to the base above along the vertical direction; one or more guide plates connected to the second carrier plate, the guide plates being provided with inclined track grooves; the second driving member comprises: a roller extending into the track groove; a driving portion arranged in the base, the driving portion being configured to drive the roller to move along the first direction, so that the roller moves in the track groove to drive the second carrier plate to move up and down along the vertical direction.

[0011] In some embodiments, the number of second driving members is two or more, and the plurality of second driving members are arranged in the first direction at intervals.

[0012] In some embodiments, one of the first carrier and the second carrier is provided with a first sliding rail extending along the first direction, and the other is provided with a first sliding block matched with the first sliding rail, the relative movement of the first sliding block and the first sliding rail in the first direction can drive the first carrier to slide in the first direction relative to the second carrier; and / or, one of the second carrier and the base is provided with a second sliding rail extending along the vertical direction, and the other is provided with a second sliding block matched with the second sliding rail, the relative movement of the second sliding block and the second sliding rail in the vertical direction can drive the second carrier to slide in the vertical direction relative to the base.

[0013] In some embodiments, the first tooth groove has a first opening, and the second tooth groove has a second opening, the size of the second opening in the first direction being greater than the size of the first opening in the first direction.

[0014] In a second aspect, the present disclosure also provides a sheet loading and unloading system, comprising: a carrier mechanism having a bottom bar, the bottom bar being provided with a plurality of first tooth slots arranged along a first direction; a sheet inserting mechanism located above the carrier mechanism in a vertical direction, the sheet inserting mechanism being configured to insert a sheet into the carrier mechanism; and the sheet guiding mechanism described above, configured to lift the sheet in the carrier mechanism or the sheet inserted by the sheet inserting mechanism and place the sheet into the first tooth slots.

[0015] The sheet guiding mechanism and the sheet loading and unloading system provided by the embodiments of the present disclosure use the cooperation of the first driving member driving the transverse movement of the first carrier member and the second driving member driving the vertical movement of the first carrier member to adjust the second tooth slots to correspond to the silicon wafer to be inserted when the second tooth slots are used to carry the silicon wafer inserted into the boat structure, and to adjust the second tooth slots to correspond to the first tooth slots when the second tooth slots are used to further guide the silicon wafer inserted into the boat structure into the first tooth slots of the bottom bar, so as to smoothly guide the silicon wafer into the first tooth slots of the bottom bar. Such a cooperation structure enables the silicon wafer to be inserted into the first tooth slots of the bottom bar even if the silicon wafer is offset or deformed by process during the automatic sheet insertion process, so as to reduce the probability of carding and chipping in subsequent processes. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and other objects, features and advantages of the present disclosure will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings. The drawings provided in the disclosure serve to provide a further understanding that assists in elucidating the present disclosure, and together with the description, form a part of the disclosure. The drawings provided in the disclosure do not constitute restrictions on the present disclosure. In the drawings, identical reference numerals represent identical components or steps throughout the several views.

[0017] Figure 1 Fig. 1 shows a schematic diagram of a sheet loading and unloading system provided by an embodiment of the present disclosure.

[0018] Figure 2 Fig. 2 shows a schematic diagram of a sheet guiding mechanism in which an adjusting block is located at a first position, provided by an embodiment of the present disclosure.

[0019] Figure 3 Fig. 3 shows a schematic diagram of a sheet guiding mechanism in which an adjusting block is located at a second position, provided by an embodiment of the present disclosure. Figure 2 Fig. 4 shows a partial enlarged view of part A of the sheet guiding mechanism.

[0020] Figure 4 Fig. 5 shows a partial enlarged view of part B of the sheet guiding mechanism.

[0021] Figure 5 Fig. 6 shows a schematic diagram of a sheet loading and unloading system provided by an embodiment of the present disclosure. Figure 4 Fig. 7 shows a partial enlarged view of part B of the sheet guiding mechanism.

[0022] Figure 6Fig. 1 is a schematic view of a sheet guiding mechanism according to an embodiment of the present disclosure.

[0023] Figure 7 Fig. 2 is a partial enlarged view of the sheet guiding mechanism according to an embodiment of the present disclosure.

