Wafer box opening and closing device and system

Abstract

The utility model relates to the technical field of semiconductors, in particular to a wafer box opening and closing device and system.The wafer box opening and closing device comprises a mounting frame, a loading platform, a box opener, a detection component, a lifting module, a horizontal module and a detection assembly, the horizontal module is in driving connection with the box opener, and the horizontal module is used for driving the box opener to be close to or away from the mounting frame; the loading platform is used for mounting a wafer box and driving the wafer box to get close to or get away from the mounting frame in the front-back direction, the box opener is used for clamping a box cover on the wafer box, the detection component is used for detecting a wafer in the wafer box, and the detection assembly is used for detecting whether the wafer in the wafer box protrudes or not; according to the utility model, the loading of the wafer box and the detection of the wafer can be smoothly realized, a manipulator can conveniently and accurately grab the wafer, the alignment precision is improved, the wafer is prevented from being exposed and adsorbing particulate matters in air, and the stability of the wafer performance is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor, especially a wafer box opening and closing device and system. BACKGROUND

[0002] In the process of wafer processing, the transmission path of the wafer in the equipment is: the wafer is placed into a wafer box, loaded onto a loading platform, then a mechanical hand takes the wafer, sends the taken wafer into the wafer conveying belt inside the equipment, processes, and the processed wafer is sent to the tail of the equipment by the conveying belt, taken out by the mechanical hand system, and placed back into the wafer box. The wafer is taken out from the wafer box by the mechanical hand, placed into the equipment, reaches the return platform after the processing process is completed, and taken out by the mechanical hand and placed back into the wafer box.

[0003] Therefore, if the wafer protrudes during the loading process, it may cause the mechanical hand to grab the position incorrectly, thereby affecting the alignment accuracy of the subsequent process, resulting in product scrap; and the protruding wafer part is easy to adsorb particulate matters in the air, and these particles may be transferred to the wafer surface in the subsequent process steps, resulting in a decrease or failure of device performance. UTILITY MODEL CONTENT

[0004] The utility model provides a wafer box opening and closing device and system, which can smoothly realize the loading of the wafer box and the detection of the wafer, facilitate the accurate grabbing of the wafer by the mechanical hand, improve the alignment accuracy, avoid the wafer from protruding to adsorb particulate matters in the air, and stabilize the wafer performance.

[0005] To solve the above technical problems, the utility model adopts the following technical scheme:

[0006] The utility model provides a wafer box opening and closing device, which comprises a mounting frame provided with a loading cavity, a loading platform and a box opener respectively located at the two end openings of the loading cavity, a detection component mounted on the box opener, a lifting module mounted on the mounting frame, a horizontal module drivingly connected with the lifting module, and a detection assembly mounted on the mounting frame and located on the side of the loading cavity close to the box opener, the horizontal module is drivingly connected with the box opener, the horizontal module is used for driving the box opener to approach or move away from the mounting frame, the loading platform is used for mounting the wafer box and driving the wafer box to approach or move away from the mounting frame in the front-rear direction, the box opener is used for clamping the box cover on the wafer box, the detection component is used for detecting the wafer inside the wafer box, and the detection assembly is used for detecting whether the wafer inside the wafer box protrudes or not.

[0007] When the wafer needs to be detected, the wafer box loaded with the wafer is installed on the loading platform, the loading platform drives the wafer box to approach the loading cavity, so that the box cover on the wafer box is opposite to the detection assembly, the lifting module and the horizontal module drive the box opener to move to the required position, so that the box opener corresponds to the opening of the loading cavity, the box cover is clamped by the box opener, the horizontal module drives the box cover to move to the outside of the mounting frame, so that the opening side of the wafer box is exposed, the detection assembly detects whether the wafer in the wafer box protrudes, when the detection assembly detects that the wafer protrudes, the horizontal module and the lifting module are stopped, the protruding wafer is manually taken out, when the detection assembly detects that the wafer does not protrude, the lifting module drives the box opener to move up and down, so that the detection assembly synchronously detects the wafer in the wafer box while moving with the box opener.

[0008] When the box cover needs to be covered on the opening of the wafer box, the detection assembly detects whether the wafer in the wafer box protrudes, when the detection assembly detects that the wafer protrudes, the protruding wafer is manually taken out, when the detection assembly detects that the wafer does not protrude, the lifting module drives the box opener to move to the required height, the horizontal module drives the box opener and the box cover to pass into the loading cavity, so that the box cover is covered on the opening of the wafer box.

[0009] Wherein, the mounting frame is provided with a protective cover, the lifting module and the horizontal module are located inside the protective cover, the mounting frame is provided with a lifting space, the output end of the horizontal module is connected with a support, the support is connected with the box opener, and the support is arranged in the lifting space.

