Door opening and closing lifting structure of wafer loading platform

Abstract

The utility model relates to the technical field of wafer loading equipment, in particular to a wafer loading platform door opening and closing lifting structure, which comprises a mounting frame, a lifting driving unit, a lifting frame, a loading platform, a first horizontal module and a second horizontal module, the lifting frame is in driving connection with the lifting driving unit, the loading platform is used for installing a wafer box and driving the wafer box to be away from or close to the installing frame in the front-back direction, the first horizontal module is in driving connection with an opening and closing unit used for clamping a box cover on the wafer box, and the opening and closing unit is opposite to the opening side of the wafer box on the loading platform. The second horizontal module is in driving connection with a detection piece used for detecting wafers in the wafer box; according to the utility model, the space on the same side of the mounting rack can be effectively utilized, the transverse occupied space of the whole lifting mechanism is reduced, the storage station is increased, and the wafer transfer efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer loading equipment technical field especially is a kind of round crystal loading platform switch door lifting structure. BACKGROUND

[0002] Wafer box is used to store wafer during wafer transfer process, and maintain its closed state. Wafer box usually includes side opening box, box cover that can be closed to cover side opening and bottom plate arranged at the bottom of box, and box cover can be completely separated from box. The commonly used wafer box is front opening unified pod (FOUP).

[0003] Generally, load port for wafer box is arranged in front of wafer process equipment, and wafer box transfer robot is matched to realize wafer taking and placing. Taking wafer as an example, the following steps are realized circularly: wafer box transfer robot places wafer box on load port→load port opens and detects→process equipment wafer transfer robot transfers wafer→until wafer box is empty, then load port closes→wafer box transfer robot takes wafer box.

[0004] However, in the above-mentioned cycle, it is inconvenient to shorten the horizontal space, which reduces the storage station and leads to low wafer transfer efficiency. UTILITY MODEL CONTENTS

[0005] The utility model provides a kind of round crystal loading platform switch door lifting structure for the deficiency of prior art, effectively utilize the same side space of mounting bracket, reduce the horizontal space of overall lifting mechanism, it is convenient to increase storage station, improve wafer transfer efficiency.

[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0007] The utility model provides a kind of round crystal loading platform switch door lifting structure, including mounting bracket, lifting drive unit, lifting frame and loading platform installed in the same side of mounting bracket, and first horizontal module and second horizontal module installed in lifting frame, the lifting frame is driven connection with lifting drive unit, the loading platform is used to install wafer box and drive wafer box to move away or approach mounting bracket along front-back direction, the first horizontal module drive connection is used for the opening and closing unit for clamping wafer box lid, the opening and closing unit is opposite to the opening side of wafer box on loading platform, the second horizontal module drive connection is used for detecting the detection piece for detecting wafer inside wafer box;

[0008] When it is needed to detect the wafers inside the wafer box, the wafer box is mounted on the loading platform, the lifting driving unit drives the lifting frame to move upward to the required height, the loading platform drives the wafer box to approach the mounting frame, the first horizontal module drives the opening and closing unit to approach the box cover, after the opening and closing unit clamps the box cover, the first horizontal module drives the opening and closing unit to move away from the wafer box, the lifting driving unit drives the lifting frame to move downward so that the detection member corresponds to the opening end of the wafer box, the second horizontal module drives the detection member to approach the wafer box until one end of the detection member extends into the inside of the wafer box, the lifting driving unit drives the lifting frame to move downward so that the detection member detects the wafers inside the wafer box from top to bottom.

[0009] The first horizontal module, the second horizontal module and the lifting frame are located on the same side of the mounting frame, the first horizontal module is located above the second horizontal module, the mounting frame is longitudinally provided with a movable opening, and the first horizontal module and the second horizontal module are arranged in the movable opening.

[0010] The output end of the second horizontal module is connected with a detection frame, the detection member is mounted on the detection frame, the detection frame encloses an accommodation space, and the opening and closing unit is arranged in the accommodation space.

