Reaction device for photoresist production

Abstract

The utility model discloses a reaction device for photoresist production. The reaction device for photoresist production comprises a reaction kettle, a temperature control system is arranged in the reaction kettle, the reaction kettle is provided with a kettle container, a feeding port and a discharging port are formed in the upper end and the lower end of the kettle container, a metal pipe is arranged in the kettle container, a water inlet and a water outlet are formed in the two ends of the metal pipe respectively, a rotating shaft is further arranged in the reaction kettle, and the rotating shaft is connected with the kettle container. A stirring paddle is mounted on the rotating shaft, and the rotating shaft is driven by a motor. According to the reaction device for photoresist production provided by the utility model, when the temperature of the raw material is slightly increased, heat in the raw material is conducted into the constant-temperature water through the metal pipe, so that the temperature of the raw material is reduced, similarly, when the temperature of the raw material is slightly reduced, heat in the constant-temperature water is transferred into the raw material through the metal pipe, so that the temperature of the raw material is increased; therefore, the effect of regulating and controlling the temperature of reactants in the kettle container in real time is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of photoresist, especially to a reaction device for photoresist production. BACKGROUND

[0002] Photoresist is a core material in semiconductor manufacturing and microelectronic processing, and its raw material composition directly determines its performance such as resolution, sensitivity, and etch resistance. The raw materials of photoresist include resin, photoinitiator, solvent, and additives, etc. The design and proportioning of the raw materials of photoresist is one of the core secrets of semiconductor technology. Under normal circumstances, the photoresist raw materials are mixed in a certain proportion to form a liquid product in a strict production environment, and the photoresist is uniformly coated on the wafer surface during use.

[0003] The prior art discloses a photoresist reaction kettle stirring device, which relates to the field of photoresist processing equipment and comprises a stirring kettle, a feeding port, a discharging port, a mounting plate and a multi-stage air cylinder are arranged on the stirring kettle, a stirring assembly is arranged on the mounting plate, the stirring assembly is connected with a driving assembly, the multi-stage air cylinder is connected with a scraping ring, and the scraping ring is arranged at intervals with the stirring assembly and is in contact with the inner wall of the stirring kettle.

[0004] The above-mentioned device does not have a temperature control component. In fact, the environment temperature needs to be strictly controlled during the production of ordinary photoresist. The temperature is generally kept constant at 20-22℃ to avoid the influence of temperature fluctuation on chemical stability.

[0005] Therefore, it is necessary to provide a reaction device for photoresist production to solve the above technical problems. SUMMARY

[0006] In view of the above situation, in order to overcome the defects of the prior art, the utility model provides a reaction device for photoresist production which can control the temperature of the photoresist in the reaction kettle during production.

[0007] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0008] The reaction device for photoresist production comprises a reaction kettle, a temperature control system arranged in the reaction kettle, a kettle shell arranged on the reaction kettle, a feeding port and a discharging port arranged on the upper and lower ends of the kettle shell, a metal pipe arranged in the kettle shell, a water inlet and a water outlet arranged at the two ends of the metal pipe, a rotating shaft arranged in the reaction kettle, a stirring paddle mounted on the rotating shaft, and a motor driving the rotating shaft.

[0009] Preferably, the stirring paddle is in the shape of a spiral blade.

[0010] Preferably, the kettle shell is provided with a heat preservation shell, and a chamber between the kettle shell and the heat preservation shell is in a vacuum state.

[0011] Preferably, the metal pipe is close to the inner wall of the reaction kettle and is in a spiral shape.

[0012] Preferably, a monitoring pipe is arranged at the water outlet, and a valve is arranged on the monitoring pipe.

[0013] Preferably, a temperature sensor is arranged at the upper end of the kettle shell.

[0014] Compared with the prior art, the utility model has the following beneficial effects:

[0015] (1) When the temperature of raw materials in the reaction kettle changes due to external temperature or mixing of the raw materials, the metal pipe regulates the temperature of the raw materials, when the temperature of the raw materials slightly increases, the heat in the raw materials is conducted to the constant-temperature water through the metal pipe, thereby reducing the temperature of the raw materials, and when the temperature of the raw materials slightly decreases, the heat in the constant-temperature water is transmitted to the raw materials through the metal pipe, thereby increasing the temperature of the raw materials, so that the effect of regulating the temperature of the reactants in the kettle shell in real time is realized.

[0016] (2) The utility model realizes the effect of fully mixing the raw materials in the kettle shell through the spiral blade-shaped stirring paddle.