[0024] Figure 8 Fig. 3 is a schematic view of the sheet guiding mechanism according to an embodiment of the present disclosure, in which a roller is in a fourth position.

[0025] Figure 9 Fig. 4 is a schematic view of the sheet guiding mechanism according to an embodiment of the present disclosure. Figure 8 Fig. 5 is a partial enlarged view of part C of the sheet guiding mechanism.

[0026] Reference signs:

[0027] 10, sheet handling system; 1, sheet guiding mechanism; 1a, third center; 11, base; 11a, accommodating space; 12, second carrier; 121, second carrier plate; 121a, through hole; 122, guide plate; 122a, track groove; 13, first carrier; 131, first carrier plate; 1311, tooth bar; 132, adjusting block; 133, first positioning member; 133a, first positioning surface; 1331, fixing block; 1331a, threaded hole; 1332, screw rod; 134, second positioning member; 13a, second tooth groove; 14, first driving member; 141, driving cylinder; 142, cylinder top rod; 15, second driving member; 151, driving part; 152, roller; 16, second sliding rail; 17, second sliding block; 18, first sliding block; 19, first sliding rail; 2, carrying mechanism; 21, bottom rod; 211, first tooth groove; 22, top rod; 23, side plate; 2a, first center; 3, insert piece mechanism; 3a, second center; 4, silicon wafer; X, first direction; Y, vertical direction; Z, second direction; L1, first offset distance; B1, third position; B2, fourth position. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present disclosure.

[0029] Figure 1 Fig. 1 is a schematic view of a sheet handling system according to an embodiment of the present disclosure. The direction indicated by arrow X is the first direction, and the direction indicated by arrow Y is the vertical direction. The first direction X and the vertical direction Y are perpendicular, and will not be emphasized separately hereinafter.

[0030] The sheet guiding mechanism according to the present disclosure can be applied to a sheet loading and unloading system Figure 1 The sheet guiding mechanism 1 is applied to a sheet loading and unloading system 10, which includes a sheet inserting mechanism 3, a carrying mechanism 2 and the sheet guiding mechanism 1 arranged in sequence from top to bottom along a vertical direction Y. The sheet inserting mechanism 3 is configured to insert a sheet downwardly into the carrying mechanism 2 along the vertical direction Y. The carrying mechanism 2 includes a bottom bar 21 located on a side away from the sheet inserting mechanism 3, and the bottom bar 21 is provided with a plurality of first tooth grooves 211 arranged along a first direction X. The sheet guiding mechanism 1 is configured to lift the sheet in the carrying mechanism 2, or carry the sheet inserted by the sheet inserting mechanism 3, and place the sheet in the first tooth grooves 211, so as to play a role of intermediate transfer.

[0031] It can be understood that the carrying mechanism 2 can be a boat structure for carrying a plurality of sheets, and the boat structure includes two side plates 23 arranged at intervals along the first direction X, and a plurality of top bars 22 and a plurality of bottom bars 21 connected between the two side plates 23, and the top bars 22 are located above the bottom bars 21 along the vertical direction Y. For example, the number of the top bars 22 and the bottom bars 21 is both set to two, so as to form a square frame structure, and the space enclosed by the square frame is used for carrying the sheets. The bottom bar 21 is provided with a plurality of first tooth grooves 211 on a side facing the sheet inserting mechanism 3, and the plurality of first tooth grooves 211 are arranged along the first direction X. The top bars 22 can also be provided with tooth grooves. In the process of inserting the sheet into the boat structure by the sheet inserting mechanism 3, the sheet will first enter the tooth grooves of the top bars 22, and can continue to move downwardly relative to the tooth grooves, and in this downward movement, the sheet is carried to the sheet guiding mechanism 1, and then the sheet guiding mechanism 1 transfers the sheet into the first tooth grooves 211 of the bottom bars 21.

[0032] Optionally, the sheet can be a solar cell sheet, which needs to be processed through different processes to finally become a solar cell product that can be used. The shape of the solar cell sheet can be, for example, rectangular, square, circular, etc., without specific limitation. In the present disclosure, for the convenience of description, the solar cell sheet is set to be square, and the square solar cell sheet is simply referred to as a silicon sheet 4, which will not be emphasized separately in the following.