[0011] The first horizontal module comprises an opening and closing cylinder mounted on the lifting frame, an opening and closing guide column slidingly connected to the lifting frame and an opening and closing bracket drivingly connected to the opening and closing cylinder, one end of the opening and closing guide column is connected to the opening and closing bracket, and the opening and closing unit is connected to the opening and closing bracket.

[0012] When it is needed to drive the opening and closing unit to move, the opening and closing cylinder drives the opening and closing bracket to move, and simultaneously drives the opening and closing guide column to move back and forth in the movable opening, so that the opening and closing unit approaches or moves away from the mounting frame.

[0013] The loading platform comprises a loading frame connected to the mounting frame, a loading plate slidingly connected to the loading frame, a positioning pin mounted on the loading plate, a locking unit for locking the loading plate and the wafer box and a loading driving unit mounted on the loading frame, the locking unit is mounted on the loading frame, the loading driving unit is drivingly connected to the loading plate, and the loading driving unit is used to drive the loading plate to move in the front-rear direction.

[0014] When it is needed to mount the wafer box, the wafer box is placed on the loading plate and the positioning pin is matched with the positioning hole at the bottom of the wafer box to realize the positioning of the wafer box, and the locking unit locks the loading plate and the wafer box to realize the loading of the wafer box on the loading frame.

[0015] When it is needed to move the wafer box, the wafer box is first loaded on the loading frame, and the loading driving unit drives the loading plate to move in the front-rear direction, so that the wafer box moves away from or approaches the mounting frame in the front-rear direction.

[0016] The locking unit comprises a locking rotary cylinder and a locking body in driving connection with the locking rotary cylinder.

[0017] When the wafer box is positioned on the loading plate through the positioning pin, the locking rotary cylinder drives the locking body to move, the locking body is clamped into the locking cavity at the bottom of the wafer box, so that the wafer box is locked with the loading plate.

[0018] When the wafer box needs to be taken out from the loading plate, the locking rotary cylinder drives the locking body to move, the locking body is separated from the locking cavity at the bottom of the wafer box, so that the locking body is located in the accommodating cavity.

[0019] The inner side of the loading plate is provided with a detection support, a detection support column is slidably connected to the detection support, a contact sensor is installed at the top end of the detection support column, the loading plate is provided with a detection hole, the detection support column is arranged in the detection hole, and a reset spring is connected between the detection support column and the detection support; when the wafer box is loaded on the loading frame, the reset spring is compressed and the contact sensor is pressed by the wafer box.

[0020] The utility model discloses the beneficial effects of:

[0021] The utility model discloses the beneficial effects of: BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is the three -dimensional structure schematic diagram of wafer loading platform switch door lifting structure.

[0023] Figure 2 It is the structure schematic diagram when wafer box and box cover are separated.

[0024] Figure 3 It is another three -dimensional structure schematic diagram of wafer loading platform switch door lifting structure.

[0025] Figure 4 It is the front view of lifting frame and detection frame and opening and closing unit.

[0026] Figure 5 It is the three -dimensional drawing of having first horizontal module, first horizontal module and lifting frame.

[0027] Figure 6 It is the installation structure schematic diagram of loading platform and mounting frame.

[0028] Figure 7 It is the explosion structure schematic diagram of locking unit.

[0029] Figure 8 Schematic diagram of the explosion structure of the loading platform.

[0030] Figure 9 Schematic diagram of the connection structure of the detection support and the contact sensor.

[0031] 01, wafer box; 02, box cover; 03, opening and closing unit; 04, detection piece;

[0032] 1, mounting frame; 11, movable port;

[0033] 2, lifting driving unit; 3, lifting frame;

[0034] 4, loading platform;

[0035] 41, loading frame;

[0036] 42, loading plate; 421, through hole; 422, accommodating cavity; 423, detection hole;

[0037] 43, positioning pin;

[0038] 44, locking unit; 441, locking rotary cylinder; 442, locking body;

[0039] 45, loading driving unit;

[0040] 5, first horizontal module;

[0041] 51, opening and closing cylinder; 52, opening and closing guide column; 53, opening and closing support;

[0042] 6, second horizontal module; 61, detection frame; 62, accommodating space;

[0043] 71, detection support; 72, detection support column; 73, contact sensor; 74, reset spring. DETAILED DESCRIPTION

[0044] In order to facilitate the understanding of those skilled in the art, the present application will be further described below in conjunction with the embodiments and the accompanying drawings. The specific embodiments of the present application will be described below, and it should be noted that, in the specific description of these embodiments, the present specification cannot describe all the features of the actual embodiments in detail for the sake of brevity and conciseness.

