Semiconductor vacuum equipment cavity lining structure

Abstract

The utility model discloses a semiconductor vacuum equipment cavity lining structure, which relates to the technical field of semiconductor vacuum equipment cavity linings, comprises a vacuum equipment main body which is hinged with an equipment box door, and is characterized in that two inner lining plates I are movably arranged in the vacuum equipment main body; the two first inner lining plates are each provided with two fixing pieces, the fixing pieces are arranged on the vacuum equipment body, the two first inner lining plates are each provided with a second inner lining plate in a sliding mode, the equipment box door is attached to the first inner lining plates and the second inner lining plates, and the surfaces of the two second inner lining plates are each provided with two first fixing plates. Two first bolts are arranged on the four first fixing plates, corrosion-resistant layers are arranged on the surfaces of the two first inner lining plates and the surfaces of the second inner lining plates, and high-temperature-resistant layers are arranged on the two corrosion-resistant layers, so that the first inner lining plates and the second inner lining plates can be conveniently mounted and dismounted in a cavity of the vacuum equipment, the operation is simple, and the practicability is high.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor vacuum equipment cavity lining technology, and specifically to a semiconductor vacuum equipment cavity lining structure. Background Technology

[0002] Semiconductors are materials with electrical conductivity between that of insulators and conductors. Their conductivity is easily controlled, making them suitable as components for information processing. Semiconductors are the fundamental material for chips, and chips are the specific application of semiconductors. Semiconductor vacuum equipment is the core equipment for chip manufacturing, requiring operation in ultra-high vacuum (<1×10⁻⁶). -7 Thin film deposition, etching, and ion implantation are performed in a vacuum environment. Metals (such as Al and Cu) or insulating layers (such as SiO2) are deposited on the wafer surface through vacuum evaporation or sputtering.

[0003] In the prior art, semiconductor vacuum equipment cavities are fitted with inner lining plates as a protective layer on the inner wall of the cavity to prevent reactive gases, plasma or corrosive substances from directly contacting the main cavity material and to avoid damage to the cavity metal due to chemical corrosion or physical sputtering. However, most inner lining plates are installed in semiconductor vacuum equipment cavities by welding and fixing. When the inner lining plate is damaged or needs maintenance, it is inconvenient to disassemble it, which makes it less flexible.

[0004] Therefore, a cavity lining structure for semiconductor vacuum equipment is proposed. Utility Model Content

[0005] The purpose of this utility model is to provide a semiconductor vacuum equipment cavity lining structure in order to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model specifically adopts the following technical solution:

[0007] A semiconductor vacuum equipment cavity lining structure includes a vacuum equipment body with a hinged equipment door. The vacuum equipment body has two movable inner lining plates (Type 1), each with two fixing members, and both fixing members are mounted on the vacuum equipment body. Two inner lining plates (Type 2) are slidably mounted on each of the two inner lining plates (Type 1 and Type 2), and the equipment door is in contact with both inner lining plates (Type 1 and Type 2). Two fixing plates (Type 1) are mounted on the surfaces of each of the two inner lining plates (Type 2), and two bolts (Type 1) are mounted on the four fixing plates (Type 1). Corrosion-resistant layers are provided on the surfaces of both inner lining plates (Type 1 and Type 2), and high-temperature resistant layers are provided on both corrosion-resistant layers.

[0008] Further, four T-shaped sliding grooves are arranged on the surface of each of the two inner lining plates one, T-shaped sliding blocks are slidably installed on the inner walls of the eight T-shaped sliding grooves, and the T-shaped sliding blocks are fixedly installed on the surface of the inner lining plate two.

[0009] Further, the fixing member comprises a threaded stud, the threaded stud is threadedly installed on the vacuum equipment body and the inner lining plate one, and a knob is fixedly installed on the surface of the threaded stud.

[0010] Further, two fixing plates two are arranged on the surface of each of the two inner lining plates one, and two bolts two are arranged on the two fixing plates two.

[0011] Further, the material of the corrosion-resistant layer is alumina ceramic, and the corrosion-resistant layer is connected with the inner lining plate one and the inner lining plate two in a coating mode.

[0012] Further, the material of the high-temperature-resistant layer is silicon carbide composite material, and the corrosion-resistant layer is connected with the high-temperature-resistant layer in a coating mode.