[0010] Wherein, the lifting module comprises a lifting guide rail longitudinally installed on the mounting frame, a lifting support slidably connected to the lifting guide rail, a lifting driving unit installed on the mounting frame, and at least two pairs of light-receiving photoelectric switches, the lifting driving unit is drivingly connected with the lifting support, the lifting driving unit drives the lifting support to slide up and down along the lifting guide rail, the horizontal module is installed on the lifting support, the lifting support is connected with a shielding plate, and the pairs of light-receiving photoelectric switches are installed at both ends of the stroke of the lifting support.

[0011] When the lifting driving unit drives the lifting support to move to one end, the shielding plate shields the light beam between the emitting end and the receiving end of the pair of light-receiving photoelectric switches, the state of the pair of light-receiving photoelectric switches changes, thereby triggering a detection signal, so as to determine that the lifting support moves to one end of the stroke.

[0012] Wherein, the lifting driving unit comprises a lifting driving motor installed on the mounting frame, a lifting first sprocket drivingly connected with the lifting driving motor, a lifting lead screw rotationally connected to the mounting frame, a lifting sliding block threadedly connected to the lifting lead screw, a lifting second sprocket connected to one end of the lifting lead screw, and a lifting chain connected between the lifting first sprocket and the lifting second sprocket, and the lifting sliding block is connected with the lifting support.

[0013] The horizontal module comprises a horizontal support connected to the lifting support, a horizontal slide connected to the horizontal support in the front-rear direction, and a horizontal drive unit installed on the horizontal support. The horizontal drive unit is drivingly connected to the horizontal slide. The lifting support is provided with a receiving space. One end of the horizontal slide penetrates the receiving space and is connected to the support. The horizontal drive unit drives the horizontal slide to move, so that the support penetrates the lifting space in the front-rear direction.

[0014] The horizontal support is vertically connected to one side of the lifting support away from the support. The horizontal support is longitudinally arranged. The horizontal support is connected to the upper and lower ends of the lifting support.

[0015] The horizontal slide is provided with a space for giving way. The horizontal drive unit is located in the space for giving way.

[0016] The box opener comprises a box cover clamping mechanism and an opening support column connected to the box cover clamping mechanism. The box cover clamping mechanism is used to clamp the box cover on the wafer box. The opening support column is connected to the support. The orthographic projection of the receiving space in the front-rear direction is located in the opening support column.

[0017] The loading platform comprises a loading rack mounted on the mounting rack, a loading table slidingly connected to the loading rack in the front-rear direction, at least three positioning members mounted on the loading table, a clamping mechanism mounted on the loading table, and a loading drive unit mounted on the loading rack. The loading drive unit is drivingly connected to the loading table. The loading drive unit is used to drive the loading table to approach or move away from the mounting rack in the front-rear direction.

[0018] When a wafer box needs to be installed, the wafer box is placed on the loading table. The positioning members are inserted into the positioning holes at the bottom of the wafer box to achieve accurate positioning of the wafer box and the loading table. The wafer box and the loading table are locked by the clamping mechanism.

[0019] The clamping mechanism comprises a clamping member hinged to the loading table and a clamping drive unit with an output end hinged to the clamping member. The mounting end of the clamping drive unit is hinged to the loading table. The loading table is provided with a clamping opening. The clamping member is provided with a clamping portion.

[0020] When the wafer box needs to be locked with the loading table, the wafer box is positioned on the loading table. The clamping drive unit drives the clamping member to rotate, drives the clamping portion to penetrate the clamping opening, so that the clamping portion hooks the bottom of the wafer box.

[0021] When the wafer box needs to be unlocked from the loading table, the clamping drive unit drives the clamping member to rotate, drives the clamping portion to separate from the bottom of the wafer box and retract into the clamping opening, so that the wafer box is unlocked from the loading table.

[0022] The bottom of the loading table is elastically connected to a pressing sensor.

[0023] When the wafer box is positioned with the stage, the wafer box bottom presses the press sensor, the bottom end of the press sensor absorbs the elastic potential energy, so that the press sensor is triggered to determine that the wafer box is installed on the stage;

[0024] When the wafer box is separated from the stage, the bottom end of the press sensor releases the elastic potential energy, so that the press sensor returns to the initial position.

[0025] The utility model also provides a wafer box opening and closing system, including installation frame being provided with loading cavity, loading platform and box opener respectively located loading cavity both ends opening, detection component being installed in box opener, lift module being installed in installation frame, horizontal module and detection assembly being installed in installation frame and being located loading cavity near box opener side, horizontal module and box opener drive connection, horizontal module is used for driving box opener to be close to or away from installation frame, loading platform is used for installing wafer box and driving wafer box to be close to or away from installation frame along the front and back direction, box opener is used for clamping the lid on wafer box, detection component is used for detecting wafer in wafer box, and detection assembly is used for detecting whether wafer in wafer box is protruding.