[0045] REFERENCE Figures 1 to 9As shown, the utility model provides a kind of wafer loading platform switch door lifting structure, including mounting frame 1, be installed in the lifting drive unit 2 of mounting frame 1 same side, lifting frame 3 and loading platform 4, and first horizontal module 5 and second horizontal module 6 installed in lifting frame 3, the lifting frame 3 is driven connection with lifting drive unit 2, the loading platform 4 is used to install wafer box 01 and drive wafer box 01 away or close to mounting frame 1 along front-back direction, first horizontal module 5 drive connection is used to open and close unit 03 for clamping wafer box 01 on box cover 02, the open and close unit 03 is opposite with the opening side of wafer box 01 on loading platform 4, second horizontal module 6 drive connection is used for detecting the detection piece 04 of wafer in wafer box 01 inside.

[0046] Reference Figure 1 、 2 ,5 as shown, in actual application, when needing to detect wafer in wafer box 01, wafer box 01 is installed on loading platform 4, lifting drive unit 2 drives lifting frame 3 to move upwards to the height required, loading platform 4 drives wafer box 01 to close to mounting frame 1, first horizontal module 5 drives open and close unit 03 to close to box cover 02, open and close unit 03 uses wafer box 01 switch or wafer box 01 box opening mechanism, to realize the clamping wafer box 01 on box cover 02 smoothly, lifting drive unit 2 uses screw motor module, oil cylinder or electric cylinder, to realize the smooth up and down movement of lifting frame 3;After open and close unit 03 clamps box cover 02, first horizontal module 5 drives open and close unit 03 to be far from wafer box 01, lifting drive unit 2 drives lifting frame 3 to move downwards to make detection piece 04 correspond to wafer box 01 opening end, second horizontal module 6 drives detection piece 04 to close to wafer box 01, until the end of detection piece 04 is inserted into wafer box 01 inside, lifting drive unit 2 drives lifting frame 3 to move downwards, so that detection piece 04 detects wafer in wafer box 01 inside from top to bottom, wafer is taken out by manipulator after each detection by detection piece 04, until all wafers in wafer box 01 are detected, so as to realize the detection of all wafers in wafer box 01, lifting mechanism drives lifting frame 3 to rise, first horizontal module 5 drives open and close unit 03 to wafer box 01, to make open and close unit 03 box cover 02 is successfully covered on wafer box 01 opening;Detection piece 04 is combined with visual detection, the image inside wafer box 01 is captured by camera, and image recognition algorithm is used to process and analyze image, realize the automatic identification and detection of wafer position, quantity and abnormal situation, can timely discover and handle abnormal situation, avoid production interruption and waste, ensure the integrity and accuracy of wafer in production and delivery process, help to improve the quality and reliability of product;By arranging lifting drive unit 2, lifting frame 3, loading platform 4 on the same side of mounting frame 1, effectively utilize the same side space of mounting frame 1, reduce the transverse space occupied by overall lifting mechanism, facilitate to increase storage station, improve wafer transfer efficiency.

[0047] Referring to Figure 4 , 5 In the embodiment, the first horizontal module 5, the second horizontal module 6 and the lifting frame 3 are located on the same side of the mounting frame 1, the first horizontal module 5 is located above the second horizontal module 6, the mounting frame 1 is longitudinally provided with a movable opening 11, and the first horizontal module 5 and the second horizontal module 6 are arranged in the movable opening 11. By arranging the lifting driving unit 2, the lifting frame 3, the loading platform 4, the first horizontal module 5 and the second horizontal module 6 on the same side of the mounting frame 1, the space below the mounting frame 1 is effectively utilized, the transverse space occupied by the overall lifting mechanism is reduced, the storage station is facilitated to be increased, and the wafer transfer efficiency is improved. The first linear module and the second linear module are arranged in the movable opening 11 during operation, the structure is compact, and the space occupation is reduced.