[0033] Optionally, the plurality of first tooth grooves 211 are arranged along the first direction X, and the cross section of the first tooth groove 211 can be, for example, V-shaped, U-shaped, etc. The opening of the first tooth groove 211 has a first size in the first direction X. The first size can also be understood as the distance between the top of the adjacent first tooth grooves 211 in the first direction X. The first size can be matched according to the thickness of the silicon sheet 4, the inclination angle of the silicon sheet 4 relative to the vertical plane when placed, etc., without specific limitation.

[0034] Specifically, the sheet guiding mechanism 1 comprises a first carrier 13, a first driving member 14 and a second driving member 15, the sheet guiding mechanism 1 is arranged on the side of the carrier mechanism 2 away from the sheet inserting mechanism 3 in the vertical direction Y; the first carrier 13 is provided with a plurality of second tooth grooves 13a arranged in the first direction X on the side facing the sheet inserting mechanism 3, the second tooth grooves 13a are configured to carry the silicon wafer 4; the first driving member 14 is connected with the first carrier 13 and is configured to drive the first carrier 13 to move in the first direction X, so that the second tooth grooves 13a correspond to the silicon wafers 4 one by one in the vertical direction Y, or the centers of the second tooth grooves 13a are aligned with the centers of the first tooth grooves 211; the second driving member 15 is configured to drive the first carrier 13 to ascend and descend in the vertical direction Y, so that the first carrier 13 lifts the silicon wafer 4 in the first tooth groove 211 or places the silicon wafer 4 in the second tooth groove 13a into the first tooth groove 211.

[0035] It can be understood that the first carrier 13 is located between the two bottom rods 21 in the second direction Z and between the two side plates 23 in the first direction X, and the two bottom rods 21 and the two side plates 23 of the boat structure enclose an inlet and outlet in communication with the space. The first carrier 13 is located directly below the inlet and outlet, and when the second driving member 15 drives the first carrier 13 to ascend and descend in the vertical direction Y, at least the second tooth grooves 13a of the first carrier 13 can enter or move out of the space through the inlet and outlet.

[0036] Optionally, the sheet inserting mechanism 3 can be arranged with a plurality of silicon wafers 4 in the first direction X for inserting the silicon wafers into the space of the boat structure, and the specific structure of the sheet inserting mechanism 3 is not described in detail.

[0037] When the sheet inserting mechanism 3 inserts the vertically placed silicon wafer 4 into the boat structure, since the bottom rod 21 of the boat structure is far away from the position of the sheet inserting mechanism 3, and the opening size of the first tooth groove 211 of the bottom rod 21 in the first direction X is small, when the silicon wafer 4 has a positional deviation in the first direction X or a process deformation problem, it is difficult for the lower edge of the silicon wafer 4 to be inserted into the first tooth groove 211. Therefore, the sheet guiding mechanism 1 provided by the embodiment of the present disclosure can first drive the first carrier 13 to move in the first direction X by the first driving member 14 to align the centers of the second tooth grooves 13a with the centers of the silicon wafers 4 in the sheet inserting mechanism 3, and then drive the first carrier 13 to extend into the space from the inlet and outlet in the vertical direction Y by the second driving member 15, and make the second tooth grooves 13a higher than the first tooth grooves 211, so that the lower edge of the silicon wafer 4 can extend into the second tooth groove 13a during the sheet inserting process. After the sheet inserting mechanism 3 completes the sheet inserting, the first driving member 14 can drive the first carrier 13 to move in the first direction X to align the centers of the second tooth grooves 13a with the centers of the first tooth grooves 211, and the second driving member 15 drives the first carrier 13 to descend, and during the descending process, the sheet guiding mechanism 1 can transfer the silicon wafer 4 from the second tooth groove 13a to the first tooth groove 211.