[0026] The utility model has the advantages of:

[0027] The wafer box can be loaded and the wafer can be detected smoothly, the wafer can be accurately grabbed by the mechanical hand, the alignment precision is improved, the wafer is prevented from exposing the particulate matter in the adsorption air, and the wafer performance is stabilized. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 It is a front view of the wafer box opening and closing device.

[0029] Figure 2 It is an explosion structure schematic view of the installation frame and the box opener.

[0030] Figure 3 It is a perspective view of the wafer box opening and closing device.

[0031] Figure 4 It is an installation structure schematic view of the lift module.

[0032] Figure 5 It is a partial structure perspective view of the lift driving unit.

[0033] Figure 6 It is a perspective structure schematic view of the horizontal module.

[0034] Figure 7 It is a connection structure front view of the horizontal module and the box support column.

[0035] Figure 8 It is an explosion structure schematic view of the box support column and the lift support.

[0036] Figure 9 The schematic view of the connection structure of the loading driving unit and the loading platform.

[0037] Figure 10 The cross-sectional view of the mounting structure of the clamping mechanism and the loading platform.

[0038] Figure 11 The exploded view of the clamping driving unit, the clamping member and the loading platform.

[0039] 1, mounting frame; 101, loading cavity; 102, lifting space;

[0040] 2, loading platform; 200, pressing sensor;

[0041] 21, loading frame; 22, loading platform; 221, clamping opening; 23, positioning member;

[0042] 24, clamping mechanism;

[0043] 241, clamping member; 2411, clamping part; 242, clamping driving unit;

[0044] 25, loading driving unit;

[0045] 3, box opener; 31, box cover clamping mechanism; 32, box opening support column;

[0046] 4, detection component;

[0047] 51, lifting guide rail; 52, lifting support; 521, shielding plate; 522, accommodating space;

[0048] 53, lifting driving unit;

[0049] 531, lifting driving motor; 532, lifting first sprocket; 533, lifting lead screw; 534, lifting slider; 535, lifting second sprocket; 536, lifting chain;

[0050] 54, photoelectric switch;

[0051] 6, horizontal module;

[0052] 61, horizontal support; 62, horizontal sliding frame; 621, accommodation space; 63, horizontal driving unit;

[0053] 601, support; 602, stabilizing frame;

[0054] 7, detection assembly;

[0055] 8, protective cover. DETAILED DESCRIPTION

[0056] For the convenience of understanding of those skilled in the art, the present application is further described below in conjunction with the embodiments and the accompanying drawings. The specific embodiments of the present application will be described below, and it should be noted that, in the specific description of these embodiments, the present specification cannot describe all the features of the actual embodiments in detail for the sake of brevity and conciseness.

[0057] Reference Figures 1 to 11 As shown in the utility model provides a wafer box opening and closing device, including setting up the mounting bracket 1 of loading cavity 101, loading platform 2 and box opener 3 respectively at loading cavity 101 both ends opening, install in the detection component 4 of box opener 3, install in the lifting module of mounting bracket 1, with the horizontal module 6 of lifting module drive connection and install in the detection assembly 7 of mounting bracket 1 and located loading cavity 101 close to box opener 3 one side, the horizontal module 6 is driven to be connected with box opener 3, the horizontal module 6 is used to drive box opener 3 to be close to or away from mounting bracket 1, the loading platform 2 is used to install wafer box and drive wafer box to be close to or away from mounting bracket 1 along the front and back direction, the box opener 3 is used to clamp the box cover on wafer box, the detection component 4 is used to detect wafer inside wafer box, the detection assembly 7 is used to detect whether wafer inside wafer box is protruding.