[0017] (3) The utility model adds a heat preservation layer on the outer wall of the kettle shell through the heat preservation shell, thereby reducing the influence of external temperature change on the kettle shell. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 The utility model provides the internal structure schematic diagram of reaction device for photoresist production;

[0019] Figure 2 The utility model provides the section view of reaction device for photoresist production;

[0020] Figure 3 For Figure 2 The utility model provides the internal structure schematic diagram of reaction device for photoresist production;

[0021] Wherein, the name corresponding to the reference sign is: 10, reaction kettle;11, kettle shell;12, feed inlet;13, motor;14, rotating shaft;15, stirring paddle;16, temperature sensor;17, discharge port;18, heat preservation shell;20, temperature control system;21, metal pipe;22, water inlet;23, water outlet;24, monitoring pipe;241, valve;25, bent frame. DETAILED DESCRIPTION

[0022] The utility model is further illustrated by the following drawings and examples, and the mode of the utility model includes but is not limited to the following examples.

[0023] First embodiment:

[0024] As Figures 1-2 The reaction device for photoresist production provided by the utility model, including: the reation kettle 10 is equipped with the temperature control system 20 in the reation kettle 10, and the photoresist raw material is located in the reation kettle 10; the temperature control system 20 is used for controlling the temperature of the photoresist raw material during mixing, so that the temperature is stabilized in the range of 20-22 DEG C; specifically, the reation kettle 10 is equipped with the kettle shell 11; the kettle shell 11 is a container made of stainless steel material, is sealed around, and has a cavity in the middle; the shape is as shown in the figure Figure 1 The kettle shell 11 is provided with through holes at the upper and lower ends; the through holes are welded with the feeding port 12 and the discharging port 17; the feeding port 12 is a T-shaped round pipe, has three openings, and is installed with the motor 13 at the upper opening; the horizontal opening is used for feeding; the lowermost opening is installed in the through hole at the upper end of the kettle shell 11; the discharging port 17 is L-shaped, has two openings, and is installed with the valve body for controlling discharging at the upper opening; the kettle shell 11 is welded with the vertical long strip-shaped frame 25 on the inner wall; the metal pipe 21 is welded on the side surface of the frame 25; the metal pipe 21 is a stainless steel pipe; the two ends of the metal pipe 21 are respectively the water inlet 22 and the water outlet 23; the water inlet 22 and the water outlet 23 are vertically installed on the side wall of the kettle shell 11 and penetrate the kettle shell 11; the water inlet 22 is below, and the water outlet 23 is above; the external 22 DEG C constant-temperature water is pumped into the metal pipe 21 from the water inlet 22 and discharged from the water outlet 23; on the other hand, the motor 13 is connected with the rotating shaft 14 through the transmission support; the shaft center of the rotating shaft 14 is coaxial with the center of the kettle shell 11; the stirring paddle 15 is installed on the outer wall of the rotating shaft 14; the stirring paddle 15 is a fan-shaped vertical welding fixed on the outer wall of the rotating shaft 14 and is used for pushing the raw material in the kettle shell 11 to move and mix; during use, the photoresist raw material is injected into the kettle shell 11 from the feeding port 12 according to a certain proportion, the external constant-temperature water is injected from the water inlet 22 and discharged from the water outlet 23 without interruption, and finally the motor 13 is started to drive the stirring paddle 15 to rotate to mix the raw material.

[0025] During the process, when the temperature of the raw material in the reation kettle 10 changes due to external temperature or raw material mixing, etc., the metal pipe 21 regulates the temperature of the raw material; when the temperature of the raw material slightly rises, the heat in the raw material is conducted into the constant-temperature water through the metal pipe 21, so as to reduce the temperature of the raw material; similarly, when the temperature of the raw material slightly reduces, the heat in the constant-temperature water is transferred to the raw material through the metal pipe 21, so as to increase the temperature of the raw material, thereby realizing the effect of regulating the temperature of the reactant in the kettle shell 11 in real time.

[0026] Second embodiment:

[0027] As Figure 1 shown, the stirring paddle 15 is in the shape of a spiral blade, the structure of the stirring paddle 15 and the rotating shaft 14 is similar to the feeding screw structure in the prior art, when the spiral blade rotates, the slope pushes the raw material near the rotating shaft 14 to move vertically upward or downward, and finally makes the raw material in the kettle 11 circulate up and down.

[0028] The spiral-shaped stirring paddle 15 is arranged to achieve the effect of fully mixing the raw material in the kettle 11.