[0038] The sheet guiding mechanism 1 provided by the embodiment of the present disclosure utilizes the cooperation of the first driving member 14 driving the lateral movement of the first carrier 13 and the second driving member 15 driving the vertical movement of the first carrier 13, so that when the second tooth groove 13a is used to carry the sheet mechanism 3, the second tooth groove 13a is adjusted to correspond to the silicon wafer 4 to be inserted, and when the second tooth groove 13a is used to further guide the silicon wafer 4 inserted into the boat structure into the first tooth groove 211 of the bottom rod 21, the second tooth groove 13a is adjusted to correspond to the first tooth groove 211, so that the silicon wafer 4 is smoothly guided into the first tooth groove 211 of the bottom rod 21. Such a cooperation structure enables the inserted silicon wafer 4 to be guided into the first tooth groove 211 of the bottom rod 21 even if there is a deviation or process deformation, so as to reduce the probability of carding and fragmentation in the subsequent process.

[0039] Optionally, the first tooth groove 211 has a first opening, and the second tooth groove 13a has a second opening, and the size of the second opening in the first direction X is greater than the size of the first opening in the first direction X, so as to facilitate the smooth guidance of the inserted silicon wafer 4 into the second tooth groove 13a and from the second tooth groove 13a to the first tooth groove 211.

[0040] In some optional embodiments, the sheet guiding mechanism 1 further comprises a base 11 and a second carrier 12, the base 11 is detachably connected to the workbench below the boat structure, the second carrier 12 is connected to the base 11, and the second driving member 15 is installed to the base 11 or the second carrier 12; the first driving member 14 is installed to the second carrier 12, and the first carrier 13 is movably connected above the second carrier 12 in the first direction X. The base 11 and the second carrier 12 are provided to facilitate the adaptive adjustment of the installation position of the sheet guiding mechanism on the workbench according to the specific position of the boat structure, and facilitate the installation of the first driving member 14 and the second driving member 15, so that the first carrier 13 can realize the movement in the first direction X and the lifting in the vertical direction Y.

[0041] Optionally, the second carrier 12 comprises a second carrier plate 121, which is movably connected above the base 11 in the vertical direction Y, and the first carrier 13 is movably connected to the second carrier plate 121 in the first direction X.

[0042] Figure 2 The figure shows a schematic view of the adjusting block in the first position in the sheet guiding mechanism provided by an embodiment of the present disclosure. Figure 3 The figure shows a schematic view of the adjusting block in the second position in the sheet guiding mechanism provided by an embodiment of the present disclosure. Figure 2 The figure shows a partial enlarged view of part A in the sheet guiding mechanism.

[0043] Figure 4Fig. 6 shows a schematic view of the sheet guiding mechanism according to an embodiment of the present disclosure, wherein the adjusting block is located at the second position. Figure 5 Fig. 7 shows a schematic view of the sheet guiding mechanism according to an embodiment of the present disclosure. Figure 4 Fig. 8 shows a partial enlarged view of the B part of the sheet guiding mechanism. Figure 6 Fig. 6 shows a schematic view of the sheet guiding mechanism according to an embodiment of the present disclosure, wherein the adjusting block is located at the second position.

[0044] As shown in Fig. 6, the first carrier 13 includes a first carrier plate 131, one or more supporting tooth bars 1311 and an adjusting block 132, the first carrier plate 131 is connected with the supporting tooth bars 1311 arranged along the second direction Z on one side of the sheet guiding mechanism 3, each supporting tooth bar 1311 has a second tooth groove 13a, the adjusting block 132 is fixedly connected to the first carrier plate 131, and the first driving member 14 is connected with the adjusting block 132 to drive the first carrier plate 131 and the supporting tooth bars 1311 to move along the first direction X, wherein the supporting tooth bars 1311 are arranged in a staggered manner with the bottom bars, and the supporting tooth bars 1311 are located between the two bottom bars at the edge. Figures 2 to 6 In some embodiments, the first center 2a of the carrier mechanism 2 is positionally offset from the second center 3a of the sheet inserting mechanism 3 along the first direction X, i.e., the first center 2a and the second center 3a have a first offset distance L1 therebetween, the sheet guiding mechanism 1 can be installed on the workbench with the carrier mechanism 2 as a reference, the third center 1a of the sheet guiding mechanism 1 is aligned with the first center 2a, and the second tooth grooves 13a are one-to-one corresponding to the first tooth grooves 211 of the bottom bars 21, at this time, the adjusting block 132 is located at the first position, which is also the initial position of the adjusting block 132. When the first driving member 14 drives the adjusting block 132 to move to the second position, the first center 2a and the second center 3a coincide, the distance between the first position and the second position is the first offset distance L1, by driving the adjusting block 132 to move to the second position through the first driving member 14, the second tooth grooves 13a can be one-to-one corresponding to the offset silicon wafer 4, so that the silicon wafer 4 can be guided into the second tooth grooves 13a. And by driving the adjusting block 132 to reset to the initial position through the first driving member 14, the second tooth grooves 13a can be one-to-one corresponding to the first tooth grooves 211, so as to guide the offset silicon wafer 4 into the first tooth grooves 211.