[0058] Reference Figure 1 , 2As shown, in actual application, when it is needed to detect the wafer, the wafer box loaded with the wafer is installed on the loading platform 2, the wafer box is driven by the loading platform 2 to approach the loading cavity 101, so that the box cover on the wafer box is opposite to the detection assembly 7, the opening device 3 is moved to the required position by the lifting module and the horizontal module 6, so that the opening device 3 corresponds to the opening of the loading cavity 101, the opening device 3 clamps the box cover, the opening device 3 adopts an automatic FOUP opening device or an automatic SMIF box opening device 3, so as to realize automatic clamping of the box cover on the wafer box; the horizontal module 6 drives the box cover to move to the outside of the mounting frame 1, so that the opening side of the wafer box is exposed; the detection assembly 7 is a photoelectric detection sensor, which includes a transmitting end and a receiving end installed at the upper and lower ends of the loading cavity 101 respectively and close to the opening device 3, when the wafer in the wafer box is exposed and blocks between the transmitting end and the receiving end, the photoelectric detection sensor detects that the wafer is protruding; when the detection assembly 7 detects that there is wafer protrusion, the horizontal module 6 and the lifting module are stopped, and the protruding wafer is manually taken out, when the detection assembly 7 detects that there is no wafer protrusion, the opening device 3 is moved up and down by the lifting module, so that the detection component 4 synchronously detects the wafer in the wafer box while following the movement of the opening device 3, the detection component 4 is a wafer detection sensor, which realizes surface defect detection, film thickness measurement, metallization detection, wafer flatness detection, temperature and humidity detection of the wafer, so as to ensure the yield and performance of the wafer, according to the detection result of the wafer, the robot grasps the wafer to perform corresponding operation, and the continuity with subsequent processes is maintained; so as to smoothly realize the loading of the wafer box and the detection of the wafer, facilitate the robot to accurately grasp the wafer, improve the alignment accuracy, avoid the wafer from exposing the particulate matters in the air, and facilitate the stability of the wafer performance.

[0059] The robot puts the wafer after performing the corresponding process back into the wafer box, when it is needed to cover the box cover on the opening of the wafer box, the detection assembly 7 detects whether the wafer in the wafer box is protruding, when the detection assembly 7 detects that there is wafer protrusion, the protruding wafer is manually taken out, when the detection assembly 7 detects that there is no wafer protrusion, the opening device 3 is moved to the required height by the lifting module, and the opening device 3 and the box cover are driven by the horizontal module 6 to enter the loading cavity 101, so that the box cover is covered on the opening of the wafer box, and the wafer performance is facilitated to be ensured.

[0060] Reference Figure 3 As shown, in the embodiment, the mounting frame 1 is installed with a protective cover 8, the lifting module and the horizontal module 6 are located inside the protective cover 8, the mounting frame 1 is provided with a lifting space 102, the output end of the horizontal module 6 is connected with a supporting piece 601, the supporting piece 601 is connected with the opening device 3, and the supporting piece 601 is arranged in the lifting space 102; the lifting space 102 is a region where the lifting module and the horizontal module 6 contact with the external environment, which facilitates to protect the lifting module and the horizontal module 6, reduces the time of the lifting module and the horizontal module 6 exposed to the external environment, and reduces the risk of pollution or damage.

[0061] Reference Figure 4 、 5 As shown in FIG. 6, in this embodiment, the lifting module comprises a lifting guide rail 51 longitudinally mounted on the mounting frame 1, a lifting bracket 52 slidingly connected to the lifting guide rail 51, a lifting driving unit 53 mounted on the mounting frame 1, and at least two pair of photoelectric switches 54, the lifting driving unit 53 is drivingly connected to the lifting bracket 52, the lifting driving unit 53 drives the lifting bracket 52 to slide up and down along the lifting guide rail 51, the horizontal module 6 is mounted on the lifting bracket 52, the lifting bracket 52 is connected with a shielding plate 521, and the pair of photoelectric switches 54 are mounted at both ends of the stroke of the lifting bracket 52; in actual application, the pair of photoelectric switches 54 are groove photoelectric switches, when the lifting driving unit 53 drives the lifting bracket 52 to move to one end, the shielding plate 521 shields the light beam between the emitting end and the receiving end of the pair of photoelectric switches 54, the state of the pair of photoelectric switches 54 changes to trigger a detection signal, so as to determine that the lifting bracket 52 moves to one end of the stroke, the lifting driving unit 53 is stopped in time, so as to stabilize and limit the moving range of the lifting bracket 52.

[0062] Reference Figure 4 、 5 As shown in FIG. 6, in this embodiment, the lifting driving unit 53 comprises a lifting driving motor 531 mounted on the mounting frame 1, a lifting first sprocket 532 drivingly connected to the lifting driving motor 531, a lifting lead screw 533 rotatably connected to the mounting frame 1, a lifting sliding block 534 threadedly connected to the lifting lead screw 533, a lifting second sprocket 535 connected to one end of the lifting lead screw 533, and a lifting chain 536 connected between the lifting first sprocket 532 and the lifting second sprocket 535, the lifting sliding block 534 is connected to the lifting bracket 52; in actual application, the lifting driving motor 531 is a servo motor, a stepping motor, a linear motor or a permanent magnet synchronous motor, the lifting driving motor 531 drives the lifting first sprocket 532 to rotate, drives the lead screw to rotate under the action of the lifting first sprocket 532 and the lifting second sprocket 535, and drives the sliding block to move, so as to move the lifting bracket 52 and the box opener 3 up and down.