[0048] Referring to Figure 3 , 4 In the embodiment, the output end of the second horizontal module 6 is connected with a detection frame 61, the second horizontal module 6 is an oil cylinder or an electric cylinder, the detection piece 04 is mounted on the detection frame 61, the detection frame 61 surrounds a containing space 62, and the opening and closing unit 03 is arranged in the containing space 62. In actual application, the second linear module drives the detection frame 61 to move, so that the detection piece 04 moves smoothly. The movement space of the opening and closing unit 03 and the movement space of the detection frame 61 are independent of each other, the use of the opening and closing unit 03 and the detection piece 04 does not interfere with each other, and the structural stability is improved.

[0049] Referring to Figure 5 In the embodiment, the first horizontal module 5 includes an opening and closing cylinder 51 mounted on the lifting frame 3, an opening and closing guide column 52 slidingly connected to the lifting frame 3, and an opening and closing bracket 53 drivingly connected to the opening and closing cylinder 51. One end of the opening and closing guide column 52 is connected to the opening and closing bracket 53, and the opening and closing unit 03 is connected to the opening and closing bracket 53. In actual application, when the opening and closing unit 03 needs to be driven to move, the opening and closing cylinder 51 drives the opening and closing bracket 53 to move, and simultaneously drives the opening and closing guide column 52 to move back and forth in the movable opening 11, so that the opening and closing unit 03 approaches or moves away from the mounting frame 1. The opening and closing guide column 52 guides the opening and closing bracket 53 to smoothly slide with the lifting frame 3, and guarantees the structural stability. By arranging the opening and closing guide column 52 in the movable opening 11, the movement stroke of the opening and closing bracket 53 is ingeniously arranged in the movable opening 11, the stroke arrangement space of the opening and closing bracket 53 is saved, and the structure is compact.

[0050] Referring to Figure 6 , 7As shown, in this embodiment, the loading platform 4 includes a loading frame 41 connected to the mounting frame 1, a loading plate 42 slidably connected to the loading frame 41, a positioning pin 43 mounted on the loading plate 42, a locking unit 44 for locking the loading plate 42 to the wafer cassette 01, and a loading drive unit 45 mounted on the loading frame 41. The locking unit 44 is mounted on the loading frame 41. (Refer to...) Figure 9 As shown, the loading drive unit 45 is driven to connect with the loading plate 42, and the loading drive unit 45 is used to drive the loading plate 42 to move in the front-back direction.

[0051] refer to Figure 2 , 6 As shown, in practical applications, when it is necessary to install the wafer cassette 01, the wafer cassette 01 is placed on the loading plate 42 and the positioning pin 43 engages with the positioning hole at the bottom of the wafer cassette 01 to achieve positioning of the wafer cassette 01; the locking unit 44 locks the loading plate 42 and the wafer cassette 01 to achieve loading of the wafer cassette 01 onto the loading rack 41; when it is necessary to move the wafer cassette 01, the wafer cassette 01 is first loaded onto the loading rack 41, as shown in the reference. Figure 8 As shown, the loading drive unit 45 drives the loading plate 42 to move in the front-to-back direction. The loading drive unit 45 uses a hydraulic cylinder or an electric cylinder to make the wafer box 01 move away from or closer to the mounting frame 1 in the front-to-back direction, so that the wafer box 01 can be installed and moved smoothly, which is conducive to picking up and putting down the wafer box 01.