[0045]

[0046] ​In an optional embodiment, the first center 2a of the bearing mechanism 2, the second center 3a of the sheet inserting mechanism 3, and the third center 1a of the sheet guiding mechanism 1 coincide, and the second tooth grooves 13a correspond to the first tooth grooves 211 of the bottom bar 21 one by one, at this time, the adjusting block 132 is in the first position, which is also the initial position of the adjusting block 132. When the silicon wafer 4 inserted by the sheet inserting mechanism 3 is a process-deformed silicon wafer, there is a deformation distance between the position where the lower edge of the silicon wafer 4 is deformed and the position of the undeformed area of the silicon wafer 4 in the first direction X. When the first driving member 14 drives the adjusting block 132 to move to the second position, the second tooth grooves 13a correspond to the deformed lower edge of the silicon wafer 4 one by one, and the distance between the first position and the second position is the deformation distance, so that the silicon wafer 4 can be guided into the second tooth grooves 13a. And the first driving member 14 drives the adjusting block 132 to reset to the initial position, so that the second tooth grooves 13a can correspond to the first tooth grooves 211 one by one, so as to guide the deformed silicon wafer 4 into the first tooth grooves 211.

[0047] In some embodiments, a first positioning member 133 is further included, which is fixedly or adjustably connected to the second bearing member 12, and the first positioning member 133 is provided with a first positioning surface 133a on the side facing the adjusting block 132. When the second tooth grooves 13a correspond to the silicon wafer 4 in the vertical direction Y and / or the centers of the second tooth grooves 13a are aligned with the centers of the first tooth grooves 211, the first driving member 14 drives the first bearing member 13 to abut against the first positioning surface 133a, specifically, the surface of the adjusting block 132 abuts against the first positioning surface 133a, at this time, the adjusting block 132 is in the second position. The first positioning member 133 can make the first driving member 14 quickly position the adjusting block 132 to the second position when driving the adjusting block 132 to move, and ensure the alignment accuracy of the second tooth grooves 13a and the silicon wafer 4.

[0048] Optionally, a second positioning member 134 can also be included, which can be arranged on the side of the adjusting block 132 away from the first positioning member 133 in the first direction X, and the second positioning member 134 is provided with a second positioning surface on the side facing the adjusting block 132. The second positioning member 134 can make the first driving member 14 quickly position the adjusting block 132 to the first position when driving the adjusting block 132 to move, and ensure the alignment accuracy of the first tooth grooves 211 and the second tooth grooves 13a.

[0049] It can be understood that the first positioning member 133 and the second positioning member 134 can be selected according to requirements, and are not specifically limited. For example, only the first positioning member 133 is provided, the first driving member 14 is provided as a driving cylinder 141, the end of a cylinder rod 142 of the driving cylinder 141 is connected to the adjusting block 132, the driving cylinder 141 can drive the cylinder rod 142 to extend in the first direction X, in the process of driving the cylinder rod 142 to extend by the driving cylinder 141, the cylinder rod 142 drives the adjusting block 132 to move in the first direction X to abut against the first positioning member 133 and then stop, at this time, the adjusting block 132 is in the second position, the driving cylinder 141 can also drive the cylinder rod 142 to retract to an initial state, so that the adjusting block 132 returns to the initial position, i.e., the initial position. In this cooperation structure, the second positioning member 134 does not need to be provided, so as to reduce the complexity of the sheet material guiding mechanism 1 and save costs.