[0063] Reference Figure 6 、 7As shown, in the embodiment, the horizontal module 6 comprises a horizontal support 61 connected to the lifting support 52, a horizontal sliding support 62 slidingly connected to the horizontal support 61 in the front-rear direction, and a horizontal driving unit 63 mounted on the horizontal support 61, the horizontal driving unit 63 being drivingly connected to the horizontal sliding support 62, the lifting support 52 being provided with a receiving space 522, one end of the horizontal sliding support 62 extending out of the receiving space 522 and being connected to a support member 601, the horizontal driving unit 63 being an oil cylinder or an electric cylinder, the horizontal driving unit 63 driving the horizontal sliding support 62 to move, so that the support member 601 is arranged in the lifting space 102 in the front-rear direction, thereby smoothly driving the box opener 3 to approach or move away from the mounting rack 1 in the front-rear direction.

[0064] Reference Figure 7 As shown, in the embodiment, the horizontal support 61 is vertically connected to the side of the lifting support 52 away from the support member 601, the horizontal support 61 is longitudinally arranged, and a stabilizing frame 602 is connected to each of the upper and lower ends of the lifting support 52 and the horizontal support 61, thereby improving the connection stability of the horizontal support 61 and the lifting support 52; the horizontal support 61 and the horizontal sliding support 62 are perpendicular to the lifting support 52, thereby saving the space occupation of the overall structure, making the horizontal sliding support 62 correspond to the lifting space 102 in the longitudinal direction, and facilitating the reduction of the width of the lifting space 102, the reduction of the channel for the external medium to enter the lifting space 102, and the reduction of the pollution to the horizontal module 6.

[0065] Reference Figure 7 As shown, in the embodiment, the horizontal sliding support 62 is provided with a space 621 for the horizontal driving unit 63, thereby saving the space occupation and making the structure arrangement compact; the box opener 3 comprises a box cover clamping mechanism 31 and a box opening support column 32 connected to the box cover clamping mechanism 31, the box cover clamping mechanism 31 is used for clamping the box cover on the wafer box, and the box cover clamping mechanism 31 adopts an automatic FOUP box opener or an automatic SMIF box opener 3 to automatically clamp the box cover on the wafer box; Reference Figure 8 As shown, the box opening support column 32 is connected to the support member 601, and the orthographic projection of the receiving space 522 in the front-rear direction is located in the box opening support column, specifically, the support member 601 is provided with two support members 601 connected to the two ends of the horizontal sliding support 62, and the horizontal sliding support 62 can smoothly drive the support member 601 and the box opening support column 32 to move when the horizontal sliding support 62 moves, thereby stably driving the box cover clamping mechanism 31 to move and facilitating the stable movement of the box cover.

[0066] Reference Figure 9 , 10,11, in the embodiment, the loading platform 2 comprises a loading frame 21 mounted on the mounting frame 1, a loading table 22 slidingly connected to the loading frame 21 in the front-rear direction, at least three positioning members 23 mounted on the loading table 22, a clamping mechanism 24 mounted on the loading table 22, and a loading driving unit 25 mounted on the loading frame 21, the loading driving unit 25 is drivingly connected with the loading table 22, the loading driving unit 25 is used to drive the loading table 22 to approach or move away from the mounting frame 1 in the front-rear direction, the loading driving unit 25 adopts a screw motor module, an oil cylinder or an electric cylinder; in actual application, when it is needed to install a wafer box, the wafer box is placed on the loading table 22, the positioning members 23 are inserted into the positioning holes at the bottom of the wafer box to realize accurate positioning of the wafer box and the loading table 22, and the wafer box and the loading table 22 are locked by the clamping mechanism 24, so as to facilitate quick loading of the wafer box.

[0067] Reference Figure 10 As shown in the figure, the clamping mechanism 24 comprises a clamping member 241 hinged to the loading table 22 and a clamping driving unit 242 hinged at the output end to the clamping member 241, the mounting end of the clamping driving unit 242 is hinged to the loading table 22, the loading table 22 is provided with a clamping opening 221, and the clamping member 241 is provided with a clamping portion 2411.

[0068] Reference Figure 9 , 11 As shown in the figure, in actual application, the bottom of the wafer box has a cavity corresponding to the clamping portion 2411, when it is needed to lock the wafer box and the loading table 22, the wafer box is positioned on the loading table 22, the clamping driving unit 242 adopts a pneumatic cylinder or an oil cylinder, the clamping driving unit 242 drives the clamping member 241 to rotate, drives the clamping portion 2411 to pass through the clamping opening 221, so that the clamping portion 2411 extends into the cavity to hook the bottom of the wafer box, thereby facilitating locking of the wafer box and the loading table 22; when it is needed to unlock the wafer box and the loading table 22, the clamping driving unit 242 drives the clamping member 241 to rotate, drives the clamping portion 2411 to move away from the bottom of the wafer box and retract into the clamping opening 221, so that the wafer box and the loading table 22 are unlocked, thereby facilitating automatic transmission of the wafer box by the crown block, and ensuring continuity and high efficiency of the production process.