[0052] refer to Figure 7 As shown, in this embodiment, the locking unit 44 includes a locking rotary cylinder 441 and a locking body 442 that is driven and connected to the locking rotary cylinder 441. The locking rotary cylinder 441 is installed on the loading frame 41. The loading plate 42 is provided with a through hole 421. The output end of the locking rotary cylinder 441 passes through the through hole 421. The top end of the through hole 421 is connected to a receiving cavity 422 that cooperates with the locking body 442. In practical applications, when the wafer cassette 01 is positioned on the loading plate 42 by the positioning pin 43, the locking rotary cylinder 441 drives the locking body 442 to move, and the locking body 442 is engaged in the locking cavity at the bottom of the wafer cassette 01, so that the wafer cassette 01 is locked to the loading plate 42, thereby stabilizing the loading of the wafer cassette 01; when it is necessary to remove the wafer cassette 01 from the loading plate 42, the locking rotary cylinder 441 drives the locking body 442 to move, and the locking body 442 disengages from the locking cavity at the bottom of the wafer cassette 01, so that the locking body 442 is located in the receiving cavity 422, which facilitates the smooth removal of the wafer cassette 01, and the locking body 442 is hidden inside the loading plate 42, saving space.

[0053] refer to Figure 8 , 9As shown, in the embodiment, the inner side of the loading plate 42 is provided with a detection bracket 71, a detection support 72 is slidably connected to the detection bracket 71, a contact sensor 73 is installed at the top end of the detection support 72, the loading plate 42 is provided with a detection hole 423, the detection support 72 is arranged in the detection hole 423, and a reset spring 74 is connected between the detection support 72 and the detection bracket 71; in actual application, the wafer box 01 is cooperated with the positioning pin 43 to realize accurate positioning of the wafer box 01, at the same time, the contact sensor 73 is pressed by the wafer box 01, the reset spring 74 is compressed under force, the wafer box 01 is detected to be placed successfully, the contact sensor 73 obtains corresponding electrical signals, the information that the wafer box 01 has been installed is transmitted to related equipment through the electrical signals, the installation working condition of the wafer box 01 is accurately detected, and when the wafer box 01 is separated from the loading plate 42, the reset spring 74 drives the contact sensor 73 to reset, and whether the subsequent wafer box 01 is effectively placed is detected.

[0054] The above is only a preferred embodiment of the present application, and does not limit the present application in any form. Although the present application is disclosed in the preferred embodiment, it is not intended to limit the present application. Any person skilled in the art can make some changes or modifications to the above disclosed technical content without departing from the scope of the present application. Any simple modification, equivalent change and modification of the above embodiment within the scope of the present application are all within the scope of the present application.

Claims

1. A round crystal loading platform switch door lifting structure, characterized in that, The device comprises a mounting frame (1), a lifting driving unit (2) mounted on the same side of the mounting frame (1), a lifting frame (3) and a loading platform (4), and a first horizontal module (5) and a second horizontal module (6) mounted on the lifting frame (3), wherein the lifting frame (3) is drivingly connected with the lifting driving unit (2), the loading platform (4) is used for mounting a wafer box (01) and driving the wafer box (01) to move away from or close to the mounting frame (1) in the front-back direction, the first horizontal module (5) is drivingly connected with an opening and closing unit (03) used for clamping a box cover (02) on the wafer box (01), the opening and closing unit (03) is opposite to the opening side of the wafer box (01) on the loading platform (4), and the second horizontal module (6) is drivingly connected with a detection piece (04) used for detecting wafers in the wafer box (01). When it is needed to detect the wafers in the wafer box (01), the wafer box (01) is mounted on the loading platform (4), the lifting driving unit (2) drives the lifting frame (3) to move upward to a required height, the loading platform (4) drives the wafer box (01) to move close to the mounting frame (1), the first horizontal module (5) drives the opening and closing unit (03) to move close to the box cover (02), the first horizontal module (5) drives the opening and closing unit (03) to move away from the wafer box (01) after the opening and closing unit (03) clamps the box cover (02), the lifting driving unit (2) drives the lifting frame (3) to move downward so that the detection piece (04) corresponds to the opening end of the wafer box (01), the second horizontal module (6) drives the detection piece (04) to move close to the wafer box (01) until one end of the detection piece (04) extends into the wafer box (01), and the lifting driving unit (2) drives the lifting frame (3) to move downward so that the detection piece (04) detects the wafers in the wafer box (01) from top to bottom.

2. The round crystal loading platform switch door lifting structure according to claim 1, characterized in that, The first horizontal module (5), the second horizontal module (6) and the lifting frame (3) are located on the same side of the mounting frame (1), the first horizontal module (5) is located above the second horizontal module (6), and the mounting frame (1) is longitudinally provided with a movable opening (11), and the first horizontal module (5) and the second horizontal module (6) are arranged in the movable opening (11).