[0050] The first position and the second position are adjustable in the distance in the first direction X, for example, the first positioning member 133 is adjustably connected to the second bearing member 12. The second bearing member 12 is fixedly connected with a fixed block 1331 on the side facing the base 11, the fixed block 1331 is provided with a threaded hole 1331a, the first positioning member 133 includes a screw rod 1332 threadedly matched with the threaded hole 1331a, the axis of the screw rod 1332 is parallel to the first direction X, the end of the screw rod 1332 facing the adjusting block 132 is provided with a first positioning surface 133a, and the rotation of the screw rod 1332 relative to the threaded hole 1331a can increase or decrease the distance from the first positioning surface 133a to the first position. By cooperation of the screw rod 1332 being screwed into or out of the threaded hole 1331a in the first direction X, the first positioning surface 133a can be adjusted in position in the first direction X, thereby realizing adjustment of the distance between the first position and the second position, so as to meet the alignment requirements of the silicon wafer 4 under different conditions and facilitate adjustment.

[0051] Optionally, one of the first bearing member 13 and the second bearing member 12 is provided with a first sliding rail 19 extending in the first direction X, and the other is provided with a first sliding block 18 matched with the first sliding rail 19, the relative movement of the first sliding block 18 and the first sliding rail 19 in the first direction X can drive the first bearing member 13 to slide relative to the second bearing member 12 in the first direction X. In the embodiment of the present disclosure, the bottom of the first bearing plate 131 is provided with the first sliding block 18, and the upper side of the second bearing plate 121 is provided with the first sliding rail 19 matched with the first sliding block 18. The matched first sliding block 18 and the first sliding rail 19 can be provided as multiple groups arranged at intervals in the first direction X, so as to provide a guiding action for the movement of the first driving member 14 in the first direction X.

[0052] In some embodiments, a receiving space 11a is provided between the second support plate 121 of the second support member 12 and the base 11, and the first drive member 14 and the second drive member 15 are disposed in the receiving space 11a. The second support plate 121 has a through hole 121a, and the adjusting block 132 of the first support member 13 passes through the through hole 121a to connect the first support plate 131 and the first drive member 14. By disposing both the first drive member 14 and the second drive member 15 in the receiving space 11a, no space is needed between the first support plate 131 and the second support plate 121 for the first drive member 14, improving the compactness of the sheet guiding mechanism 1 and reducing the overall height of the sheet guiding mechanism 1.

[0053] Figure 7 The image shown is a partially enlarged view of a sheet guiding mechanism provided in an embodiment of this disclosure. Figure 8 The diagram shown is a schematic diagram of the roller being located in the fourth position in a sheet guiding mechanism provided in an embodiment of this disclosure. Figure 9 As shown Figure 8 A magnified view of part C in the sheet guiding mechanism shown.

[0054] like Figures 7 to 9 The second support plate 121 has one or more guide plates 122 on the side facing the receiving space 11a. The guide plates 122 have inclined track grooves 122a, which extend along the direction of the track grooves 122a and include at least a third position B1 and a fourth position B2, pointing from the third position B1 to the fourth position B2. The direction of the track grooves 122a is inclined upward. The second driving member 15 includes a roller 152 and a driving part 151. The roller 152 rolls into the track groove 122a. The driving part 151 is disposed on the base 11 and is configured to drive the roller 152 to move in a first direction X, so that the roller 152 moves in the track groove 122a. The movement of the roller 152 from the third position B1 to the fourth position B2 can drive the second support plate 121 to descend in the vertical direction Y, and the movement of the roller 152 from the fourth position B2 to the third position B1 can drive the second support plate 121 to rise in the vertical direction Y. By cooperating with the inclined track groove 122a, the lateral movement of the roller 152 driven by the drive unit 151 along the first direction X is converted into the movement in the vertical direction Y, thus saving the space occupied by the sheet guide mechanism 1 in the vertical direction Y.

[0055] In addition, when the drive unit 151 is unable to work due to power failure, the roller 152 and the track groove 122a can remain in the corresponding engagement position and will not fall due to power failure of the drive unit 151, thus ensuring the safety of the silicon wafer 4 carried by the second tooth groove 13a.

[0056] Optionally, the driving part 151 can be a transversely placed air cylinder, the output end of the air cylinder is connected to the roller 152 to drive the roller 152 to reciprocate in the first direction X by the jacking action of the air cylinder in the transverse direction.