[0069] Reference Figure 11As shown, in the embodiment, the bottom of the carrier 22 is elastically connected with a pressing sensor 200; when the wafer box is positioned with the carrier 22, the bottom of the wafer box extrudes the pressing sensor 200, the bottom end of the pressing sensor 200 absorbs elastic potential energy, so that the pressing sensor 200 is triggered to determine that the wafer box is installed on the carrier 22; when the wafer box is separated from the carrier 22, the bottom end of the pressing sensor 200 releases the elastic potential energy, so that the pressing sensor 200 returns to the initial position, specifically, the bottom of the pressing sensor 200 is connected with the carrier 22 through a spring, so as to facilitate the resetting of the pressing sensor 200 to the initial position, and facilitate the repeated detection of whether the subsequent wafer box is placed on the carrier 22.

[0070] Reference Figure 1 、 2 As shown, the utility model also provides a wafer box opening and closing system, including installation frame 1 that is provided with loading cavity 101, loading platform 2 and box opener 3 that are located respectively at the both ends opening of loading cavity 101, detection component 4 that is installed in box opener 3, lifting module that is installed in installation frame 1, horizontal module 6 with lifting module drive connection and detection assembly 7 that is installed in installation frame 1 and is located in loading cavity 101 close to box opener 3 one side, horizontal module 6 and box opener 3 drive connection, horizontal module 6 is used to drive box opener 3 to be close to or away from installation frame 1, loading platform 2 is used to install wafer box and drive wafer box to be close to or away from installation frame 1 along the front and back direction, box opener 3 is used to clamp the box cover on wafer box, detection component 4 is used to detect wafer in wafer box, and detection assembly 7 is used to detect whether wafer in wafer box is protruding.

[0071] In actual application, when a wafer needs to be detected, a wafer box loaded with the wafer is installed on the loading platform 2, the loading platform 2 drives the wafer box to approach the loading cavity 101, so that the box cover on the wafer box is opposite to the detection assembly 7, the lifting module and the horizontal module 6 drive the box opener 3 to move to a required position, so that the box opener 3 is opposite to the opening of the loading cavity 101, the box opener 3 clamps the box cover, the box opener 3 is an automatic FOUP box opener or an automatic SMIF box opener 3, so as to realize automatic clamping of the box cover on the wafer box; the horizontal module 6 drives the box cover to move to the outside of the mounting rack 1, so that the opening side of the wafer box is exposed; the detection assembly 7 is a photoelectric detection sensor, including a transmitting end and a receiving end installed at the upper end and the lower end of the loading cavity 101 respectively and close to the side of the box opener 3, when the wafer in the wafer box is exposed and shields between the transmitting end and the receiving end, the photoelectric detection sensor detects that the wafer protrudes; when the detection assembly 7 detects that the wafer protrudes, the horizontal module 6 and the lifting module are stopped, and the protruding wafer is manually taken out, when the detection assembly 7 detects that the wafer does not protrude, the lifting module drives the box opener 3 to move up and down, so that the detection component 4 synchronously detects the wafer in the wafer box while following the movement of the box opener 3, the detection component 4 is a wafer detection sensor, realizes surface defect detection, film thickness measurement, metallization detection, wafer flatness detection, temperature and humidity detection and the like of the wafer, so as to ensure the yield and performance of the wafer, according to the detection result of the wafer, the robot grasps the wafer to perform corresponding operation, and continuity with subsequent processes is maintained; so that the wafer box is smoothly loaded and the wafer is detected, the robot accurately grasps the wafer, alignment accuracy is improved, particles in air are avoided from being adsorbed by the exposed wafer, and wafer performance is stably ensured.

[0072] The robot puts the wafer after performing a corresponding process back into the wafer box, when the box cover needs to be covered on the opening of the wafer box, the detection assembly 7 detects whether the wafer in the wafer box protrudes, when the detection assembly 7 detects that the wafer protrudes, the protruding wafer is manually taken out, when the detection assembly 7 detects that the wafer does not protrude, the lifting module drives the box opener 3 to move to a required height, the horizontal module 6 drives the box opener 3 and the box cover to penetrate into the loading cavity 101, so that the box cover is covered on the opening of the wafer box, and wafer performance is conveniently ensured.