[0013] The utility model discloses the beneficial effect is as follows:

[0014] The utility model discloses, through the setting of inner lining plate one, inner lining plate two and T type sliding block, in use, through the inner lining plate one in advance in the inner chamber of vacuum equipment body, and with its inner chamber wall is pasted together, then through fixing member is fixed on the inner chamber wall of vacuum equipment body, another inner lining plate one is same, again the bolt two will be locked between two fixing plates two and connect, then respectively pull two inner lining plate two and make it contact, and T type sliding groove block slides in T type sliding groove, again through two bolts one and four fixed plates one are connected, then complete two inner lining plate one and two inner lining plate two's installation, can cover the original inner chamber wall, forms the protective layer, and separates the process reaction area and the main cavity, guarantees cavity cleanliness, vacuum stability and equipment life, and the setting of corrosion-resistant layer and high-temperature-resistant layer improves its service life, thereby realizes convenient inner lining plate one and inner lining plate two install in the vacuum equipment cavity, and the operation is simple, and the practicality is strong. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is the three-dimensional structure schematic diagram of the utility model;

[0016] Figure 2 It is the structure schematic diagram of the inner lining plate one of the utility model.

[0017] Figure 3 It is the structure schematic diagram of the inner lining plate one of the utility model.

[0018] Figure 4 It is the structure schematic diagram of the inner lining plate two of the utility model.

[0019] Mark No. : 1, vacuum equipment main body; 2, equipment box door; 3, inner lining plate one; 4, T-shaped sliding groove; 5, T-shaped sliding block; 6, inner lining plate two; 7, fixed plate one; 8, bolt one; 9, fixing piece; 10, fixed plate two; 11, bolt two. DETAILED DESCRIPTION

[0020] To make the objects, technical solutions, and advantages of the embodiments of the present application clearer, the following will be a clear and complete description of the technical solutions in the embodiments of the present application in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present application.

[0022] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0023] The electrical elements appearing in the text are all connected with the master controller and 220V mains from the outside, and the master controller can be a conventional known device such as a computer for control.

[0024] In the description of the embodiments of the present application, it should be noted that the directions or position relationships indicated by the terms "inner", "outer", "upper", etc. are based on the directions or position relationships shown in the drawings, or the directions or position relationships commonly placed when the product of the present application is used, which are only for the convenience of describing the present application and simplifying the description, and are not intended to indicate or imply that the indicated devices or elements must have a particular direction, be constructed and operated in a particular direction, and therefore cannot be understood as a limitation on the present application.

[0025] As Figures 1-4As shown, a semiconductor vacuum equipment cavity lining structure, including a vacuum equipment body 1, a device box door 2 is hingedly arranged on the vacuum equipment body 1, two inner lining plates one 3 are movably arranged in the vacuum equipment body 1, two fixing members 9 are arranged on the two inner lining plates one 3, and the fixing members 9 are arranged on the vacuum equipment body 1, two inner lining plates two 6 are slidably arranged on the two inner lining plates one 3, and the device box door 2 is attached to the inner lining plate one 3 and the inner lining plate two 6, two fixing plates one 7 are arranged on the surfaces of the two inner lining plates two 6, two bolts one 8 are arranged on the four fixing plates one 7, corrosion-resistant layers are arranged on the surfaces of the two inner lining plates one 3 and the inner lining plate two 6, high-temperature-resistant layers are arranged on the two corrosion-resistant layers, in this embodiment, in use, the inner lining plate one 3 is placed in the inner cavity of the vacuum equipment body 1 in advance and attached to the inner cavity wall, then the fixing member 9 is used to fix it on the inner cavity wall of the vacuum equipment body 1, and the other inner lining plate one 3 is also fixed in this way, then the two inner lining plates two 6 are pulled to make them contact, and the two bolts one 8 are connected with the four fixing plates one 7, so that the installation of the two inner lining plates one 3 and the two inner lining plates two 6 is completed, the original inner cavity wall can be covered to form a protective layer, isolate the process reaction area from the main cavity, and protect the cavity cleanliness, vacuum stability and equipment life, and the corrosion-resistant layer and the high-temperature-resistant layer improve the service life, so that the inner lining plate one 3 and the inner lining plate two 6 are easily installed and removed in the vacuum equipment cavity, the operation is simple, and the practicality is high.

[0026] As shown in the figure, Figures 3-4 The surfaces of the two inner lining plates one 3 are provided with four T-shaped sliding grooves 4, the inner walls of the eight T-shaped sliding grooves 4 are slidably provided with T-shaped sliding blocks 5, and the T-shaped sliding blocks 5 are fixedly installed on the surfaces of the inner lining plate two 6, in this embodiment, the T-shaped sliding groove 4 and the T-shaped sliding block 5 are arranged to avoid the sliding connection between the inner lining plate one 3 and the inner lining plate two 6 from falling off.

[0027] As shown in the figure, Figures 2-3 The fixing member 9 comprises a threaded stud, the threaded stud is threadedly installed on the vacuum equipment body 1 and the inner lining plate one 3, and a knob is fixedly installed on the surface of the threaded stud, in this embodiment, the knob and the threaded stud are matched to facilitate the locking connection between the vacuum equipment body 1 and the inner lining plate one 3.