[0057] In some optional embodiments, the number of the second driving members 15 includes two or more, and the plurality of second driving members 15 are arranged in the first direction X at intervals in the accommodation space 11a, and the number of the guide plates 122 can match the number of the second driving members 15. For example, the number of the guide plates 122 is two, and the two guide plates 122 are arranged at positions close to the two ends of the second bearing plate 121 respectively, and the two driving parts 151 are arranged at positions corresponding to the two guide plates 122 respectively, so that the two driving parts 151 are used to jack up the second bearing member 12 and the first bearing member 13 at the same time, to be suitable for the gusset of a larger boat structure, and the use range of the sheet guiding mechanism 1 is improved.

[0058] Optionally, one of the second bearing member 12 and the base 11 is provided with a second sliding rail 16 extending in the vertical direction Y, and the other is provided with a second sliding block 17 matched with the second sliding rail 16, and the relative movement of the second sliding block 17 and the second sliding rail 16 in the vertical direction Y can drive the second bearing member 12 to slide relative to the base 11 in the vertical direction Y. It should be emphasized that the matched second sliding rail 16 and the second sliding block 17 can be arranged as a group, or as a plurality of groups arranged at intervals in the first direction X, to provide stable guiding action for the second bearing member 12 and the first bearing member 13 in the vertical direction Y, without specific limitation.

[0059] The working principle of the sheet guiding mechanism 1 is as follows: Figure 1 In the initial state, the sheet guiding mechanism 1 is arranged below the bearing mechanism 2, the roller 152 is located at the fourth position B2, and the first driving member 14 drives the adjusting block 132 to be located at the first position as the initial position, at this time, the second tooth groove 13a is located below the first tooth groove 211 of the bottom rod 21 in the vertical direction Y, and the center of the second tooth groove 13a is respectively aligned with the center of the first tooth groove 211. Figure 2 Before the gusset mechanism 3 inserts the gusset, the second driving member 15 is driven to drive the second bearing member 12 and the first bearing member 13 to rise together in the vertical direction Y, until the second tooth groove 13a is higher than the first tooth groove 211 in the vertical direction Y, at this time, the roller 152 moves from the fourth position B2 to the third position B1 along the track groove 122a. Figure 4The first driving member 14 drives the adjusting block 132 to move along the first direction X, so that the adjusting block 132 moves from the first position to the second position, and the second toothed groove 13a corresponds one-to-one with the silicon wafer 4 of the insertion mechanism 3. The insertion mechanism 3 inserts the silicon wafer 4 into the carrying mechanism 2, and the silicon wafer 4 continues to move downward from the toothed groove of the top rod 22 until the lower edge of the silicon wafer 4 extends into the second toothed groove 13a. After the insertion is completed, the first driving member 14 drives the adjusting block 132 to reset to the first position along the first direction X, so that the second toothed groove 13a is above the first toothed groove 211 and the centers of the two are aligned. Figure 8 The second driving member 15 drives the roller 152 to move from the third position B1 back to the fourth position B2. During the process of the second carrier 12 and the first carrier 13 descending in the vertical direction Y, the silicon wafer 4 in the second tooth groove 13a is guided into the first tooth groove 211, so that the silicon wafer 4 is inserted into the first tooth groove 211 of the bottom rod 21.

[0060] This disclosure also provides a sheet loading and unloading system, such as... Figure 1 The sheet loading and unloading system 10 includes a carrying mechanism 2, a sheet insertion mechanism 3, and a sheet guiding mechanism 1. The carrying mechanism 2 has a base rod 21, which is provided with a plurality of first toothed grooves 211 arranged along the first direction X. The sheet insertion mechanism 3 is located above the carrying mechanism 2 in the vertical direction Y. The sheet insertion mechanism 3 is configured to insert a sheet into the carrying mechanism 2. The sheet guiding mechanism 1 is configured to lift the sheet in the carrying mechanism 2, or to carry the sheet inserted by the sheet insertion mechanism 3 and place the sheet in the first toothed groove 211.

[0061] It should be emphasized that the sheet guiding mechanism 1 and the cooperation between the sheet guiding mechanism and the supporting mechanism 2 and the inserting mechanism 3 can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.