[0073] The above is only a preferred embodiment of the present application, and does not limit the present application in any form, although the present application is disclosed as above with the preferred embodiment, however, it is not used to limit the present application, any person skilled in the art, without departing from the technical scheme of the present application, can make some changes or modifications to the above disclosed technical content to obtain equivalent embodiments with equivalent changes, but as long as it does not depart from the technical scheme of the present application, any simple modification, equivalent change and modification made to the above embodiment according to the present application are within the scope of the technical scheme of the present application.

Claims

1. A wafer cassette opening and closing device characterized by comprising: The application relates to a wafer box loading device, which comprises a mounting frame (1) provided with a loading cavity (101), a loading platform (2) and a box opener (3) respectively arranged at the two ends of the loading cavity (101), a detection component (4) mounted on the box opener (3), a lifting module mounted on the mounting frame (1), a horizontal module (6) in driving connection with the lifting module, and a detection assembly (7) mounted on the mounting frame (1) and arranged on the side of the loading cavity (101) close to the box opener (3), wherein the horizontal module (6) is in driving connection with the box opener (3), the horizontal module (6) is used for driving the box opener (3) to approach or move away from the mounting frame (1), the loading platform (2) is used for mounting a wafer box and driving the wafer box to approach or move away from the mounting frame (1) in the front-back direction, the box opener (3) is used for clamping a box cover on the wafer box, the detection component (4) is used for detecting wafers in the wafer box, and the detection assembly (7) is used for detecting whether the wafers in the wafer box protrude. When wafers need to be detected, a wafer box loaded with wafers is mounted on the loading platform (2), the loading platform (2) drives the wafer box to approach the loading cavity (101), so that the box cover on the wafer box faces the detection assembly (7), the lifting module and the horizontal module (6) drive the box opener (3) to move to a required position, so that the box opener (3) corresponds to the opening of the loading cavity (101), the box opener (3) clamps the box cover, the horizontal module (6) drives the box cover to move to the outside of the mounting frame (1), so that the opening side of the wafer box is exposed, the detection assembly (7) detects whether the wafers in the wafer box protrude, when the detection assembly (7) detects that the wafers protrude, the horizontal module (6) and the lifting module are stopped, and the protruding wafers are manually taken out, when the detection assembly (7) detects that the wafers do not protrude, the lifting module drives the box opener (3) to move up and down, so that the detection component (4) synchronously detects the wafers in the wafer box while following the movement of the box opener (3). When the box cover needs to be covered on the opening of the wafer box, the detection assembly (7) detects whether the wafers in the wafer box protrude, when the detection assembly (7) detects that the wafers protrude, the protruding wafers are manually taken out, when the detection assembly (7) detects that the wafers do not protrude, the lifting module drives the box opener (3) to move to a required height, the horizontal module (6) drives the box opener (3) and the box cover to enter the loading cavity (101), so that the box cover is covered on the opening of the wafer box.

2. The wafer cassette opening and closing device according to claim 1, wherein The mounting frame (1) is provided with a protective cover (8), the lifting module and the horizontal module (6) are located on the inside of the protective cover (8), the mounting frame (1) is provided with a lifting space (102), the output end of the horizontal module (6) is connected with a support (601), the support (601) is connected with the box opener (3), and the support (601) penetrates through the lifting space (102).

3. The wafer boat opening and closing device according to claim 2, wherein The lifting module comprises a lifting rail (51) longitudinally mounted on the mounting rack (1), a lifting support (52) slidingly connected to the lifting rail (51), a lifting driving unit (53) mounted on the mounting rack (1), and at least two pairs of photoelectric switches (54), the lifting driving unit (53) is drivingly connected with the lifting support (52), the lifting driving unit (53) drives the lifting support (52) to slide up and down along the lifting rail (51), the horizontal module (6) is mounted on the lifting support (52), the lifting support (52) is connected with a shielding plate (521), and the pairs of photoelectric switches (54) are mounted at both ends of the stroke of the lifting support (52); When the lifting driving unit (53) drives the lifting support (52) to move to one end, the shielding plate (521) shields the light beam between the emitting end and the receiving end of the pairs of photoelectric switches (54), the state of the pairs of photoelectric switches (54) changes, thereby triggering a detection signal to determine that the lifting support (52) moves to one end of the stroke.

4. The wafer boat opening and closing device according to claim 3, wherein The lifting driving unit (53) comprises a lifting driving motor (531) mounted on the mounting rack (1), a lifting first sprocket (532) drivingly connected with the lifting driving motor (531), a lifting lead screw (533) rotationally connected to the mounting rack (1), a lifting sliding block (534) threadedly connected to the lifting lead screw (533), a lifting second sprocket (535) connected with one end of the lifting lead screw (533), and a lifting chain (536) connected between the lifting first sprocket (532) and the lifting second sprocket (535), the lifting sliding block (534) is connected with the lifting support (52).