[0029] Third embodiment:

[0030] As Figures 1-2 shown, the kettle 11 outer wall is provided with a heat preservation shell 18, the shape of the heat preservation shell 18 is as Figure 1 shown, which is a layer of stainless steel surrounding the outside of the kettle 11, the upper end of the heat preservation shell 18 is welded and sealed with the outer wall of the kettle 11, so that a sealed chamber is formed between the heat preservation shell 18 and the kettle 11, and the air in the chamber is extracted to make it in a vacuum state during production, so as to block the heat transfer between the outside heat and the heat in the kettle 11, which is similar to the principle of the inner container of the glass heat preservation kettle in life.

[0031] By arranging the heat preservation shell 18, a heat preservation layer is added to the outer wall of the kettle 11, which reduces the influence of external temperature changes on the kettle 11.

[0032] Fourth embodiment:

[0033] As Figure 2 shown, the metal pipe 21 is close to the inner wall of the reaction kettle 10 and is in a spiral shape, the inner wall of the reaction kettle 10 is welded with a bent frame 25, the side wall of the bent frame 25 is provided with a notch, and the spiral metal pipe 21 is clamped in the notch on the bent frame 25 and is electrically welded and fixed. Compared with the linear metal pipe 21, the spiral metal pipe 21 can increase the length in the kettle 11, so the contact area of the raw material with the metal pipe 21 is larger, and the heat transfer efficiency is also higher.

[0034] Fifth embodiment:

[0035] As Figures 2-3As shown, the water outlet 23 is provided with a monitoring pipe 24, which is a vertical pipe opened at the lower end of the water outlet 23, and the opening is downward. When the constant temperature water is discharged from the water outlet 23, part of the constant temperature water flows out from the monitoring pipe 24 due to the communication of the monitoring pipe 24. The valve 241 is installed on the monitoring pipe 24. When the valve 241 is opened, part of the constant temperature water flows out from the monitoring pipe 24. When the valve 241 is closed, the constant temperature water only flows out from the water outlet 23. The function is to sample the water discharged from the water outlet 23, to judge the temperature in the metal pipe 21 by measuring the temperature of the water in the monitoring pipe 24, and to roughly judge the temperature of the raw material in the kettle 11. The upper end of the kettle 11 is provided with the temperature sensor 16, which can measure the air temperature in the kettle 11.

[0036] Working principle: When the temperature of the raw material in the reaction kettle 10 changes due to the change of the external temperature or the mixing of the raw material itself, the metal pipe 21 regulates the temperature of the raw material. When the temperature of the raw material slightly rises, the heat in the raw material is conducted to the constant temperature water through the metal pipe 21, so as to reduce the temperature of the raw material. Similarly, when the temperature of the raw material slightly decreases, the heat in the constant temperature water is transferred to the raw material through the metal pipe 21, so as to increase the temperature of the raw material, thereby realizing the effect of regulating the temperature of the reactant in the kettle 11 in real time.

[0037] The above embodiment is only one of the preferred embodiments of the present application, and should not be used to limit the protection scope of the present application. Any modification or polishing without substantial meaning made on the basis of the main design idea and spirit of the present application, and the technical problems solved are still consistent with the present application, which should be included in the protection scope of the present application.

Claims

1. A reaction apparatus for photoresist production, characterized in that, Include: The reaction kettle (10), the temperature control system (20) is equipped in the reaction kettle (10), the kettle (11) is equipped with the kettle (10), the kettle (11) is equipped with the feed inlet (12) and the discharge port (17) in the upper and lower ends, the metal pipe (21) is equipped in the kettle (11), the inlet (22) and the water outlet (23) are respectively in the both ends of the metal pipe (21), the rotating shaft (14) is further equipped in the reaction kettle (10), the stirring paddle (15) is installed on the rotating shaft (14), the rotating shaft (14) is driven by the motor (13).

2. The photoresist production reaction apparatus according to claim 1, wherein The stirring paddle (15) is a spiral blade.

3. The photoresist production reaction apparatus according to claim 1, wherein The outer wall of the kettle (11) is provided with a heat preservation shell (18), and the chamber between the heat preservation shell (18) and the kettle (11) is in a vacuum state.

4. The reaction device for producing photoresist according to claim 1 or 3, wherein The metal pipe (21) is close to the inner wall of the reaction kettle (10) and is in a spiral shape.

5. The reaction device for producing photoresist according to claim 1 or 3, wherein A monitoring pipe (24) is provided at the water outlet (23), and a valve (241) is installed on the monitoring pipe (24).

6. The reaction device for producing photoresist according to claim 1 or 3, wherein The upper end of the kettle (11) is provided with a temperature sensor (16).

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