[0062] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0063] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0064] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0065] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0066] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0067] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A sheet guide mechanism configured to assist a carrying mechanism in picking and placing a sheet, the carrying mechanism comprising a base bar provided with a plurality of first tooth slots arranged in a first direction, characterized in that, The sheet guiding mechanism comprises: a first carrier, a top surface of the first carrier being provided with a plurality of second grooves arranged along the first direction, the second grooves being configured to carry the sheet; a first driving member connected with the first carrier and configured to drive the first carrier to move along the first direction, so that the second grooves correspond to the sheet one by one in the vertical direction or the centers of the second grooves are aligned with the centers of the first grooves; a second driving member configured to drive the first carrier to move up and down along the vertical direction, so that the first carrier lifts the sheet in the first grooves or places the sheet in the second grooves into the first grooves.

2. The sheet guide mechanism according to claim 1, characterized by Further comprising: a base; a second carrier connected to the base, the second driving member being mounted to the base or the second carrier; the first driving member being mounted to the second carrier, the first carrier being movably connected to the top of the second carrier along the first direction.

3. The sheet guide mechanism of claim 1, wherein The first carrier comprises: a first carrier plate; one or more supporting grooves arranged along a second direction and connected to the first carrier plate, each of the supporting grooves having the second grooves, the second direction intersecting the first direction and the vertical direction; an adjusting block fixedly connected to the first carrier plate, the first driving member being connected to the adjusting block to drive the first carrier plate and the supporting grooves to move along the first direction; wherein the supporting grooves and the bottom bars are arranged in a staggered manner, the supporting grooves being located between two of the bottom bars at the edges.

4. The sheet guide mechanism of claim 2, wherein Further comprising: a first positioning member fixedly or adjustably connected to the second carrier, the first positioning member comprising a first positioning surface, the first driving member driving the first carrier to abut against the first positioning surface when the second grooves correspond to the sheet in the vertical direction and / or the centers of the second grooves are aligned with the centers of the first grooves.

5. The sheet guide mechanism of claim 2, wherein The second carrier comprises: a second carrier plate movably connected to the base along the vertical direction, the second carrier plate and the base having an accommodation space therebetween, the second driving member being arranged in the accommodation space; the first driving member being arranged in the accommodation space, the second carrier plate being provided with a through hole, the first carrier passing through the through hole to connect the first driving member.

6. The sheet guide mechanism of claim 2, wherein The second carrier comprises: a second carrier plate movably connected to the top of the base along the vertical direction; one or more guiding plates connected to the second carrier plate, the guiding plates being provided with inclined track grooves; The second driving member comprises: a roller extending into the track groove; a driving part arranged in the base, the driving part being configured to drive the roller to move along the first direction, so that the roller moves in the track groove to drive the second carrier plate to move up and down along the vertical direction.

7. The sheet guide mechanism of claim 1, wherein The number of the second driving members is two or more, and the plurality of second driving members are arranged in the first direction at intervals.

8. The sheet guide mechanism of claim 2, wherein, One of the first and second carriers is provided with a first sliding rail extending in the first direction, and the other is provided with a first sliding block cooperating with the first sliding rail, relative movement of the first sliding block and the first sliding rail in the first direction being capable of driving the first carrier to slide in the first direction relative to the second carrier; and / or, One of the second carrier and the base is provided with a second sliding rail extending in the vertical direction, and the other is provided with a second sliding block cooperating with the second sliding rail, relative movement of the second sliding block and the second sliding rail in the vertical direction being capable of driving the second carrier to slide in the vertical direction relative to the base.

9. The sheet guide mechanism of claim 1, wherein, The first tooth groove has a first opening, and the second tooth groove has a second opening, a dimension of the second opening in the first direction being greater than a dimension of the first opening in the first direction.

10. A sheet handling system characterized by, Comprising: A carrier mechanism having a bottom rod provided with a plurality of first tooth grooves arranged in a first direction; A sheet inserting mechanism located above the carrier mechanism in a vertical direction, the sheet inserting mechanism being configured to insert a sheet into the carrier mechanism; The sheet guiding mechanism of any one of claims 1 to 9, configured to jack up the sheet in the carrier mechanism, or to carry the sheet inserted by the sheet inserting mechanism and place the sheet into the first tooth groove.