5. The wafer boat opening and closing device according to claim 3, wherein The horizontal module (6) comprises a horizontal support (61) connected to the lifting support (52), a horizontal sliding frame (62) slidingly connected to the horizontal support (61) in the front-rear direction, and a horizontal driving unit (63) mounted on the horizontal support (61), the horizontal driving unit (63) is drivingly connected with the horizontal sliding frame (62), the lifting support (52) is provided with an accommodation space (522), one end of the horizontal sliding frame (62) passes through the accommodation space (522) and is connected with a support member (601), and the horizontal driving unit (63) drives the horizontal sliding frame (62) to move, so that the support member (601) is arranged in the lifting space (102) in the front-rear direction.

6. The wafer boat opening and closing device according to claim 5, wherein The horizontal support (61) is vertically connected to one side of the lifting support (52) away from the support member (601), the horizontal support (61) is longitudinally arranged, and the horizontal support (61) is connected with a stabilizing frame (602) at both upper and lower ends of the lifting support (52).

7. The wafer boat opening and closing device according to claim 5, wherein The horizontal sliding frame (62) is provided with a space (621) for allowing the horizontal driving unit (63) to be located in the space (621). The box opener (3) comprises a box cover clamping mechanism (31) for clamping the box cover on the wafer box and an opening box support column (32) connected with the box cover clamping mechanism (31), the opening box support column (32) is connected with the support (601), and the normal projection of the accommodating space (522) in the front-rear direction is located in the opening and closing support column.

8. The wafer cassette opening and closing apparatus according to claim 1, wherein The loading platform (2) comprises a loading rack (21) mounted on the mounting rack (1), a stage (22) slidingly connected to the loading rack (21) in the front-rear direction, at least three positioning members (23) mounted on the stage (22), a clamping mechanism (24) mounted on the stage (22), and a loading driving unit (25) mounted on the loading rack (21), the loading driving unit (25) is drivingly connected with the stage (22), and the loading driving unit (25) is used to drive the stage (22) to approach or move away from the mounting rack (1) in the front-rear direction; When the wafer box needs to be installed, the wafer box is placed on the stage (22), the positioning members (23) are inserted into the positioning holes in the bottom of the wafer box to realize accurate positioning of the wafer box and the stage (22), and the wafer box and the stage (22) are locked by the clamping mechanism (24); The clamping mechanism (24) comprises a clamping member (241) hinged to the stage (22) and a clamping driving unit (242) with an output end hinged to the clamping member (241), the mounting end of the clamping driving unit (242) is hinged to the stage (22), the stage (22) is provided with a clamping opening (221), and the clamping member (241) is provided with a clamping portion (2411); When the wafer box needs to be locked with the stage (22), the wafer box is positioned on the stage (22), the clamping driving unit (242) drives the clamping member (241) to rotate, the clamping portion (2411) is driven to pass through the clamping opening (221), so that the clamping portion (2411) hooks the bottom of the wafer box; When the wafer box needs to be unlocked from the stage (22), the clamping driving unit (242) drives the clamping member (241) to rotate, the clamping portion (2411) is driven to be separated from the bottom of the wafer box and is retracted into the clamping opening (221), so that the wafer box is unlocked from the stage (22).

9. The wafer boat opening and closing device according to claim 8, wherein The bottom of the stage (22) is elastically connected with a pressing sensor (200); When the wafer box is positioned on the stage (22), the bottom of the wafer box presses the pressing sensor (200), the bottom end of the pressing sensor (200) absorbs elastic potential energy, the pressing sensor (200) is triggered, and it is determined that the wafer box is installed on the stage (22); When the wafer box is separated from the stage (22), the bottom end of the pressing sensor (200) releases the elastic potential energy, so that the pressing sensor (200) returns to the initial position.

10. A wafer cassette opening and closing system characterized by comprising: The application relates to a wafer box loading device, which comprises a mounting frame (1) provided with a loading cavity (101), a loading platform (2) and a box opener (3) respectively arranged at the two opening ends of the loading cavity (101), a detection component (4) mounted on the box opener (3), a lifting module mounted on the mounting frame (1), a horizontal module (6) in driving connection with the lifting module, and a detection assembly (7) mounted on the mounting frame (1) and arranged on the side of the loading cavity (101) close to the box opener (3), the horizontal module (6) is in driving connection with the box opener (3), the horizontal module (6) is used for driving the box opener (3) to approach or move away from the mounting frame (1), the loading platform (2) is used for mounting a wafer box and driving the wafer box to approach or move away from the mounting frame (1) in the front-back direction, the box opener (3) is used for clamping a box cover on the wafer box, the detection component (4) is used for detecting a wafer in the wafer box, and the detection assembly (7) is used for detecting whether the wafer in the wafer box is protruding.

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