[0028] As shown in the figure, Figure 3 The surfaces of the two inner lining plates one 3 are provided with two fixing plates two 10, and the two fixing plates two 10 are provided with two bolts two 11, in this embodiment, the two inner lining plates one 3 are connected and fixed through the fixing plates two 10 and the bolts two 11.

[0029] As shown in the figure, Figures 2-4As shown, the corrosion-resistant layer is made of alumina ceramic, and the corrosion-resistant layer is coated and connected to the inner lining plate 3 and the inner lining plate 6. In this embodiment, the corrosion-resistant layer is made of alumina ceramic, which has high purity and resistance to plasma corrosion.

[0030] like Figures 2-4 As shown, the high-temperature resistant layer is made of silicon carbide composite material, and the corrosion-resistant layer is coated and connected to the high-temperature resistant layer. In this embodiment, the high-temperature resistant layer is made of silicon carbide composite material, which has both high thermal conductivity and low coefficient of thermal expansion, and isolates high-temperature thermal stress (>500℃) to prevent oxidation and deformation.

[0031] In summary, during use, the inner liner plate 3 is pre-placed inside the cavity of the vacuum equipment body 1 and fitted against its inner cavity wall. It is then fixed to the inner cavity wall of the vacuum equipment body 1 using fasteners 9. The other inner liner plate 3 is installed in the same way. Then, the two inner liner plates 6 are pulled together to make them contact each other, and connected to the four fixing plates 7 using two bolts 8. This completes the installation of the two inner liner plates 3 and 6, covering the original inner cavity wall and forming a protective layer. This isolates the process reaction area from the main cavity, ensuring cavity cleanliness, vacuum stability, and equipment lifespan. Furthermore, the addition of corrosion-resistant and high-temperature-resistant layers extends its service life, thus facilitating the lining process. Plate 1 (3) and inner liner plate 2 (6) are installed and disassembled within the vacuum equipment cavity. The operation is simple and highly practical. The T-shaped slide groove 4 and T-shaped slider 5 prevent the inner liner plate 1 (3) and inner liner plate 2 (6) from sliding and falling off. The knob and stud are used to lock the vacuum equipment body 1 and inner liner plate 1 (3) together. The fixing plate 2 (10) and bolt 2 (11) fix the two inner liner plates 1 (3) together. The corrosion-resistant layer is made of alumina ceramic, which has high purity and resistance to plasma corrosion. The high-temperature resistant layer is made of silicon carbide composite material, which has both high thermal conductivity and low coefficient of thermal expansion, isolating thermal stress at temperatures >500℃ and preventing oxidation and deformation.

[0032] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A semiconductor vacuum apparatus chamber lining structure comprising a vacuum apparatus body (1) on which a chamber door (2) is hingedly arranged, characterized in that, The inside of the vacuum equipment body (1) is movably provided with two inner lining plates (3), two fixing members (9) are arranged on the two inner lining plates (3), the fixing members (9) are arranged on the vacuum equipment body (1), two inner lining plates (6) are slidably arranged on the two inner lining plates (3), the equipment box door (2) is attached to the inner lining plates (3) and the inner lining plates (6), two fixing plates (7) are arranged on the surfaces of the two inner lining plates (6), two bolts (8) are arranged on the four fixing plates (7), corrosion-resistant layers are arranged on the surfaces of the two inner lining plates (3) and the inner lining plates (6), and high-temperature-resistant layers are arranged on the two corrosion-resistant layers.

2. A semiconductor vacuum device chamber lining structure according to claim 1, characterized in that Four T-shaped sliding grooves (4) are formed in the surfaces of the two inner lining plates (3), T-shaped sliding blocks (5) are slidably installed on the inner walls of the eight T-shaped sliding grooves (4), and the T-shaped sliding blocks (5) are fixedly installed on the surfaces of the inner lining plates (6).

3. A semiconductor vacuum device cavity liner structure according to claim 1, characterized in that The fixing member (9) comprises a threaded stud, the threaded stud is threadedly installed on the vacuum equipment body (1) and the inner lining plate (3), and a knob is fixedly installed on the surface of the threaded stud.

4. A semiconductor vacuum device chamber lining structure according to claim 1, characterized in that Two fixing plates (10) are arranged on the surfaces of the two inner lining plates (3), and two bolts (11) are arranged on the two fixing plates (10).

5. A semiconductor vacuum device cavity liner structure according to claim 1, characterized in that The material of the corrosion-resistant layer is alumina ceramic, and the corrosion-resistant layer is connected to the inner lining plates (3) and the inner lining plates (6) in a coating manner.

6. A semiconductor vacuum device chamber lining structure according to claim 1, characterized in that The material of the high-temperature-resistant layer is silicon carbide composite material, and the corrosion-resistant layer is connected to the high-temperature-resistant layer in a coating manner.

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