3. The round crystal loading platform switch door lifting structure according to claim 2, characterized in that, The output end of the second horizontal module (6) is connected with a detection frame (61), the detection piece (04) is mounted on the detection frame (61), the detection frame (61) surrounds a containing space (62), and the opening and closing unit (03) is arranged in the containing space (62).

4. The round crystal loading platform switch door lifting structure according to claim 2, characterized in that, The first horizontal module (5) comprises an opening and closing cylinder (51) mounted on the lifting frame (3), an opening and closing guide column (52) slidingly connected with the lifting frame (3) and an opening and closing support (53) drivingly connected with the opening and closing cylinder (51), one end of the opening and closing guide column (52) is connected with the opening and closing support (53), and the opening and closing unit (03) is connected with the opening and closing support (53). When it is needed to drive the opening and closing unit (03) to move, the opening and closing cylinder (51) drives the opening and closing support (53) to move, simultaneously drives the opening and closing guide column (52) to move forward and backward in the movable opening (11), so that the opening and closing unit (03) moves close to or away from the mounting frame (1).

5. The round crystal loading platform switch door lifting structure according to claim 1, characterized in that, The loading platform (4) comprises a loading frame (41) connected with the mounting frame (1), a loading plate (42) slidingly connected with the loading frame (41), a positioning pin (43) mounted on the loading plate (42), a locking unit (44) for locking the loading plate (42) and the wafer box (01), and a loading driving unit (45) mounted on the loading frame (41), the locking unit (44) is mounted on the loading frame (41), the loading driving unit (45) is drivingly connected with the loading plate (42), and the loading driving unit (45) is used to drive the loading plate (42) to move in the front-rear direction. When the wafer box (01) needs to be mounted, the wafer box (01) is placed on the loading plate (42) and the positioning pin (43) is matched with the positioning hole at the bottom of the wafer box (01), so that the wafer box (01) is positioned; the locking unit (44) locks the loading plate (42) and the wafer box (01), and the wafer box (01) is loaded on the loading frame (41). When the wafer box (01) needs to be moved, the wafer box (01) is first loaded on the loading frame (41), and the loading driving unit (45) drives the loading plate (42) to move in the front-rear direction, so that the wafer box (01) moves away from or approaches the mounting frame (1) in the front-rear direction.

6. The round crystal loading platform switch door lifting structure according to claim 5, characterized in that, The locking unit (44) comprises a locking rotary air cylinder (441) and a locking body (442) drivingly connected with the locking rotary air cylinder (441), the locking rotary air cylinder (441) is mounted on the loading frame (41), the loading plate (42) is provided with a through hole (421), the output end of the locking rotary air cylinder (441) penetrates the through hole (421), and the top end of the through hole (421) is communicated with a containing cavity (422) matched with the locking body (442). When the wafer box (01) is positioned on the loading plate (42) through the positioning pin (43), the locking rotary air cylinder (441) drives the locking body (442) to move, the locking body (442) is clamped into the locking cavity at the bottom of the wafer box (01), so that the wafer box (01) is locked with the loading plate (42); When the wafer box (01) needs to be taken out from the loading plate (42), the locking rotary air cylinder (441) drives the locking body (442) to move, the locking body (442) is separated from the locking cavity at the bottom of the wafer box (01), and the locking body (442) is located in the containing cavity (422).

7. The round crystal loading platform switch door lifting structure according to claim 5, characterized in that, The inner side of the loading plate (42) is provided with a detection support (71), a detection support column (72) is slidingly connected to the detection support (71), a contact sensor (73) is mounted at the top end of the detection support column (72), the loading plate (42) is provided with a detection hole (423), the detection support column (72) penetrates the detection hole (423), and a reset spring (74) is connected between the detection support column (72) and the detection support (71). When the wafer box (01) is loaded on the loading frame (41), the reset spring (74) is compressed and the contact sensor (73) is pressed by the wafer box (01).

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